EP0363503B1 - Pump stage for a high vacuum pump - Google Patents

Pump stage for a high vacuum pump Download PDF

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Publication number
EP0363503B1
EP0363503B1 EP88116749A EP88116749A EP0363503B1 EP 0363503 B1 EP0363503 B1 EP 0363503B1 EP 88116749 A EP88116749 A EP 88116749A EP 88116749 A EP88116749 A EP 88116749A EP 0363503 B1 EP0363503 B1 EP 0363503B1
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EP
European Patent Office
Prior art keywords
pump
pump stage
rotor
stator
webs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP88116749A
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German (de)
French (fr)
Other versions
EP0363503A1 (en
Inventor
Hans-Peter Dr. Kabelitz
Winfried Kaiser
Hans-Günter Dr. Stüber
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Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to DE88116749T priority Critical patent/DE3885899D1/en
Priority to EP88116749A priority patent/EP0363503B1/en
Priority to JP1262311A priority patent/JP3048583B2/en
Priority to US07/419,194 priority patent/US4978276A/en
Publication of EP0363503A1 publication Critical patent/EP0363503A1/en
Application granted granted Critical
Publication of EP0363503B1 publication Critical patent/EP0363503B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Definitions

  • the invention relates to a pump stage for a high vacuum pump with a rotor and a stator surrounding it, in which the rotor or the stator is provided with a structure which effects the gas delivery.
  • a turbomolecular pump with interlocking stator and rotor blades is known from CH-B-532 199.
  • the inclination of the individual blades decreases from the suction side to the pressure side, and the same applies to their width (radial extension).
  • Turbomolecular pump stages of this type have a relatively low compression (pressure ratio of pressure-side pressure to suction-side pressure) a relatively high pumping speed (pump speed, volume flow per unit of time).
  • their manufacture and assembly is complex and expensive because a large number of pump stages (rotor and stator stages) are required in order to achieve adequate compression.
  • Molecular pump stages have a relatively high compression, but their pumping speed is poor.
  • the present invention has for its object to provide a pump stage of the type mentioned with improved pump properties.
  • a pump stage with these features has both better compression and a higher pumping speed than the usual screw pump stages, especially at relatively high pressures on the suction side. It is compact. Only either the stator or the rotor must be equipped with the webs according to the invention, so that their manufacture, assembly and thus also the service work are considerably easier compared to turbomolecular pump stages.
  • the pump stage according to the invention is particularly suitable for being combined with a thread pump stage, but in particular with two thread pump stages.
  • a high-vacuum pump of this type almost achieves the pump properties of a corresponding turbomolecular pump in terms of compression, pumping speed and ultimate pressure.
  • it also has the advantage that it can be used at higher pressures, up to the viscous flow area, so that the effort for the pre-vacuum generation can be reduced.
  • the high vacuum pump according to FIG. 1 has an outer housing 1 with a central bearing bush 2 projecting inwards.
  • the shaft 3 is supported in the bearing bush 2 by means of a spindle bearing 4.
  • the drive motor 5 and the rotor system 6, 7 are coupled to the shaft 3.
  • the one-piece rotor system has two differently designed rotors 6 and 7.
  • Rotor 6 is cylindrical with smooth outer and inner surfaces 8, 9.
  • the housing 1 is equipped on its inside with a thread 10 and thus simultaneously forms the stator of a thread pump stage.
  • the surface 8 and the thread 10 are the pump-active surfaces of this known thread pump stage, which conveys molecules reaching the pump gap 11 towards the outlet 12.
  • the outside of the bearing bushes 2 is provided with a thread 13 and thus forms the stator of a further thread pump stage.
  • the thread 13 and the inner surface 9 are the pump-active surfaces of the further thread pump stage with the pump gap 14.
  • the gases conveyed upward through the pump gap 14 flow through bores 15 in the bearing bush 2 to the outlet 12.
  • the thread pump stage 8, 10 is preceded by a pump stage according to the invention.
  • This has the rotor 7, which consists of a conically shaped hub part 23 and the webs 24. These webs 24 form a pump stage 7, 25 with the surrounding stator wall 25 in the housing 1. Gas molecules that get between the individual webs 24 or into the gap 26 are transferred from the pump stage 24, 25 according to the invention in the direction of the pump gap 11 of the molecular pump stage 6 , 10 promoted.
  • the webs 24 are provided on the conical hub part 23 and rotate with the rotor system 6, 7.
  • the webs 24 are provided on the stator wall 25.
  • the gap 26 is between the smooth outer surface of the hub part 23 in this case and the inner edges of the webs 24.
  • the width of the gaps 11, 14 and 26 should be as small as possible. In practice, as is known for molecular pump stages, it is a few tenths of a millimeter.
  • FIG. 2 Details of the design of the rotor 7 of the pump stage according to the invention can be seen in FIG. 2.
  • the outer radius r of the rotor 7 is practically identical to the radius of the cylindrical stator inner wall 25 (except for the gap 26).
  • the webs 24 On the suction side, the webs 24 have an inclination or an angle of attack ⁇ of approximately 45 °.
  • width b1 corresponds to about a third of the radius r, where r z. B. can be 50 to 60 mm. With these size ratios, the annular area (gas inlet area) defined by the width b 1 of the webs 24 makes up more than 50% of the rotor end face.
  • the webs 24 On the pressure side, the webs 24 have an inclination or a setting angle ⁇ of approximately 15 °. Their width b2 corresponds to about a tenth of the radius r.
  • the pump channels formed by the hub part 23, the webs 24 and the stator wall 25 open into the thread 10 of the subsequent thread pump stage.
  • nineteen webs 24 are evenly distributed over the circumference of the conical hub part 23. They each extend over the angle ⁇ . This angle is expediently of the order of 90 °.

