EP1067290A2 - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
EP1067290A2
EP1067290A2 EP00112483A EP00112483A EP1067290A2 EP 1067290 A2 EP1067290 A2 EP 1067290A2 EP 00112483 A EP00112483 A EP 00112483A EP 00112483 A EP00112483 A EP 00112483A EP 1067290 A2 EP1067290 A2 EP 1067290A2
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EP
European Patent Office
Prior art keywords
pump
gas
vacuum pump
stage
gas friction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00112483A
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German (de)
French (fr)
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EP1067290B1 (en
EP1067290A3 (en
Inventor
Armin Blecker
Wolfgang Eberl
Heinrich Lotz
Heinz Reichhart
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication date
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Publication of EP1067290A3 publication Critical patent/EP1067290A3/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Definitions

  • the invention relates to a vacuum pump for conveying gases and for generating of high vacuum according to the preamble of the first claim.
  • At least two vacuum pumps have been used to generate high vacuum different types and working methods combined to form a pumping station.
  • pumping stations consisting of a turbomolecular pump have proven successful as a high vacuum pump and a rotary vane pump, which works against atmospheric pressure ejects.
  • Pumping stations consisting of at least two vacuum pumps, which are used to achieve the required vacuum parameters, such as Pressure ratio and pumping speed, are necessary, have the disadvantage that they are complex and take up a lot of space. Every pump requires one own drive system with power supply, monitoring and control as well its own storage system. Connection lines between the pumps with valves and control devices increase the effort.
  • the invention has for its object to develop a vacuum pump which covers the entire pressure range from atmospheric pressure to high vacuum pressure of approximately 10 -4 mbar and less.
  • the pump should consist of one piece and have a compact structure, so that the disadvantages described above, which adhere to pumping stations which consist of several pumps, are avoided. Furthermore, it should have a sufficiently high pressure ratio and pumping speed to meet the requirements in practical use.
  • a reliable and safe mode of operation is one of the basic requirements.
  • Another goal is lubricant-free operation on the high vacuum side.
  • a vacuum pump is presented, which in compact design the entire pressure range from atmospheric pressure to High vacuum area covers. Due to the parallel arrangement of the gas friction pumps on the high vacuum side, a double-flow suction area is formed, the one enables high pumping speed. This is sucked in within the gas friction pump Gas compresses sufficiently so that the subsequent pump only has one flow needs to be.
  • This combination along with the feature that the two Gas flows of the gas friction pump merged within this and the intake space the subsequent stage, enables the compact Construction and significantly reduces the size and design effort.
  • the present arrangement enables the shaft bearings at both ends attaching the rotor results in a stable bearing, with the bearing with little Diameter can be used, which ensures problem-free operation allow at high speeds.
  • the bearings are powered by the gas friction pump separated from the high vacuum side, which has the advantage that the High vacuum side can be viewed as lubricant-free.
  • the structural arrangement and the mode of operation offer the gas friction pump as Train Holweck pump. This is particularly suitable in a confined space to develop a maximum pressure ratio. Due to the double flow arrangement reaches the required pumping speed.
  • a side channel pump is advantageously used for the subsequent pump. This is particularly suitable for that of the parallel gas friction pumps compress the expelled gas to atmospheric pressure.
  • a great advantage for the side channel pump is that its stator elements are made of undivided washers, as mentioned in claim 5.
  • This crucial one The disadvantage of side channel pumps is one-piece by the inventive Stator disks avoided.
  • the use of undivided stator elements is only possible, however, if the rotor elements, as described in claim 6, with Clamping rings are attached to the rotor, because only in this way can rotor and stator elements assembled one after the other and optimal axial clearances are observed.
  • the pump housing 1 with intake flange 2 and gas discharge flange 3 are the two parallel stages of the gas friction pump according to the design of Holweck 6 and 7 and the side channel pump 8 housed.
  • the rotor elements 10, 11a, 11b and 13 of the two pumps are located on the common shaft 4. This is in the centered two bearings 9a and 9b.
  • the bearing 9a is in the area of Atmospheric pressure and the bearing 9b in the area of the fore-vacuum pressure.
  • the drive arrangement 5 is also located in the area.
  • the rotor elements of the double-flow Holweck pump consist of a support ring 10, on which cylindrical Components 11a and 11b for the two parallel pump stages are housed. Together with the stator elements 12a and 12b, which are designed as spiral grooves surround the cylindrical rotor elements 11a and 11b, they each form two two-stage Holweck pumps.
  • the side channel pump consists of the one-piece rotor disks 13, which with Clamping rings 14 are attached to the rotor 4.
  • the stator components are located in between 15 with the delivery channels 16.
  • the gas is pumped according to the arrows in the illustration.
  • the gas is pumped from the suction area 22 through the parallel Holweck stages 6 and 7, each consisting of two pump stages connected in series 11a / 12a and 11b / 12b exist in the discharge areas 23 and 24 promoted.
  • Gas flows brought together in the discharge space 25 of the gas friction pump.
  • Connecting elements 28 the gas flow passes from the discharge space 25 into the suction space 27 of the side channel pump.
  • the gas is pumped in several stages, which are connected to one another via channels 20, compressed to atmospheric pressure and supplied to the gas discharge flange 3 via the discharge chamber 29.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Electrophonic Musical Instruments (AREA)

