EP1706645B1 - Multi-stage friction vacuum pump - Google Patents

Multi-stage friction vacuum pump Download PDF

Info

Publication number
EP1706645B1
EP1706645B1 EP04790966A EP04790966A EP1706645B1 EP 1706645 B1 EP1706645 B1 EP 1706645B1 EP 04790966 A EP04790966 A EP 04790966A EP 04790966 A EP04790966 A EP 04790966A EP 1706645 B1 EP1706645 B1 EP 1706645B1
Authority
EP
European Patent Office
Prior art keywords
compressor stage
turbo
rotor
circular
compressor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP04790966A
Other languages
German (de)
French (fr)
Other versions
EP1706645A1 (en
Inventor
Heinrich Engländer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP1706645A1 publication Critical patent/EP1706645A1/en
Application granted granted Critical
Publication of EP1706645B1 publication Critical patent/EP1706645B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/02—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps having non-centrifugal stages, e.g. centripetal
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/10—Centrifugal pumps for compressing or evacuating
    • F04D17/12—Multi-stage pumps
    • F04D17/127—Multi-stage pumps with radially spaced stages, e.g. for contrarotating type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum

Definitions

  • the invention relates to a multi-stage friction vacuum pump with at least one axially compressing turbo compressor stage, which has a rotor rotating about its axis with rotor disks projecting between stationary stator disks.
  • Turbomolecular pumps belong to the group of friction vacuum pumps with which a high vacuum can be generated, for example for recipients for semiconductor production or also for mass spectrometers.
  • a multi-stage friction vacuum pump which in DE 100 04 271 A1 (Leybold Vakuum GmbH), has one or more turbo compressor stages, each comprising a rotor with radially projecting rotor disks and a stator with consist radially protruding stator discs. The rotor discs and stator discs mesh with each other at a small distance. They cause a molecular flow axially to the rotor axis.
  • a circular compressor stage which has a rotor with axially projecting rotor blades arranged on circular paths and a stator with axially projecting stator blades arranged on circular paths.
  • Rotor blades and stator blades alternately engage each other and cause a molecular flow, which is directed either radially inward or radially outward depending on the direction of rotation of the rotor and angle of attack of the blades.
  • a similar multi-stage friction vacuum pump is also off WO 94/25760 known.
  • the invention has for its object to provide a multi-stage friction vacuum pump with at least one turbo compressor stage, in which the stages are arranged in the flow path in series, and to provide increased compression.
  • the multi-stage friction type vacuum pump comprises the features of claim 1.
  • the vacuum pump includes a turbo-compressor stage and a downstream in the flow path circular compressor stage. While the turbo-compressor stage is capable of generating a high vacuum, the downstream circular compressor stage serves to effect an increase in pressure. Consequently, the circular compressor stage may have small dimensions because of the compression volume of the gas reduced.
  • the circular compressor stage has a small axial extent, because it is flowed through mainly in the radial direction.
  • the overall dimensions of the friction pump are not significantly increased by the circular compressor stage, but the compression is significantly increased over single-stage friction vacuum pumps.
  • the inventive combination of an upstream turbo compressor stage and a downstream circular compressor stage offers the advantage of a small footprint with high compression power.
  • the turbo-compressor stage and the circular compressor stage are integrated into a common combination of rotor and stator.
  • the rotors of both compressor stages consist of a single overall rotor and that the stators of both compressor stages also consist of a single overall stator. In this way, the dimensions and weight can be further reduced.
  • the friction vacuum pump according to the invention is preferably designed as a multiple-inlet pump. It has at least two axially spaced, in-line compression turbo compressor stages, between which there is an intermediate inlet. On the compressor side of the first turbo-compressor stage and / or the second turbo-compressor stage a circular compressor stage is arranged. Such a pump is particularly suitable for use in conjunction with mass spectrometers.