Description

Die Erfindung bezieht sich auf eine Pumpenstufe für eine Hochvakuumpumpe mit einem Rotor und einem diesen umgebenden Stator, bei welcher der Rotor oder der Stator mit einer die Gasförderung bewirkenden Struktur versehen ist.The invention relates to a pump stage for a high vacuum pump with a rotor and a stator surrounding it, in which the rotor or the stator is provided with a structure which effects the gas delivery.

Es ist bekannt, bei Hochvakuumpumpen Molekularpumpstufen oder Turbomolekularpumpstufen einzusetzen. Bei Molekularpumpen sind eine sich bewegende Rotorwand und eine ruhende Statorwand so gestaltet und beabstandet, daß die von den Wandungen auf dazwischen befindliche Gasmoleküle übertragenen Impuse eine bevorzugte Richtung haben. In der Regel sind Rotor- oder Statorwand mit spiral- oder wendelförmigen Vertiefungen oder Vorsprüngen zur Erzielung der bevorzugten Förderrichtung ausgerüstet. Bei Turbomolekularpumpstufen sind nach Art einer Turbine ineinandergreifende Stator- und Rotorschaufeln vorgesehen. Die Schaufeln übertragen die gewünschten Impulse auf die zu fördernden Gasmoleküle, und zwar bevorzugt in Förderrichtung.It is known to use molecular pump stages or turbomolecular pump stages in high vacuum pumps. In the case of molecular pumps, a moving rotor wall and a stationary stator wall are designed and spaced apart in such a way that the impulse transmitted from the walls to gas molecules located between them has a preferred direction. As a rule, the rotor or stator wall are equipped with spiral or helical depressions or projections in order to achieve the preferred conveying direction. In turbomolecular pump stages, intermeshing stator and rotor blades are provided in the manner of a turbine. The blades transmit the desired impulses to the gas molecules to be conveyed, preferably in the conveying direction.

Eine Turbomolekularpumpe mit ineinandergreifenden Stator- und Rotorschaufeln ist aus der CH-B-532 199 bekannt. Die Neigung der einzelnen Schaufeln nimmt von der Saugseite zur Druckseite ab, desgl. ihre Breite (radiale Erstreckung). Turbomolekularpumpstufen dieser Art haben eine relativ niedrige Kompression (Druckverhältnis von druckseitigem Druck zu saugseitigem Druck), aber ein relativ hohes Saugvermögen (Pumpgeschwindigkeit, Volumendurchfluß pro Zeiteinheit). Ihre Herstellung und Montage ist jedoch aufwendig und teuer, weil sehr viele Pumpstufen (Rotor- und Statorstufen) benötigt werden, um eine ausreichende Kompression zu erzielen. Molekularpumpstufen haben eine relativ hohe Kompression, ihr Saugvermögen ist jedoch schlecht.A turbomolecular pump with interlocking stator and rotor blades is known from CH-B-532 199. The inclination of the individual blades decreases from the suction side to the pressure side, and the same applies to their width (radial extension). Turbomolecular pump stages of this type, however, have a relatively low compression (pressure ratio of pressure-side pressure to suction-side pressure) a relatively high pumping speed (pump speed, volume flow per unit of time). However, their manufacture and assembly is complex and expensive because a large number of pump stages (rotor and stator stages) are required in order to achieve adequate compression. Molecular pump stages have a relatively high compression, but their pumping speed is poor.

