EP2385257B1 - Vacuum pump stage - Google Patents

Vacuum pump stage Download PDF

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Publication number
EP2385257B1
EP2385257B1 EP11002911.3A EP11002911A EP2385257B1 EP 2385257 B1 EP2385257 B1 EP 2385257B1 EP 11002911 A EP11002911 A EP 11002911A EP 2385257 B1 EP2385257 B1 EP 2385257B1
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EP
European Patent Office
Prior art keywords
rotor
vacuum pump
channel
pump stage
accordance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
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EP11002911.3A
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German (de)
French (fr)
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EP2385257A3 (en
EP2385257A2 (en
Inventor
Armin Conrad
Aleksandr Shirinov
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication of EP2385257A2 publication Critical patent/EP2385257A2/en
Publication of EP2385257A3 publication Critical patent/EP2385257A3/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Definitions

  • the invention relates to a vacuum pumping stage according to the preamble of the first claim.
  • Vacuum pumps or vacuum pump assemblies composed of vacuum pumps are used to generate such vacuum conditions.
  • vacuum pump stages are used according to different principles of action, which are adapted to different pressure ranges to compress gas from the desired final vacuum to the atmosphere.
  • side channel pumping stages are used to compress the atmosphere.
  • These blades run around in a channel and promote a vortex-like gas flow between inlet and outlet.
  • the gas stream follows the blades during circulation and is removed at a so-called scraper and fed to the outlet.
  • the disadvantage is that designed according to this principle pumping stages operate only in the viscous flow region and lose the transition to the molecular flow very quickly compression and pumping, since no vortex-like gas flow can be generated more.
  • Gaedepump stages are used inter alia in the molecular range adjacent to the viscous flow region at lower absolute pressures. Their drawback is that compression and absorbency are good only under molecular conditions and become poor very quickly in the viscous region.
  • WO 2005/033520 A1 a vacuum pumping stage having an inlet, an outlet, a rotor and a scraper disposed between inlet and outlet, wherein the rotor with a rotor portion dips into a channel and pumping action is achieved by cooperation of rotor portion and channel.
  • the rotor section also has design elements with pump action in the molecular flow region and design elements with pump action in the higher pressure region according to the side channel principle.
  • the object of the invention was therefore to provide a vacuum pumping stage, which provides compression and pumping both in the viscous and in the molecular flow area.
  • the vacuum pumping stage having the features of the first claim provides compression and suction in both the viscous and molecular flow regime. It can therefore be used advantageously in both flow regions and in the transition region between them.
  • the arrangement of the design elements of the rotor section in the plane of a disc of the rotor according to claim 5 is advantageous in addition to manufacturing advantages rotor-dynamically, since there is a favorable mass distribution. In addition, symmetrical forces occur due to the gas flow.
  • the vacuum pump according to claims 6 and 7 is characterized by an advantageous power consumption, which is lower compared to vacuum pumping stages with Gaede- or side channel stages due to the compression curve and the pumping speed characteristic.
  • the vacuum pumping stage 100 after FIG. 1 has a housing 102.
  • an inlet 104 is provided, is sucked through the gas in the vacuum pumping stage.
  • an outlet 106 the pumped within the vacuum pumping stage gas is ejected.
  • Inlet and outlet are interconnected by a channel 108.
  • a rotatably arranged in the housing rotor 112 dives with a rotor portion, wherein channel and rotor portion cooperate to generate the pumping action.
  • the rotor section comprises that part of the rotor which, viewed in the radial direction from the axis of rotation of the rotor, projects beyond the inner boundary 118 of the channel into the channel.
  • the smooth section is formed by a zone of the rotor that projects beyond the outer blade radius 120 over the blade root radius 120 and extends along the circumference over an angular range 124.
  • the blade root radius is substantially close to the radius of the inner boundary of the channel.
  • the outer radius is chosen so that on the one hand only a small gap to a scraper remains, on the other hand, only a portion of the channel depth 126 is utilized.