Abstract

The vacuum pump has two parallel single or multiple stage gas friction pumps (6,7) and a multiple stage pump (8) connected after them. The sub-flows passing via the two gas friction pumps are fed via connecting elements to ejection regions (23,24) and then to an ejection vol. (25) connected via pipelines to the suction chamber (27) of the next pump stage so that the next stage performs further compression and delivers the gas to another ejection vol.

Description

Die Erfindung betrifft eine Vakuumpumpe zur Förderung von Gasen und zur Erzeugung von Hochvakuum nach dem Oberbegriff des 1. Patentanspruches.The invention relates to a vacuum pump for conveying gases and for generating of high vacuum according to the preamble of the first claim.

Zur Erzeugung von Hochvakuum sind Kombinationen von verschiedenen Typen von Vakuumpumpen notwendig, da der weite Druckbereich zwischen Atmosphärendruck und ca. 10-4 mbar oder kleiner mehrere Strömungsbereiche umfaßt, in denen die physikalischen Eigenschaften von Zuständen und Strömungen der Gase jeweils anderen Gesetzen unterworfen sind.Combinations of different types of vacuum pumps are necessary to generate high vacuum, since the wide pressure range between atmospheric pressure and approx. 10 -4 mbar or less comprises several flow ranges in which the physical properties of states and flows of the gases are each subject to different laws.

Seither wurden zur Erzeugung von Hochvakuum mindestens zwei Vakuumpumpen unterschiedlicher Bauart und Arbeitsweise zu einem Pumpstand zusammengefügt. Bewährt haben sich zum Beispiel Pumpstände, bestehend aus einer Turbomolekularpumpe als Hochvakuumpumpe und einer Drehschieberpumpe, welche gegen Atmosphärendruck ausstößt. Pumpstände, bestehend aus mindestens zwei Vakuumpumpen, welche zum Erzielen der geforderten vakuumtechnischen Größen, wie Druckverhältnis und Saugvermögen, notwendig sind, weisen den Nachteil auf, daß sie aufwendig sind und einen großen Platzbedarf haben. Jede Pumpe erfordert ein eigenes Antriebssystem mit Stromversorgung, -überwachung und -regelung sowie ein eigenes Lagersystem. Verbindungsleitungen zwischen den Pumpen mit Ventilen und Regeleinrichtungen vergrößern den Aufwand.Since then, at least two vacuum pumps have been used to generate high vacuum different types and working methods combined to form a pumping station. For example, pumping stations consisting of a turbomolecular pump have proven successful as a high vacuum pump and a rotary vane pump, which works against atmospheric pressure ejects. Pumping stations, consisting of at least two vacuum pumps, which are used to achieve the required vacuum parameters, such as Pressure ratio and pumping speed, are necessary, have the disadvantage that they are complex and take up a lot of space. Every pump requires one own drive system with power supply, monitoring and control as well its own storage system. Connection lines between the pumps with valves and control devices increase the effort.

