EP1243796B1 - Vacuum pump - Google Patents
Vacuum pump Download PDFInfo
- Publication number
- EP1243796B1 EP1243796B1 EP02005166A EP02005166A EP1243796B1 EP 1243796 B1 EP1243796 B1 EP 1243796B1 EP 02005166 A EP02005166 A EP 02005166A EP 02005166 A EP02005166 A EP 02005166A EP 1243796 B1 EP1243796 B1 EP 1243796B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- pump
- gas
- vacuum pump
- connected downstream
- side channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/263—Rotors specially for elastic fluids mounting fan or blower rotors on shafts
Definitions
- the invention relates to a vacuum pump for conveying gases and for generating high vacuum according to the preamble of the first claim.
- At least two vacuum pumps of different design and operation have been assembled to form a pumping station to produce high vacuum.
- Pumping stations, consisting of at least two vacuum pumps, which are necessary to achieve the required vacuum technical parameters, such as pressure ratio and pumping speed, have the disadvantage that they are expensive and have a large footprint.
- Each pump requires its own drive system with power supply, monitoring and control and its own storage system. Connecting lines between the pumps with valves and control devices increase the effort.
- EP-A-1 067 290 shows a generic vacuum pump which compresses to atmospheric pressure and consists of two single or multi-stage gas friction pumps.
- US Pat. No. 4,090,815 shows a combined vacuum pump comprising a plurality of pump stages which operate on the Siegbahn, Holweck and rotary valve principle. All pump stages are arranged serially one behind the other. An overflow valve is not shown.
- US-A-5 040 949 shows a screw vacuum pump with a serial gas flow which is compressed by intermeshing rotors.
- the compressed gas is recompressed by a simple screw structure, which can be completely bypassed by a bypass with an overflow valve.
- US-A-3 536 418 shows a pumping station constructed of several individual vacuum pumps. An overflow valve is not shown.
- DE 34 42 843 A shows a double-flow vacuum pump, wherein in each of the parallel flow paths a plurality of pumps with different operating principle are combined in such a way that higher outlet pressures are achieved. An overflow valve completely bypasses the last pump before reaching atmospheric pressure.
- the invention has for its object to develop a vacuum pump, which comprises the entire pressure range from atmospheric pressure to high vacuum pressure of about 10 -4 mbar and less.
- the pump should consist of one piece and have a compact construction, so that the disadvantages described above, which adhere to pumping stations consisting of several pumps, are avoided. Furthermore, they should have a sufficiently high pressure ratio and pumping speed to meet the requirements in practical use.
- a reliable one and safe operation is one of the basic requirements.
- Another aim is a lubricant-free operation on the high vacuum side.
- a vacuum pump which covers the entire pressure range from atmospheric pressure to the high-vacuum range in a compact design. Due to the parallel arrangement of the gas friction pumps on the high-vacuum side, a double-flow suction area is formed, which allows a high pumping speed. Within the gas friction pump, the sucked gas is sufficiently compressed, so that the subsequent pump only needs to be single-flow. This combination, together with the feature that the two gas flows of the gas friction pump are combined within this and fed to the suction chamber of the subsequent stage, allows the compact design and reduces the size and design complexity considerably.
- the present arrangement makes it possible to mount the shaft bearings at both ends of the rotor, results in a stable storage, can be used in the bearings with a small diameter, which allow easy operation at high speeds.
- the bearings are separated by the gas friction pump from the high vacuum side, which has the advantage that the high vacuum side can be considered as lubricant-free.
- the structural arrangement and the mode of operation offer to train the gas friction pump as Holweckpumpe. This is particularly suitable for forming a maximum pressure ratio in a confined space. Due to the double-flow arrangement, the required pumping speed is achieved.
- a side channel pump is used. This is particularly suitable for compressing the gas ejected from the parallel gas friction pumps to atmospheric pressure.
- an intermediate stage be connected directly to the Gasausdorfflansch via a connecting line.
- the large quantities of gas then do not have to be pumped through the geometrically smaller end stages, which would result in long pumping times.