  • the increased gas flow at the intermediate inlet, to which the analyzer of the mass spectrometer is connected increases the gas flow at the intermediate inlet, without adversely affecting the pressure at the high-vacuum inlet.
  • the increase of the gas flow at the intermediate inlet means for the mass spectrometer an increase of the sensitivity.
  • friction vacuum pump has a housing 10 which is designed substantially cylindrical and at one end has a high vacuum port HV.
  • housing wall In the housing wall is an intermediate inlet ZE1, which is open at the side.
  • the intermediate inlet ZE1 is bridged by webs 18 which connect the stator parts together.
  • first turbo-compressor stage 11 consisting of a stator 12 and a rotor 13.
  • the stator 12 has a plurality of stator disks 15 directed radially inwardly from a circumferential wall 14.
  • the rotor 13 has a plurality of radially outwardly projecting rotor disks 16 projecting between the stator disks 15.
  • the rotor 13 is driven by a drive 17, which includes a schneil Stanfordden electric motor, at a rotational speed of 30,000 to 60,000 U / min. driven.
  • a second turbo-compressor stage 21 is arranged on the compressor side of the first turbo-compressor stage 11 and connected on the inlet side to the intermediate inlet ZE1.
  • the turbo-compressor stage 21 consists of a stator 22 and a rotor 23.
  • the stator 22 has a plurality of stator disks 25 directed radially inwardly from a circumferential wall 22.
  • the rotor 23 has a plurality of projecting radially outwardly projecting between the stator 25 Rotor disks 26 on.
  • the rotors 13 and 23 are fixedly connected to each other and are driven in common by the drive 17.
  • the compressor stage 30 is for example a Holweck stage or another molecular pump, for example a Gaede, Siegbahn, Engtractors or side channel pump.
  • a circular compressor stage 33 is provided following the first turbo-compressor stage 11. This has a rotor disk 34, which is part of the rotor 13 of the turbo compressor stage 11, and a stator 32, which is part of the stator 12.
  • the rotor disk 34 has rotor blades 35 arranged on concentric circles
  • the stator disk 32 has stator blades 36, which are also arranged on concentric circles and engage in the gaps between the rotor circuits, as shown in FIG FIG. 2 is shown.
  • the stator vanes and rotor blades have opposing skews with respect to the radial direction.
  • the circular compressor stage 33 conveys either radially outward or radially inward.
  • the conveying direction is indicated by the arrow 37 in the present embodiment.
  • the gas transport passes from the high vacuum inlet HV through the turbo-compressor stage 11 and from its circumference radially inwardly through the circular compressor stage 33 and from there through a gap 38 to the intermediate inlet ZE1.
  • the turbo-compressor stage 21 conveys the gas to the compressor stage 30.
  • the second intermediate inlet ZE2 also opens into the compressor stage 30.
  • the compressor stage 30 delivers to an outlet (not shown).
  • One of the rotor disks 16 of the turbo-compressor stage 11 is the carrier disk for the rotor blades of the circular compressor stage 33.
  • the stator disk of the Circular compressor stage also forms the end wall for the pressure-side end of the turbo-compressor stage 11.
  • a particular advantage is that the circular compressor stage 33 is to some extent integrated into the turbo-compressor stage 11. The only additional effort required is in the rotor and stator blades 35,36, which are additionally provided on the rotor and stator of the turbo compressor stage.
  • a circular compressor stage 33 can also be provided behind the second turbo-compressor stage 21.
  • the pressure side of the respective turbo compressor stage provided and integrated into the turbo compressor stage circular compressor stage of the gas flow is increased on the pressure side. For a connected mass spectrometer, this means an increase in sensitivity.
  • FIG. 3 shows the gas flow 40 through the circular compressor stage 33 radially from outside to inside.
  • the blade surface of the rotor disk 34 is conical.
  • the rotor blades 35 have an axial length which decreases with decreasing radius of the circular path.

