EP0363503A1 - Pump stage for a high vacuum pump - Google Patents

Pump stage for a high vacuum pump Download PDF

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Publication number
EP0363503A1
EP0363503A1 EP88116749A EP88116749A EP0363503A1 EP 0363503 A1 EP0363503 A1 EP 0363503A1 EP 88116749 A EP88116749 A EP 88116749A EP 88116749 A EP88116749 A EP 88116749A EP 0363503 A1 EP0363503 A1 EP 0363503A1
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EP
European Patent Office
Prior art keywords
pump
pump stage
rotor
stator
stage according
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Granted
Application number
EP88116749A
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German (de)
French (fr)
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EP0363503B1 (en
Inventor
Hans-Peter Dr. Kabelitz
Winfried Kaiser
Hans-Günter Dr. Stüber
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Balzers und Leybold Deutschland Holding AG
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Leybold AG
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Priority to EP88116749A priority Critical patent/EP0363503B1/en
Priority to DE88116749T priority patent/DE3885899D1/en
Priority to JP1262311A priority patent/JP3048583B2/en
Priority to US07/419,194 priority patent/US4978276A/en
Publication of EP0363503A1 publication Critical patent/EP0363503A1/en
Application granted granted Critical
Publication of EP0363503B1 publication Critical patent/EP0363503B1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Definitions

  • the invention relates to a pump stage for a high vacuum pump with a rotor and a stator surrounding it, in which the rotor or the stator is provided with a structure which effects the gas delivery.
  • Turbomolecular pump stages have a relatively low compression (pressure ratio of pressure-side pressure to suction-side pressure), but a relatively high pumping speed (pump speed, volume flow per unit of time).
  • pressure ratio pressure ratio of pressure-side pressure to suction-side pressure
  • pumping speed volume flow per unit of time
  • Molecular pump stages also have a relatively high compression, but their pumping speed is poor.
  • the present invention has for its object to provide a pump stage of the type mentioned with improved pump properties.
  • this object is achieved in that the structure producing the gas production consists of radially extending webs, the pitch and the width of which decrease from the suction side to the pressure side.
  • a pump stage with these features has both better compression and a higher pumping speed than the usual screw pump stages, especially at relatively high pressures on the suction side. It is compact. Only either the stator or the rotor must be equipped with the webs according to the invention, so that their manufacture, assembly and thus also the service work are considerably easier compared to turbomolecular pump stages.
  • the pump stage according to the invention is particularly suitable for being combined with a thread pump stage, but in particular with two thread pump stages.
  • a high-vacuum pump of this type almost achieves the pump properties of a corresponding turbomolecular pump in terms of compression, pumping speed and ultimate pressure.
  • it also has the advantage that it can be used at higher pressures, even in the viscous flow area, so that the effort for generating the pre-vacuum can be reduced.
  • the high vacuum pump according to FIG. 1 has an outer housing 1 with a central bearing bush 2 projecting inwards.
  • the shaft 3 is supported in the bearing bush 2 by means of a spindle bearing 4.
  • the drive motor 5 and the rotor system 6, 7 are coupled to the shaft 3.
  • the one-piece rotor system has two differently designed rotors 6 and 7.
  • Rotor 6 is cylindrical with smooth outer and inner surfaces 8, 9.
  • the housing 1 is equipped on its inside with a thread 10 and thus simultaneously forms the stator of a thread pump stage.
  • the surface 8 and the thread 10 are the pump-active surfaces of this known thread pump stage, which conveys molecules reaching the pump gap 11 in the direction of the outlet 12.
  • the outside of the bearing bushes 2 is provided with a thread 13 and thus forms the stator of a further thread pump stage.
  • the thread 13 and the inner surface 9 are the pump-active surfaces of the further thread pump stage with the pump gap 14.
  • the gases conveyed upward through the pump gap 14 flow through bores 15 in the bearing bush 2 to the outlet 12.
  • the thread pump stage 8, 10 is preceded by a pump stage according to the invention.
  • This has the rotor 7, which consists of a conically shaped hub part 23 and the webs 24. These webs 24, together with the stator wall 25 surrounding them, form a pump stage 7, 25 in the housing 1 , 10 promoted.
  • the webs 24 are provided on the conical hub part 23 and rotate with the rotor system 6, 7.
  • the webs 24 are provided on the stator wall 25.
  • the gap 26 is between the smooth outer surface of the hub part 23 in this case and the inner edges of the webs 24.
  • the width of the gaps 11, 14 and 26 should be as small as possible. In practice, as is known for molecular pump stages, it is a few tenths of a millimeter.
  • FIG. 2 Details of the design of the rotor 7 of the pump stage according to the invention can be seen in FIG. 2.
  • the outer radius r of the rotor 7 is practically identical to the radius of the cylindrical inner stator wall 25 (except for the gap 26).
  • the webs 24 On the suction side, the webs 24 have an inclination or angle of attack ⁇ of approximately 45 °.
  • width b1 corresponds to about a third of the radius r, where r z. B. can be 50 to 60 mm. With these size ratios, the annular area (gas inlet area) defined by the width b 1 of the webs 24 makes up more than 50% of the rotor end face.
  • the webs 24 On the pressure side, the webs 24 have an inclination or a setting angle ⁇ of approximately 15 °. Their width b2 corresponds to about a tenth of the radius r.
  • the pump channels formed by the hub part 23, the webs 24 and the stator wall 15 open into the thread 10 of the subsequent thread pump stage.
  • nineteen webs 24 are evenly distributed over the circumference of the conical hub part 23. They each extend over the angle ⁇ . This angle is expediently of the order of 90 °.