- the connecting line is closed by a pressure relief valve and the compression to atmospheric pressure via the last pump stages.
- a major advantage for the side channel pump is that its stator elements consist of undivided disks, as mentioned in claim 5.
- the usual design, in which split disks are mounted between the rotor disks, has the consequence that the resulting column backflows are possible, which represent losses and significantly reduce the pressure ratio.
- This crucial disadvantage of side channel pumps is avoided by the one-piece stator discs according to the invention.
- the use of undivided stator elements is only possible if the rotor elements, as described in claim 6, are fastened with clamping rings on the rotor, because only then rotor and stator elements can be mounted successively and optimal axial play can be maintained.
- the gas friction pump is designed as Holweckpumpe and the subsequent pump as a side channel pump.
- the two parallel stages of the gas friction pump according to the design of Holweck 6 and 7 and the side channel pump 8 are housed.
- the rotor elements 10, 11a, 11b and 13 of the two pumps are located on the common shaft 4. This is centered in the two bearings 9a and 9b. In this case, the bearing 9a is in the range of the atmospheric pressure and the bearing 9b in the region of the fore-vacuum pressure. In this area, there is also the drive assembly 5.
- the rotor elements of the double-flow Holweckpumpe consist of a support ring 10, on which cylindrical Components 11a and 11b are housed for the two parallel pumping stages. Together with the stator elements 12a and 12b, which are formed as spiral grooves surrounding the cylindrical rotor elements 11a and 11b, they each form two two-stage Holweckpumpen.
- the side channel pump consists of the one-piece rotor discs 13, which are fastened with clamping rings 14 on the rotor 4. In between, there are the stator components 15 with the delivery channels 16.
- the gas is conveyed according to the arrows in the figure.
- the gas is supplied from the suction portion 22 through the parallel pumping Holweckmakern 6 and 7, which consist of two series-connected pumping stages 11a / 12a and 11b / 12b, in the discharge regions 23 and 24.
- the gas streams are merged into the discharge space 25 of the gas friction pump.
- the gas flow from the discharge space 25 into the suction chamber 27 of the side channel pump.
- the gas in several pumping stages, which are connected to each other via channels 20, compressed to atmospheric pressure and fed via the discharge chamber 29 the Gasaussorbflansch 3.
- a connecting line 30 leads via a pressure relief valve 31 directly to the gas discharge flange 3.
Description
Die Erfindung betrifft eine Vakuumpumpe zur Förderung von Gasen und zur Erzeugung von Hochvakuum nach dem Oberbegriff des 1. Patentanspruches.The invention relates to a vacuum pump for conveying gases and for generating high vacuum according to the preamble of the first claim.
Zur Erzeugung von Hochvakuum sind Kombinationen von verschiedenen Typen von Vakuumpumpen notwendig, da der weite Druckbereich zwischen Atmosphärendruck und ca. 101-4 mbar oder kleiner mehrere Strömungsbereiche umfaßt, in denen die physikalischen Eigenschaften von Zuständen und Strömungen der Gase jeweils anderen Gesetzen unterworfen sind.To create high vacuum, combinations of different types of vacuum pumps are necessary because the wide pressure range between atmospheric pressure and about 101 -4 mbar or less includes multiple flow ranges in which the physical properties of states and flows of the gases are subject to different laws.