Description

Die Erfindung betrifft eine mehrstufige Reibungsvakuumpumpe mit mindestens einer axial verdichtenden Turboverdichterstufe, die einen um seine Achse rotierenden Rotor mit zwischen feststehende Statorscheiben ragenden Rotorscheiben aufweist.The invention relates to a multi-stage friction vacuum pump with at least one axially compressing turbo compressor stage, which has a rotor rotating about its axis with rotor disks projecting between stationary stator disks.

Turbomolekularpumpen gehören zur Gruppe der Reibungsvakuumpumpen, mit denen ein Hochvakuum erzeugt werden kann, beispielsweise für Rezipienten für die Halbleiterherstellung oder auch für Massenspektrometer. Eine mehrstufige Reibungsvakuumpumpe, die in DE 100 04 271 A1 (Leybold Vakuum GmbH) beschrieben ist, weist eine oder mehrere Turboverdichterstufen auf, die jeweils aus einem Rotor mit radial abstehenden Rotorscheiben und einem Stator mit radial abstehenden Statorscheiben bestehen. Die Rotorscheiben und Statorscheiben greifen mit geringem Abstand kammartig ineinander. Sie bewirken eine Molekularströmung axial zur Rotorachse. Zusätzlich zu der Turboverdichterstufe kann eine Zirkularverdichterstufe vorgesehen sein, die einen Rotor mit auf Kreisbahnen angeordneten axial abstehenden Rotorschaufeln und einen Stator mit auf Kreisbahnen angeordneten axial abstehenden Statorschaufeln aufweist. Rotorschaufeln und Statorschaufeln greifen abwechselnd ineinander und bewirken eine Molekularströmung, die je nach Drehrichtung des Rotors und Anstellwinkel der Schaufeln entweder radial nach innen oder radial nach außen gerichtet ist. Eine ähnliche mehrstufige Reibungsvakuumpumpe ist auch aus WO 94/25760 bekannt.Turbomolecular pumps belong to the group of friction vacuum pumps with which a high vacuum can be generated, for example for recipients for semiconductor production or also for mass spectrometers. A multi-stage friction vacuum pump, which in DE 100 04 271 A1 (Leybold Vakuum GmbH), has one or more turbo compressor stages, each comprising a rotor with radially projecting rotor disks and a stator with consist radially protruding stator discs. The rotor discs and stator discs mesh with each other at a small distance. They cause a molecular flow axially to the rotor axis. In addition to the turbo-compressor stage, a circular compressor stage may be provided which has a rotor with axially projecting rotor blades arranged on circular paths and a stator with axially projecting stator blades arranged on circular paths. Rotor blades and stator blades alternately engage each other and cause a molecular flow, which is directed either radially inward or radially outward depending on the direction of rotation of the rotor and angle of attack of the blades. A similar multi-stage friction vacuum pump is also off WO 94/25760 known.

Der Erfindung liegt die Aufgabe zugrunde, eine mehrstufige Reibungsvakuumpumpe mit mindestens einer Turboverdichterstufe zu schaffen, bei der die Stufen im Strömungsweg seriell angeordnet sind, und die eine erhöhte Kompression liefern soll.The invention has for its object to provide a multi-stage friction vacuum pump with at least one turbo compressor stage, in which the stages are arranged in the flow path in series, and to provide increased compression.

Die mehrstufige Reibungsvakuumpumpe nach der vorliegenden Erfindung weist die Merkmale des Patentanspruchs 1 auf. Die Vakuumpumpe enthält eine Turboverdichterstufe und eine im Strömungsweg nachgeschaltete Zirkularverdichterstufe. Während die Turboverdichterstufe geeignet ist, ein Hochvakuum zu erzeugen, dient die nachgeordnete Zirkularverdichterstufe dazu, eine Druckerhöhung zu bewirken. Folglich kann die Zirkularverdichterstufe wegen des durch die Kompression reduzierten Gasvolumens geringe Abmessungen haben. Die Zirkularverdichterstufe hat eine geringe axiale Erstreckung, weil sie hauptsächlich in radialer Richtung durchströmt wird. Die Gesamtabmessungen der Reibungspumpe werden durch die Zirkularverdichterstufe nicht wesentlich vergrößert, jedoch wird die Verdichtung gegenüber einstufigen Reibungsvakuumpumpen deutlich erhöht. Die erfindungsgemäße Kombination aus einer vorgeordneten Turboverdichterstufe und einer nachgeordneten Zirkularverdichterstufe bietet den Vorteil eines geringen Platzbedarfes bei hoher Kompressionsleistung.The multi-stage friction type vacuum pump according to the present invention comprises the features of claim 1. The vacuum pump includes a turbo-compressor stage and a downstream in the flow path circular compressor stage. While the turbo-compressor stage is capable of generating a high vacuum, the downstream circular compressor stage serves to effect an increase in pressure. Consequently, the circular compressor stage may have small dimensions because of the compression volume of the gas reduced. The circular compressor stage has a small axial extent, because it is flowed through mainly in the radial direction. The overall dimensions of the friction pump are not significantly increased by the circular compressor stage, but the compression is significantly increased over single-stage friction vacuum pumps. The inventive combination of an upstream turbo compressor stage and a downstream circular compressor stage offers the advantage of a small footprint with high compression power.

