WO2005047707A1 - Multi-stage friction vacuum pump - Google Patents

Multi-stage friction vacuum pump Download PDF

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Publication number
WO2005047707A1
WO2005047707A1 PCT/EP2004/012196 EP2004012196W WO2005047707A1 WO 2005047707 A1 WO2005047707 A1 WO 2005047707A1 EP 2004012196 W EP2004012196 W EP 2004012196W WO 2005047707 A1 WO2005047707 A1 WO 2005047707A1
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WO
WIPO (PCT)
Prior art keywords
stage
rotor
vacuum pump
compressor
circular
Prior art date
Application number
PCT/EP2004/012196
Other languages
German (de)
French (fr)
Inventor
Heinrich Engländer
Original Assignee
Leybold Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vacuum Gmbh filed Critical Leybold Vacuum Gmbh
Priority to JP2006538704A priority Critical patent/JP2007510853A/en
Priority to EP04790966A priority patent/EP1706645B1/en
Priority to DE502004008709T priority patent/DE502004008709D1/en
Priority to US10/578,989 priority patent/US20070081889A1/en
Priority to CA002545566A priority patent/CA2545566A1/en
Publication of WO2005047707A1 publication Critical patent/WO2005047707A1/en

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/02—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps having non-centrifugal stages, e.g. centripetal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/10—Centrifugal pumps for compressing or evacuating
    • F04D17/12—Multi-stage pumps
    • F04D17/127—Multi-stage pumps with radially spaced stages, e.g. for contrarotating type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum

Definitions

  • the invention relates to a multi-stage friction vacuum pump with at least one axially compressing turbocompressor stage, which has a rotor rotating about its axis with rotor disks protruding between fixed stator disks.
  • Turbomolecular pumps belong to the group of friction vacuum pumps with which a high vacuum can be generated, for example for recipients for semiconductor production or also for mass spectrometers.
  • a multi-stage friction vacuum pump which is described in DE 100 04 271 AI (Leybold Vacuum GmbH), has one or more turbocompressor stages, each consisting of a rotor with radially projecting rotor disks and a stator there are radially protruding stator disks. The rotor disks and stator disks mesh with one another at a short distance. They cause a molecular flow axially to the rotor axis.
  • a circular compressor stage which has a rotor with axially projecting rotor blades arranged on circular paths and a stator with axially projecting stator blades arranged on circular paths.
  • Rotor blades and stator blades alternate with one another and produce a molecular flow which, depending on the direction of rotation of the rotor and the angle of attack of the blades, is either directed radially inwards or radially outwards.
  • the invention has for its object to provide a multi-stage friction vacuum pump with at least one turbocompressor stage, in which the stages are arranged in series in the flow path and which is intended to provide increased compression.
  • the multi-stage friction vacuum pump has the features of claim 1.
  • the vacuum pump contains a turbocompressor stage and a circular compressor stage downstream in the flow path. While the turbocompressor stage is suitable for generating a high vacuum, the downstream circular compressor stage serves to increase the pressure. Consequently, the circular compressor stage can have small dimensions because of the gas volume reduced by the compression.
  • the circular compressor stage has a small axial extent because the flow is mainly in the radial direction.
  • the overall dimensions of the friction pump are not significantly increased by the circular compressor stage, but the compression is significantly increased compared to single-stage friction vacuum pumps.
  • the combination according to the invention of an upstream turbocompressor stage and a downstream circular compressor stage offers the advantage of a small space requirement with high compression performance.
  • the turbocompressor stage and the circular compressor stage are integrated in a common combination of rotor and stator.
  • the rotors of both compressor stages consist of a single overall rotor and that the stators of both compressor stages likewise consist of a single overall stator. In this way, the dimensions and weight can be further reduced.
  • the friction vacuum pump according to the invention is preferably designed as a multiple inlet pump. It has at least two axially spaced, in series compressing turbocompression stages, between which there is an intermediate inlet.
  • a circular compressor stage is arranged on the compressor side of the first turbocompressor stage and / or the second turbocompressor stage.
  • Such a pump is particularly suitable for use in connection with mass spectrometers. Due to the increased gas flow at the intermediate inlet, to which the analysis device of the mass spectrometer is connected, the gas flow at the intermediate inlet is increased without a negative influence on the pressure at the high vacuum inlet. The increase in gas flow at the intermediate inlet means an increase in sensitivity for the mass spectrometer.
  • FIG. 1 shows a longitudinal section through a friction vacuum pump according to the invention
  • FIGS. 1 A first figure.
  • the friction vacuum pump shown in FIG. 1 has a housing 10 which is essentially cylindrical and has a high vacuum connection HV at one end. There is an intermediate inlet ZE1 in the housing wall, which is open on the side. The intermediate inlet ZE1 is bridged by webs 18 which connect the stator parts to one another.
  • first turbocompressor stage 11 comprising a stator 12 and a rotor 13.
  • the stator 12 has a plurality of stator disks 15 directed radially inwards from a peripheral wall 14.
  • the rotor 13 has a plurality of rotor disks 16 projecting between the stator disks 15 and projecting radially outwards.
  • the rotor 13 is driven by a drive 17, which contains a high-speed electric motor, at a speed of 30,000 to 60,000 rpm. driven.
  • a second turbocompressor stage 21 is arranged on the compressor side of the first turbocompressor stage 11 and is connected on the inlet side to the intermediate inlet ZE1.
  • the turbocompressor stage 21 consists of a stator 22 and a rotor 23.
  • the stator 22 has a plurality of stator disks 25 directed radially inwards from a peripheral wall 22.
  • the rotor 23 has a plurality of projecting radially outwardly projecting between the stator disks 25 Rotor disks 26 on.
  • the rotors 13 and 23 are firmly connected to one another and are driven jointly by the drive 17.
  • a second compressor stage 30 is connected to the second turbocompressor stage 21 in the housing 10 and is additionally connected to an intermediate inlet ZE2.
  • the compressor stage 30 is, for example, a Holweck stage or another molecular pump, for example a Gaede, Siegbahn, English or side channel pump.
  • a circular compressor stage 33 is provided after the first turbocompressor stage 11. This has a rotor disk 34, which is part of the rotor 13 of the turbocompressor stage 11, and a stator disk 32, which is part of the stator 12.
  • the rotor disk 34 has rotor blades 35 which are arranged on concentric circles and the stator disk 32 has stator blades 36 which are likewise arranged on concentric circles and engage in the gaps between the rotor circles, as shown in FIG. 2.
  • the stator blades and rotor blades have opposite inclinations with respect to the radial direction.
  • the circular compressor stage 33 conveys either radially outwards or radially inwards.
  • the direction of conveyance is indicated by the arrow 37 in the present exemplary embodiment.
  • the gas transport goes from the high vacuum inlet HV through the turbocompressor stage 11 and from its circumference radially inward through the circular compressor stage 33 and from there through a gap 38 to the intermediate inlet ZE1.
  • the turbocompressor stage 21 conveys the gas from the intermediate inlet ZE1 to the compressor stage 30.
  • the second intermediate inlet ZE2 also opens into the compressor stage 30.
  • the compressor stage 30 delivers to an outlet (not shown).
  • One of the rotor disks 16 of the turbocompressor stage 11 is the carrier disk for the rotor blades of the circular compressor stage 33.
  • the stator disk of the The circular compressor stage also forms the end wall for the pressure-side end of the turbocompressor stage 11.
  • a particular advantage is that the circular compressor stage 33 is, as it were, integrated into the turbocompressor stage 11.
  • the only additional effort required is the rotor and stator blades 35, 36, which are additionally provided on the rotor and stator of the turbocompressor stage.
  • a circular compressor stage 33 can also be provided behind the second turbocompressor stage 21.
  • the gas flow on the pressure side is increased by the circular compressor stage provided on the pressure side by the respective turbocompressor stage and integrated in the turbocompressor stage. For a connected mass spectrometer, this means an increase in sensitivity.
  • FIG. 3 shows the gas flow 40 through the circular compressor stage 33 radially from the outside inwards.
  • the blade surface of the rotor disk 34 is conical.
  • the rotor blades 35 have an axial length that decreases as the radius of the circular path becomes smaller.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

The invention relates to a multi-stage vacuum pump comprising at least one turbocompressor stage (11) and equipped with a circular compressor stage (33) on the pressure side of the turbocompressor stage. Said pump has small axial dimensions, enabling the compression to be increased without significantly increasing the space requirement.