Seither wurden zur Erzeugung von Hochvakuum mindestens zwei Vakuumpumpen unterschiedlicher Bauart und Arbeitsweise zu einem Pumpstand zusammengefügt. Bewährt haben sich zum Beispiel Pumpstände, bestehend aus einer Turbomolekularpumpe als Hochvakuumpumpe und einer Drehschieberpumpe, welche gegen Atmosphärendruck ausstößt. Pumpstände, bestehend aus mindestens zwei Vakuumpumpen, welche zum Erzielen der geforderten vakuumtechnischen Größen, wie Druckverhältnis und Saugvermögen, notwendig sind, weisen den Nachteil auf, dass sie aufwendig sind und einen großen Platzbedarf haben. Jede Pumpe erfordert ein eigenes Antriebssystem mit Stromversorgung, -überwachung und -regelung sowie ein eigenes Lagersystem. Verbindungsleitungen zwischen den Pumpen mit Ventilen und Regeleinrichtungen vergrößern den Aufwand.Since then, at least two vacuum pumps of different design and operation have been assembled to form a pumping station to produce high vacuum. Proved, for example, pumping stations, consisting of a turbomolecular pump as a high vacuum pump and a rotary vane pump, which expels against atmospheric pressure. Pumping stations, consisting of at least two vacuum pumps, which are necessary to achieve the required vacuum technical parameters, such as pressure ratio and pumping speed, have the disadvantage that they are expensive and have a large footprint. Each pump requires its own drive system with power supply, monitoring and control and its own storage system. Connecting lines between the pumps with valves and control devices increase the effort.
Die EP-A-1 067 290 zeigt eine gattungsgemäße Vakuumpumpe, die bis zu Atmosphärendruck verdichtet und aus zwei ein- oder mehrstufigen Gasreibungspumpen besteht.EP-A-1 067 290 shows a generic vacuum pump which compresses to atmospheric pressure and consists of two single or multi-stage gas friction pumps.
Die US-A 4 090 815 zeigt eine kombinierte Vakuumpumpe aus mehreren Pumpstufen, die nach Siegbahn-, Holweck- und Drehschieberprinzip arbeiten. Alle Pumpstufen sind seriell hintereinander angeordnet. Ein Überströmventil ist nicht gezeigt.US Pat. No. 4,090,815 shows a combined vacuum pump comprising a plurality of pump stages which operate on the Siegbahn, Holweck and rotary valve principle. All pump stages are arranged serially one behind the other. An overflow valve is not shown.
Die US-A-5 040 949 zeigt eine Schraubenvakuumpumpe mit einem seriellen Gasstrom, der von ineinandergreifenden Rotoren verdichtet wird. Das verdichtete Gas wird von einer einfachen Schraubenstruktur nachverdichtet, welche durch einen Bypass mit einem Überströmventil vollständig überbrückt werden kann.US-A-5 040 949 shows a screw vacuum pump with a serial gas flow which is compressed by intermeshing rotors. The compressed gas is recompressed by a simple screw structure, which can be completely bypassed by a bypass with an overflow valve.
Die US-A-3 536 418 zeigt einen Pumpstand, der aus mehreren einzelnen Vakuumpumpen aufgebaut ist. Ein Überströmventil ist nicht gezeigt.US-A-3 536 418 shows a pumping station constructed of several individual vacuum pumps. An overflow valve is not shown.
Die DE 34 42 843 A zeigt eine zweiflutige Vakuumpumpe, wobei in jedem der parallelen Strömungspfade mehrere Pumpen mit unterschiedlichem Wirkprinzip derart kombiniert sind, dass höhere Auslassdrücke erreicht werden. Ein Überströmventil überbrückt vollständig die letzte Pumpe vor Erreichen des Atmosphärendrucks.DE 34 42 843 A shows a double-flow vacuum pump, wherein in each of the parallel flow paths a plurality of pumps with different operating principle are combined in such a way that higher outlet pressures are achieved. An overflow valve completely bypasses the last pump before reaching atmospheric pressure.
Der Erfindung liegt die Aufgabe zugrunde, eine Vakuumpumpe zu entwickeln, welche den gesamten Druckbereich von Atmosphärendruck bis Hochvakuumdruck von ca. 10-4 mbar und kleiner umfaßt. Die Pumpe soll aus einem Stück bestehen und einen kompakten Aufbau aufweisen, so dass die oben beschriebenen Nachteile, welche Pumpständen anhaften, die aus mehreren Pumpen bestehen, vermieden werden. Weiterhin soll sie ein ausreichend hohes Druckverhältnis und Saugvermögen aufweisen, um den Anforderungen im praktischen Einsatz gerecht zu werden. Eine zuverlässige und sichere Betriebsweise ist eine der Grundvoraussetzungen. Als weiteres Ziel wird ein schmiermittelfreier Betrieb auf der Hochvakuumseite angestrebt.The invention has for its object to develop a vacuum pump, which comprises the entire pressure range from atmospheric pressure to high vacuum pressure of about 10 -4 mbar and less. The pump should consist of one piece and have a compact construction, so that the disadvantages described above, which adhere to pumping stations consisting of several pumps, are avoided. Furthermore, they should have a sufficiently high pressure ratio and pumping speed to meet the requirements in practical use. A reliable one and safe operation is one of the basic requirements. Another aim is a lubricant-free operation on the high vacuum side.
