EP1067290A3 - Vacuum pump - Google Patents

Vacuum pump Download PDF

Info

Publication number
EP1067290A3
EP1067290A3 EP00112483A EP00112483A EP1067290A3 EP 1067290 A3 EP1067290 A3 EP 1067290A3 EP 00112483 A EP00112483 A EP 00112483A EP 00112483 A EP00112483 A EP 00112483A EP 1067290 A3 EP1067290 A3 EP 1067290A3
Authority
EP
European Patent Office
Prior art keywords
pump
double
flow
gas friction
side channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00112483A
Other languages
German (de)
French (fr)
Other versions
EP1067290A2 (en
EP1067290B1 (en
Inventor
Armin Blecker
Wolfgang Eberl
Heinrich Lotz
Heinz Reichhart
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1067290A2 publication Critical patent/EP1067290A2/en
Publication of EP1067290A3 publication Critical patent/EP1067290A3/en
Application granted granted Critical
Publication of EP1067290B1 publication Critical patent/EP1067290B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Abstract

Die Erfindung beschreibt eine Vakuumpumpe, welche aus einer zweiflutigen Gasreibungspumpe (6) und (7) und aus einer nachgeschalteten Pumpe (9) besteht. Die Gasströme der zweiflutigen Gasreibungspumpe werden innerhalb der Pumpe durch Verbindungselemente (26) zusammengeführt und durch die nachfolgende Pumpe (9) auf Atmosphärendruck verdichtet. Die Gasreibungspumpe ist vorteilhafterweise als zweiflutige Holweckpumpe und die nachgeschaltete Pumpe als Seitenkanalpumpe ausgebildet. Die kompakte Bauweise der Pumpe wird noch ergänzt durch die Tatsache, daß die Statorelemente (15) der Seitenkanalpumpe aus ungeteilten Scheiben bestehen. Diese Bauweise wird ermöglicht durch Rotorscheiben (13), welche durch Klemmringe (14) auf dem Rotor (4) befestigt sind.

Figure 00000001
The invention describes a vacuum pump which consists of a double-flow gas friction pump (6) and (7) and a downstream pump (9). The gas flows of the double-flow gas friction pump are brought together within the pump by connecting elements (26) and compressed to atmospheric pressure by the following pump (9). The gas friction pump is advantageously designed as a double-flow Holweck pump and the downstream pump as a side channel pump. The compact design of the pump is supplemented by the fact that the stator elements (15) of the side channel pump consist of undivided disks. This design is made possible by rotor disks (13) which are fastened to the rotor (4) by means of clamping rings (14).
Figure 00000001
EP00112483A 1999-07-05 2000-06-13 Vacuum pump Expired - Lifetime EP1067290B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19930952A DE19930952A1 (en) 1999-07-05 1999-07-05 Vacuum pump
DE19930952 1999-07-05

Publications (3)

Publication Number Publication Date
EP1067290A2 EP1067290A2 (en) 2001-01-10
EP1067290A3 true EP1067290A3 (en) 2001-04-11
EP1067290B1 EP1067290B1 (en) 2003-07-30

Family

ID=7913691

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00112483A Expired - Lifetime EP1067290B1 (en) 1999-07-05 2000-06-13 Vacuum pump

Country Status (5)