  • the scraper separates the gas flow entrained at the rotor section and prevents a direct flow between inlet and outlet.
  • the smooth section creates together with the channel in the molecular flow area compression and pumping speed and acts on the Gaedezin.
  • the vanes 114 act in the viscous flow area as side channel pumping structures which cooperate with the channel.
  • smooth sections are distributed over the circumference of the rotor, resulting in a mass balance. This is achieved for example by two opposite smooth sections. Furthermore, this design can be advantageously further developed by blades and smooth sections are dimensioned so that in each case opposite masses correspond in value.
  • FIG. 2 Channel and rotor section are shown in a development
  • Fig. 3 shows the section along the line I-I '.
  • the channel 208 is provided with a channel depth 226. Beyond the inner boundary 218 of the channel, the rotor section projects into the channel. In it are provided as design elements blades 214 which rotate by rotation of the rotor in the channel. The blades have a thickness 228 in the direction of movement. At least one of the blades has a thickness greater than about one fifth of the distance 230 to the succeeding blade. It is achieved by this thickness that the blade surfaces 250, 252 and 254 facing the channel walls 240, 242 and 244 act in the molecular flow region like gas pumping structures. In the viscous flow region, the rotor section acts as a side channel pumping stage due to the blades.
  • At least one blade 214 has a thickness that is equal to or greater than about the distance 230 to the subsequent blade.
  • FIGS. 4 and 5 Another embodiment is in the FIGS. 4 and 5 shown.
  • Fig. 4 Channel and rotor section are shown in a development,
  • Fig. 5 shows the section along the line II-II '.
  • the channel 308 is provided here, which is bounded by the inner boundary 318 in the direction of the axis of rotation.
  • blades 314 are provided as design elements which lead to a side channel pumping action in the viscous flow area.
  • the rotor section also has a base land 340 which projects beyond the inner boundary into the channel.
  • FIG. 5 It is shown that the base web protrudes with the web height 332 over the inner boundary. As a result, runs in the channel, the side surface 342 of the base bar. This works together with the channel wall in the molecular flow area as Gaedepumplay.
  • the base web is provided only along part of the circumference of the rotor.
  • a base web with the thicker blades and / or a smooth section can be used together to achieve design elements in the rotor section, by means of which the pumping action in the molecular flow region is effected according to Gaede and in the higher pressure range according to the side channel principle.
  • Curve 70 shows the course for a pure Gaedepumpcut. There is a strong increase in the molecular flow area observed, while at higher pressures, especially above 1 hPa, no significant compression occurs.
  • Curve 72 shows the course of a pure side channel pumping stage. Here the compression reaches its maximum towards higher pressures.
  • Curve 74 shows the compression curve for the smooth-section embodiment FIG. 1
  • Curve 76 traces the course for the embodiment with thick blades FIGS. 2 and 3 ,
  • a vacuum pump 600 is shown in the basic structure, in which the advantages of the vacuum pumping stage described above are particularly good advantage.
  • a shaft 640 is provided, which is rotatably supported by bearings 650 and 652.
  • bearings 650 and 652. may be grease or oil lubricated bearings, gas, sliding or magnetic bearings. These types of bearings can be used mixed, with lubricants such as oil or the like are used in the area of Vorvakuums, which is found on the side of the bearing 652.
  • the inlet 604 is in gas flow communication with a suction port 612 so that the multi-section stage 610 sucks gas through both this suction port and the high vacuum pump stage outlet 622.
  • the compressed gas in it is expelled through the outlet 606 and fed to a fore-vacuum stage 630.
  • This can advantageously be designed as a side channel pumping stage and in turn comprise a plurality of pumping stages.
  • a pump outlet 682 the gas is expelled from the vacuum pump, for example against the atmosphere or in the supply line to a backing pump.
  • the pumping stages 610, 620 and 630 are commonly driven by the drive means 660.
  • the multigrade stage advantageously operates in a pressure and flow regime in which it has better compression and absorbency properties per power consumed than pure Gaede or side channel pumping stages.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Description