Aus der Europäischen Patentanmeldung 142 208 ist es bekannt, das Saugvermögen einer Molekularpumpe dadurch zu verbessern, daß ihr eine gesonderte Pumpstufe saugseitig vorgelagert wird. Diese Pumpstufe umfaßt statorseitig einen wendelförmigen Vorsprung. Dieser Vorsprung ist die Fortsetzung des wendelförmigen Vorsprunges der Molekularpumpe in Richtung Saugseite. Weiterhin sind dem wendelförmigen Vorsprung rotorseitig Schaufelblätter zugeordnet, die sich radial und parallel zur Drehachse des Rotors erstrecken. Eine Pumpenstufe dieser Art ist ebenfalls relativ aufwendig in ihrer Herstellung, da sowohl rotorseitig als auch statorseitig Strukturen vorhanden sein müssen. Außerdem ist die Kompression dieser Pumpenstufen sehr klein.From European patent application 142 208 it is known to improve the pumping speed of a molecular pump in that it is preceded by a separate pump stage on the suction side. This pump stage comprises a helical projection on the stator side. This projection is the continuation of the helical projection of the molecular pump towards the suction side. Furthermore, blades are assigned to the helical projection on the rotor side, which blades extend radially and parallel to the axis of rotation of the rotor. A pump stage of this type is also relatively complex to manufacture, since structures must be present both on the rotor side and on the stator side. In addition, the compression of these pump stages is very small.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine Pumpenstufe der eingangs genannten Art mit verbesserten Pumpeigenschaften zu schaffen.The present invention has for its object to provide a pump stage of the type mentioned with improved pump properties.

Erfindungsgemäß wird diese Aufgabe durch die kennzeichnenden Merkmale im Patentanspruch 1 gelöst. Eine Pumpenstufe mit diesen Merkmalen hat im Vergleich zu den üblichen Gewindepumpenstufen sowohl eine bessere Kompression als auch ein höheres Saugvermögen, vor allem bei relativ hohen Drücken auf der Saugseite. Sie ist kompakt. Nur entweder der Stator oder der Rotor müssen mit den erfindungsgemäßen Stegen ausgerüstet sein, so daß ihre Herstellung, Montage und damit auch die Service-Arbeiten im Vergleich zu Turbomolekularpumpstufen wesentlich einfacher sind.According to the invention this object is achieved by the characterizing features in claim 1. A pump stage with these features has both better compression and a higher pumping speed than the usual screw pump stages, especially at relatively high pressures on the suction side. It is compact. Only either the stator or the rotor must be equipped with the webs according to the invention, so that their manufacture, assembly and thus also the service work are considerably easier compared to turbomolecular pump stages.

Aufgrund ihrer besonderen Pumpeigenschaften ist die erfindungsgemäße Pumpstufe besonders geeignet, mit einer Gewindepumpenstufe, insbesondere aber mit zwei Gewindepumpenstufen, kombiniert zu werden. Eine Hochvakuumpumpe dieser Art erreicht bezüglich Kompression, Saugvermögen und Enddruck nahezu die Pumpeigenschaften einer entsprechenden Turbomolekularpumpe. Darüber hinaus hat sie noch den Vorteil, daß sie zu höheren Drücken hin, bis in den viskosen Strömungsbereich einsetzbar ist, so daß der Aufwand für die Vorvakuumerzeugung reduziert werden kann.Because of its special pump properties, the pump stage according to the invention is particularly suitable for being combined with a thread pump stage, but in particular with two thread pump stages. A high-vacuum pump of this type almost achieves the pump properties of a corresponding turbomolecular pump in terms of compression, pumping speed and ultimate pressure. In addition, it also has the advantage that it can be used at higher pressures, up to the viscous flow area, so that the effort for the pre-vacuum generation can be reduced.