Der Erfindung liegt die Aufgabe zugrunde, eine Vakuumpumpe zu entwickeln, welche den gesamten Druckbereich von Atmosphärendruck bis Hochvakuumdruck von ca. 10-4 mbar und kleiner umfaßt. Die Pumpe soll aus einem Stück bestehen und einen kompakten Aufbau aufweisen, so daß die oben beschriebenen Nachteile, welche Pumpständen anhaften, die aus mehreren Pumpen bestehen, vermieden werden. Weiterhin soll sie ein ausreichend hohes Druckverhältnis und Saugvermögen aufweisen, um den Anforderungen im praktischen Einsatz gerecht zu werden. Eine zuverlässige und sichere Betriebsweise ist eine der Grundvoraussetzungen. Als weiteres Ziel wird ein schmiermittelfreier Betrieb auf der Hochvakuumseite angestrebt. The invention has for its object to develop a vacuum pump which covers the entire pressure range from atmospheric pressure to high vacuum pressure of approximately 10 -4 mbar and less. The pump should consist of one piece and have a compact structure, so that the disadvantages described above, which adhere to pumping stations which consist of several pumps, are avoided. Furthermore, it should have a sufficiently high pressure ratio and pumping speed to meet the requirements in practical use. A reliable and safe mode of operation is one of the basic requirements. Another goal is lubricant-free operation on the high vacuum side.

Die Aufgabe wird durch die kennzeichnenden Merkmale des 1. Patentanspruches gelöst. Die Ansprüche 2 ― 6 stellen weitere Ausgestaltungsformen der Erfindung dar.The task is characterized by the characterizing features of the first claim solved. Claims 2-6 represent further embodiments of the invention.

Mit der erfindungsgemäßen Anordnung wird eine Vakuumpumpe vorgestellt, die in kompakter Bauweise den gesamten Druckbereich von Atmosphärendruck bis in den Hochvakuumbereich abdeckt. Durch die parallele Anordnung der Gasreibungspumpen auf der Hochvakuumseite wird ein zweiflutiger Ansaugbereich gebildet, der ein hohes Saugvermögen ermöglicht. Innerhalb der Gasreibungspumpe wird das angesaugte Gas ausreichend verdichtet, so daß die nachfolgende Pumpe nur noch einflutig zu sein braucht. Diese Kombination zusammen mit dem Merkmal, daß die beiden Gasströme der Gasreibungspumpe innerhalb dieser zusammengeführt und dem Ansaugraum der nachfolgenden Stufe zugeführt werden, ermöglicht die kompakte Bauweise und reduziert die Baugröße und den konstruktiven Aufwand erheblich. Dadurch, daß die vorliegende Anordnung es ermöglicht, die Wellenlager an beiden Enden des Rotors anzubringen, ergibt sich eine stabile Lagerung, bei der Lager mit geringem Durchmesser eingesetzt werden können, welche einen problemlosen Betrieb bei hohen Drehzahlen erlauben. Außerdem sind die Lager durch die Gasreibungspumpe von der Hochvakuumseite getrennt, was den Vorteil mit sich bringt, daß die Hochvakuumseite als schmiermittelfrei angesehen werden kann.With the arrangement according to the invention, a vacuum pump is presented, which in compact design the entire pressure range from atmospheric pressure to High vacuum area covers. Due to the parallel arrangement of the gas friction pumps on the high vacuum side, a double-flow suction area is formed, the one enables high pumping speed. This is sucked in within the gas friction pump Gas compresses sufficiently so that the subsequent pump only has one flow needs to be. This combination along with the feature that the two Gas flows of the gas friction pump merged within this and the intake space the subsequent stage, enables the compact Construction and significantly reduces the size and design effort. Thereby, that the present arrangement enables the shaft bearings at both ends attaching the rotor results in a stable bearing, with the bearing with little Diameter can be used, which ensures problem-free operation allow at high speeds. In addition, the bearings are powered by the gas friction pump separated from the high vacuum side, which has the advantage that the High vacuum side can be viewed as lubricant-free.