Description

Mehrstufige Reibunαsvakuumpumpe Multi-stage friction pump
Die Erfindung betrifft eine mehrstufige Reibungsvakuumpumpe mit mindestens einer axial verdichtenden Turboverdichterstufe, die einen um seine Achse rotierenden Rotor mit zwischen feststehende Statorscheiben ragenden Rotorscheiben aufweist.The invention relates to a multi-stage friction vacuum pump with at least one axially compressing turbocompressor stage, which has a rotor rotating about its axis with rotor disks protruding between fixed stator disks.
Turbomolekularpumpen gehören zur Gruppe der Reibungsvakuumpumpen, mit denen ein Hochvakuum erzeugt werden kann, beispielsweise für Rezipienten für die Halbleiterherstellung oder auch für Massenspektrometer. Eine mehrstufige Reibungsvakuumpumpe, die in DE 100 04 271 AI (Leybold Vakuum GmbH) beschrieben ist, weist eine oder mehrere Turboverdichterstufen auf, die jeweils aus einem Rotor mit radial abstehenden Rotorscheiben und einem Stator mit radial abstehenden Statorscheiben bestehen. Die Rotorscheiben und Statorscheiben greifen mit geringem Abstand kammartig ineinander. Sie bewirken eine Molekularströmung axial zur Rotorachse. Zusätzlich zu der Turboverdichterstufe kann eine Zirkularverdichterstufe vorgesehen sein, die einen Rotor mit auf Kreisbahnen angeordneten axial abstehenden Rotorschaufeln und einen Stator mit auf Kreisbahnen angeordneten axial abstehenden Statorschaufeln aufweist. Rotorschaufeln und Statorschaufeln greifen abwechselnd ineinander und bewirken eine Molekularströmung, die je nach Drehrichtung des Rotors und Anstellwinkel der Schaufeln entweder radial nach innen oder radial nach außen gerichtet ist.Turbomolecular pumps belong to the group of friction vacuum pumps with which a high vacuum can be generated, for example for recipients for semiconductor production or also for mass spectrometers. A multi-stage friction vacuum pump, which is described in DE 100 04 271 AI (Leybold Vacuum GmbH), has one or more turbocompressor stages, each consisting of a rotor with radially projecting rotor disks and a stator there are radially protruding stator disks. The rotor disks and stator disks mesh with one another at a short distance. They cause a molecular flow axially to the rotor axis. In addition to the turbocompressor stage, a circular compressor stage can be provided which has a rotor with axially projecting rotor blades arranged on circular paths and a stator with axially projecting stator blades arranged on circular paths. Rotor blades and stator blades alternate with one another and produce a molecular flow which, depending on the direction of rotation of the rotor and the angle of attack of the blades, is either directed radially inwards or radially outwards.
Der Erfindung liegt die Aufgabe zugrunde, eine mehrstufige Reibungsvakuumpumpe mit mindestens einer Turboverdichterstufe zu schaffen, bei der die Stufen im Strömungsweg seriell angeordnet sind, und die eine erhöhte Kompression liefern soll.The invention has for its object to provide a multi-stage friction vacuum pump with at least one turbocompressor stage, in which the stages are arranged in series in the flow path and which is intended to provide increased compression.
Die mehrstufige Reibungsvakuumpumpe nach der vorliegenden Erfindung weist die Merkmale des Patentanspruchs 1 auf. Die Vakuumpumpe enthält eine Turboverdichterstufe und eine im Strömungsweg nachgeschaltete Zirkularverdichterstufe. Während die Turboverdichterstufe geeignet ist, ein Hochvakuum zu erzeugen, dient die nachgeordnete Zirkularverdichterstufe dazu, eine Druckerhöhung zu bewirken. Folglich kann die Zirkularverdichterstufe wegen des durch die Kompression reduzierten Gasvolumens geringe Abmessungen haben. Die Zirkularverdichterstufe hat eine geringe axiale Erstreckung, weil sie hauptsächlich in radialer Richtung durchströmt wird. Die Gesamtabmessungen der Reibungspumpe werden durch die Zirkularverdichterstufe nicht wesentlich vergrößert, jedoch wird die Verdichtung gegenüber einstufigen Reibungsvakuumpumpen deutlich erhöht. Die erfindungsgemäße Kombination aus einer vorgeordneten Turboverdichterstufe und einer nachgeordneten Zirkularverdichterstufe bietet den Vorteil eines geringen Platzbedarfes bei hoher Kompressionsleistung. Gemäß einer bevorzugten Ausgestaltung der Erfindung sind die Turboverdichterstufe und die Zirkularverdichterstufe in eine gemeinsame Kombination aus Rotor und Stator integriert. Dies bedeutet, dass die Rotoren beider Verdichterstufen aus einem einzigen Gesamtrotor bestehen und dass die Statoren beider