Gemäß einer bevorzugten Ausgestaltung der Erfindung sind die Turboverdichterstufe und die Zirkularverdichterstufe in eine gemeinsame Kombination aus Rotor und Stator integriert. Dies bedeutet, dass die Rotoren beider Verdichterstufen aus einem einzigen Gesamtrotor bestehen und dass die Statoren beider Verdichterstufen ebenfalls aus einem einzigen Gesamt-Stator bestehen. Auf diese Weise können die Abmessungen und das Gewicht weiter verringert werden.According to a preferred embodiment of the invention, the turbo-compressor stage and the circular compressor stage are integrated into a common combination of rotor and stator. This means that the rotors of both compressor stages consist of a single overall rotor and that the stators of both compressor stages also consist of a single overall stator. In this way, the dimensions and weight can be further reduced.

Die erfindungsgemäße Reibungsvakuumpumpe ist vorzugsweise als Multiple-Inlet-Pumpe ausgebildet. Sie weist mindestens zwei axial beabstandete, in Reihe verdichtende Turboverdichterstufen auf, zwischen denen sich ein Zwischeneinlass befindet. An der Verdichterseite der ersten Turboverdichterstufe und/oder der zweiten Turboverdichterstufe ist eine Zirkularverdichterstufe angeordnet. Eine derartige Pumpe eignet sich insbesondere für die Verwendung in Verbindung mit Massenspektrometern. Durch den erhöhten Gasfluss am Zwischeneinlass, an den die Analyseeinrichtung des Massenspektrometers angeschlossen ist, wird der Gasfluss am Zwischeneinlass erhöht, ohne negativen Einfluss auf den Druck am Hochvakuumeinlass. Die Erhöhung des Gasflusses am Zwischeneinlass bedeutet für das Massenspektrometer eine Erhöhung der Empfindlichkeit.The friction vacuum pump according to the invention is preferably designed as a multiple-inlet pump. It has at least two axially spaced, in-line compression turbo compressor stages, between which there is an intermediate inlet. On the compressor side of the first turbo-compressor stage and / or the second turbo-compressor stage a circular compressor stage is arranged. Such a pump is particularly suitable for use in conjunction with mass spectrometers. The increased gas flow at the intermediate inlet, to which the analyzer of the mass spectrometer is connected, increases the gas flow at the intermediate inlet, without adversely affecting the pressure at the high-vacuum inlet. The increase of the gas flow at the intermediate inlet means for the mass spectrometer an increase of the sensitivity.

Als Zirkularverdichterstufen können je nach Verdichtungsverhältnis unterschiedliche Typen und Konstruktionen benutzt werden, wie sie in DE 100 04 271 A1 beschrieben sind.Depending on the compression ratio, different types and constructions can be used as circular compressor stages, as they are described in US Pat DE 100 04 271 A1 are described.

Im Folgenden werden unter Bezugnahme auf die Zeichnungen Ausführungsbeispiele der Erfindung näher erläutert. Diese Ausführungsbeispiele sind nicht so zu verstehen, dass dadurch der Schutzbereich der Erfindung eingeschränkt wird. Dieser bestimmt sich vielmehr nach den Patentansprüchen, einschließlich der Äquivalente.In the following, embodiments of the invention will be explained in more detail with reference to the drawings. These embodiments are not to be understood as limiting the scope of the invention. This is determined rather by the claims, including the equivalents.

Es zeigen:

Fig. 1
einen Längsschnitt durch eine Reibungsvakuumpumpe nach der Erfindung,
Fig. 2
eine Ansicht der Zirkularverdichterstufe,
Fign. 3 und 4
Längsschnitte durch verschiedene Ausführungsformen von Zirkularverdichterstufen.
Show it:
Fig. 1
a longitudinal section through a friction vacuum pump according to the invention,
Fig. 2
a view of the circular compressor stage,
FIGS. 3 and 4
Longitudinal sections through various embodiments of circular compressor stages.

Die in Figur 1 dargestellte Reibungsvakuumpumpe weist ein Gehäuse 10 auf, das im Wesentlichen zylindrisch gestaltet ist und an einem Ende einen Hochvakuumanschluss HV hat. In der Gehäusewand befindet sich ein Zwischeneinlass ZE1, der seitlich offen ist. Der Zwischeneinlass ZE1 ist durch Stege 18 überbrückt, die die Statorteile miteinander verbinden.In the FIG. 1 shown friction vacuum pump has a housing 10 which is designed substantially cylindrical and at one end has a high vacuum port HV. In the housing wall is an intermediate inlet ZE1, which is open at the side. The intermediate inlet ZE1 is bridged by webs 18 which connect the stator parts together.