Die bauliche Anordnung und die Betriebsweise bieten an, die Gasreibungspumpe als Holweckpumpe auszubilden. Diese eignet sich besonders dazu, auf engem Raum ein maximales Druckverhältnis auszubilden. Durch die zweiflutige Anordnung wird das geforderte Saugvermögen erreicht.The structural arrangement and the mode of operation offer the gas friction pump as Train Holweck pump. This is particularly suitable in a confined space to develop a maximum pressure ratio. Due to the double flow arrangement reaches the required pumping speed.

Für die nachfolgende Pumpe wird vorteilhafterweise eine Seitenkanalpumpe verwendet. Diese eignet sich besonders dazu, daß von den parallelen Gasreibungspumpen ausgestoßene Gas bis Atmosphärendruck zu verdichten.A side channel pump is advantageously used for the subsequent pump. This is particularly suitable for that of the parallel gas friction pumps compress the expelled gas to atmospheric pressure.

Ein großer Vorteil für die Seitenkanalpumpe ist es, daß deren Statorelemente aus ungeteilten Scheiben bestehen, wie in Anspruch 5 erwähnt. Die übliche Bauweise, bei der geteilte Scheiben zwischen die Rotorscheiben montiert werden, hat zur Folge, daß durch die entstehenden Spalte Rückströmungen ermöglicht werden, welche Verluste darstellen und das Druckverhältnis erheblich vermindern. Dieser entscheidende Nachteil von Seitenkanalpumpen wird durch die erfindungsgemäßen einstückigen Statorscheiben vermieden. Die Verwendung von ungeteilten Statorelementen ist jedoch nur möglich, wenn die Rotorelemente, wie in Anspruch 6 beschrieben, mit Klemmringen auf dem Rotor befestigt werden, denn nur so können Rotor- und Statorelemente nacheinander montiert und optimale Axialspiele eingehalten werden.A great advantage for the side channel pump is that its stator elements are made of undivided washers, as mentioned in claim 5. The usual design, where split disks are mounted between the rotor disks, that backflows are made possible by the resulting column, which Represent losses and significantly reduce the pressure ratio. This crucial one The disadvantage of side channel pumps is one-piece by the inventive Stator disks avoided. The use of undivided stator elements is only possible, however, if the rotor elements, as described in claim 6, with Clamping rings are attached to the rotor, because only in this way can rotor and stator elements assembled one after the other and optimal axial clearances are observed.

Anhand der einzigen Abbildung soll die Erfindung näher erläutert werden. Bei diesem Beispiel ist die Gasreibungspumpe als Holweckpumpe und die nachfolgende Pumpe als Seitenkanalpumpe ausgebildet.The invention is to be explained in more detail with the aid of the single figure. With this An example is the gas friction pump as a Holweck pump and the subsequent pump designed as a side channel pump.

In dem Pumpengehäuse 1 mit Ansaugflansch 2 und Gasausstoßflansch 3 sind die beiden parallelen Stufen der Gasreibungspumpe nach der Bauart von Holweck 6 und 7 und die Seitenkanalpumpe 8 untergebracht. Die Rotorelemente 10, 11a, 11b und 13 der beiden Pumpen befinden sich auf der gemeinsamen Welle 4. Diese ist in den beiden Lagern 9a und 9b zentriert. Dabei befindet sich das Lager 9a im Bereich des Atmosphärendruckes und das Lager 9b im Bereich des Vorvakuumdruckes. In diesem Bereich befindet sich auch die Antriebsanordnung 5. Die Rotorelemente der zweiflutigen Holweckpumpe bestehen aus einem Tragring 10, auf welchem zylindrische Bauteile 11a und 11b für die beiden parallelen Pumpstufen untergebracht sind. Zusammen mit den Statorelementen 12a und 12b, welche als Spiralrillen ausgebildet die zylindrischen Rotorelemente 11a und 11b umgeben, bilden sie jeweils zwei zweistufige Holweckpumpen.In the pump housing 1 with intake flange 2 and gas discharge flange 3 are the two parallel stages of the gas friction pump according to the design of Holweck 6 and 7 and the side channel pump 8 housed. The rotor elements 10, 11a, 11b and 13 of the two pumps are located on the common shaft 4. This is in the centered two bearings 9a and 9b. The bearing 9a is in the area of Atmospheric pressure and the bearing 9b in the area of the fore-vacuum pressure. In this The drive arrangement 5 is also located in the area. The rotor elements of the double-flow Holweck pump consist of a support ring 10, on which cylindrical Components 11a and 11b for the two parallel pump stages are housed. Together with the stator elements 12a and 12b, which are designed as spiral grooves surround the cylindrical rotor elements 11a and 11b, they each form two two-stage Holweck pumps.