Verdichterstufen ebenfalls aus einem einzigen Gesamt-Stator bestehen. Auf diese Weise können die Abmessungen und das Gewicht weiter verringert werden.The multi-stage friction vacuum pump according to the present invention has the features of claim 1. The vacuum pump contains a turbocompressor stage and a circular compressor stage downstream in the flow path. While the turbocompressor stage is suitable for generating a high vacuum, the downstream circular compressor stage serves to increase the pressure. Consequently, the circular compressor stage can have small dimensions because of the gas volume reduced by the compression. The circular compressor stage has a small axial extent because the flow is mainly in the radial direction. The overall dimensions of the friction pump are not significantly increased by the circular compressor stage, but the compression is significantly increased compared to single-stage friction vacuum pumps. The combination according to the invention of an upstream turbocompressor stage and a downstream circular compressor stage offers the advantage of a small space requirement with high compression performance. According to a preferred embodiment of the invention, the turbocompressor stage and the circular compressor stage are integrated in a common combination of rotor and stator. This means that the rotors of both compressor stages consist of a single overall rotor and that the stators of both compressor stages likewise consist of a single overall stator. In this way, the dimensions and weight can be further reduced.
Die erfindungsgemäße Reibungsvakuumpumpe ist vorzugsweise als Multiple- Inlet-Pumpe ausgebildet. Sie weist mindestens zwei axial beabstandete, in Reihe verdichtende Turboverdichterstufen auf, zwischen denen sich ein Zwischeneinlass befindet. An der Verdichterseite der ersten Turboverdichterstufe und/oder der zweiten Turboverdichterstufe ist eine Zirkularverdichterstufe angeordnet. Eine derartige Pumpe eignet sich insbesondere für die Verwendung in Verbindung mit Massenspektrometem. Durch den erhöhten Gasfluss am Zwischeneinlass, an den die Analyseeinrichtung des Massenspektrometers angeschlossen ist, wird der Gasfluss am Zwischeneinlass erhöht, ohne negativen Einfluss auf den Druck am Hochvakuumeinlass. Die Erhöhung des Gasflusses am Zwischeneinlass bedeutet für das Massenspektrometer eine Erhöhung der Empfindlichkeit.The friction vacuum pump according to the invention is preferably designed as a multiple inlet pump. It has at least two axially spaced, in series compressing turbocompression stages, between which there is an intermediate inlet. A circular compressor stage is arranged on the compressor side of the first turbocompressor stage and / or the second turbocompressor stage. Such a pump is particularly suitable for use in connection with mass spectrometers. Due to the increased gas flow at the intermediate inlet, to which the analysis device of the mass spectrometer is connected, the gas flow at the intermediate inlet is increased without a negative influence on the pressure at the high vacuum inlet. The increase in gas flow at the intermediate inlet means an increase in sensitivity for the mass spectrometer.
Als Zirkularverdichterstufen können je nach Verdichtungsverhältnis unterschiedliche Typen und Konstruktionen benutzt werden, wie sie in DE 100 04 271 AI beschrieben sind.Depending on the compression ratio, different types and constructions can be used as circular compressor stages, as described in DE 100 04 271 AI.
Im Folgenden werden unter Bezugnahme auf die Zeichnungen Ausführungsbeispiele der Erfindung näher erläutert. Diese Ausführungsbeispiele sind nicht so zu verstehen, dass dadurch der Schutzbereich der Erfindung eingeschränkt wird. Dieser bestimmt sich vielmehr nach den Patentansprüchen, einschließlich der Äquivalente. Es zeigen:Exemplary embodiments of the invention are explained in more detail below with reference to the drawings. These exemplary embodiments are not to be understood to limit the scope of the invention. Rather, this is determined according to the patent claims, including the equivalents. Show it:
Fig. 1 einen Längsschnitt durch eine Reibungsvakuumpumpe nach der Erfindung,1 shows a longitudinal section through a friction vacuum pump according to the invention,
Fig. 2 eine Ansicht der Zirkularverdichterstufe,2 is a view of the circular compressor stage,
Fign.FIGS.
3 und 4 Längsschnitte durch verschiedene Ausführungsformen von Zirkularverdichterstufen.3 and 4 longitudinal sections through different embodiments of circular compressor stages.