Abstract

Die Erfindung bezieht sich auf eine Pumpenstufe für eine Hochva­kuumpumpe mit einem Rotor (7) und einem Stator (1), bei welcher der Rotor oder der Stator mit einer die Gasförderung bewirkenden Struktur versehen ist; um bei dieser Pumpenstufe verbesserte Pumpeigenschaften zu erzielen, wird vorgeschlagen, daß die die Gasförderung bewirkende Struktur aus radial sich erstreckenden Stegen (24) besteht, deren Steigung und deren Breite von der Saugseite zur Druckseite hin abnehmen.

Figure imgaf001
The invention relates to a pump stage for a high vacuum pump with a rotor (7) and a stator (1), in which the rotor or the stator is provided with a structure which effects gas delivery; In order to achieve improved pump properties in this pump stage, it is proposed that the structure which effects the gas delivery consists of radially extending webs (24), the pitch and the width of which decrease from the suction side to the pressure side.
Figure imgaf001

Description

Die Erfindung bezieht sich auf eine Pumpenstufe für eine Hochva­kuumpumpe mit einem Rotor und einem diesen umgebenden Stator, bei welcher der Rotor oder der Stator mit einer die Gasförderung bewirkenden Struktur versehen ist.The invention relates to a pump stage for a high vacuum pump with a rotor and a stator surrounding it, in which the rotor or the stator is provided with a structure which effects the gas delivery.

Es ist bekannt, bei Hochvakuumpumpen Molekularpumpstufen oder Turbomolekularpumpstufen einzusetzen. Bei Molekularpumpen sind eine sich bewegende Rotorwand und eine ruhende Statorwand so gestaltet und beabstandet, daß die von den Wandungen auf dazwi­schen befindliche Gasmoleküle übertragenen Impulse eine bevor­zugte Richtung haben. In der Regel sind Rotor- oder Statorwand mit spiral- oder wendelförmigen Vertiefungen oder Vorsprüngen zur Erzielung der bevorzugten Förderrichtung ausgerüstet. Bei Turbo­molekularpumpstufen sind nach Art einer Turbine ineinandergrei­fende Stator- und Rotorschaufeln vorgesehen. Die Schaufeln übertragen die gewünschten Impulse auf die zu fördernden Gasmo­leküle, und zwar bevorzugt in Förderrichtung.It is known to use molecular pump stages or turbomolecular pump stages in high vacuum pumps. In the case of molecular pumps, a moving rotor wall and a stationary stator wall are designed and spaced apart in such a way that the pulses transmitted from the walls to gas molecules located between them have a preferred direction. As a rule, the rotor or stator wall are equipped with spiral or helical depressions or projections to achieve the preferred conveying direction. In turbomolecular pump stages, intermeshing stator and rotor blades are provided in the manner of a turbine. The blades transmit the desired impulses to the gas molecules to be conveyed, preferably in the conveying direction.