In dem vorderen Teil 10a des Gehäuses 10 befindet sich eine erste Turboverdichterstufe 11 aus einem Stator 12 und einem Rotor 13. Der Stator 12 weist mehrere von einer Umfangswand 14 radial nach innen gerichtete Statorscheiben 15 auf. Der Rotor 13 weist mehrere zwischen die Statorscheiben 15 ragende radial nach außen abstehende Rotorscheiben 16 auf. Der Rotor 13 wird von einem Antrieb 17, der einen schneillaufenden Elektromotor enthält, mit einer Drehzahl von 30.000 bis 60.000 U/min. angetrieben.In the front part 10a of the housing 10 there is a first turbo-compressor stage 11 consisting of a stator 12 and a rotor 13. The stator 12 has a plurality of stator disks 15 directed radially inwardly from a circumferential wall 14. The rotor 13 has a plurality of radially outwardly projecting rotor disks 16 projecting between the stator disks 15. The rotor 13 is driven by a drive 17, which includes a schneillaufenden electric motor, at a rotational speed of 30,000 to 60,000 U / min. driven.

Eine zweite Turboverdichterstufe 21 ist verdichterseitig von der ersten Turboverdichterstufe 11 angeordnet und einlassseitig mit dem Zwischeneinlass ZE1 verbunden. Die Turboverdichterstufe 21 besteht aus einem Stator 22 und einem Rotor 23. Der Stator 22 weist mehrere von einer Umfangswand 22 radial nach innen gerichtete Statorscheiben 25 auf. Der Rotor 23 weist mehrere zwischen die Statorscheiben 25 ragende radial nach außen abstehende Rotorscheiben 26 auf. Die Rotoren 13 und 23 sind fest miteinander verbunden und werden von dem Antrieb 17 gemeinsam angetrieben.A second turbo-compressor stage 21 is arranged on the compressor side of the first turbo-compressor stage 11 and connected on the inlet side to the intermediate inlet ZE1. The turbo-compressor stage 21 consists of a stator 22 and a rotor 23. The stator 22 has a plurality of stator disks 25 directed radially inwardly from a circumferential wall 22. The rotor 23 has a plurality of projecting radially outwardly projecting between the stator 25 Rotor disks 26 on. The rotors 13 and 23 are fixedly connected to each other and are driven in common by the drive 17.

An die zweite Turboverdichterstufe 21 schließt sich in dem Gehäuse 10 eine weitere Verdichterstufe 30 an, die zusätzlich mit einem Zwischeneinlass ZE2 verbunden ist. Die Verdichterstufe 30 ist beispielsweise eine Holweckstufe oder eine andere Molekularpumpe, beispielsweise eine Gaede-, Siegbahn-, Engländer-oder Seitenkanalpumpe.Connected to the second turbocompressor stage 21 in the housing 10 is a further compressor stage 30, which is additionally connected to an intermediate inlet ZE2. The compressor stage 30 is for example a Holweck stage or another molecular pump, for example a Gaede, Siegbahn, Engländer or side channel pump.

Bei dem vorliegenden Ausführungsbeispiel ist im Anschluss an die erste Turboverdichterstufe 11 eine Zirkularverdichterstufe 33 vorgesehen. Diese weist eine Rotorscheibe 34 auf, die Bestandteil des Rotors 13 der Turboverdichterstufe 11 ist, und eine Statorscheibe 32, die Bestandteil des Stators 12 ist. Die Rotorscheibe 34 weist Rotorschaufeln 35 auf, die auf konzentrischen Kreisen angeordnet sind und die Statorscheibe 32 weist Statorschaufeln 36 auf, die ebenfalls auf konzentrischen Kreisen angeordnet sind und in die Lücken zwischen den Rotorkreisen eingreifen, wie dies in Figur 2 dargestellt ist. Die Statorschaufeln und Rotorschaufeln haben gegensinnige Schrägstellungen in Bezug auf die Radialrichtung. In Abhängigkeit von der Drehrichtung des Rotors fördert die Zirkularverdichterstufe 33 entweder radial nach außen oder radial nach innen. Die Förderrichtung ist bei dem vorliegenden Ausführungsbeispiel durch den Pfeil 37 bezeichnet. Der Gastransport geht von dem Hochvakuumeinlass HV durch die Turboverdichterstufe 11 und von deren Umfang radial nach innen durch die Zirkularverdichterstufe 33 und von dort durch einen Spalt 38 zum Zwischeneinlass ZE1. Vom Zwischeneinlass ZE1 fördert die Turboverdichterstufe 21 das Gas zu der Verdichterstufe 30. In die Verdichterstufe 30 mündet auch der zweite Zwischeneinlass ZE2. Die Verdichterstufe 30 fördert zu einem (nicht dargestellten) Auslass.In the present embodiment, a circular compressor stage 33 is provided following the first turbo-compressor stage 11. This has a rotor disk 34, which is part of the rotor 13 of the turbo compressor stage 11, and a stator 32, which is part of the stator 12. The rotor disk 34 has rotor blades 35 arranged on concentric circles, and the stator disk 32 has stator blades 36, which are also arranged on concentric circles and engage in the gaps between the rotor circuits, as shown in FIG FIG. 2 is shown. The stator vanes and rotor blades have opposing skews with respect to the radial direction. Depending on the direction of rotation of the rotor, the circular compressor stage 33 conveys either radially outward or radially inward. The conveying direction is indicated by the arrow 37 in the present embodiment. The gas transport passes from the high vacuum inlet HV through the turbo-compressor stage 11 and from its circumference radially inwardly through the circular compressor stage 33 and from there through a gap 38 to the intermediate inlet ZE1. From the intermediate inlet ZE1, the turbo-compressor stage 21 conveys the gas to the compressor stage 30. The second intermediate inlet ZE2 also opens into the compressor stage 30. The compressor stage 30 delivers to an outlet (not shown).

