EP1252446B1 - Dynamic seal - Google Patents

Dynamic seal Download PDF

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Publication number
EP1252446B1
EP1252446B1 EP00988779A EP00988779A EP1252446B1 EP 1252446 B1 EP1252446 B1 EP 1252446B1 EP 00988779 A EP00988779 A EP 00988779A EP 00988779 A EP00988779 A EP 00988779A EP 1252446 B1 EP1252446 B1 EP 1252446B1
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EP
European Patent Office
Prior art keywords
seal
seal according
blades
rows
feeding effect
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP00988779A
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German (de)
French (fr)
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EP1252446A1 (en
Inventor
Heinrich Engländer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Leybold Vacuum GmbH
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Filing date
Publication date
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Publication of EP1252446A1 publication Critical patent/EP1252446A1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Definitions

  • the invention relates to a dynamic seal between a rotating and a stationary component, wherein at least one of the components is equipped with protruding into the sealing gap projections.
  • the present invention has for its object to provide an effective dynamic seal for about radially extending gaps between a rotating and a stationary component.
  • FIG. 1 and 2 show a seal 1 according to the invention with fixed blade rows 2 and rotating blade rows 3, whose longitudinal axes extend parallel to the axis of rotation 4 of the rotating component. They are arranged in concentric rows about the axis of rotation 4 and extend into the gap 5 to be sealed. The spaces which are separated by the sealing gap 5 and are to be mutually sealed are generally designated 8 and 9.
  • the rows of rotor blades 2 and the rows of stator blades 3 alternate. They engage in each other in the region of the gap 5 to be sealed and, if a conveying effect is desired, change in a manner known per se in the flow direction.
  • FIG. 2 indicates that the blades 2, 3 are components of the adjacent rotating or stationary components 6 and 7, between which the gap 5 to be sealed is located.
  • FIGS. 3 and 4 show a double-flow design of a seal 1 according to the invention.
  • An inner group of rows of blades delivers gases radially inward (arrow 11), an outer group of rows of blades inside out (arrow 12).
  • an effective separation of the sealed spaces 8 and 9 is also achieved.
  • This arrangement has the advantage that in the space to be protected (eg 8) vapor pressures of components in this room are not unduly fallen below.
  • this separation can be assisted by the introduction of inert gas between the two groups.
  • the inert gas is supplied via the stationary component 6.
  • An inlet bore is shown (several can also be provided) and denoted by 14.
  • FIG. 5 It consists of the drive part 21, in which the drive motor, not shown, is housed, and the gas delivery part 22.
  • the drive motor drives a shaft 23, the gas-tight (labyrinth seal 24) through the flange 25th the drive housing is guided.
  • the impeller 26 On the free end of the shaft 23, the impeller 26 is attached.
  • the seal 1 according to the invention is realized in the gap 5 between the underside of the impeller 26 and the flange 25.
  • the flange 25 carries Statorschaufelschschschschschschschitz, the impeller 25 rotating blade rows 3, which are arranged concentrically around the shaft 23 and engage in the region of the gap 5 in each other. If the gasket 1 has the effect that gases delivered by the impeller 26 can not get into the engine compartment, then it is expedient to make the gasket so that it has a radially outwardly promoting effect.
  • FIG. 6 a partial section through a turbomolecular pump 31 is shown, the base part is denoted by 32.
  • the shaft 34 In the base part 32 with the drive motor 33, the shaft 34 is supported by bearings 35.
  • the shaft 34 carries the rotor 36 with its rotor blades 37, which are located together with the stator blades 38 in the delivery chamber 39.
  • a sealing system 1 designed according to the invention is provided. It comprises stator blades 2 which are arranged on two levels and which carries a ring-shaped component 42 which is fixed to the housing and has an L-shaped section, surrounding the shaft 34.
  • the rotor 36 is equipped with a recess 43 adapted to the shape of the ring component 42.
  • the stator blades 2 associated rotor blades 3 are attached on the rotor 36. If in an embodiment of this type z. B. a secure separation of the spaces 39 and 41 are achieved, it is expedient, the seal 1 in such a way that the inner (upper) blade row group 2, 3 a conveying action towards the engine compartment 41 and the outer (lower) blade row group 2, 3 a Conveying direction in the direction of delivery chamber 39 has. By introducing an inert gas between the two blade row groups, the separation effect can be further improved. Both the penetration of hydrocarbons from the engine and storage space 41 into the delivery chamber 39 and the penetration of harmful (eg, corrosive or toxic) gases from the delivery chamber 39 into the engine compartment 41 can be reliably avoided. The one to the FIGS. 3 and 4 mentioned advantage also exists.
  • FIG. 7 shows the use of a seal according to the invention in an axially compressing friction pump 51 according to the prior art.
  • the friction pump 51 consists of a suction side arranged turbomolecular pump stage 52 and a pressure side arranged Molekularpumpgen 53, which may be designed as Holweckpumpe (as shown) or as Gaede-, Siegbahn-, Engtractors- or side channel pump.
  • the seal 1 and the friction pump 51 are located in a common, approximately cylindrical housing 55 with lateral inlet 56.
  • a bearing on both ends (bearing 57, 58) shaft 59 carries the respective rotating components (rotor disk 6 of the seal 1, rotor 61 of Turbomolecular pumping stage 52, cylinder 62 of Holweck pumping stage 53).
  • the lateral inlet 56 of the pump 51 opens between the seal 1 and the axially compressing pumping stages 52, 53.
  • the outlet 64 of the pump 51 is located on the pressure side of the molecular pumping stage 53.
  • the peculiarity of the solution FIG. 7 is that the drive motor 68 is located on the high vacuum side of the axially conveying pump 51 (and not as usual on the pressure side of Holweckpumpch 53).
  • a relatively high pressure can be maintained in the engine compartment 41 (eg, 1 ⁇ 10 -2 mbar).
  • the use of highly vacuum-compatible materials in the engine compartment 41 is not required.
  • the execution after FIG. 8 differs from the execution FIG. 7 in that the seal 1 has a radially from outside to inside promoting effect.
  • a bypass 67 is connected to the engine compartment 41 which communicates with the suction side of the molecular pumping stage 62.
  • the gases conveyed by the seal 1 pass through the engine compartment 41 into the bypass 67 and from there to the molecular pumping stage 53.
  • the maintenance of a backing pressure in the engine compartment 41 is thereby ensured.
  • the seal 1 supports the flow rate of the turbomolecular pumping stage 52 without significantly increasing the overall length of the pump 51.
  • FIG. 9 shows an embodiment of a pump 51 for use in multi-chamber systems, here two-chamber systems. These are z.
  • the distance of the intake is predetermined, which often leads in the prior art that relatively long, cantilevered rotor systems are required, requiring complex storage systems.
  • FIG. 9 has two lateral inlets 56, 56 '. They are separated by at least one seal 1 from each other.
  • the gasket 1 is formed so as to have an outside-in promoting effect.
  • the inlet 56 "sees" the inlet region of the axially conveying friction pump 51 as well as the periphery of the radially outwardly inwardly promoting seal 1.
  • the outlet of the radially conveying seal 1 opens into the inlet region of a second turbomolecular pump stage 52 ', to which the second inlet 56' is connected.
  • the seal 1 causes the pressure at the inlet 56 to be lower than at the inlet 56 '.
  • the drive motor 68 is located on the pressure side of the turbomolecular pump stage 52 '. This pressure side is connected to the suction side of the molecular pumping stage 53 via the bypass 67.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Description