Turbomolekularpumpstufen haben eine relativ niedrige Kompression (Druckverhältnis von druckseitigem Druck zu saugseitigem Druck), aber ein relativ hohes Saugvermögen (Pumpgeschwindigkeit, Volumen­durchfluß pro Zeiteinheit). Ihre Herstellung und Montage ist jedoch aufwendig und teuer, weil sehr viele Pumpstufen (Rotor­und Statorstufen) benötigt werden, um eine ausreichende Kompres­sion zu erzielen. Molekularpumpstufen haben ebenfalls eine relativ hohe Kompression, ihr Saugvermögen ist jedoch schlecht.Turbomolecular pump stages have a relatively low compression (pressure ratio of pressure-side pressure to suction-side pressure), but a relatively high pumping speed (pump speed, volume flow per unit of time). However, their manufacture and assembly is complex and expensive because a large number of pump stages (rotor and stator stages) are required in order to achieve sufficient compression. Molecular pump stages also have a relatively high compression, but their pumping speed is poor.

Aus der Europäischen Patentanmeldung 142 208 ist es bekannt, das Saugvermögen einer Molekularpumpe dadurch zu verbessern, daß ihr eine gesonderte Pumpstufe saugseitig vorgelagert wird. Diese Pumpstufe umfaßt statorseitig einen wendelförmigen Vorsprung. Dieser Vorsprung ist die Fortsetzung des wendelförmigen Vor­sprunges der Molekularpumpe in Richtung Saugseite. Weiterhin sind dem wendelförmigen Vorsprung rotorseitig Schaufelblätter zuge­ordnet, die sich radial und parallel zur Drehachse des Rotors erstrecken. Eine Pumpenstufe dieser Art ist ebenfalls relativ aufwendig in ihrer Herstellung, da sowohl rotorseitig als auch statorseitig Strukturen vorhanden sein müssen. Außerdem ist die Kompression dieser Pumpenstufen sehr klein.From European patent application 142 208 it is known to improve the pumping speed of a molecular pump in that it is preceded by a separate pump stage on the suction side. This pump stage comprises a helical projection on the stator side. This projection is the continuation of the helical projection of the molecular pump towards the suction side. Furthermore, blades are assigned to the helical projection on the rotor side, which blades extend radially and parallel to the axis of rotation of the rotor. A pump stage of this type is also relatively complex to manufacture, since structures must be present both on the rotor side and on the stator side. In addition, the compression of these pump stages is very small.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine Pumpenstufe der eingangs genannten Art mit verbesserten Pumpei­genschaften zu schaffen.The present invention has for its object to provide a pump stage of the type mentioned with improved pump properties.

Erfindungsgemäß wird diese Aufgabe dadurch gelöst, daß die die Gasförderung bewirkende Struktur aus radial sich erstreckenden Stegen besteht, deren Steigung und deren Breite von der Saugseite zur Druckseite hin abnehmen. Eine Pumpenstufe mit diesen Merk­malen hat im Vergleich zu den üblichen Gewindepumpenstufen sowohl eine bessere Kompression als auch ein höheres Saugvermögen, vor allem bei relativ hohen Drücken auf der Saugseite. Sie ist kompakt. Nur entweder der Stator oder der Rotor müssen mit den erfindungsgemäßen Stegen ausgerüstet sein, so daß ihre Herstel­lung, Montage und damit auch die Service-Arbeiten im Vergleich zu Turbomolekularpumpstufen wesentlich einfacher sind.According to the invention, this object is achieved in that the structure producing the gas production consists of radially extending webs, the pitch and the width of which decrease from the suction side to the pressure side. A pump stage with these features has both better compression and a higher pumping speed than the usual screw pump stages, especially at relatively high pressures on the suction side. It is compact. Only either the stator or the rotor must be equipped with the webs according to the invention, so that their manufacture, assembly and thus also the service work are considerably easier compared to turbomolecular pump stages.