Die Aufgabe wird durch die kennzeichnenden Merkmale des 1. Patentanspruches gelöst. Die Ansprüche 2 - 9 stellen weitere Ausgestaltungsformen der Erfindung dar.The object is solved by the characterizing features of the first claim. The claims 2 - 9 represent further embodiments of the invention.
Mit der erfindungsgemäßen Anordnung wird eine Vakuumpumpe vorgestellt, die in kompakter Bauweise den gesamten Druckbereich von Atmosphärendruck bis in den Hochvakuumbereich abdeckt. Durch die parallele Anordnung der Gasreibungspumpen auf der Hochvakuumseite wird ein zweiflutiger Ansaugbereich gebildet, der ein hohes Saugvermögen ermöglicht. Innerhalb der Gasreibungspumpe wird das angesaugte Gas ausreichend verdichtet, so dass die nachfolgende Pumpe nur noch einflutig zu sein braucht. Diese Kombination zusammen mit dem Merkmal, dass die beiden Gasströme der Gasreibungspumpe innerhalb dieser zusammengeführt und dem Ansaugraum der nachfolgenden Stufe zugeführt werden, ermöglicht die kompakte Bauweise und reduziert die Baugröße und den konstruktiven Aufwand erheblich. Dadurch, dass die vorliegende Anordnung es ermöglicht, die Wellenlager an beiden Enden des Rotors anzubringen, ergibt sich eine stabile Lagerung, bei der Lager mit geringem Durchmesser eingesetzt werden können, welche einen problemlosen Betrieb bei hohen Drehzahlen erlauben. Außerdem sind die Lager durch die Gasreibungspumpe von der Hochvakuumseite getrennt, was den Vorteil mit sich bringt, dass die Hochvakuumseite als schmiermittelfrei angesehen werden kann.With the arrangement according to the invention, a vacuum pump is presented, which covers the entire pressure range from atmospheric pressure to the high-vacuum range in a compact design. Due to the parallel arrangement of the gas friction pumps on the high-vacuum side, a double-flow suction area is formed, which allows a high pumping speed. Within the gas friction pump, the sucked gas is sufficiently compressed, so that the subsequent pump only needs to be single-flow. This combination, together with the feature that the two gas flows of the gas friction pump are combined within this and fed to the suction chamber of the subsequent stage, allows the compact design and reduces the size and design complexity considerably. The fact that the present arrangement makes it possible to mount the shaft bearings at both ends of the rotor, results in a stable storage, can be used in the bearings with a small diameter, which allow easy operation at high speeds. In addition, the bearings are separated by the gas friction pump from the high vacuum side, which has the advantage that the high vacuum side can be considered as lubricant-free.
Die bauliche Anordnung und die Betriebsweise bieten an, die Gasreibungspumpe als Holweckpumpe auszubilden. Diese eignet sich besonders dazu, auf engem Raum ein maximales Druckverhältnis auszubilden. Durch die zweiflutige Anordnung wird das geforderte Saugvermögen erreicht.The structural arrangement and the mode of operation offer to train the gas friction pump as Holweckpumpe. This is particularly suitable for forming a maximum pressure ratio in a confined space. Due to the double-flow arrangement, the required pumping speed is achieved.
