EP1249614B1 - Gas friction pump with an additional gas inlet - Google Patents

Gas friction pump with an additional gas inlet Download PDF

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Publication number
EP1249614B1
EP1249614B1 EP02002738A EP02002738A EP1249614B1 EP 1249614 B1 EP1249614 B1 EP 1249614B1 EP 02002738 A EP02002738 A EP 02002738A EP 02002738 A EP02002738 A EP 02002738A EP 1249614 B1 EP1249614 B1 EP 1249614B1
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EP
European Patent Office
Prior art keywords
gas
pump
gas inlet
additional
friction pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP02002738A
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German (de)
French (fr)
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EP1249614A1 (en
Inventor
Armin Conrad
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1249614A1 publication Critical patent/EP1249614A1/en
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Anticipated expiration legal-status Critical
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Definitions

  • the invention relates to a gas friction pump with additional gas inlet according to the preamble of the first claim.
  • a gas friction pump In the housing of a gas friction pump fixed and rotating pump-active components are housed. These consist in the present example of a turbomolecular pump made of blades provided with blades, which are arranged alternately one behind the other. The interaction of these discs creates the pumping effect. Gases which enter the pump through the intake opening on the high-vacuum side are compressed and conveyed to the fore-vacuum side. From here they can be further compressed to atmospheric pressure by internal or external pumping stages. External pumping systems can be connected via a pre-vacuum connection.
  • the gas inlet is via holes in the pump housing. This results in a gas jet in the radial direction between rotor disks. For further conveying, the jet must be deflected by 90 °.
  • the prior art arrangements provide the high flow resistance, whereby the effect achieved is hindered and can only be used with a time delay.
  • the invention has for its object to present a gas inlet to a gas friction pump in the height of the rotor disks, which compared to the prior art has a higher efficiency and allows a faster occurrence of the desired effects.
  • the flow conditions of the additional gas inlet arrangement are considerably improved.
  • the flow resistance is thereby reduced because no longer tightly focused through the inlet bore gas jet hits the rotor disks and must be deflected there.
  • turbomolecular pump With reference to the figure, the invention will be explained in more detail using the example of a turbomolecular pump. It shows a turbomolecular pump with the housing 1, which has an intake opening 2 and a gas outlet opening 3.
  • the rotor 4 and the stator disks 6 are provided with pump-active structures, which consist in the present case of a turbomolecular pump of blade rings with inclined blades 8 to the disk plane.
  • An additional gas inlet 10 in the form of a slot is attached to the periphery of the housing. This gas inlet extends in its longitudinal direction over part of the outer edge of a rotor disk 4th

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Description

Die Erfindung betrifft eine Gasreibungspumpe mit zusätzlichem Gaseinlass nach dem Oberbegriff des 1. Patentanspruches.The invention relates to a gas friction pump with additional gas inlet according to the preamble of the first claim.

Im Gehäuse einer Gasreibungspumpe sind feststehende und rotierende pumpaktive Bauteile untergebracht. Diese bestehen im vorliegenden Beispiel einer Turbomolekularpumpe aus mit Schaufeln versehenen Scheiben, die abwechselnd hintereinander angeordnet sind. Durch das Zusammenwirken dieser Scheiben wird der Pumpeffekt erzeugt. Gase, welche durch die Ansaugöffnung auf der Hochvakuumseite in die Pumpe gelangen, werden verdichtet und zur Vorvakuumseite gefördert. Von hier aus können sie durch interne oder externe Pumpstufen weiter bis Atmosphärendruck verdichtet werden. Über einen Vorvakuumanschluss können externe Pumpsysteme angeschlossen werden.In the housing of a gas friction pump fixed and rotating pump-active components are housed. These consist in the present example of a turbomolecular pump made of blades provided with blades, which are arranged alternately one behind the other. The interaction of these discs creates the pumping effect. Gases which enter the pump through the intake opening on the high-vacuum side are compressed and conveyed to the fore-vacuum side. From here they can be further compressed to atmospheric pressure by internal or external pumping stages. External pumping systems can be connected via a pre-vacuum connection.

Es gibt unterschiedliche Gründe, neben der Hauptansaugöffnung noch einen oder mehrere zusätzliche Gaseinlässe an der Pumpe anzubringen. Im Folgenden einige Beispiele:

  • Wird zum Beispiel eine Turbomolekularpumpe außer Betrieb gesetzt, so ist es sinnvoll, die Pumpe mit trockenem Gas zu fluten, um Verunreinigungen, insbesondere durch Kohlenwasserstoffe und Wasser, zu verhindern und die Pumpzeit beim Wiedereinschalten zu verkürzen. Dies geschieht vorzugsweise über ein Ventil, welches am Umfang der Pumpe angebracht ist und den Gasstrom zwischen zwei Rotorscheiben führt ( DE-A 18 09 902 , DE-A 44 27 153 ).
  • Während des Betriebes einer Turbomolekularpumpe kann es für den Pumpeffekt von Vorteil sein, ein Spülgas einzulassen ( DE-A 18 09 902 , DE-A 44 27 153 ).
  • Ausgewählte Gase können wirkungsvoll zum Kühlen der Pumpe während des Betriebes eingelassen werden ( DE-A 195 08 566 ).
  • Durch Zuführung eines Teils des Gasstromes aus einem Gebiet höheren Druckes auf die Hochvakuumseite in der Höhe der letzten Scheiben kann das Saugvermögen einer Turbomolekularpumpe beeinflusst werden ( DE-A 197 04 234 )
  • Turbomolekularpumpen, welche an Lecksuchanlagen oder Analysensystemen eingesetzt werden, sind in der Regel an mehreren Stellen mit Gaseinlässen versehen, welche das zu zuführende Gas zwischen die Rotorscheiben leiten ( DE-A 16 48 648 , DE-A 43 31 589 ).
There are various reasons for attaching one or more additional gas inlets to the pump in addition to the main intake opening. Here are some examples:
  • For example, if a turbomolecular pump is put out of operation, it makes sense to flood the pump with dry gas to prevent contamination, especially by hydrocarbons and water, and to shorten the pumping time when restarting. This is preferably done via a valve which is attached to the circumference of the pump and guides the gas flow between two rotor disks ( DE-A 18 09 902 . DE-A 44 27 153 ).
  • During the operation of a turbomolecular pump, it may be advantageous for the pumping effect to introduce a purge gas ( DE-A 18 09 902 . DE-A 44 27 153 ).
  • Selected gases can be effectively introduced to cool the pump during operation ( DE-A 195 08 566 ).
  • By feeding a portion of the gas stream from a region of higher pressure on the high-vacuum side at the height of the last slices, the pumping speed of a turbomolecular pump can be influenced ( DE-A 197 04 234 )
  • Turbomolecular pumps, which are used on leak detection systems or analysis systems, are usually provided at several points with gas inlets, which conduct the gas to be supplied between the rotor disks ( DE-A 16 48 648 . DE-A 43 31 589 ).

Bei allen diesen Einrichtungen erfolgt der Gaseinlass über Bohrungen im Gehäuse der Pumpe. Daraus resultiert ein Gasstrahl in radialer Richtung zwischen Rotorscheiben. Zur Weiterförderung muss der Strahl um 90° umgelenkt werden. Solche, dem Stand der Technik entsprechenden Anordnungen stellen dem hohen Strömungswiderstand entgegen, wodurch die erzielte Wirkung behindert wird und nur mit Zeitverzögerung einsetzen kann.In all these devices, the gas inlet is via holes in the pump housing. This results in a gas jet in the radial direction between rotor disks. For further conveying, the jet must be deflected by 90 °. Such, the prior art arrangements provide the high flow resistance, whereby the effect achieved is hindered and can only be used with a time delay.

Die US 6,030,189 , aus der Merkmale des Oberbegriffs des Anspruchs 1 hervorgehen, schlägt vor, durch eine kreisrunde Bohrung im Gehäuse einer Turbomolekularvakuumpumpe Gas in einen Ringkanal einströmen zu lassen.The US 6,030,189 , emerge from the features of the preamble of claim 1, proposes to flow through a circular bore in the housing of a turbomolecular vacuum pump gas in an annular channel.

Der Erfindung liegt die Aufgabe zugrunde, einen Gaseinlass an einer Gasreibungspumpe in der Höhe der Rotorscheiben vorzustellen, welcher gegenüber dem Stand der Technik eine höhere Wirksamkeit aufweist und ein schnelleres Eintreten der angestrebten Effekte ermöglicht.The invention has for its object to present a gas inlet to a gas friction pump in the height of the rotor disks, which compared to the prior art has a higher efficiency and allows a faster occurrence of the desired effects.

Die Aufgabe wird durch die kennzeichnenden Teile des Schutzanspruches gelöst.The problem is solved by the characterizing parts of the protection claim.

Durch die erfindungsgemäße Anordnung werden die Strömungsverhältnisse der zusätzlichen Gaseinlassanordnung erheblich verbessert. Der Strömungswiderstand wird dadurch reduziert, da nicht mehr ein durch die Einlassbohrung eng gebündelter Gasstrahl die Rotorscheiben trifft und dort umgelenkt werden muss.By the arrangement according to the invention, the flow conditions of the additional gas inlet arrangement are considerably improved. The flow resistance is thereby reduced because no longer tightly focused through the inlet bore gas jet hits the rotor disks and must be deflected there.