Aufgrund ihrer besonderen Pumpeigenschaften ist die erfindungs­gemäße Pumpstufe besonders geeignet, mit einer Gewindepumpenstufe, insbesondere aber mit zwei Gewindepumpenstufen, kombiniert zu werden. Eine Hochvakuumpumpe dieser Art erreicht bezüglich Kompression, Saugvermögen und Enddruck nahezu die Pumpeigen­schaften einer entsprechenden Turbomolekularpumpe. Darüber hinaus hat sie noch den Vorteil, daß sie zu höheren Drücken hin, bis in den viskosen Strömungsbereich einsetzbar ist, so daß der Aufwand für die Vorvakuumerzeugung reduziert werden kann.Because of its special pump properties, the pump stage according to the invention is particularly suitable for being combined with a thread pump stage, but in particular with two thread pump stages. A high-vacuum pump of this type almost achieves the pump properties of a corresponding turbomolecular pump in terms of compression, pumping speed and ultimate pressure. In addition, it also has the advantage that it can be used at higher pressures, even in the viscous flow area, so that the effort for generating the pre-vacuum can be reduced.

Weitere Vorteile und Einzelheiten der Erfindung sollen anhand der Figuren 1 und 2 erläutert werden. Es zeigen

  • - Figur 1 einen Schnitt durch eine Hochvakuumpumpe mit einer erfindungsgemäß ausgebildeten Pumpstufe, deren Rotor teilweise in Seitenansicht dargestellt ist, und
  • - Figur 2 eine Ansicht des Rotors der erfindungsgemäßen Pumpstufe nach Figur 1.
Further advantages and details of the invention will be explained with reference to FIGS. 1 and 2. Show it
  • - Figure 1 shows a section through a high vacuum pump with a pump stage designed according to the invention, the rotor is partially shown in side view, and
  • - Figure 2 is a view of the rotor of the pump stage according to the invention according to Figure 1.

Die Hochvakuumpumpe nach Figur 1 weist ein äußeres Gehäuse 1 mit einer zentralen, nach innen hineinragenden Lagerbuchse 2 auf. In der Lagerbuchse 2 stützt sich die Welle 3 mittels einer Spindel­lagerung 4 ab. Mit der Welle 3 ist der Antriebsmotor 5 und das Rotorsystem 6, 7 gekoppelt.The high vacuum pump according to FIG. 1 has an outer housing 1 with a central bearing bush 2 projecting inwards. The shaft 3 is supported in the bearing bush 2 by means of a spindle bearing 4. The drive motor 5 and the rotor system 6, 7 are coupled to the shaft 3.

Das einstückige Rotorsystem weist zwei unterschiedlich gestaltete Rotoren 6 und 7 auf. Rotor 6 ist zylindrisch mit glatter äußerer und innerer Oberfläche 8, 9 ausgebildet. Im Bereich der Oberflä­che 8 ist das Gehäuse 1 auf seiner Innenseite mit einem Gewinde 10 ausgerüstet und bildet damit gleichzeitig den Stator einer Gewindepumpenstufe. Die Oberfläche 8 und das Gewinde 10 sind die pumpaktiven Flächen dieser an sich bekannten Gewindepumpenstufe, die in den Pumpspalt 11 gelangende Moleküle in Richtung Auslaß 12 fördert.The one-piece rotor system has two differently designed rotors 6 and 7. Rotor 6 is cylindrical with smooth outer and inner surfaces 8, 9. In the area of the surface 8, the housing 1 is equipped on its inside with a thread 10 and thus simultaneously forms the stator of a thread pump stage. The surface 8 and the thread 10 are the pump-active surfaces of this known thread pump stage, which conveys molecules reaching the pump gap 11 in the direction of the outlet 12.