Die Erfindung betrifft eine Vakuumpumpstufe nach dem Oberbegriff des ersten Anspruchs.The invention relates to a vacuum pumping stage according to the preamble of the first claim.

Viele industrielle Prozesse laufen unter Vakuumbedingungen im molekularen Strömungsbereich ab. Zur Erzeugung solcher Vakuumbedingungen werden Vakuumpumpen oder aus Vakuumpumpen zusammengesetzte Vakuumpumpstände eingesetzt. In den Vakuumpumpen kommen Vakuumpumpstufen nach unterschiedlichen Wirkprinzipien zum Einsatz, die unterschiedlichen Druckbereichen angepasst sind, um Gas vom gewünschten Endvakuum bis zur Atmosphäre zu verdichten.Many industrial processes occur under vacuum conditions in the molecular flow regime. Vacuum pumps or vacuum pump assemblies composed of vacuum pumps are used to generate such vacuum conditions. In the vacuum pumps vacuum pump stages are used according to different principles of action, which are adapted to different pressure ranges to compress gas from the desired final vacuum to the atmosphere.

Gegen Atmosphäre verdichtend werden beispielsweise Seitenkanalpumpstufen eingesetzt. In diesen laufen Schaufeln in einem Kanal um und fördern einen wirbelartigen Gasstrom zwischen Ein- und Auslass. Der Gasstrom folgt den Schaufeln beim Umlauf und wird an einem sogenannten Abstreifer abgelöst und dem Auslass zugeführt. Nachteilig ist, dass nach diesem Prinzip gestaltete Pumpstufen lediglich im viskosen Strömungsbereich arbeiten und beim Übergang zur molekularen Strömung sehr schnell Kompression und Saugvermögen verlieren, da kein wirbelartiger Gasstrom mehr erzeugt werden kann.For example, side channel pumping stages are used to compress the atmosphere. In these blades run around in a channel and promote a vortex-like gas flow between inlet and outlet. The gas stream follows the blades during circulation and is removed at a so-called scraper and fed to the outlet. The disadvantage is that designed according to this principle pumping stages operate only in the viscous flow region and lose the transition to the molecular flow very quickly compression and pumping, since no vortex-like gas flow can be generated more.

Im zu niedrigeren Absolutdrücken an den viskosen Strömungsbereich angrenzenden Molekularbereich werden unter anderem Gaedepumpstufen eingesetzt. Deren Nachteil ist, dass Kompression und Saugvermögen lediglich unter molekularen Bedingungen gut sind und im viskosen Bereich sehr schnell schlecht werden.Gaedepump stages are used inter alia in the molecular range adjacent to the viscous flow region at lower absolute pressures. Their drawback is that compression and absorbency are good only under molecular conditions and become poor very quickly in the viscous region.

Die vorgenannten Nachteile werden verschärft, da Vakuumpumpen oft im Zyklusbetrieb eingesetzt werden, so dass die einzelnen Pumpstufen auf die Gesamtbetriebsdauer gesehen oft in einem Strömungsbereich arbeiten, für den sie nicht optimiert sind.The aforementioned disadvantages are aggravated because vacuum pumps are often used in cycle operation, so that the individual pump stages, as seen over the entire operating time, often operate in a flow range for which they are not optimized.

Aus der US 4 141 674 A ist eine Vakuumpumpstufe gemäß dem Oberbegriff des Anspruchs 1 bekannt.From the US 4 141 674 A a vacuum pumping stage according to the preamble of claim 1 is known.

Ferner beschreibt die WO 2005/033520 A1 eine Vakuumpumpstufe mit einem Einlass, einem Auslass, einem Rotor und einem zwischen Einlass und Auslass angeordneten Abstreifer, bei welcher der Rotor mit einem Rotorabschnitt in einen Kanal eintaucht und durch Zusammenwirken von Rotorabschnitt und Kanal eine Pumpwirkung erreicht wird. Der Rotorabschnitt weist ferner Gestaltungselemente mit Pumpwirkung im molekularen Strömungsbereich und Gestaltungselemente mit Pumpwirkung im höheren Druckbereich nach dem Seitenkanalprinzip auf.Furthermore, the describes WO 2005/033520 A1 a vacuum pumping stage having an inlet, an outlet, a rotor and a scraper disposed between inlet and outlet, wherein the rotor with a rotor portion dips into a channel and pumping action is achieved by cooperation of rotor portion and channel. The rotor section also has design elements with pump action in the molecular flow region and design elements with pump action in the higher pressure region according to the side channel principle.

Aufgabe der Erfindung war es daher, eine Vakuumpumpstufe zu schaffen, die sowohl im viskosen als auch im molekularen Strömungsbereich Kompression und Saugvermögen bereitstellt.The object of the invention was therefore to provide a vacuum pumping stage, which provides compression and pumping both in the viscous and in the molecular flow area.

Gelöst wird diese Aufgabe durch eine Vakuumpumpstufe mit den Merkmalen des ersten Patentanspruchs. Die abhängigen Ansprüche 2 bis 7 geben vorteilhafte Weiterbildungen an.This object is achieved by a vacuum pumping stage having the features of the first patent claim. The dependent claims 2 to 7 indicate advantageous developments.

Die Vakuumpumpstufe mit den Merkmalen des ersten Anspruchs stellt sowohl im viskosen als auch im molekularen Strömungsbereich Kompression und Saugvermögen bereit. Sie kann daher vorteilhaft in beiden Strömungsbereichen und im Übergangsbereich dazwischen eingesetzt werden.The vacuum pumping stage having the features of the first claim provides compression and suction in both the viscous and molecular flow regime. It can therefore be used advantageously in both flow regions and in the transition region between them.

Die Weiterbildungen gemäß den Ansprüchen 2 bis 4 sind vorteilhaft, da die Gestaltungselemente kostengünstig herstellbar sind.The developments according to claims 2 to 4 are advantageous because the design elements are inexpensive to produce.