Die Erfindung bezieht sich auf eine dynamische Dichtung zwischen einem rotierenden und einem feststehenden Bauteil, bei welcher zumindest eines der Bauteile mit in den Dichtspalt hineinragenden Vorsprüngen ausgerüstet ist.The invention relates to a dynamic seal between a rotating and a stationary component, wherein at least one of the components is equipped with protruding into the sealing gap projections.

Insbesondere bei Vakuumpumpen besteht häufig die Forderung, Wellen abzudichten, die eine Trennwand zwischen zwei Räumen mit unterschiedlichen Drücken durchsetzen. Üblicherweise werden dazu Labyrinthdichtungen eingesetzt, wie es beispielsweise auch aus der US-A-33 99 827 bekannt ist.Especially in vacuum pumps there is often the requirement to seal waves that enforce a partition between two rooms with different pressures. Usually labyrinth seals are used, as for example, from the US-A-33 99 827 is known.

Bei Spaltdichtungen, die sich etwa radial erstrecken, ist es bekannt, (vergleiche EP-A-408791 , Spaltdichtung 43 in Figur 5) Spülgase (Stickstoff, Argon oder dergleichen) einzusetzen, um z.B. einen Lager-/Motorraum vor dem Eindringen schädlicher Gase zu schützen. Das Spülgas wird in den Lager/-Motorraum eingelassen und gelangt durch die Spaltdichtung in den Förderraum, so dass sichergestellt ist, dass Gase aus dem Förderraum nicht in den Motorraum gelangen können.In gap seals that extend approximately radially, it is known (see EP-A-408 791 , Gap seal 43 in FIG. 5 ) Purge gases (nitrogen, argon or the like) to use, for example, to protect a storage / engine room from the ingress of harmful gases. The purge gas is introduced into the bearing / engine compartment and passes through the gap seal in the delivery chamber, so that it is ensured that gases from the delivery chamber can not get into the engine compartment.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine wirksame dynamische Dichtung für sich etwa radial erstreckende Spalte zwischen einem rotierenden und einem feststehenden Bauteil zu schaffen.The present invention has for its object to provide an effective dynamic seal for about radially extending gaps between a rotating and a stationary component.