Die Seitenkanalpumpe besteht aus den einstückigen Rotorscheiben 13, welche mit Klemmringen 14 auf dem Rotor 4 befestigt sind. Dazwischen befinden sich die Statorbauteile 15 mit den Förderkanälen 16.The side channel pump consists of the one-piece rotor disks 13, which with Clamping rings 14 are attached to the rotor 4. The stator components are located in between 15 with the delivery channels 16.

Die Gasförderung erfolgt entsprechend den in der Abbildung eingetragenen Pfeilen. Zunächst wird das Gas von dem Ansaugbereich 22 über die parallel pumpenden Holweckstufen 6 und 7, welche aus jeweils zwei in Serie geschalteten Pumpstufen 11a / 12a und 11b / 12b bestehen, in die Ausstoßbereiche 23 und 24 gefördert. Durch Verbindungselemente 26 zwischen diesen beiden Bereichen werden die Gasströme in den Ausstoßraum 25 der Gasreibungspumpe zusammengeführt. Über Verbindungselemente 28 gelangt der Gasstrom von dem Ausstoßraum 25 in den Ansaugraum 27 der Seitenkanalpumpe. Hier wird das Gas in mehreren Pumpstufen, welche über Kanäle 20 miteinander verbunden sind, bis auf Atmosphärendruck verdichtet und über den Ausstoßraum 29 dem Gasausstoßflansch 3 zugeführt.The gas is pumped according to the arrows in the illustration. First, the gas is pumped from the suction area 22 through the parallel Holweck stages 6 and 7, each consisting of two pump stages connected in series 11a / 12a and 11b / 12b exist in the discharge areas 23 and 24 promoted. By connecting elements 26 between these two areas Gas flows brought together in the discharge space 25 of the gas friction pump. about Connecting elements 28 the gas flow passes from the discharge space 25 into the suction space 27 of the side channel pump. Here the gas is pumped in several stages, which are connected to one another via channels 20, compressed to atmospheric pressure and supplied to the gas discharge flange 3 via the discharge chamber 29.

Claims (6)