Die Anordnung der Gestaltungselemente des Rotorabschnitts in der Ebene einer Scheibe des Rotors nach Anspruch 5 ist neben Herstellungsvorteilen rotordynamisch vorteilhaft, da eine günstige Massenverteilung vorliegt. Zudem treten symmetrische Kräfte durch den Gasstrom auf.The arrangement of the design elements of the rotor section in the plane of a disc of the rotor according to claim 5 is advantageous in addition to manufacturing advantages rotor-dynamically, since there is a favorable mass distribution. In addition, symmetrical forces occur due to the gas flow.

Die Vakuumpumpe nach Ansprüchen 6 und 7 zeichnet sich durch eine vorteilhafte Leistungsaufnahme aus, die gegenüber Vakuumpumpstufen mit Gaede- oder Seitenkanalstufen aufgrund von Kompressionsverlauf und Saugvermögenscharakteristik niedriger ausfällt.The vacuum pump according to claims 6 and 7 is characterized by an advantageous power consumption, which is lower compared to vacuum pumping stages with Gaede- or side channel stages due to the compression curve and the pumping speed characteristic.

Anhand von Ausführungsbeispielen und deren Weiterbildungen soll die Erfindung näher erläutert und die Darstellung ihrer Vorteile vertieft werden.Reference to exemplary embodiments and their developments, the invention will be explained in more detail and the representation of its benefits to be deepened.

Es zeigen:

Fig. 1:
Schnitt durch eine Vakuumpumpstufe mit Rotorabschnitt und Gestaltungselementen,
Fig. 2:
Gestaltungselemente im Rotorabschnitt gemäß zweitem Ausführungsbeispiel, dargestellt in Abwicklung,
Fig. 3:
Gestaltungselemente im Rotorabschnitt gemäß zweitem Ausführungsbeispiel, dargestellt im Querschnitt,
Fig. 4:
Gestaltungselemente im Rotorabschnitt gemäß drittem Ausführungsbeispiel, dargestellt in Abwicklung,
Fig. 5:
Gestaltungselemente im Rotorabschnitt gemäß drittem Ausführungsbeispiel, dargestellt im Querschnitt,
Fig. 6:
Schematische Darstellung einer mehrstufigen Vakuumpumpe,
Fig. 7:
Vergleich des Kompressionsverlaufes vom Stand der Technik und der Vakuumpumpstufe.
Show it:
Fig. 1:
Section through a vacuum pump stage with rotor section and design elements,
Fig. 2:
Design elements in the rotor section according to the second embodiment, shown in development,
3:
Design elements in the rotor section according to the second embodiment, shown in cross-section,
4:
Design elements in the rotor section according to the third embodiment, shown in development,
Fig. 5:
Design elements in the rotor section according to the third embodiment, shown in cross section,
Fig. 6:
Schematic representation of a multi-stage vacuum pump,
Fig. 7:
Comparison of the compression curve of the prior art and the vacuum pumping stage.

Die Vakuumpumpstufe 100 nach Figur 1 weist ein Gehäuse 102 auf. In diesem ist ein Einlass 104 vorgesehen, durch den Gas in die Vakuumpumpstufe angesaugt wird. Durch einen Auslass 106 wird das innerhalb der Vakuumpumpstufe geförderte Gas ausgestoßen. Einlass und Auslass sind durch einen Kanal 108 miteinander verbunden. In diesen Kanal taucht ein drehbar im Gehäuse angeordneter Rotor 112 mit einem Rotorabschnitt ein, wobei Kanal und Rotorabschnitt zum Erzeugen der Pumpwirkung zusammenwirken. Der Rotorabschnitt umfasst jenen Teil der Rotors, der von Drehachse des Rotors in radialer Richtung betrachtet über die innere Begrenzung 118 des Kanals hinaus in den Kanal hineinragt. Der Rotor gemäß Figur 1 wird durch die Gestaltungselemente Schaufeln 114 und wenigstens einem glattem Abschnitt 116 gebildet. Der glatte Abschnitt wird durch eine Zone des Rotors gebildet, die bis zu einem Außenradius 122 über den Schaufelgrundradius 120 hinausragt und sich entlang des Umfangs über einen Winkelbereich 124 erstreckt. Der Schaufelgrundradius liegt im Wesentlichen nahe des Radius der inneren Begrenzung des Kanals. Der Außenradius ist so gewählt, dass einerseits nur ein kleiner Spalt zu einem Abstreifer verbleibt, andererseits nur ein Teil der Kanaltiefe 126 ausgenutzt wird. Der Abstreifer trennt den am Rotorabschnitt mitgeführten Gasstrom und verhindert eine direkte Strömung zwischen Ein- und Auslass. Der glatte Abschnitt erzeugt zusammen mit dem Kanal im molekularen Strömungsbereich Kompression und Saugvermögen und wirkt nach dem Gaedeprinzip. Die Schaufeln 114 wirken im viskosen Strömungsbereich als Seitenkanalpumpstrukturen, die mit dem Kanal zusammenwirken.The vacuum pumping stage 100 after FIG. 1 has a housing 102. In this, an inlet 104 is provided, is sucked through the gas in the vacuum pumping stage. Through an outlet 106, the pumped within the vacuum pumping stage gas is ejected. Inlet and outlet are interconnected by a channel 108. In this channel, a rotatably arranged in the housing rotor 112 dives with a rotor portion, wherein channel and rotor portion cooperate to generate the pumping action. The rotor section comprises that part of the rotor which, viewed in the radial direction from the axis of rotation of the rotor, projects beyond the inner boundary 118 of the channel into the channel. The rotor according to FIG. 1 is formed by the design elements paddles 114 and at least one smooth portion 116. The smooth section is formed by a zone of the rotor that projects beyond the outer blade radius 120 over the blade root radius 120 and extends along the circumference over an angular range 124. The blade root radius is substantially close to the radius of the inner boundary of the channel. The outer radius is chosen so that on the one hand only a small gap to a scraper remains, on the other hand, only a portion of the channel depth 126 is utilized. The scraper separates the gas flow entrained at the rotor section and prevents a direct flow between inlet and outlet. The smooth section creates together with the channel in the molecular flow area compression and pumping speed and acts on the Gaedeprinzip. The vanes 114 act in the viscous flow area as side channel pumping structures which cooperate with the channel.