Eine der Rotorscheiben 16 der Turboverdichterstufe 11 ist die Trägerscheibe für die Rotorschaufeln der Zirkularverdichterstufe 33. Die Statorscheibe der Zirkularverdichterstufe bildet zugleich die Abschlusswand für das druckseitige Ende der Turboverdichterstufe 11.One of the rotor disks 16 of the turbo-compressor stage 11 is the carrier disk for the rotor blades of the circular compressor stage 33. The stator disk of the Circular compressor stage also forms the end wall for the pressure-side end of the turbo-compressor stage 11.

Ein besonderer Vorteil besteht darin, dass die Zirkularverdichterstufe 33 in die Turboverdichterstufe 11 gewissermaßen integriert ist. Der einzige zusätzlich erforderliche Aufwand besteht in den Rotor- und Statorschaufeln 35,36, die an Rotor und Stator der Turboverdichterstufe zusätzlich vorgesehen sind.A particular advantage is that the circular compressor stage 33 is to some extent integrated into the turbo-compressor stage 11. The only additional effort required is in the rotor and stator blades 35,36, which are additionally provided on the rotor and stator of the turbo compressor stage.

Alternativ zu dem vorliegenden Ausführungsbeispiel kann eine Zirkularverdichterstufe 33 auch hinter der zweiten Turboverdichterstufe 21 vorgesehen sein. Durch die druckseitig von der jeweiligen Turboverdichterstufe vorgesehene und in die Turboverdichterstufe integrierte Zirkularverdichterstufe wird der Gasfluss auf der Druckseite erhöht. Für ein angeschlossenes Massenspektrometer bedeutet dies eine Erhöhung der Empfindlichkeit.As an alternative to the present exemplary embodiment, a circular compressor stage 33 can also be provided behind the second turbo-compressor stage 21. By the pressure side of the respective turbo compressor stage provided and integrated into the turbo compressor stage circular compressor stage of the gas flow is increased on the pressure side. For a connected mass spectrometer, this means an increase in sensitivity.

Figur 3 zeigt den Gasfluss 40 durch die Zirkularverdichterstufe 33 radial von außen nach innen. FIG. 3 shows the gas flow 40 through the circular compressor stage 33 radially from outside to inside.

Bei dem Ausführungsbeispiel von Figur 4 ist die Schaufelfläche der Rotorscheibe 34 kegelförmig. Die Rotorschaufeln 35 haben eine axiale Länge, die sich mit kleiner werdendem Radius der Kreisbahn verringert.In the embodiment of FIG. 4 the blade surface of the rotor disk 34 is conical. The rotor blades 35 have an axial length which decreases with decreasing radius of the circular path.

Es ist auch möglich, eine Zirkularverdichterstufe mit mehreren Scheiben und abwechselnd nach außen und nach innen gerichteten Strömungsverläufen zu verwenden wie sie generell die Figur 7 von DE 100 04 271 A1 darstellt.It is also possible to use a circular compressor stage with a plurality of disks and alternately outward and inward flow patterns as generally shown in FIG. 7 of FIG DE 100 04 271 A1 represents.