Die in Figur 1 dargestellte Reibungsvakuumpumpe weist ein Gehäuse 10 auf, das im Wesentlichen zylindrisch gestaltet ist und an einem Ende einen Hochvakuumanschluss HV hat. In der Gehäusewand befindet sich ein Zwischeneinlass ZE1, der seitlich offen ist. Der Zwischeneinlass ZE1 ist durch Stege 18 überbrückt, die die Statorteile miteinander verbinden.The friction vacuum pump shown in FIG. 1 has a housing 10 which is essentially cylindrical and has a high vacuum connection HV at one end. There is an intermediate inlet ZE1 in the housing wall, which is open on the side. The intermediate inlet ZE1 is bridged by webs 18 which connect the stator parts to one another.
In dem vorderen Teil 10a des Gehäuses 10 befindet sich eine erste Turboverdichterstufe 11 aus einem Stator 12 und einem Rotor 13. Der Stator 12 weist mehrere von einer Umfangswand 14 radial nach innen gerichtete Statorscheiben 15 auf. Der Rotor 13 weist mehrere zwischen die Statorscheiben 15 ragende radial nach außen abstehende Rotorscheiben 16 auf. Der Rotor 13 wird von einem Antrieb 17, der einen schnelllaufenden Elektromotor enthält, mit einer Drehzahl von 30.000 bis 60.000 U/min. angetrieben.In the front part 10a of the housing 10 there is a first turbocompressor stage 11 comprising a stator 12 and a rotor 13. The stator 12 has a plurality of stator disks 15 directed radially inwards from a peripheral wall 14. The rotor 13 has a plurality of rotor disks 16 projecting between the stator disks 15 and projecting radially outwards. The rotor 13 is driven by a drive 17, which contains a high-speed electric motor, at a speed of 30,000 to 60,000 rpm. driven.
Eine zweite Turboverdichterstufe 21 ist verdichterseitig von der ersten Turboverdichterstufe 11 angeordnet und einlassseitig mit dem Zwischeneinlass ZE1 verbunden. Die Turboverdichterstufe 21 besteht aus einem Stator 22 und einem Rotor 23. Der Stator 22 weist mehrere von einer Umfangswand 22 radial nach innen gerichtete Statorscheiben 25 auf. Der Rotor 23 weist mehrere zwischen die Statorscheiben 25 ragende radial nach außen abstehende Rotorscheiben 26 auf. Die Rotoren 13 und 23 sind fest miteinander verbunden und werden von dem Antrieb 17 gemeinsam angetrieben.A second turbocompressor stage 21 is arranged on the compressor side of the first turbocompressor stage 11 and is connected on the inlet side to the intermediate inlet ZE1. The turbocompressor stage 21 consists of a stator 22 and a rotor 23. The stator 22 has a plurality of stator disks 25 directed radially inwards from a peripheral wall 22. The rotor 23 has a plurality of projecting radially outwardly projecting between the stator disks 25 Rotor disks 26 on. The rotors 13 and 23 are firmly connected to one another and are driven jointly by the drive 17.
An die zweite Turboverdichterstufe 21 schließt sich in dem Gehäuse 10 eine weitere Verdichterstufe 30 an, die zusätzlich mit einem Zwischeneinlass ZE2 verbunden ist. Die Verdichterstufe 30 ist beispielsweise eine Holweckstufe oder eine andere Molekularpumpe, beispielsweise eine Gaede-, Siegbahn-, Engländeroder Seitenkanalpumpe.A second compressor stage 30 is connected to the second turbocompressor stage 21 in the housing 10 and is additionally connected to an intermediate inlet ZE2. The compressor stage 30 is, for example, a Holweck stage or another molecular pump, for example a Gaede, Siegbahn, English or side channel pump.
Bei dem vorliegenden Ausführungsbeispiel ist im Anschluss an die erste Turboverdichterstufe 11 eine Zirkularverdichterstufe 33 vorgesehen. Diese weist eine Rotorscheibe 34 auf, die Bestandteil des Rotors 13 der Turboverdichterstufe 11 ist, und eine Statorscheibe 32, die Bestandteil des Stators 12 ist. Die Rotorscheibe 34 weist Rotorschaufeln 35 auf, die auf konzentrischen Kreisen angeordnet sind und die Statorscheibe 32 weist Statorschaufeln 36 auf, die ebenfalls auf konzentrischen Kreisen angeordnet sind und in die Lücken zwischen den Rotorkreisen eingreifen, wie dies in Figur 2 dargestellt ist. Die Statorschaufeln und Rotorschaufeln haben gegensinnige Schrägstellungen in Bezug auf die Radialrichtung. In Abhängigkeit von der Drehrichtung des Rotors fördert die Zirkularverdichterstufe 33 entweder radial nach außen oder radial nach innen. Die Förderrichtung ist bei dem vorliegenden Ausführungsbeispiel durch den Pfeil 37 bezeichnet. Der Gastransport geht von dem Hochvakuumeinlass HV durch die Turboverdichterstufe 11 und von deren Umfang radial nach innen durch die Zirkularverdichterstufe 33 und von dort durch einen