Vorteilhaft werden mehrere glatte Abschnitte derart über den Umfang des Rotors verteilt, dass sich ein Massenausgleich ergibt. Dies wird beispielsweise durch zwei sich gegenüberliegende glatte Abschnitte erreicht. Weiterhin lässt sich diese Gestaltung vorteilhaft weiterbilden, indem Schaufeln und glatte Abschnitte so bemessen werden, dass sich jeweils gegenüberliegende Massen im Wert entsprechen.Advantageously, several smooth sections are distributed over the circumference of the rotor, resulting in a mass balance. This is achieved for example by two opposite smooth sections. Furthermore, this design can be advantageously further developed by blades and smooth sections are dimensioned so that in each case opposite masses correspond in value.

Die Herstellung eines solchen Rotors ist kostengünstig, da beispielsweise zunächst eine Vollscheibe hergestellt wird, aus der eine Anzahl Schaufeln herausgesägt wird. In dem Bereich des glatten Abschnitts wird auf das Heraussägen verzichtet.The production of such a rotor is cost-effective, since, for example, first a solid disk is produced from which a number of blades are sawn out. In the area of the smooth section, the sawing is dispensed with.

Ein zweites Ausführungsbeispiel wird im Folgenden anhand der Figuren 2 und 3 beschrieben. In Fig. 2 sind Kanal und Rotorabschnitt in einer Abwicklung dargestellt, Fig. 3 zeigt den Schnitt entlang der Linie I-I'.A second embodiment will be described below with reference to FIG FIGS. 2 and 3 described. In Fig. 2 Channel and rotor section are shown in a development, Fig. 3 shows the section along the line I-I '.

Im Gehäuse 202 ist der Kanal 208 mit einer Kanaltiefe 226 vorgesehen. Über die innere Begrenzung 218 des Kanals hinaus ragt der Rotorabschnitt in den Kanal hinein. In ihm sind als Gestaltungselemente Schaufeln 214 vorgesehen, die durch Drehung des Rotors im Kanal umlaufen. Die Schaufeln weisen eine Dicke 228 in Bewegungsrichtung auf. Wenigstens eine der Schaufeln besitzt eine Dicke, die größer als etwa ein Fünftel des Abstandes 230 zur nachfolgenden Schaufel ist. Durch diese Dicke wird erreicht, dass die den Kanalwänden 240, 242 und 244 zugewandten Schaufeloberflächen 250, 252 und 254 im molekularen Strömungsbereich wie Gaedepumpstrukturen wirken. Im viskosen Strömungsbereich wirkt der Rotorabschnitt aufgrund der Schaufeln als Seitenkanalpumpstufe.In the housing 202, the channel 208 is provided with a channel depth 226. Beyond the inner boundary 218 of the channel, the rotor section projects into the channel. In it are provided as design elements blades 214 which rotate by rotation of the rotor in the channel. The blades have a thickness 228 in the direction of movement. At least one of the blades has a thickness greater than about one fifth of the distance 230 to the succeeding blade. It is achieved by this thickness that the blade surfaces 250, 252 and 254 facing the channel walls 240, 242 and 244 act in the molecular flow region like gas pumping structures. In the viscous flow region, the rotor section acts as a side channel pumping stage due to the blades.