Weitere Vorteile und Einzelheiten der Erfindung sollen anhand der Figuren 1 und 2 erläutert werden. Es zeigen

  • Figur 1 einen Schnitt durch eine Hochvakuumpumpe mit einer erfindungsgemäß ausgebildeten Pumpstufe, deren Rotor teilweise in Seitenansicht dargestellt ist, und
  • Figur 2 eine Ansicht des Rotors der erfindungsgemäßen Pumpstufe nach Figur 1.
Further advantages and details of the invention will be explained with reference to FIGS. 1 and 2. Show it
  • 1 shows a section through a high vacuum pump with a pump stage designed according to the invention, the rotor of which is partially shown in side view, and
  • FIG. 2 shows a view of the rotor of the pump stage according to the invention according to FIG. 1.

Die Hochvakuumpumpe nach Figur 1 weist ein äußeres Gehäuse 1 mit einer zentralen, nach innen hineinragenden Lagerbuchse 2 auf. In der Lagerbuchse 2 stützt sich die Welle 3 mittels einer Spindellagerung 4 ab. Mit der Welle 3 ist der Antriebsmotor 5 und das Rotorsystem 6, 7 gekoppelt.The high vacuum pump according to FIG. 1 has an outer housing 1 with a central bearing bush 2 projecting inwards. The shaft 3 is supported in the bearing bush 2 by means of a spindle bearing 4. The drive motor 5 and the rotor system 6, 7 are coupled to the shaft 3.

Das einstückige Rotorsystem weist zwei unterschiedlich gestaltete Rotoren 6 und 7 auf. Rotor 6 ist zylindrisch mit glatter äußerer und innerer Oberfläche 8, 9 ausgebildet. Im Bereich der Oberfläche 8 ist das Gehäuse 1 auf seiner Innenseite mit einem Gewinde 10 ausgerüstet und bildet damit gleichzeitig den Stator einer Gewindepumpenstufe. Die Oberfläche 8 und das Gewinde 10 sind die pumpaktiven Flächen dieser an sich bekannten Gewindepumpenstufe, die in den Pumpspalt 11 gelangende Moleküle in Richtung Auslaß 12 fördert.The one-piece rotor system has two differently designed rotors 6 and 7. Rotor 6 is cylindrical with smooth outer and inner surfaces 8, 9. In the area of the surface 8, the housing 1 is equipped on its inside with a thread 10 and thus simultaneously forms the stator of a thread pump stage. The surface 8 and the thread 10 are the pump-active surfaces of this known thread pump stage, which conveys molecules reaching the pump gap 11 towards the outlet 12.

Im Bereich der inneren Oberfläche 9 des Rotors 6 ist die Außenseite der Lagerbuchsen 2 mit einem Gewinde 13 versehen und bildet damit den Stator einer weiteren Gewindepumpenstufe. Das Gewinde 13 und die innere Oberfläche 9 sind die pumpaktiven Flächen der weiteren Gewindepumpenstufe mit dem Pumpspalt 14. Die durch den Pumpspalt 14 von unten nach oben geförderten Gase strömen durch Bohrungen 15 in der Lagerbuchse 2 zum Auslaß 12.In the area of the inner surface 9 of the rotor 6, the outside of the bearing bushes 2 is provided with a thread 13 and thus forms the stator of a further thread pump stage. The thread 13 and the inner surface 9 are the pump-active surfaces of the further thread pump stage with the pump gap 14. The gases conveyed upward through the pump gap 14 flow through bores 15 in the bearing bush 2 to the outlet 12.

Der Gewindepumpenstufe 8, 10 ist eine Pumpstufe nach der Erfindung vorgelagert. Diese weist den Rotor 7 auf, der aus einem konisch geformten Nabenteil 23 und den Stegen 24 besteht. Diese Stege 24 bilden mit der sie umgebenden Statorwand 25 im Gehäuse 1 eine Pumpstufe 7, 25. Gasmoleküle, die zwischen die einzelnen Stege 24 oder in den Spalt 26 gelangen, werden von der erfindungsgemäßen Pumpenstufe 24, 25 in Richtung des Pumpspaltes 11 der Molekularpumpstufe 6, 10 gefördert.The thread pump stage 8, 10 is preceded by a pump stage according to the invention. This has the rotor 7, which consists of a conically shaped hub part 23 and the webs 24. These webs 24 form a pump stage 7, 25 with the surrounding stator wall 25 in the housing 1. Gas molecules that get between the individual webs 24 or into the gap 26 are transferred from the pump stage 24, 25 according to the invention in the direction of the pump gap 11 of the molecular pump stage 6 , 10 promoted.