Vakuumpumpe, bestehend aus zwei ein- oder mehrstufigen Gasreibungspumpen (6) und (7) und einer mehrstufigen nachgeschalteten Pumpe (8), dadurch gekennzeichnet, daß die beiden Gasreibungspumpen in Strömungsrichtung parallel angeordnet sind derart, daß der angesaugte Gasstrom im Ansaugbereich (22) in zwei Teilströme geteilt wird und jeder dieser Teilströme durch die zugeordnete Gasreibungspumpe von dem Ansaugbereich (22) zu dem jeweiligen Ausstoßbereich (23) bzw. (24) gefördert wird und anschließend die beiden Gasströme über Verbindungselemente (26) in einem Ausstoßraum (25) zusammengeführt werden und daß der Ausstoßraum mit dem Ansaugraum (27) der nachgeschalteten Pumpstufe (8) über Leitungen (28) verbunden ist derart, daß die nachgeschaltete Pumpstufe das Gas weiter verdichtetet und in einen weiteren Ausstoßraum (29) fördert.Vacuum pump, consisting of two single or multi-stage gas friction pumps (6) and (7) and a multi-stage downstream pump (8), characterized in that that the two gas friction pumps parallel in the flow direction are arranged in such a way that the sucked gas flow in the suction area (22) in two sub-streams is divided and each of these sub-streams is assigned by the Gas friction pump from the suction area (22) to the respective discharge area (23) or (24) is promoted and then the two gas flows over Connecting elements (26) are brought together in an ejection space (25) and that the discharge space with the suction space (27) of the downstream Pump stage (8) via lines (28) is connected such that the downstream Pump stage further compresses the gas and into another discharge chamber (29) promotes. Vakuumpumpe nach Anspruch 1, dadurch gekennzeichnet, daß die beiden Gasreibungspumpen (6) und (7) nach der Bauart von Holweck ausgebildet sind.Vacuum pump according to claim 1, characterized in that the two gas friction pumps (6) and (7) are designed according to the Holweck design. Vakuumpumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, daß die Verbindungselemente (26) aus axialen Bohrungen bestehen, die innerhalb der Gasreibungspumpe (6) und (7) angebracht sind.Vacuum pump according to claim 1 or 2, characterized in that the connecting elements (26) consist of axial bores that are inside the gas friction pump (6) and (7) are attached. Vakuumpumpe nach einem der vorangehenden Ansprüche, dadurch gekennzeichnet, daß die nachgeschaltete Pumpe (8) eine Seitenkanalpumpe ist.Vacuum pump according to one of the preceding claims, characterized in that that the downstream pump (8) is a side channel pump. Vakuumpumpe nach Anspruch 4, dadurch gekennzeichnet, daß die Statorelemente (15) der Seitenkanalpumpe aus ungeteilten Scheiben bestehen.Vacuum pump according to claim 4, characterized in that the stator elements (15) of the side channel pump consist of undivided disks. Vakuumpumpe nach Anspruch 4 oder 5, dadurch gekennzeichnet, daß die Rotorelemente (13) der Seitenkanalpumpe mittels Klemmringen (14) auf der Rotorwelle (4) befestigt sind.Vacuum pump according to claim 4 or 5, characterized in that the rotor elements (13) of the side channel pump by means of clamping rings (14) on the rotor shaft (4) are attached.
EP00112483A 1999-07-05 2000-06-13 Vacuum pump Expired - Lifetime EP1067290B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19930952 1999-07-05
DE19930952A DE19930952A1 (en) 1999-07-05 1999-07-05 Vacuum pump

Publications (3)

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EP1067290A2 true EP1067290A2 (en) 2001-01-10
EP1067290A3 EP1067290A3 (en) 2001-04-11
EP1067290B1 EP1067290B1 (en) 2003-07-30

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US (1) US6409477B1 (en)
EP (1) EP1067290B1 (en)
JP (1) JP4584420B2 (en)
AT (1) ATE246315T1 (en)
DE (2) DE19930952A1 (en)

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EP1243796A2 (en) * 2001-03-24 2002-09-25 Pfeiffer Vacuum GmbH Vacuum pump
US6676384B2 (en) * 2001-03-24 2004-01-13 Pfeiffer Vacuum Gmbh Gas friction pump
EP1243796B1 (en) * 2001-03-24 2006-11-08 Pfeiffer Vacuum GmbH Vacuum pump
EP2565464A3 (en) * 2011-09-05 2015-04-15 Pfeiffer Vacuum GmbH Vacuum pump
DE102011112689B4 (en) 2011-09-05 2024-03-21 Pfeiffer Vacuum Gmbh vacuum pump

Also Published As

Publication number Publication date
JP4584420B2 (en) 2010-11-24
EP1067290B1 (en) 2003-07-30
ATE246315T1 (en) 2003-08-15
DE50003075D1 (en) 2003-09-04
JP2001027195A (en) 2001-01-30
US6409477B1 (en) 2002-06-25
EP1067290A3 (en) 2001-04-11
DE19930952A1 (en) 2001-01-11

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