In einer Weiterbildung besitzt wenigstens eine Schaufel 214 eine Dicke, die gleichgroß oder größer als etwa der Abstand 230 zur nachfolgenden Schaufel ist.In a further development, at least one blade 214 has a thickness that is equal to or greater than about the distance 230 to the subsequent blade.

Ein weiteres Ausführungsbeispiel ist in den Figuren 4 und 5 gezeigt. In Fig. 4 sind Kanal und Rotorabschnitt in einer Abwicklung dargestellt, Fig. 5 zeigt den Schnitt entlang der Linie II-II'.Another embodiment is in the FIGS. 4 and 5 shown. In Fig. 4 Channel and rotor section are shown in a development, Fig. 5 shows the section along the line II-II '.

Im Gehäuse 302 ist hier der Kanal 308 vorgesehen, der durch die innere Begrenzung 318 in Richtung Drehachse begrenzt wird. Im Rotorabschnitt sind als Gestaltungselemente Schaufeln 314 vorgesehen, die im viskosen Strömungsbereich zu einer Seitenkanalpumpwirkung führen. Der Rotorabschnitt weist außerdem einen Grundsteg 340 auf, der über die innere Begrenzung hinaus in den Kanal hineinragt. Im Schnitt nach Figur 5 ist dargestellt, dass der Grundsteg mit der Grundsteghöhe 332 über die innere Begrenzung hinausragt. Hierdurch läuft im Kanal die Seitenfläche 342 des Grundsteges um. Diese wirkt zusammen mit der Kanalwand im molekularen Strömungsbereich als Gaedepumpstufe.In the housing 302, the channel 308 is provided here, which is bounded by the inner boundary 318 in the direction of the axis of rotation. In the rotor section, blades 314 are provided as design elements which lead to a side channel pumping action in the viscous flow area. The rotor section also has a base land 340 which projects beyond the inner boundary into the channel. On average FIG. 5 It is shown that the base web protrudes with the web height 332 over the inner boundary. As a result, runs in the channel, the side surface 342 of the base bar. This works together with the channel wall in the molecular flow area as Gaedepumpstufe.

In einer Weiterbildung ist der Grundsteg nur entlang eines Teils des Umfangs des Rotors vorgesehen.In a development, the base web is provided only along part of the circumference of the rotor.

Die einzelnen Maßnahmen der Ausführungsbeispiele können kombiniert werden. So kann ein Grundsteg mit den dickeren Schaufeln und/oder einem glatten Abschnitt zusammen benutzt werden, um im Rotorabschnitt Gestaltungselemente zu erreichen, durch die die Pumpwirkung im molekularen Strömungsbereich nach Gaede und im höheren Druckbereich nach dem Seitenkanalprinzip bewirkt wird.The individual measures of the embodiments can be combined. Thus, a base web with the thicker blades and / or a smooth section can be used together to achieve design elements in the rotor section, by means of which the pumping action in the molecular flow region is effected according to Gaede and in the higher pressure range according to the side channel principle.

Die vorteilhafte Wirkung der beschriebenen Gestaltungen wird anhand von Messkurven in Fig. 7 deutlich. Gezeigt sind vier Messkurven, die jeweils auf ihren Maximalwert normiert wurden. Dargestellt ist die Kompression bei Nulldurchsatz, also das Verhältnis aus Druck am Auslass zu Druck am Einlass über dem Vorvakuumdruck, gemessen ohne Gasfluss durch den Pumpstufeneinlass.The advantageous effect of the described embodiments is based on measurement curves in Fig. 7 clear. Shown are four traces, each normalized to its maximum value. The compression at zero flow rate, that is the ratio of pressure at the outlet to pressure at the inlet above the backing pressure measured without gas flow through the pump stage inlet, is shown.

Kurve 70 zeigt den Verlauf für eine reine Gaedepumpstufe. Es wird ein starker Anstieg im molekularen Strömungsbereich beobachtet, während zu höheren Drücken hin, insbesondere oberhalb 1 hPa, keine nennenswerte Kompression auftritt.Curve 70 shows the course for a pure Gaedepumpstufe. There is a strong increase in the molecular flow area observed, while at higher pressures, especially above 1 hPa, no significant compression occurs.

Kurve 72 zeigt den Verlauf einer reinen Seitenkanalpumpstufe. Hier erreicht die Kompression zu höheren Drücken hin ihr Maximum.Curve 72 shows the course of a pure side channel pumping stage. Here the compression reaches its maximum towards higher pressures.