Spalt 38 zum Zwischeneinlass ZE1. Vom Zwischeneinlass ZE1 fördert die Turboverdichterstufe 21 das Gas zu der Verdichterstufe 30. In die Verdichterstufe 30 mündet auch der zweite Zwischeneinlass ZE2. Die Verdichterstufe 30 fördert zu einem (nicht dargestellten) Auslass.In the present exemplary embodiment, a circular compressor stage 33 is provided after the first turbocompressor stage 11. This has a rotor disk 34, which is part of the rotor 13 of the turbocompressor stage 11, and a stator disk 32, which is part of the stator 12. The rotor disk 34 has rotor blades 35 which are arranged on concentric circles and the stator disk 32 has stator blades 36 which are likewise arranged on concentric circles and engage in the gaps between the rotor circles, as shown in FIG. 2. The stator blades and rotor blades have opposite inclinations with respect to the radial direction. Depending on the direction of rotation of the rotor, the circular compressor stage 33 conveys either radially outwards or radially inwards. The direction of conveyance is indicated by the arrow 37 in the present exemplary embodiment. The gas transport goes from the high vacuum inlet HV through the turbocompressor stage 11 and from its circumference radially inward through the circular compressor stage 33 and from there through a gap 38 to the intermediate inlet ZE1. The turbocompressor stage 21 conveys the gas from the intermediate inlet ZE1 to the compressor stage 30. The second intermediate inlet ZE2 also opens into the compressor stage 30. The compressor stage 30 delivers to an outlet (not shown).
Eine der Rotorscheiben 16 der Turboverdichterstufe 11 ist die Trägerscheibe für die Rotorschaufeln der Zirkularverdichterstufe 33. Die Statorscheibe der Zirkularverdichterstufe bildet zugleich die Abschlusswand für das druckseitige Ende der Turboverdichterstufe 11.One of the rotor disks 16 of the turbocompressor stage 11 is the carrier disk for the rotor blades of the circular compressor stage 33. The stator disk of the The circular compressor stage also forms the end wall for the pressure-side end of the turbocompressor stage 11.
Ein besonderer Vorteil besteht darin, dass die Zirkularverdichterstufe 33 in die Turboverdichterstufe 11 gewissermaßen integriert ist. Der einzige zusätzlich erforderliche Aufwand besteht in den Rotor- und Statorschaufeln 35,36, die an Rotor und Stator der Turboverdichterstufe zusätzlich vorgesehen sind.A particular advantage is that the circular compressor stage 33 is, as it were, integrated into the turbocompressor stage 11. The only additional effort required is the rotor and stator blades 35, 36, which are additionally provided on the rotor and stator of the turbocompressor stage.
Alternativ zu dem vorliegenden Ausführungsbeispiel kann eine Zirkularverdichterstufe 33 auch hinter der zweiten Turboverdichterstufe 21 vorgesehen sein. Durch die druckseitig von der jeweiligen Turboverdichterstufe vorgesehene und in die Turboverdichterstufe integrierte Zirkularverdichterstufe wird der Gasfluss auf der Druckseite erhöht. Für ein angeschlossenes Massenspektrometer bedeutet dies eine Erhöhung der Empfindlichkeit.As an alternative to the present exemplary embodiment, a circular compressor stage 33 can also be provided behind the second turbocompressor stage 21. The gas flow on the pressure side is increased by the circular compressor stage provided on the pressure side by the respective turbocompressor stage and integrated in the turbocompressor stage. For a connected mass spectrometer, this means an increase in sensitivity.
Figur 3 zeigt den Gasfluss 40 durch die Zirkularverdichterstufe 33 radial von außen nach innen.FIG. 3 shows the gas flow 40 through the circular compressor stage 33 radially from the outside inwards.
Bei dem Ausführungsbeispiel von Figur 4 ist die Schaufelfläche der Rotorscheibe 34 kegelförmig. Die Rotorschaufeln 35 haben eine axiale Länge, die sich mit kleiner werdendem Radius der Kreisbahn verringert.In the embodiment of Figure 4, the blade surface of the rotor disk 34 is conical. The rotor blades 35 have an axial length that decreases as the radius of the circular path becomes smaller.
Es ist auch möglich, eine Zirkularverdichterstufe mit mehreren Scheiben und abwechselnd nach außen und nach innen gerichteten Strömungsverläufen zu verwenden wie sie generell die Figur 7 von DE 100 04 271 AI darstellt. It is also possible to use a circular compressor stage with a plurality of disks and alternating outward and inward flow profiles, as is generally shown in FIG. 7 of DE 100 04 271 A1.

