EP0363503A1 - Etage de pompage pour une pompe à vide élevé - Google Patents

Etage de pompage pour une pompe à vide élevé Download PDF

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Publication number
EP0363503A1
EP0363503A1 EP88116749A EP88116749A EP0363503A1 EP 0363503 A1 EP0363503 A1 EP 0363503A1 EP 88116749 A EP88116749 A EP 88116749A EP 88116749 A EP88116749 A EP 88116749A EP 0363503 A1 EP0363503 A1 EP 0363503A1
Authority
EP
European Patent Office
Prior art keywords
pump
pump stage
rotor
stator
stage according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP88116749A
Other languages
German (de)
English (en)
Other versions
EP0363503B1 (fr
Inventor
Hans-Peter Dr. Kabelitz
Winfried Kaiser
Hans-Günter Dr. Stüber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to EP88116749A priority Critical patent/EP0363503B1/fr
Priority to DE88116749T priority patent/DE3885899D1/de
Priority to JP1262311A priority patent/JP3048583B2/ja
Priority to US07/419,194 priority patent/US4978276A/en
Publication of EP0363503A1 publication Critical patent/EP0363503A1/fr
Application granted granted Critical
Publication of EP0363503B1 publication Critical patent/EP0363503B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Definitions

  • the invention relates to a pump stage for a high vacuum pump with a rotor and a stator surrounding it, in which the rotor or the stator is provided with a structure which effects the gas delivery.
  • Turbomolecular pump stages have a relatively low compression (pressure ratio of pressure-side pressure to suction-side pressure), but a relatively high pumping speed (pump speed, volume flow per unit of time).
  • pressure ratio pressure ratio of pressure-side pressure to suction-side pressure
  • pumping speed volume flow per unit of time
  • Molecular pump stages also have a relatively high compression, but their pumping speed is poor.
  • the present invention has for its object to provide a pump stage of the type mentioned with improved pump properties.
  • this object is achieved in that the structure producing the gas production consists of radially extending webs, the pitch and the width of which decrease from the suction side to the pressure side.
  • a pump stage with these features has both better compression and a higher pumping speed than the usual screw pump stages, especially at relatively high pressures on the suction side. It is compact. Only either the stator or the rotor must be equipped with the webs according to the invention, so that their manufacture, assembly and thus also the service work are considerably easier compared to turbomolecular pump stages.
  • the pump stage according to the invention is particularly suitable for being combined with a thread pump stage, but in particular with two thread pump stages.
  • a high-vacuum pump of this type almost achieves the pump properties of a corresponding turbomolecular pump in terms of compression, pumping speed and ultimate pressure.
  • it also has the advantage that it can be used at higher pressures, even in the viscous flow area, so that the effort for generating the pre-vacuum can be reduced.
  • the high vacuum pump according to FIG. 1 has an outer housing 1 with a central bearing bush 2 projecting inwards.
  • the shaft 3 is supported in the bearing bush 2 by means of a spindle bearing 4.
  • the drive motor 5 and the rotor system 6, 7 are coupled to the shaft 3.
  • the one-piece rotor system has two differently designed rotors 6 and 7.
  • Rotor 6 is cylindrical with smooth outer and inner surfaces 8, 9.
  • the housing 1 is equipped on its inside with a thread 10 and thus simultaneously forms the stator of a thread pump stage.
  • the surface 8 and the thread 10 are the pump-active surfaces of this known thread pump stage, which conveys molecules reaching the pump gap 11 in the direction of the outlet 12.
  • the outside of the bearing bushes 2 is provided with a thread 13 and thus forms the stator of a further thread pump stage.
  • the thread 13 and the inner surface 9 are the pump-active surfaces of the further thread pump stage with the pump gap 14.
  • the gases conveyed upward through the pump gap 14 flow through bores 15 in the bearing bush 2 to the outlet 12.
  • the thread pump stage 8, 10 is preceded by a pump stage according to the invention.
  • This has the rotor 7, which consists of a conically shaped hub part 23 and the webs 24. These webs 24, together with the stator wall 25 surrounding them, form a pump stage 7, 25 in the housing 1 , 10 promoted.
  • the webs 24 are provided on the conical hub part 23 and rotate with the rotor system 6, 7.
  • the webs 24 are provided on the stator wall 25.
  • the gap 26 is between the smooth outer surface of the hub part 23 in this case and the inner edges of the webs 24.
  • the width of the gaps 11, 14 and 26 should be as small as possible. In practice, as is known for molecular pump stages, it is a few tenths of a millimeter.
  • FIG. 2 Details of the design of the rotor 7 of the pump stage according to the invention can be seen in FIG. 2.
  • the outer radius r of the rotor 7 is practically identical to the radius of the cylindrical inner stator wall 25 (except for the gap 26).
  • the webs 24 On the suction side, the webs 24 have an inclination or angle of attack ⁇ of approximately 45 °.
  • width b1 corresponds to about a third of the radius r, where r z. B. can be 50 to 60 mm. With these size ratios, the annular area (gas inlet area) defined by the width b 1 of the webs 24 makes up more than 50% of the rotor end face.
  • the webs 24 On the pressure side, the webs 24 have an inclination or a setting angle ⁇ of approximately 15 °. Their width b2 corresponds to about a tenth of the radius r.
  • the pump channels formed by the hub part 23, the webs 24 and the stator wall 15 open into the thread 10 of the subsequent thread pump stage.
  • nineteen webs 24 are evenly distributed over the circumference of the conical hub part 23. They each extend over the angle ⁇ . This angle is expediently of the order of 90 °.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP88116749A 1988-10-10 1988-10-10 Etage de pompage pour une pompe à vide élevé Expired - Lifetime EP0363503B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP88116749A EP0363503B1 (fr) 1988-10-10 1988-10-10 Etage de pompage pour une pompe à vide élevé
DE88116749T DE3885899D1 (de) 1988-10-10 1988-10-10 Pumpenstufe für eine Hochvakuumpumpe.
JP1262311A JP3048583B2 (ja) 1988-10-10 1989-10-09 高真空ポンプ用のポンプ段
US07/419,194 US4978276A (en) 1988-10-10 1989-10-10 Pump stage for a high-vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP88116749A EP0363503B1 (fr) 1988-10-10 1988-10-10 Etage de pompage pour une pompe à vide élevé