Country Link
US (1) US6409477B1 (en)
EP (1) EP1067290B1 (en)
JP (1) JP4584420B2 (en)
AT (1) ATE246315T1 (en)
DE (2) DE19930952A1 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6419461B2 (en) * 1997-08-13 2002-07-16 Seiko Instruments Inc. Turbo molecular pump
DE10114585A1 (en) * 2001-03-24 2002-09-26 Pfeiffer Vacuum Gmbh vacuum pump
DE10130426B4 (en) * 2001-06-23 2021-03-18 Pfeiffer Vacuum Gmbh Vacuum pump system
KR20030000735A (en) * 2001-06-26 2003-01-06 김덕겸 Vacuum pump apparatus having improved sealing structure
JP2005042709A (en) 2003-07-10 2005-02-17 Ebara Corp Vacuum pump
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
US7021888B2 (en) * 2003-12-16 2006-04-04 Universities Research Association, Inc. Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump
DE102008034948A1 (en) 2008-07-26 2010-01-28 Pfeiffer Vacuum Gmbh vacuum pump
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage
DE102009021642B4 (en) 2009-05-16 2021-07-22 Pfeiffer Vacuum Gmbh Vacuum pump
DE102009021620B4 (en) 2009-05-16 2021-07-29 Pfeiffer Vacuum Gmbh Vacuum pump
DE102010019940B4 (en) 2010-05-08 2021-09-23 Pfeiffer Vacuum Gmbh Vacuum pumping stage
EP2589814B3 (en) * 2010-07-02 2024-01-24 Edwards Japan Limited Vacuum pump
DE102011112689B4 (en) * 2011-09-05 2024-03-21 Pfeiffer Vacuum Gmbh vacuum pump
DE102013114290A1 (en) * 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh vacuum pump
US20180087513A1 (en) * 2015-06-12 2018-03-29 Tti (Macao Commercial Offshore) Limited Axial fan blower

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3644051A (en) * 1969-10-27 1972-02-22 Sargent Welch Scientific Co Turbomolecular and stator pump having improved rotor construction
US4787829A (en) * 1986-05-08 1988-11-29 Mitsubishi Denki Kabushiki Kaisha Turbomolecular pump
DE3826710A1 (en) * 1987-08-07 1989-02-16 Japan Atomic Energy Res Inst Vacuum pump
US4919599A (en) * 1988-06-01 1990-04-24 Leybold Aktiengesellschaft Pumping system for a leak detecting device
US5116196A (en) * 1990-07-06 1992-05-26 Alcatel Cit Mechanical pump assembly for pumping a secondary vacuum, and a leak detection installation using such an assembly
EP0805275A2 (en) * 1996-05-03 1997-11-05 The BOC Group plc Vacuum pumps
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
US5893702A (en) * 1996-08-10 1999-04-13 Pfeiffer Vacuum Gmbh Gas friction pump

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump
NL7010108A (en) * 1969-09-30 1971-04-01
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
JPH01277698A (en) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Kk Compound vacuum pump
FR2656658B1 (en) * 1989-12-28 1993-01-29 Cit Alcatel MIXED TURBOMOLECULAR VACUUM PUMP, WITH TWO ROTATION SHAFTS AND WITH ATMOSPHERIC PRESSURE DISCHARGE.
JPH05195957A (en) * 1992-01-23 1993-08-06 Matsushita Electric Ind Co Ltd Vacuum pump
DE19634095A1 (en) * 1996-08-23 1998-02-26 Pfeiffer Vacuum Gmbh Entry stage for a double-flow gas friction pump
JP3550465B2 (en) * 1996-08-30 2004-08-04 株式会社日立製作所 Turbo vacuum pump and operating method thereof

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3644051A (en) * 1969-10-27 1972-02-22 Sargent Welch Scientific Co Turbomolecular and stator pump having improved rotor construction
US4787829A (en) * 1986-05-08 1988-11-29 Mitsubishi Denki Kabushiki Kaisha Turbomolecular pump
DE3826710A1 (en) * 1987-08-07 1989-02-16 Japan Atomic Energy Res Inst Vacuum pump
US4919599A (en) * 1988-06-01 1990-04-24 Leybold Aktiengesellschaft Pumping system for a leak detecting device
US5116196A (en) * 1990-07-06 1992-05-26 Alcatel Cit Mechanical pump assembly for pumping a secondary vacuum, and a leak detection installation using such an assembly
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
EP0805275A2 (en) * 1996-05-03 1997-11-05 The BOC Group plc Vacuum pumps
US5893702A (en) * 1996-08-10 1999-04-13 Pfeiffer Vacuum Gmbh Gas friction pump

Also Published As

Publication number Publication date
US6409477B1 (en) 2002-06-25
JP2001027195A (en) 2001-01-30
JP4584420B2 (en) 2010-11-24
EP1067290A2 (en) 2001-01-10
DE19930952A1 (en) 2001-01-11
EP1067290B1 (en) 2003-07-30
DE50003075D1 (en) 2003-09-04
ATE246315T1 (en) 2003-08-15

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