Anhand der Figur soll die Erfindung am Beispiel einer Turbomolekularpumpe näher erläutert werden. Sie zeigt eine Turbomolekularpumpe mit dem Gehäuse 1, welches eine Ansaugöffnung 2 und eine Gasaustrittsöffnung 3 aufweist. Die Rotor- 4 und die Statorscheiben 6 sind mit pumpaktiven Strukturen, die im vorliegenden Falle einer Turbomolekularpumpe aus Schaufelkränzen mit schräg zur Scheibenebene angestellten Schaufeln 8 bestehen, versehen. Ein zusätzlicher Gaseinlass 10 in Form eines Langloches ist am Umfang des Gehäuses angebracht. Dieser Gaseinlass erstreckt sich in seiner Längsrichtung über einen Teil des äußeren Randes einer Rotorscheibe 4.With reference to the figure, the invention will be explained in more detail using the example of a turbomolecular pump. It shows a turbomolecular pump with the housing 1, which has an intake opening 2 and a gas outlet opening 3. The rotor 4 and the stator disks 6 are provided with pump-active structures, which consist in the present case of a turbomolecular pump of blade rings with inclined blades 8 to the disk plane. An additional gas inlet 10 in the form of a slot is attached to the periphery of the housing. This gas inlet extends in its longitudinal direction over part of the outer edge of a rotor disk 4th

Claims (1)

  1. Gas friction pump with rotating (4) and stationary components (6) which are accommodated in a casing (1) and are provided with active pumping structures for delivering gases and for maintaining a pressure ratio, wherein the casing comprises an intake opening (2) and a gas outlet opening (3) as well as an additional gas inlet (10), characterised in that the additional gas inlet (10) is formed in the shape of an elongated hole which is located at the periphery of the casing (1) in the peripheral direction and extends in its longitudinal extent over a part of the outer edge of a rotating component.
EP02002738A 2001-03-10 2002-02-07 Gas friction pump with an additional gas inlet Expired - Lifetime EP1249614B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10111603 2001-03-10
DE10111603A DE10111603A1 (en) 2001-03-10 2001-03-10 Gas friction pump with additional gas inlet

Publications (2)

Publication Number Publication Date
EP1249614A1 EP1249614A1 (en) 2002-10-16
EP1249614B1 true EP1249614B1 (en) 2009-11-04

Family

ID=7677017

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02002738A Expired - Lifetime EP1249614B1 (en) 2001-03-10 2002-02-07 Gas friction pump with an additional gas inlet

Country Status (4)

Country Link
US (1) US6644912B2 (en)
EP (1) EP1249614B1 (en)
JP (1) JP4512305B2 (en)
DE (2) DE10111603A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008013142A1 (en) * 2008-03-07 2009-09-10 Oerlikon Leybold Vacuum Gmbh Turbo-molecular pump for producing vacuum, has auxiliary inlet arranged lateral to rotor longitudinal axis, where gas is sucked via auxiliary inlet in auxiliary inlet area of pump chamber, and rotor disks arranged in auxiliary inlet area
DE202010011790U1 (en) * 2010-08-25 2011-12-05 Oerlikon Leybold Vacuum Gmbh Turbo-molecular pumps
TWI424121B (en) * 2010-12-10 2014-01-21 Prosol Corp Turbo molecular pump with improved blade structures

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1648648C3 (en) * 1967-04-12 1980-01-24 Arthur Pfeiffer-Hochvakuumtechnik Gmbh, 6330 Wetzlar Arrangement for leak detection according to the mass spectrometer principle
DE1809902C3 (en) * 1968-11-20 1973-11-15 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Multi-stage turbo molecular high vacuum pump
DE2442614A1 (en) * 1974-09-04 1976-03-18 Siemens Ag Rotary high vacuum pump - has second inlet opening so that it can produce two levels of vacuum
US4472962A (en) * 1981-08-03 1984-09-25 Balzers Aktiengesellschaft Low pressure leak detector
DE3133781A1 (en) * 1981-08-26 1983-03-10 Leybold-Heraeus GmbH, 5000 Köln TURBOMOLECULAR PUMP SUITABLE FOR COUNTERFLOW LEAK DETECTION
DE4331589C2 (en) * 1992-12-24 2003-06-26 Pfeiffer Vacuum Gmbh Vacuum pumping system
DE19508566A1 (en) * 1995-03-10 1996-09-12 Balzers Pfeiffer Gmbh Molecular vacuum pump with cooling gas device and method for its operation
DE29516599U1 (en) 1995-10-20 1995-12-07 Leybold AG, 50968 Köln Friction vacuum pump with intermediate inlet
US6193461B1 (en) * 1999-02-02 2001-02-27 Varian Inc. Dual inlet vacuum pumps

Also Published As

Publication number Publication date
DE10111603A1 (en) 2002-09-12
US20020127094A1 (en) 2002-09-12
JP4512305B2 (en) 2010-07-28
EP1249614A1 (en) 2002-10-16
JP2002295397A (en) 2002-10-09
US6644912B2 (en) 2003-11-11
DE50213975D1 (en) 2009-12-17

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