Für die nachfolgende Pumpe wird vorteilhafterweise eine Seitenkanalpumpe verwendet. Diese eignet sich besonders dazu, dass von den parallelen Gasreibungspumpen ausgestoßene Gas bis Atmosphärendruck zu verdichten. Bei hohem Gasanfall kann unter Umgehung der letzten, dem Atmosphärendruck zugewandten Stufen eine Zwischenstufe direkt an den Gasausstoßflansch über eine Verbindungsleitung angeschlossen werden. Die großen Gasmengen müssen dann nicht durch die geometrisch kleiner dimensionierten Endstufen gepumpt werden, was lange Pumpzeiten zur Folge hätte. Bei geringeren Gasmengen wird die Verbindungsleitung durch ein Überdruckventil geschlossen und die Verdichtung bis zum Atmosphärendruck erfolgt über die letzten Pumpstufen. Diese Maßnahme ist nicht auf das hier vorliegende Beispiel einer Seitenkanalpumpe beschränkt, sondern kann auf alle anderen, nach höheren Drücken hin ausstoßenden mehrstufigen Pumpen angewandt werden.For the subsequent pump advantageously a side channel pump is used. This is particularly suitable for compressing the gas ejected from the parallel gas friction pumps to atmospheric pressure. At high gas attack, bypassing the last, the atmospheric pressure facing stages an intermediate stage be connected directly to the Gasausstoßflansch via a connecting line. The large quantities of gas then do not have to be pumped through the geometrically smaller end stages, which would result in long pumping times. For smaller amounts of gas, the connecting line is closed by a pressure relief valve and the compression to atmospheric pressure via the last pump stages. This measure is not limited to the present example of a side channel pump, but can be applied to all other, multi-stage pumps ejecting at higher pressures.
Ein großer Vorteil für die Seitenkanalpumpe ist es, dass deren Statorelemente aus ungeteilten Scheiben bestehen, wie in Anspruch 5 erwähnt. Die übliche Bauweise, bei der geteilte Scheiben zwischen die Rotorscheiben montiert werden, hat zur Folge, dass durch die entstehenden Spalte Rückströmungen ermöglicht werden, welche Verluste darstellen und das Druckverhältnis erheblich vermindern. Dieser entscheidende Nachteil von Seitenkanalpumpen wird durch die erfindungsgemäßen einstückigen Statorscheiben vermieden. Die Verwendung von ungeteilten Statorelementen ist jedoch nur möglich, wenn die Rotorelemente, wie in Anspruch 6 beschrieben, mit Klemmringen auf dem Rotor befestigt werden, denn nur so können Rotor- und Statorelemente nacheinander montiert und optimale Axialspiele eingehalten werden.A major advantage for the side channel pump is that its stator elements consist of undivided disks, as mentioned in
Anhand der einzigen Abbildung soll die Erfindung näher erläutert werden. Bei diesem Beispiel ist die Gasreibungspumpe als Holweckpumpe und die nachfolgende Pumpe als Seitenkanalpumpe ausgebildet.With reference to the single figure, the invention will be explained in more detail. In this example, the gas friction pump is designed as Holweckpumpe and the subsequent pump as a side channel pump.