Im Bereich der inneren Oberfläche 9 des Rotors 6 ist die Außen­seite der Lagerbuchsen 2 mit einem Gewinde 13 versehen und bildet damit den Stator einer weiteren Gewindepumpenstufe. Das Gewinde 13 und die innere Oberfläche 9 sind die pumpaktiven Flächen der weiteren Gewindepumpenstufe mit dem Pumpspalt 14. Die durch den Pumpspalt 14 von unten nach oben geförderten Gase strömen durch Bohrungen 15 in der Lagerbuchse 2 zum Auslaß 12.In the area of the inner surface 9 of the rotor 6, the outside of the bearing bushes 2 is provided with a thread 13 and thus forms the stator of a further thread pump stage. The thread 13 and the inner surface 9 are the pump-active surfaces of the further thread pump stage with the pump gap 14. The gases conveyed upward through the pump gap 14 flow through bores 15 in the bearing bush 2 to the outlet 12.

Der Gewindepumpenstufe 8, 10 ist eine Pumpstufe nach der Erfin­dung vorgelagert. Diese weist den Rotor 7 auf, der aus einem konisch geformten Nabenteil 23 und den Stegen 24 besteht. Diese Stege 24 bilden mit der sie umgebenden Statorwand 25 im Gehäuse 1 eine Pumpstufe 7, 25. Gasmoleküle, die zwischen die einzelnen Stege 24 oder in den Spalt 26 gelangen, werden von der erfindungs­gemäßen Pumpenstufe 24, 25 in Richtung des Pumpspaltes 11 der Molekularpumpstufe 6, 10 gefördert.The thread pump stage 8, 10 is preceded by a pump stage according to the invention. This has the rotor 7, which consists of a conically shaped hub part 23 and the webs 24. These webs 24, together with the stator wall 25 surrounding them, form a pump stage 7, 25 in the housing 1 , 10 promoted.

Beim dargestellten Ausführungsbeispiel sind die Stege 24 auf dem konischen Nabenteil 23 vorgesehen und rotieren mit dem Rotorsy­stem 6, 7. Es besteht auch die Möglichkeit, daß die Stege 24 an der Statorwand 25 vorgesehen sind. Bei einer derartigen Ausbil­dung befindet sich der Spalt 26 zwischen der in diesem Falle glatten äußeren Oberfläche des Nabenteils 23 und den Innenkanten der Stege 24. Die Breite der Spalte 11 14 und 26 soll möglichst klein sein. Sie beträgt - wie bei Molekularpumpstufen bekannt - in der Praxis wenige Zehntel Millimeter.In the illustrated embodiment, the webs 24 are provided on the conical hub part 23 and rotate with the rotor system 6, 7. There is also the possibility that the webs 24 are provided on the stator wall 25. With such a design, the gap 26 is between the smooth outer surface of the hub part 23 in this case and the inner edges of the webs 24. The width of the gaps 11, 14 and 26 should be as small as possible. In practice, as is known for molecular pump stages, it is a few tenths of a millimeter.

Einzelheiten der Gestaltung des Rotors 7 der erfindungsgemäßen Pumpstufe sind der Figur 2 entnehmbar. Der äußere Radius r des Rotors 7 ist praktisch identisch mit dem Radius der zylindrischen Statorinnenwand 25 (bis auf den Spalt 26). Saugseitig haben die Stege 24 eine Neigung bzw. einen Anstellwinkel α von ca. 45°.Details of the design of the rotor 7 of the pump stage according to the invention can be seen in FIG. 2. The outer radius r of the rotor 7 is practically identical to the radius of the cylindrical inner stator wall 25 (except for the gap 26). On the suction side, the webs 24 have an inclination or angle of attack α of approximately 45 °.

Ihre Breite b₁ entspricht etwa einem Drittel des Radius r, wobei r z. B. 50 bis 60 mm betragen kann. Bei diesen Größenverhältnis­sen macht die durch die Breite b₁ der Stege 24 definierte Ring­fläche (Gaseintrittsfläche) mehr als 50% der Rotorstirnseite aus.Their width b₁ corresponds to about a third of the radius r, where r z. B. can be 50 to 60 mm. With these size ratios, the annular area (gas inlet area) defined by the width b 1 of the webs 24 makes up more than 50% of the rotor end face.