Claims

PATENTANSPRÜCHE
1. Mehrstufige Reibungsvakuumpumpe mit mindestens einer axial verdichtenden Turboverdichterstufe (11,21), die einen um seine Achse rotierenden Rotor (13) mit zwischen feststehenden Statorscheiben (15) ragenden Rotorscheiben (16) aufweist, d a d u r c h g e k e n n z e i c h n e t , dass an der Verdichterseite der Turboverdichterstufe (11) eine radial verdichtende Zirkularverdichterstufe (33) angeordnet ist, die einen Rotor (34) mit auf Kreisbahnen angeordneten axial abstehenden Rotorschaufeln (35) und einen Stator (39) mit auf Kreisbahnen angeordneten axial abstehenden Statorschaufeln (36) aufweist.1. Multi-stage friction vacuum pump with at least one axially compressing turbo-compressor stage (11, 21), which has a rotor (13) rotating about its axis with rotor disks (16) projecting between fixed stator disks (15), characterized in that on the compressor side of the turbo-compressor stage (11 ) a radially compressing circular compressor stage (33) is arranged, which has a rotor (34) with axially projecting rotor blades (35) arranged on circular paths and a stator (39) with axially projecting stator blades (36) arranged on circular paths.
2. Reibungsvakuumpumpe nach Anspruch 1, dadurch gekennzeichnet, dass die Rotorschaufeln (35) der Zirkularverdichterstufe an einem die Rotorscheiben (16) tragenden Rotorkörper der Turboverdichterstufe (11) angeordnet sind.2. A friction vacuum pump according to claim 1, characterized in that the rotor blades (35) of the circular compressor stage are arranged on a rotor body of the turbocompressor stage (11) carrying the rotor disks (16).
3. Reibungsvakuumpumpe nach Anspruch 1 oder 2 dadurch gekennzeichnet, dass die Statorschaufeln (36) an einem die Statorscheiben (15) tragenden Statorkörper der Turboverdichterstufe (11) angeordnet sind.3. Friction vacuum pump according to claim 1 or 2, characterized in that the stator blades (36) are arranged on a stator discs (15) bearing stator body of the turbocompressor stage (11).
4. Reibungsvakuumpumpe nach einem der Ansprüche 1 - 3, als Multiple- Inlet-Pumpe, dadurch gekennzeichnet, dass mindestens zwei axial beabstandete, in Reihe verdichtende Turboverdichterstufen (11,21) vorgesehen sind, zwischen denen sich ein Zwischeneinlass (ZE1) befindet, und dass eine Zirkularverdichterstufe (33) an der Verdichterseite der ersten Turboverdichterstufe (11) angeordnet ist. 4. Friction vacuum pump according to one of claims 1-3, as a multiple inlet pump, characterized in that at least two axially spaced, in series compressing turbo-compressor stages (11, 21) are provided, between which there is an intermediate inlet (ZE1), and that a circular compressor stage (33) is arranged on the compressor side of the first turbocompressor stage (11).
5. Reibungsvakuumpumpe nach einem der Ansprüche 1 - 3, als Multiple- Inlet-Pumpe, dadurch gekennzeichnet, dass mindestens zwei axial beabstandete, in Reihe verdichtende Turboverdichterstufen (11,21) vorgesehen sind, zwischen denen sich ein Zwischeneinlass (ZE1) befindet, und dass eine Zirkularverdichterstufe (33) an der Verdichterseite der zweiten Turboverdichterstufe (21) angeordnet ist.5. Friction vacuum pump according to one of claims 1-3, as a multiple inlet pump, characterized in that at least two axially spaced, in series compressing turbo-compressor stages (11, 21) are provided, between which there is an intermediate inlet (ZE1), and that a circular compressor stage (33) is arranged on the compressor side of the second turbocompressor stage (21).
6. Reibungsvakuumpumpe nach einem der Ansprüche 1 - 5, dadurch gekennzeichnet, dass die Zirkularverdichterstufe (33) radial einwärts verdichtet.6. Friction vacuum pump according to one of claims 1-5, characterized in that the circular compressor stage (33) compresses radially inwards.
7. Reibungsvakuumpumpe nach einem der Ansprüche 1 - 6, dadurch gekennzeichnet, dass die Zirkularverdichterstufe (33) mindestens zweistufig ausgebildet ist und abwechselnd radial einwärts und radial auswärts (oder in umgekehrter Reihenfolge) verdichtet.7. Friction vacuum pump according to one of claims 1-6, characterized in that the circular compressor stage (33) is formed at least in two stages and alternately compresses radially inwards and radially outwards (or in reverse order).
8. Reibungsvakuumpumpe nach einem der Ansprüche 1 - 7, dadurch gekennzeichnet, dass die Rotorschaufeln (35) eine axiale Länge haben, die sich in Verdichtungsrichtung verjüngt. 8. Friction vacuum pump according to one of claims 1-7, characterized in that the rotor blades (35) have an axial length that tapers in the compression direction.
PCT/EP2004/012196 2003-11-13 2004-10-28 Multi-stage friction vacuum pump WO2005047707A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2006538704A JP2007510853A (en) 2003-11-13 2004-10-28 Multi-stage friction vacuum pump
EP04790966A EP1706645B1 (en) 2003-11-13 2004-10-28 Multi-stage friction vacuum pump
DE502004008709T DE502004008709D1 (en) 2003-11-13 2004-10-28 MULTI-STAGE FRICTION VACUUM PUMP
US10/578,989 US20070081889A1 (en) 2003-11-13 2004-10-28 Multi-stage friction vacuum pump
CA002545566A CA2545566A1 (en) 2003-11-13 2004-10-28 Multi-stage friction vacuum pump