Claims (8)

  1. A multi-stage friction vacuum pump comprising at least one axially compressing turbo-compressor stage (11, 21) with a rotor (13) rotating about its axis and having rotor discs (16) projecting between stationary stator discs (15), and a radially compressing circular compressor stage (33) arranged on the compressor side of the turbo-compressor stage (11), said circular compressor stage comprising a rotor (34) having axially projecting rotor blades (35) arranged on circular paths and a stator (39) having axially projecting stator blades (36) arranged on circular paths,
    characterized in
    that the stator blades (36) engage in radial gaps between adjacent circular paths of rotor blades (35).
  2. The friction vacuum pump of claim 1, characterized in that the rotor blades (35) of the circular compressor stage are arranged on a rotor body of the turbo-compressor stage (11) carrying the rotor discs (16).
  3. The friction vacuum pump of claim 1 or 2, characterized in that the stator blades (36) are arranged on a stator body of the turbo-compressor stage (11) carrying the stator discs (15).
  4. The friction vacuum pump of one of claims 1 - 3, as a multi-inlet pump, characterized in that at least two axially spaced, serially compressing turbo-compressor stages (11, 12) are provided between which an intermediate inlet (ZE1) is situated, and that a circular compressor stage (33) is provided on the compressor side of the first turbo-compressor stage (11).
  5. The friction vacuum pump of one of claims 1-3, as a multi-inlet pump, characterized in that at least two axially spaced, serially compressing turbo-compressor stages (11, 12) are provided between which an intermediate inlet (ZE1) is situated, and that a circular compressor stage (33) is provided on the compressor side of the second turbo-compressor stage (21).
  6. The friction vacuum pump of one of claims 1 -5, characterized in that the circular compressor stage (33) compresses radially inward.
  7. The friction vacuum pump of one of claims 1-6, characterized in that the circular compressor stage (33) is designed with at least two stages and alternately compresses radially inward and radially outward (or vice versa).
  8. The friction vacuum pump of one of claims 1-7, characterized in that the rotor blades (35) have an axial length that tapers in the direction of compression.
EP04790966A 2003-11-13 2004-10-28 Multi-stage friction vacuum pump Not-in-force EP1706645B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10353034A DE10353034A1 (en) 2003-11-13 2003-11-13 Multi-stage friction vacuum pump
PCT/EP2004/012196 WO2005047707A1 (en) 2003-11-13 2004-10-28 Multi-stage friction vacuum pump

Publications (2)

Publication Number Publication Date
EP1706645A1 EP1706645A1 (en) 2006-10-04
EP1706645B1 true EP1706645B1 (en) 2008-12-17

Family

ID=34559626

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04790966A Not-in-force EP1706645B1 (en) 2003-11-13 2004-10-28 Multi-stage friction vacuum pump

Country Status (7)

Country Link
US (1) US20070081889A1 (en)
EP (1) EP1706645B1 (en)
JP (1) JP2007510853A (en)
CN (1) CN100453817C (en)
CA (1) CA2545566A1 (en)
DE (2) DE10353034A1 (en)
WO (1) WO2005047707A1 (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
DE102007048703A1 (en) * 2007-10-11 2009-04-16 Oerlikon Leybold Vacuum Gmbh Multi-stage turbomolecular pump pump rotor
CN101392749B (en) * 2008-10-31 2012-05-23 东北大学 Vortex vacuum pump
GB0901872D0 (en) * 2009-02-06 2009-03-11 Edwards Ltd Multiple inlet vacuum pumps
DE102009011082A1 (en) * 2009-02-28 2010-09-02 Oerlikon Leybold Vacuum Gmbh Multi-inlet vacuum pump
KR101848515B1 (en) 2010-07-02 2018-04-12 에드워즈 가부시키가이샤 Vacuum pump
EP2620649B1 (en) 2012-01-27 2019-03-13 Edwards Limited Gas transfer vacuum pump
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
JP6079052B2 (en) * 2012-08-24 2017-02-15 株式会社島津製作所 Vacuum pump
JP6435338B2 (en) 2013-10-16 2018-12-05 エーエスエムエル ネザーランズ ビー．ブイ． Radiation source, lithographic apparatus, device manufacturing method, sensor system, and sensing method
DE102014105582A1 (en) * 2014-04-17 2015-10-22 Pfeiffer Vacuum Gmbh vacuum pump
GB2558921B (en) * 2017-01-20 2020-06-17 Edwards Ltd A multiple stage turbomolecular pump with inter-stage inlet
CN108105121B (en) * 2017-12-29 2020-03-24 东北大学 Multistage composite high-vacuum dry pump
WO2021102583A1 (en) * 2019-11-28 2021-06-03 Laminar Lift Systems Inc. Tesla turbine pump and associated methods
CN112160919A (en) * 2020-09-28 2021-01-01 东北大学 Turbo molecular pump and composite molecular pump comprising same