Kurve 74 zeigt den Kompressionsverlauf für das Ausführungsbeispiel mit glattem Abschnitt nach Figur 1, Kurve 76 den Verlauf für das Ausführungsbeispiel mit dicken Schaufeln nach Figuren 2 und 3.Curve 74 shows the compression curve for the smooth-section embodiment FIG. 1 Curve 76 traces the course for the embodiment with thick blades FIGS. 2 and 3 ,

Die Kurvenverläufe belegen, dass durch Verwendung der Geometrien gemäß den Ausführungsbeispielen vorteilhaft sowohl im molekularen Strömungsbereich 78 als auch im viskosen Strömungsbereich 80 Kompression erreicht wird. Diese ist im molekularen Bereich besser als die einer reinen Seitenkanalpumpstufe und im viskosen Bereich besser als die einer reinen Gaedestufe.The curves show that by using the geometries according to the exemplary embodiments, compression is advantageously achieved both in the molecular flow region 78 and in the viscous flow region 80. This is better in the molecular range than that of a pure side-channel pumping stage and in the viscous range better than that of a pure Gaedestufe.

In Fig. 6 ist eine Vakuumpumpe 600 im prinzipiellen Aufbau dargestellt, in der die Vorteile der oben beschriebenen Vakuumpumpstufe besonders gut zur Geltung kommen.In Fig. 6 a vacuum pump 600 is shown in the basic structure, in which the advantages of the vacuum pumping stage described above are particularly good advantage.

Im Gehäuse 602 der Vakuumpumpe ist eine Welle 640 vorgesehen, die mittels Lagern 650 und 652 drehbar unterstützt wird. Hierbei kann es sich um fett- oder ölgeschmierte Wälzlager, Gas-, Gleit- oder Magnetlager handeln. Diese Lagerbauformen können gemischt verwendet werden, wobei Schmiermittel wie Öl oder dergleichen eher im Bereich des Vorvakuums eingesetzt werden, welcher auf der Seite des Lagers 652 zu finden ist.In the housing 602 of the vacuum pump, a shaft 640 is provided, which is rotatably supported by bearings 650 and 652. These may be grease or oil lubricated bearings, gas, sliding or magnetic bearings. These types of bearings can be used mixed, with lubricants such as oil or the like are used in the area of Vorvakuums, which is found on the side of the bearing 652.

Durch einen Pumpeneinlass 680 tritt Gas in die Vakuumpumpe ein und gelangt zur Hochvakuumpumpstufe 620. Diese ist vorteilhaft als Holweck- oder Turbomolekularpumpstufe gestaltet und kann ihrerseits mehrstufig aufgebaut sein. In diesen einzelnen Stufen können unterschiedliche Pumpprinzipien Anwendung finden. Durch einen Auslass 622 der Hochvakuumpumpstufe tritt Gas aus und gelang zum Einlass 604 der Mehrbereichsstufe 610, welche gemäß den zu den Figuren 1 bis 5 beschriebenen Vorgaben gestaltet ist.Gas enters the vacuum pump through a pump inlet 680 and passes to the high vacuum pumping stage 620. This is advantageous as a Holweck or turbomolecular pumping stage designed and can in turn be multi-level structure. Different pumping principles can be used in these individual stages. Gas exits through an outlet 622 of the high vacuum pumping stage and reaches the inlet 604 of the multi-stage 610, which is in accordance with the FIGS. 1 to 5 described specifications is designed.

Der Einlass 604 steht mit einer Ansaugöffnung 612 in Gasflussverbindung, so dass die Mehrbereichsstufe 610 Gas sowohl durch diese Ansaugöffnung als auch vom Auslass 622 der Hochvakuumpumpstufe ansaugt. Das in ihr verdichtete Gas wird durch den Auslass 606 ausgestoßen und einer Vorvakuumstufe 630 zugeführt. Diese kann vorteilhaft als Seitenkanalpumpstufe gestaltet sein und ihrerseits mehrere Pumpstufen umfassen. Durch einen Pumpenauslass 682 wird das Gas aus der Vakuumpumpe ausgestoßen, beispielsweise gegen Atmosphäre oder in die Zuleitung zu einer Vorvakuumpumpe.The inlet 604 is in gas flow communication with a suction port 612 so that the multi-section stage 610 sucks gas through both this suction port and the high vacuum pump stage outlet 622. The compressed gas in it is expelled through the outlet 606 and fed to a fore-vacuum stage 630. This can advantageously be designed as a side channel pumping stage and in turn comprise a plurality of pumping stages. By a pump outlet 682, the gas is expelled from the vacuum pump, for example against the atmosphere or in the supply line to a backing pump.

Die Pumpstufen 610, 620 und 630 werden durch die Antriebsmittel 660 gemeinsam angetrieben.The pumping stages 610, 620 and 630 are commonly driven by the drive means 660.

Durch diese Anordnung arbeitet die Mehrbereichsstufe vorteilhaft in einem Druck- und Strömungsbereich, in dem sie bessere Kompressions- und Saugvermögenseigenschaften pro aufgenommene Leistung als reine Gaede- oder Seitenkanalpumpstufen besitzt.By virtue of this arrangement, the multigrade stage advantageously operates in a pressure and flow regime in which it has better compression and absorbency properties per power consumed than pure Gaede or side channel pumping stages.