In dem Pumpengehäuse 1 mit Ansaugflansch 2 und Gasausstoßflansch 3 sind die beiden parallelen Stufen der Gasreibungspumpe nach der Bauart von Holweck 6 und 7 und die Seitenkanalpumpe 8 untergebracht. Die Rotorelemente 10, 11a,11b und 13 der beiden Pumpen befinden sich auf der gemeinsamen Welle 4. Diese ist in den beiden Lagern 9a und 9b zentriert. Dabei befindet sich das Lager 9a im Bereich des Atmosphärendruckes und das Lager 9b im Bereich des Vorvakuumdruckes. In diesem Bereich befindet sich auch die Antriebsanordnung 5. Die Rotorelemente der zweiflutigen Holweckpumpe bestehen aus einem Tragring 10, auf welchem zylindrische Bauteile 11a und 11b für die beiden parallelen Pumpstufen untergebracht sind. Zusammen mit den Statorelementen 12a und 12b, welche als Spiralrillen ausgebildet die zylindrischen Rotorelemente 11a und 11b umgeben, bilden sie jeweils zwei zweistufige Holweckpumpen.In the pump housing 1 with intake flange 2 and Gasausstoßflansch 3, the two parallel stages of the gas friction pump according to the design of Holweck 6 and 7 and the
Die Seitenkanalpumpe besteht aus den einstückigen Rotorscheiben 13, welche mit Klemmringen 14 auf dem Rotor 4 befestigt sind. Dazwischen befinden sich die Statorbauteile 15 mit den Förderkanälen 16.The side channel pump consists of the one-
Die Gasförderung erfolgt entsprechend den in der Abbildung eingetragenen Pfeilen. Zunächst wird das Gas von dem Ansaugbereich 22 über die parallel pumpenden Holweckstufen 6 und 7, weiche aus jeweils zwei in Serie geschalteten Pumpstufen 11a / 12a und 11b / 12b bestehen, in die Ausstoßbereiche 23 und 24 gefördert. Durch Verbindungselemente 26 zwischen diesen beiden Bereichen werden die Gasströme in den Ausstoßraum 25 der Gasreibungspumpe zusammengeführt. Über Verbindungselemente 28 gelangt der Gasstrom von dem Ausstoßraum 25 in den Ansaugraum 27 der Seitenkanalpumpe. Hier wird das Gas in mehreren Pumpstufen, welche über Kanäle 20 miteinander verbunden sind, bis auf Atmosphärendruck verdichtet und über den Ausstoßraum 29 dem Gasausstoßflansch 3 zugeführt. Von einer Zwischenstufe der Seitenkanalpumpe führt eine Verbindungsleitung 30 über ein Überdruckventil 31 direkt zum Gasausstoßflansch 3.The gas is conveyed according to the arrows in the figure. First, the gas is supplied from the
Claims (8)
- Vacuum pump comprising two single- or multistage gas friction pumps (6) and (7) and a multistage pump (8) connected downstream, wherein the two gas friction pumps are arranged in parallel in the flow direction in such a manner that the drawn in gas flow in an intake region (22) is divided into two branch flows and each of these branch flows is conveyed through the associated gas friction pump from the intake region (22) to the respective discharge region (23) or (24) and the two gas flows are then combined via connection elements (26) in a discharge chamber (25), and that the discharge chamber is connected to the intake chamber (27) of the pump (8) connected downstream via lines (28) in such a manner that the pump connected downstream further compresses the gas, characterised in that from an intermediate stage of the pump (8) connected downstream a connection line (30) leads to a gas discharge flange (3) and an excess pressure valve (31) is connected in the connection line.
- Vacuum pump according to Claim 1, characterised in that the pump (8) connected downstream conveys the gas into a further discharge chamber (29).
- Vacuum pump according to one of the preceding claims, characterised in that the two gas friction pumps (6) and (7) are configured in the Holweck design.
- Vacuum pump according to one of the preceding claims, characterised in that the connection elements (26) consist of axial bores located inside the gas friction pump (6) and (7).
- Vacuum pump according to one of the preceding claims, characterised in that the pump (8) connected downstream is a side channel pump.
- Vacuum pump according to Claim 5, characterised in that the stator elements (15) of the side channel pump consist of undivided discs.
- Vacuum pump according to one of Claims 5 or 6, characterised in that the rotor elements (13) of the side channel pump are fastened to the rotor shaft (4) by means of clamping rings (14).