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2224009A5 (en) * 1973-03-30 1974-10-25 Cit Alcatel
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE4314418A1 (en) * 1993-05-03 1994-11-10 Leybold Ag Friction vacuum pump with differently designed pump sections
DE29516599U1 (en) * 1995-10-20 1995-12-07 Leybold Ag Friction vacuum pump with intermediate inlet
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
DE19821634A1 (en) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Friction vacuum pump with staged rotor and stator
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
US6508631B1 (en) * 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
DE10004271A1 (en) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Friction vacuum pump has component parts supporting rotor and stator blade rows extending radially and longitudinal axes of blades extend axially, and medium flows through pump from outside inwards
DE10004263A1 (en) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Seal between stationary and rotating component in vacuum pump consists of blades arranged in herringbone pattern attached to each component
FR2859250B1 (en) * 2003-08-29 2005-11-11 Cit Alcatel VACUUM PUMP

Also Published As

Publication number Publication date
JP2007510853A (en) 2007-04-26
DE502004008709D1 (en) 2009-01-29
EP1706645A1 (en) 2006-10-04
US20070081889A1 (en) 2007-04-12
CN100453817C (en) 2009-01-21
DE10353034A1 (en) 2005-06-09
WO2005047707A1 (en) 2005-05-26
CN1878962A (en) 2006-12-13
CA2545566A1 (en) 2005-05-26

Similar Documents

Publication Publication Date Title
EP1706645B1 (en) Multi-stage friction vacuum pump
EP1394365B1 (en) Turbocharger shaft sealing
EP2295812B1 (en) Vacuum pump
EP1252445B1 (en) Turbomolecular pump
WO2017041997A1 (en) Turbo ventilator with heat sink
DE3613198A1 (en) VACUUM PUMP
DE602004008089T2 (en) VACUUM PUMP
EP1067290B1 (en) Vacuum pump
EP1243796B1 (en) Vacuum pump
EP3088743B1 (en) Side-channel vacuum pump stage with a stripper that is slanted on the suction side
EP2253851A2 (en) Vacuum pump
WO2008031819A1 (en) Vacuum pump
EP0825346B1 (en) Inlet-stage for a double-flow gas friction pump
DE102016208265A1 (en) Return stage, radial turbocompressor
WO2010105908A1 (en) Multi-inlet vacuum pump
EP2990656A2 (en) Vacuum pump
EP2902637B1 (en) Vacuum pump
EP2886870B1 (en) Vacuum pump with improved inlet geometry
DE102013112185B4 (en) Vacuum pump and vacuum pump with at least one turbomolecular pump stage
EP1249614B1 (en) Gas friction pump with an additional gas inlet
EP1541871B1 (en) Side channel pumping stage
DE202021000691U1 (en) Vacuum system
DE102013022539B3 (en) vacuum pump
DE102012207727A1 (en) Radial compressor of exhaust gas turbocharger, has blades whose exit angle is measured relative to vector of circumferential speed of opposite circumferential direction such that radially inner and radially outer outlet angles differs
EP3577346A1 (en) Turbo compressor with integrated flow channels

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20060412

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): CH DE FR GB IT LI

DAX Request for extension of the european patent (deleted)
RBV Designated contracting states (corrected)

Designated state(s): CH DE FR GB IT LI

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: OERLIKON LEYBOLD VACUUM GMBH

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): CH DE FR GB IT LI

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

Ref country code: CH

Ref legal event code: NV

Representative=s name: ISLER & PEDRAZZINI AG

REF Corresponds to:

Ref document number: 502004008709

Country of ref document: DE

Date of ref document: 20090129

Kind code of ref document: P

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20090918

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 20091026

Year of fee payment: 6

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20091110

Year of fee payment: 6

Ref country code: GB

Payment date: 20091022

Year of fee payment: 6

Ref country code: IT

Payment date: 20091029

Year of fee payment: 6

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20101028

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20101031

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20101031

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20101102

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20110630

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20101028

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20101028

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20111215

Year of fee payment: 8

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130501

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 502004008709

Country of ref document: DE

Effective date: 20130501

P01 Opt-out of the competence of the unified patent court (upc) registered

Effective date: 20230421