Claims (7)

  1. A vacuum pump stage (100; 610) having an inlet (104; 604); an outlet (106; 606); a rotor (112; 212; 312) and a channel (108; 208; 308), wherein a rotor section of the rotor (112; 212; 312) dips into the channel (108; 208; 308) and a pumping effect is achieved by the cooperation of the rotor section and the channel (108; 208; 308); and having a scraper (110) arranged between the inlet (104; 604) and the outlet (106; 606),
    wherein the rotor section has design elements (114, 116; 214; 314, 340) along its periphery, by which design elements the pumping effect is brought about in a molecular flow region in accordance with Gaede and in a higher pressure range in accordance with the side channel principle, characterized in that
    the rotor (112; 212; 312) is formed by the design elements blades (114; 214; 314) and by at least one smooth section (116), with the at least one smooth section (116) being formed by a zone of the rotor which projects beyond a base radius (120) of the blades up to an external radius (122) and which extends along the periphery over an angular range (124).
  2. A vacuum pump stage in accordance with claim 1,
    characterized in that
    at least one blade (214) has a thickness which is larger than approximately a fifth of a spacing (230) from a following blade.
  3. A vacuum pump stage in accordance with claim 1,
    characterized in that
    at least one blade (214) has a thickness which is as large as or larger than approximately the spacing (230) from the following blade.
  4. A vacuum pump stage in accordance with any one of the preceding claims,
    characterized in that
    the design elements comprise a base web (340) which dips into the channel.
  5. A vacuum pump stage in accordance with any one of the preceding claims,
    characterized in that
    the design elements (114, 116; 214; 314, 340) are substantially arranged lying in the plane (234; 334) of the rotor (112; 212; 312).
  6. A vacuum pump (600),
    characterized in that
    it comprises a vacuum pump stage (610) in accordance with any one of the preceding claims which is arranged in a gas flow between a pump stage (620) at the high vacuum side and a pump stage (630) at the atmosphere side.
  7. A vacuum pump in accordance with claim 6,
    characterized in that
    the vacuum pump stage (610) is in gas flow communication with a suction opening (612) and with an outlet (622) of the pump stage (620) at the high vacuum side.
EP11002911.3A 2010-05-08 2011-04-07 Vacuum pump stage Not-in-force EP2385257B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102010019940.0A DE102010019940B4 (en) 2010-05-08 2010-05-08 Vacuum pumping stage

Publications (3)

Publication Number Publication Date
EP2385257A2 EP2385257A2 (en) 2011-11-09
EP2385257A3 EP2385257A3 (en) 2014-09-03
EP2385257B1 true EP2385257B1 (en) 2017-10-18

Family

ID=44144686

Family Applications (1)

Application Number Title Priority Date Filing Date
EP11002911.3A Not-in-force EP2385257B1 (en) 2010-05-08 2011-04-07 Vacuum pump stage

Country Status (3)

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EP (1) EP2385257B1 (en)
JP (1) JP6302615B2 (en)
DE (1) DE102010019940B4 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013108482A1 (en) 2013-08-06 2015-02-12 Pfeiffer Vacuum Gmbh Vacuum pump stage
DE102013114290A1 (en) * 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh vacuum pump

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE605902C (en) 1932-01-08 1934-11-20 Hugo Seemann Dr Turbo high vacuum pump
DE2034285A1 (en) 1970-07-10 1972-01-13 Pfeiffer Vakuumtechnik Molecular pump
US4141674A (en) * 1975-02-13 1979-02-27 Siemens Aktiengesellschaft Impeller for a ring compressor
US5238362A (en) 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
DE19930952A1 (en) 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vacuum pump
US6641361B2 (en) 2001-12-12 2003-11-04 Visteon Global Technologies, Inc. Fuel pump impeller for high flow applications
US6607351B1 (en) * 2002-03-12 2003-08-19 Varian, Inc. Vacuum pumps with improved impeller configurations
ITTO20020370A1 (en) * 2002-05-06 2003-11-06 Varian Spa PUMPING STAGE FOR VACUUM PUMP.
US6974302B2 (en) 2002-06-06 2005-12-13 Hitachi Unisia Automotive, Ltd. Turbine fuel pump
GB0229356D0 (en) 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
EP2385257A3 (en) 2014-09-03
JP2011236900A (en) 2011-11-24
DE102010019940B4 (en) 2021-09-23
JP6302615B2 (en) 2018-03-28
EP2385257A2 (en) 2011-11-09
DE102010019940A1 (en) 2011-11-10

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