Publications (2)

Publication Number Publication Date
EP0363503A1 true EP0363503A1 (fr) 1990-04-18
EP0363503B1 EP0363503B1 (fr) 1993-11-24

Family

ID=8199438

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88116749A Expired - Lifetime EP0363503B1 (fr) 1988-10-10 1988-10-10 Etage de pompage pour une pompe à vide élevé

Country Status (4)

Country Link
US (1) US4978276A (fr)
EP (1) EP0363503B1 (fr)
JP (1) JP3048583B2 (fr)
DE (1) DE3885899D1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993023672A1 (fr) * 1992-05-16 1993-11-25 Leybold Aktiengesellschaft Pompe a friction a vide a gaz
WO2000000746A1 (fr) * 1998-06-30 2000-01-06 Ebara Corporation Pompe turbomoleculaire
DE10224604A1 (de) * 2002-06-04 2003-12-18 Leybold Vakuum Gmbh Evakuierungseinrichtung

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0692799B2 (ja) * 1989-11-24 1994-11-16 ダイキン工業株式会社 真空ポンプ
JPH03166251A (ja) * 1989-11-24 1991-07-18 Sekisui Chem Co Ltd 繊維強化塩素含有樹脂組成物、該組成物を用いた成形体及びその製造方法
GB9927493D0 (en) * 1999-11-19 2000-01-19 Boc Group Plc Improved vacuum pumps
DE10008691B4 (de) * 2000-02-24 2017-10-26 Pfeiffer Vacuum Gmbh Gasreibungspumpe
JP2002138987A (ja) 2000-10-31 2002-05-17 Seiko Instruments Inc 真空ポンプ
US6503050B2 (en) * 2000-12-18 2003-01-07 Applied Materials Inc. Turbo-molecular pump having enhanced pumping capacity
US6790016B2 (en) * 2002-02-04 2004-09-14 Ching-Yuan Chiang Motor and its blade unit
JP4141199B2 (ja) * 2002-08-13 2008-08-27 株式会社大阪真空機器製作所 分子ポンプのシール構造
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
GB0424199D0 (en) * 2004-11-01 2004-12-01 Boc Group Plc Vacuum pump
GB0503946D0 (en) 2005-02-25 2005-04-06 Boc Group Plc Vacuum pump

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR887499A (fr) * 1941-11-04 1943-11-15 Brown Pompe moléculaire
EP0142208A1 (fr) * 1983-11-16 1985-05-22 Ultra-Centrifuge Nederland N.V. Pompe moléculaire à vide élevé
FR2611818A1 (fr) * 1987-02-26 1988-09-09 Cit Alcatel Pompe rotative a vide moleculaire du type a canal de gaede

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US109926A (en) * 1870-12-06 Improvement in turbine water-wheels
US2941780A (en) * 1954-06-17 1960-06-21 Garrett Corp Elastic fluid turbine and compressor wheels
US3697190A (en) 1970-11-03 1972-10-10 Walter D Haentjens Truncated conical drag pump
FR2446934A1 (fr) * 1979-01-19 1980-08-14 Cit Alcatel Pompe rotative a vide eleve
JPS61145394A (ja) * 1984-12-18 1986-07-03 Tokuda Seisakusho Ltd 分子ポンプ
JPS61226597A (ja) * 1985-03-30 1986-10-08 Shimadzu Corp タ−ボ分子ポンプ用ロ−タ
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR887499A (fr) * 1941-11-04 1943-11-15 Brown Pompe moléculaire
EP0142208A1 (fr) * 1983-11-16 1985-05-22 Ultra-Centrifuge Nederland N.V. Pompe moléculaire à vide élevé
FR2611818A1 (fr) * 1987-02-26 1988-09-09 Cit Alcatel Pompe rotative a vide moleculaire du type a canal de gaede

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1993023672A1 (fr) * 1992-05-16 1993-11-25 Leybold Aktiengesellschaft Pompe a friction a vide a gaz
US5553998A (en) * 1992-05-16 1996-09-10 Leybold Ag Gas friction vacuum pump having at least three differently configured pump stages releasably connected together
WO2000000746A1 (fr) * 1998-06-30 2000-01-06 Ebara Corporation Pompe turbomoleculaire
DE10224604A1 (de) * 2002-06-04 2003-12-18 Leybold Vakuum Gmbh Evakuierungseinrichtung
US7264439B2 (en) 2002-06-04 2007-09-04 Oerlikon Leybold Vacuum Gmbh Evacuating device
CN100422565C (zh) * 2002-06-04 2008-10-01 奥林肯莱博尔德真空技术有限责任公司 抽真空装置
DE10224604B4 (de) * 2002-06-04 2014-01-30 Oerlikon Leybold Vacuum Gmbh Evakuierungseinrichtung

Also Published As

Publication number Publication date
JPH02149798A (ja) 1990-06-08
JP3048583B2 (ja) 2000-06-05
EP0363503B1 (fr) 1993-11-24
US4978276A (en) 1990-12-18
DE3885899D1 (de) 1994-01-05

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