Beim dargestellten Ausführungsbeispiel sind die Stege 24 auf dem konischen Nabenteil 23 vorgesehen und rotieren mit dem Rotorsystem 6, 7. Es besteht auch die Möglichkeit, daß die Stege 24 an der Statorwand 25 vorgesehen sind. Bei einer derartigen Ausbildung befindet sich der Spalt 26 zwischen der in diesem Falle glatten äußeren Oberfläche des Nabenteils 23 und den Innenkanten der Stege 24. Die Breite der Spalte 11, 14 und 26 soll möglichst klein sein. Sie beträgt - wie bei Molekularpumpstufen bekannt - in der Praxis wenige Zehntel Millimeter.In the illustrated embodiment, the webs 24 are provided on the conical hub part 23 and rotate with the rotor system 6, 7. There is also the possibility that the webs 24 are provided on the stator wall 25. With such a design, the gap 26 is between the smooth outer surface of the hub part 23 in this case and the inner edges of the webs 24. The width of the gaps 11, 14 and 26 should be as small as possible. In practice, as is known for molecular pump stages, it is a few tenths of a millimeter.

Einzelheiten der Gestaltung des Rotors 7 der erfindungsgemäßen Pumpstufe sind der Figur 2 entnehmbar. Der äußere Radius r des Rotors 7 ist praktisch identisch mit dem Radius der zylindrischen Statorinnenwand 25 (bis auf den Spalt 26). Saugseitig haben die Stege 24 eine Neigung bzw. einen Anstellwinkel α von ca. 45°.Details of the design of the rotor 7 of the pump stage according to the invention can be seen in FIG. 2. The outer radius r of the rotor 7 is practically identical to the radius of the cylindrical stator inner wall 25 (except for the gap 26). On the suction side, the webs 24 have an inclination or an angle of attack α of approximately 45 °.

Ihre Breite b₁ entspricht etwa einem Drittel des Radius r, wobei r z. B. 50 bis 60 mm betragen kann. Bei diesen Größenverhältnissen macht die durch die Breite b₁ der Stege 24 definierte Ringfläche (Gaseintrittsfläche) mehr als 50% der Rotorstirnseite aus.Their width b₁ corresponds to about a third of the radius r, where r z. B. can be 50 to 60 mm. With these size ratios, the annular area (gas inlet area) defined by the width b 1 of the webs 24 makes up more than 50% of the rotor end face.

Druckseitig haben die Stege 24 eine Neigung bzw. einen Anstellwinkel β von ca. 15°. Ihre Breite b₂ entspricht etwa einem Zehntel des Radius r. Die vom Nabenteil 23, den Stegen 24 und der Statorwand 25 gebildeten Pumpkanäle münden in das Gewinde 10 der nachfolgenden Gewindepumpenstufe.On the pressure side, the webs 24 have an inclination or a setting angle β of approximately 15 °. Their width b₂ corresponds to about a tenth of the radius r. The pump channels formed by the hub part 23, the webs 24 and the stator wall 25 open into the thread 10 of the subsequent thread pump stage.

Beim dargestellten Ausführungsbeispiel sind neunzehn Stege 24 gleichmäßig über den Umfang des konischen Nabenteils 23 verteilt. Sie erstrecken sich jeweils über den Winkel α. Dieser Winkel liegt zweckmäßig in der Größenordnung von 90°.In the illustrated embodiment, nineteen webs 24 are evenly distributed over the circumference of the conical hub part 23. They each extend over the angle α. This angle is expediently of the order of 90 °.

Claims (10)