- Vacuum pump in the manner of a side channel pump, comprising a plurality of stages for conveying and compressing gases to atmospheric pressure, characterised in that a connection line (30) leads to the gas discharge flange (3) from an intermediate stage bypassing the last stage facing the atmospheric pressure and an excess pressure valve (31) is connected in the connection line.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10114585A DE10114585A1 (en) | 2001-03-24 | 2001-03-24 | vacuum pump |
| DE10114585 | 2001-03-24 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| EP1243796A2 EP1243796A2 (en) | 2002-09-25 |
| EP1243796A3 EP1243796A3 (en) | 2003-08-27 |
| EP1243796B1 true EP1243796B1 (en) | 2006-11-08 |
Family
ID=7678927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP02005166A Expired - Lifetime EP1243796B1 (en) | 2001-03-24 | 2002-03-08 | Vacuum pump |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US6676384B2 (en) |
| EP (1) | EP1243796B1 (en) |
| JP (1) | JP2002310092A (en) |
| DE (2) | DE10114585A1 (en) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10150015A1 (en) * | 2001-10-11 | 2003-04-17 | Leybold Vakuum Gmbh | Multiple chamber plant used for degassing, coating or etching substrates comprises an evacuating system connected to chambers |
| GB0229352D0 (en) * | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping arrangement and method of operating same |
| GB0229353D0 (en) * | 2002-12-17 | 2003-01-22 | Boc Group Plc | Vacuum pumping system and method of operating a vacuum pumping arrangement |
| GB0322889D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
| US7140847B2 (en) * | 2004-08-11 | 2006-11-28 | The Boc Group, Inc. | Integrated high vacuum pumping system |
| US8673394B2 (en) * | 2008-05-20 | 2014-03-18 | Sundew Technologies Llc | Deposition method and apparatus |
| GB2474507B (en) | 2009-10-19 | 2016-01-27 | Edwards Ltd | Vacuum pump |
| DE102009056218A1 (en) * | 2009-11-28 | 2011-06-01 | Robert Bosch Gmbh | Screw pump with integrated pressure relief valve |
| WO2014125238A1 (en) * | 2013-02-15 | 2014-08-21 | Edwards Limited | Vacuum pump |
| DE102013114290A1 (en) * | 2013-12-18 | 2015-06-18 | Pfeiffer Vacuum Gmbh | vacuum pump |
| GB2592030B (en) * | 2020-02-12 | 2022-03-09 | Edwards Ltd | Multiple stage vacuum pump |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1067290A2 (en) * | 1999-07-05 | 2001-01-10 | Pfeiffer Vacuum GmbH | Vacuum pump |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3536418A (en) * | 1969-02-13 | 1970-10-27 | Onezime P Breaux | Cryogenic turbo-molecular vacuum pump |
| JPS5267810A (en) * | 1975-12-03 | 1977-06-04 | Aisin Seiki Co Ltd | High vacuum pump |
| DE2621201C3 (en) * | 1976-05-13 | 1979-09-27 | Maschinenfabrik Augsburg-Nuernberg Ag, 8900 Augsburg | Impeller for a turbomachine |
| JPS60116895A (en) * | 1983-11-30 | 1985-06-24 | Hitachi Ltd | Vacuum pump |
| FR2647853A1 (en) * | 1989-06-05 | 1990-12-07 | Cit Alcatel | DRY PRIMARY PUMP WITH TWO FLOORS |
| DE19632375A1 (en) * | 1996-08-10 | 1998-02-19 | Pfeiffer Vacuum Gmbh | Gas friction pump |
| US6220824B1 (en) * | 1999-06-21 | 2001-04-24 | Varian, Inc. | Self-propelled vacuum pump |
| DE19942410A1 (en) * | 1999-09-06 | 2001-03-08 | Pfeiffer Vacuum Gmbh | Vacuum pump |
-
2001
- 2001-03-24 DE DE10114585A patent/DE10114585A1/en not_active Withdrawn
-
2002
- 2002-02-07 JP JP2002030826A patent/JP2002310092A/en active Pending
- 2002-03-07 US US10/093,204 patent/US6676384B2/en not_active Expired - Fee Related
- 2002-03-08 DE DE50208630T patent/DE50208630D1/en not_active Expired - Lifetime
- 2002-03-08 EP EP02005166A patent/EP1243796B1/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1067290A2 (en) * | 1999-07-05 | 2001-01-10 | Pfeiffer Vacuum GmbH | Vacuum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1243796A2 (en) | 2002-09-25 |
| US6676384B2 (en) | 2004-01-13 |
| US20020136643A1 (en) | 2002-09-26 |
| DE10114585A1 (en) | 2002-09-26 |
| JP2002310092A (en) | 2002-10-23 |
| DE50208630D1 (en) | 2006-12-21 |
| EP1243796A3 (en) | 2003-08-27 |
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