Druckseitig haben die Stege 24 eine Neigung bzw. einen Anstell­winkel β von ca. 15°. Ihre Breite b₂ entspricht etwa einem Zehntel des Radius r. Die vom Nabenteil 23, den Stegen 24 und der Statorwand 15 gebildeten Pumpkanäle münden in das Gewinde 10 der nachfolgenden Gewindepumpenstufe.On the pressure side, the webs 24 have an inclination or a setting angle β of approximately 15 °. Their width b₂ corresponds to about a tenth of the radius r. The pump channels formed by the hub part 23, the webs 24 and the stator wall 15 open into the thread 10 of the subsequent thread pump stage.

Beim dargestellten Ausführungsbeispiel sind neunzehn Stege 24 gleichmäßig über den Umfang des konischen Nabenteils 23 verteilt. Sie erstrecken sich jeweils über den Winkel α. Dieser Winkel liegt zweckmäßig in der Größenordnung von 90°.In the illustrated embodiment, nineteen webs 24 are evenly distributed over the circumference of the conical hub part 23. They each extend over the angle α. This angle is expediently of the order of 90 °.

Claims (10)

1. Pumpenstufe für eine Hochvakuumpumpe mit einem Rotor (7) und einem Stator (1), bei welcher der Rotor oder der Stator mit einer die Gasförderung bewirkenden Struktur versehen ist, dadurch gekennzeichnet, daß die Struktur aus radial sich erstreckenden Stegen (24) besteht, deren Steigung und deren Breite von der Saugseite zur Druckseite hin abnehmen.1. Pump stage for a high vacuum pump with a rotor (7) and a stator (1), in which the rotor or the stator is provided with a gas- producing structure , characterized in that the structure consists of radially extending webs (24) , their slope and their width decrease from the suction side to the pressure side. 2. Pumpenstufe nach Anspruch 1, dadurch gekennzeichnet, daß das Verhältnis des Radius r der inneren Oberfläche der Stator­wandung (25) zur Stegbreite b₁ auf der Saugseite des Rotors (7) 2:1 bis 5:1, vorzugsweise 3:1 beträgt.2. Pump stage according to claim 1, characterized in that the ratio of the radius r of the inner surface of the stator wall (25) to the web width b₁ on the suction side of the rotor (7) is 2: 1 to 5: 1, preferably 3: 1. 3. Pumpenstufe nach Anspruch 2, dadurch gekennzeichnet, daß das Verhältnis des Radius r der inneren Oberfläche der Stator­wandung (25) zur Stegbreite b₂ auf der Druckseite des Rotors (7) 10:1 bis 12:1 beträgt.3. Pump stage according to claim 2, characterized in that the ratio of the radius r of the inner surface of the stator wall (25) to the web width b₂ on the pressure side of the rotor (7) is 10: 1 to 12: 1. 4. Pumpstufe nach Anspruch 1, 2 oder 3, dadurch gekennzeichnet, daß die Steigung der Stege (24) von der Saugseite zur Druckseite von 40° bis 50°, vorzugsweise 45°, auf 10° bis 20°, vorzugsweise 15°, abnimmt.4. Pump stage according to claim 1, 2 or 3, characterized in that the slope of the webs (24) from the suction side to the pressure side decreases from 40 ° to 50 °, preferably 45 °, to 10 ° to 20 °, preferably 15 ° . 5. Pumpstufe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß sich die Stege (24) über etwa 90°des Umfanges des Rotors (7) erstrecken.5. Pump stage according to one of the preceding claims, characterized in that the webs (24) extend over approximately 90 ° of the circumference of the rotor (7). 6. Pumpenstufe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, daß zehn bis zwanzig parallel geführte Stege (24) auf dem Umfang gleichmäßig verteilt angeordnet sind.6. Pump stage according to one of the preceding claims, characterized in that ten to twenty parallel webs (24) are arranged distributed uniformly on the circumference. 