  1. Pump stage for a high-vacuum pump, having a rotor (7) and a stator (1), in which the rotor or the stator is provided with a structure effecting gas conveyance, characterised in that the radially extending webs (24) have the following features:
    - on the suction side, the ratio of the radius r of the inner surface of the stator wall (25) to the web breadth b₁ is 2:1 to 5:1, preferably 3:1;
    - on the pressure side, the ratio of the radius r of the inner surface of the stator wall (25) to the web breadth b₂ is 10:1 to 12:1;
    - the pitch of the webs (24) decreases from the suction side to the pressure side from 40° - 50°, preferably 45°, to 10° - 20°, preferably 15°.
  2. Pump stage according to claim 1, characterised in that the webs (24) are part of the rotor (7).
  3. Pump stage according to claim 1, characterised in that the webs (24) are part of the stator (1, 25).
  4. Pump stage according to one of claims 1, 2 or 3, characterised in that the rotor has a conically formed hub part (23).
  5. Pump stage according to one of the preceding claims, characterised in that the webs (24) extend over approximately 90° of the circumference of the rotor (7).
  6. Pump stage according to one of the preceding claims, characterised in that ten to twenty parallel-guided webs (24) are distributed evenly over the circumference.
  7. Pump stage according to one of the preceding claims, characterised in that it is combined with a threaded pump stage (8, 10), and in that the rotors (6, 7) of the pump stage (24, 25) and the threaded pump stage (8, 10) are disposed on a common shaft (3).
  8. Pump stage according to claim 7, characterised in that the shaft (3) is supported in a bearing bush (2), in that the rotor (6) takes the form of a hollow cylinder, in that the exterior of the rotor (6) with the stator or housing (1) forms a first threaded pump stage (8, 10) with the pump gap (11), and in that the interior of the rotor (6) with the exterior of the bearing bush (2) forms a further threaded stage (9, 13) with the pump gap (14).
  9. Pump stage according to claim 8, characterised in that the pump gap (14) is connected to the outlet (12) via bores (15) in the bearing bush (2).
  10. Pump stage according to claims 2, 5 or 6, characterised in that the rotor (6, 7) is formed in one piece and in that the structure of the threaded pump stage(s) (8, 10; 9, 13) effecting gas conveyance is disposed on the stator side.
EP88116749A 1988-10-10 1988-10-10 Pump stage for a high vacuum pump Expired - Lifetime EP0363503B1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE88116749T DE3885899D1 (en) 1988-10-10 1988-10-10 Pump stage for a high vacuum pump.
EP88116749A EP0363503B1 (en) 1988-10-10 1988-10-10 Pump stage for a high vacuum pump
JP1262311A JP3048583B2 (en) 1988-10-10 1989-10-09 Pump stage for high vacuum pump
US07/419,194 US4978276A (en) 1988-10-10 1989-10-10 Pump stage for a high-vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP88116749A EP0363503B1 (en) 1988-10-10 1988-10-10 Pump stage for a high vacuum pump

Publications (2)

Publication Number Publication Date
EP0363503A1 EP0363503A1 (en) 1990-04-18
EP0363503B1 true EP0363503B1 (en) 1993-11-24

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Application Number Title Priority Date Filing Date
EP88116749A Expired - Lifetime EP0363503B1 (en) 1988-10-10 1988-10-10 Pump stage for a high vacuum pump

Country Status (4)

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US (1) US4978276A (en)
EP (1) EP0363503B1 (en)
JP (1) JP3048583B2 (en)
DE (1) DE3885899D1 (en)

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DE4216237A1 (en) * 1992-05-16 1993-11-18 Leybold Ag Gas friction vacuum pump
TW504548B (en) * 1998-06-30 2002-10-01 Ebara Corp Turbo molecular pump
GB9927493D0 (en) * 1999-11-19 2000-01-19 Boc Group Plc Improved vacuum pumps
DE10008691B4 (en) * 2000-02-24 2017-10-26 Pfeiffer Vacuum Gmbh Gas friction pump
JP2002138987A (en) * 2000-10-31 2002-05-17 Seiko Instruments Inc Vacuum pump
US6503050B2 (en) * 2000-12-18 2003-01-07 Applied Materials Inc. Turbo-molecular pump having enhanced pumping capacity
US6790016B2 (en) * 2002-02-04 2004-09-14 Ching-Yuan Chiang Motor and its blade unit
DE10224604B4 (en) 2002-06-04 2014-01-30 Oerlikon Leybold Vacuum Gmbh evacuation device
JP4141199B2 (en) * 2002-08-13 2008-08-27 株式会社大阪真空機器製作所 Molecular pump seal structure
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
GB0424199D0 (en) * 2004-11-01 2004-12-01 Boc Group Plc Vacuum pump
GB0503946D0 (en) 2005-02-25 2005-04-06 Boc Group Plc Vacuum pump

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Also Published As

Publication number Publication date
JPH02149798A (en) 1990-06-08
DE3885899D1 (en) 1994-01-05
US4978276A (en) 1990-12-18
EP0363503A1 (en) 1990-04-18
JP3048583B2 (en) 2000-06-05

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