Applications Claiming Priority (2)

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DE10353034A DE10353034A1 (en) 2003-11-13 2003-11-13 Multi-stage friction vacuum pump
DE10353034.7 2003-11-13

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WO2005047707A1 true WO2005047707A1 (en) 2005-05-26

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EP (1) EP1706645B1 (en)
JP (1) JP2007510853A (en)
CN (1) CN100453817C (en)
CA (1) CA2545566A1 (en)
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Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
DE102007048703A1 (en) * 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Multi-stage turbomolecular pump pump rotor
CN101392749B (en) * 2008-10-31 2012-05-23 东北大学 Vortex vacuum pump
GB0901872D0 (en) * 2009-02-06 2009-03-11 Edwards Ltd Multiple inlet vacuum pumps
DE102009011082A1 (en) * 2009-02-28 2010-09-02 Oerlikon Leybold Vacuum Gmbh Multi-inlet vacuum pump
WO2012002084A1 (en) 2010-07-02 2012-01-05 エドワーズ株式会社 Vacuum pump
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
EP2620649B1 (en) 2012-01-27 2019-03-13 Edwards Limited Gas transfer vacuum pump
JP6079052B2 (en) * 2012-08-24 2017-02-15 株式会社島津製作所 Vacuum pump
JP6435338B2 (en) 2013-10-16 2018-12-05 エーエスエムエル ネザーランズ ビー．ブイ． Radiation source, lithographic apparatus, device manufacturing method, sensor system, and sensing method
DE102014105582A1 (en) * 2014-04-17 2015-10-22 Pfeiffer Vacuum Gmbh vacuum pump
GB2558921B (en) * 2017-01-20 2020-06-17 Edwards Ltd A multiple stage turbomolecular pump with inter-stage inlet
CN108105121B (en) * 2017-12-29 2020-03-24 东北大学 Multistage composite high-vacuum dry pump
WO2021102583A1 (en) * 2019-11-28 2021-06-03 Laminar Lift Systems Inc. Tesla turbine pump and associated methods
CN112160919A (en) * 2020-09-28 2021-01-01 东北大学 Turbo molecular pump and composite molecular pump comprising same

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994025760A1 (en) * 1993-05-03 1994-11-10 Leybold Aktiengesellschaft Friction vacuum pump with pump sections of different designs
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
WO1999060275A1 (en) * 1998-05-14 1999-11-25 Leybold Vakuum Gmbh Friction vacuum pump with a stator and a rotor
WO2001036825A1 (en) * 1999-11-18 2001-05-25 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
DE10004271A1 (en) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Friction vacuum pump has component parts supporting rotor and stator blade rows extending radially and longitudinal axes of blades extend axially, and medium flows through pump from outside inwards

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2224009A5 (en) * 1973-03-30 1974-10-25 Cit Alcatel
DE29516599U1 (en) * 1995-10-20 1995-12-07 Leybold Ag Friction vacuum pump with intermediate inlet
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
DE10004263A1 (en) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Seal between stationary and rotating component in vacuum pump consists of blades arranged in herringbone pattern attached to each component
FR2859250B1 (en) * 2003-08-29 2005-11-11 Cit Alcatel VACUUM PUMP

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
WO1994025760A1 (en) * 1993-05-03 1994-11-10 Leybold Aktiengesellschaft Friction vacuum pump with pump sections of different designs
WO1999060275A1 (en) * 1998-05-14 1999-11-25 Leybold Vakuum Gmbh Friction vacuum pump with a stator and a rotor
WO2001036825A1 (en) * 1999-11-18 2001-05-25 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
DE10004271A1 (en) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Friction vacuum pump has component parts supporting rotor and stator blade rows extending radially and longitudinal axes of blades extend axially, and medium flows through pump from outside inwards

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DE502004008709D1 (en) 2009-01-29
US20070081889A1 (en) 2007-04-12
CA2545566A1 (en) 2005-05-26
EP1706645B1 (en) 2008-12-17
JP2007510853A (en) 2007-04-26
EP1706645A1 (en) 2006-10-04
DE10353034A1 (en) 2005-06-09
CN100453817C (en) 2009-01-21

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