7. Pumpenstufe nach einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, daß sie mit einer Gewindepumpenstufe (8, 10) kombiniert ist und daß die Rotoren (6, 7) der Pumpenstufe (24, 25) und der Gewindepumpenstufe (8, 10) gemeinsam auf einer Welle (3) angeordnet sind.7. Pump stage according to one of claims 1 to 4, characterized in that it is combined with a threaded pump stage (8, 10) and that the rotors (6, 7) of the pump stage (24, 25) and the threaded pump stage (8, 10) are arranged together on a shaft (3). 8. Pumpenstufe nach Anspruch 7, dadurch gekennzeichnet, daß sich die Welle (3) in einer Lagerbuchse (2) abstützt, daß der Rotor (6) die Form eines Hohlzylinders hat, daß die Außenseite des Rotors (6) mit dem Stator bzw. Gehäuse (1) eine erste Gewindepumpenstufe (8, 10) mit dem Pumpspalt (11) bildet und daß die Innenseite des Rotors (6) mit der Außen­seite der Lagerbuchse (2) eine weitere Gewindestufe (9, 13) mit dem Pumpspalt (14) bildet.8. Pump stage according to claim 7, characterized in that the shaft (3) is supported in a bearing bush (2), that the rotor (6) has the shape of a hollow cylinder, that the outside of the rotor (6) with the stator or Housing (1) forms a first thread pump stage (8, 10) with the pump gap (11) and that the inside of the rotor (6) with the outside of the bearing bush (2) forms a further thread stage (9, 13) with the pump gap (14) forms. 9. Pumpenstufe nach Anspruch 8, dadurch gekennzeichnet, daß sich der Pumpspalt (14) über Bohrungen (15) in der Lager­buchse (2) mit dem Auslaß (12) verbunden ist.9. Pump stage according to claim 8, characterized in that the pump gap (14) via bores (15) in the bearing bush (2) is connected to the outlet (12). 10. Pumpenstufe nach Anspruch 7, 8 oder 9, dadurch gekennzeich­net, daß der Rotor (6, 7) einstückig ausgebildet ist und daß die die Gasförderung bewirkende Struktur der Pumpenstufe (24, 25) rotorseitig und der Gewindepumpenstufe(n) stator­seitig angeordnet sind.10. Pump stage according to claim 7, 8 or 9, characterized in that the rotor (6, 7) is integrally formed and that the structure of the pump stage (24, 25) causing the gas delivery are arranged on the rotor side and the threaded pump stage (s) on the stator side.
EP88116749A 1988-10-10 1988-10-10 Pump stage for a high vacuum pump Expired - Lifetime EP0363503B1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP88116749A EP0363503B1 (en) 1988-10-10 1988-10-10 Pump stage for a high vacuum pump
DE88116749T DE3885899D1 (en) 1988-10-10 1988-10-10 Pump stage for a high vacuum pump.
JP1262311A JP3048583B2 (en) 1988-10-10 1989-10-09 Pump stage for high vacuum pump
US07/419,194 US4978276A (en) 1988-10-10 1989-10-10 Pump stage for a high-vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP88116749A EP0363503B1 (en) 1988-10-10 1988-10-10 Pump stage for a high vacuum pump

Publications (2)

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EP0363503A1 true EP0363503A1 (en) 1990-04-18
EP0363503B1 EP0363503B1 (en) 1993-11-24

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EP88116749A Expired - Lifetime EP0363503B1 (en) 1988-10-10 1988-10-10 Pump stage for a high vacuum pump

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US (1) US4978276A (en)
EP (1) EP0363503B1 (en)
JP (1) JP3048583B2 (en)
DE (1) DE3885899D1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993023672A1 (en) * 1992-05-16 1993-11-25 Leybold Aktiengesellschaft Gas friction vacuum pump
WO2000000746A1 (en) * 1998-06-30 2000-01-06 Ebara Corporation Turbo-molecular pump
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WO2000000746A1 (en) * 1998-06-30 2000-01-06 Ebara Corporation Turbo-molecular pump
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JP3048583B2 (en) 2000-06-05
US4978276A (en) 1990-12-18
EP0363503B1 (en) 1993-11-24
JPH02149798A (en) 1990-06-08
DE3885899D1 (en) 1994-01-05

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