Erfindungsgemäß wird diese Aufgabe durch die kennzeichnenden Merkmale der Patentansprüche gelöst.According to the invention this object is achieved by the characterizing features of the claims.

Durch den Einsatz von Vorsprüngen, die als ineinander greifende Schaufelreihen ausgebildet sind, kann nicht nur die gewünschte Dichtwirkung verbessert werden; darüber hinaus besteht die Möglichkeit, der Dichtung Fördereigenschaften zu geben, die für die jeweilige Applikation von Vorteil sind. Soll z. B. ein Raum vor dem Eindringen von Gasen geschützt werden, können die Schaufelreihen bzw. die Anstellwinkel der die Schaufelreihen bildenden Schaufeln so gewählt werden, daß die Dichtung eine Förderrichtung hat, die der unerwünschten Strömungsrichtung der schädlichen Gase entgegengerichtet ist.By the use of projections, which are formed as interlocking blade rows, not only the desired sealing effect can be improved; In addition, there is the possibility to give the seal conveying properties that are beneficial for the particular application. Should z. B. a space to be protected from the ingress of gases, the blade rows and the angle of attack of the blade rows forming blades can be chosen so that the seal has a conveying direction which is opposite to the undesired flow direction of the harmful gases.

Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von in den Figuren 1 bis 10 erläutert werden. Es zeigen

  • Figuren 1 und 2 Schnitte durch eine Ausführung der erfindungsgemäßen Dichtung,
  • Figuren 3 und 4 Schnitte durch eine zweiflutige Ausführung,
  • Figuren 5 und 6 Anwendungen bei Maschinen nur fliegend gelagerten Rotoren, sowie
  • Figuren 7 bis 9 Anwendungen bei einer Vakuumpumpe mit auf beiden Stirnseiten gelagertem Rotorsystem.
Further advantages and details of the invention are intended to be based on in the FIGS. 1 to 10 be explained. Show it
  • Figures 1 and 2 Sections through an embodiment of the seal according to the invention,
  • FIGS. 3 and 4 Cuts through a double-flow design,
  • FIGS. 5 and 6 Applications for machines only cantilevered rotors, as well
  • FIGS. 7 to 9 Applications with a vacuum pump with rotor system mounted on both ends.

Die Figuren 1 und 2 zeigen eine Dichtung 1 nach der Erfindung mit feststehenden Schaufelreihen 2 und rotierenden Schaufelreihen 3, deren Längsachsen sich parallel zur Drehachse 4 des rotierenden Bauteils erstrecken. Sie sind in konzentrischen Reihen um die Drehachse 4 angeordnet und erstrecken sich in den abzudichtenden Spalt 5. Die durch den Dichtspalt 5 getrennten, gegenseitig abzudichtenden Räume sind generell mit 8 und 9 bezeichnet. Die Reihen der Rotorschaufeln 2 und die Reihen der Statorschaufeln 3 wechseln einander ab. Sie greifen im Bereich des abzudichtenden Spaltes 5 ineinander und haben - wenn eine Förderwirkung gewünscht ist - in an sich bekannter Weise in Strömungsrichtung wechselnde Anstellwinkel. Figur 2 lässt erkennen, dass die Schaufeln 2, 3 Bestandteile der angrenzenden rotierenden bzw. feststehenden Bauteile 6 bzw. 7 sind, zwischen denen sich der abzudichtende Spalt 5 befindet.The Figures 1 and 2 show a seal 1 according to the invention with fixed blade rows 2 and rotating blade rows 3, whose longitudinal axes extend parallel to the axis of rotation 4 of the rotating component. They are arranged in concentric rows about the axis of rotation 4 and extend into the gap 5 to be sealed. The spaces which are separated by the sealing gap 5 and are to be mutually sealed are generally designated 8 and 9. The rows of rotor blades 2 and the rows of stator blades 3 alternate. They engage in each other in the region of the gap 5 to be sealed and, if a conveying effect is desired, change in a manner known per se in the flow direction. FIG. 2 indicates that the blades 2, 3 are components of the adjacent rotating or stationary components 6 and 7, between which the gap 5 to be sealed is located.

In Figuren 3 und 4 zeigen eine zweiflutige Ausführung einer Dichtung 1 nach der Erfindung. Eine innere Gruppe von Schaufelreihen fördert Gase radial nach innen (Pfeil 11), eine äußere Gruppe von Schaufelreihen von innen nach außen (Pfeil 12). Dadurch wird ebenso eine wirksame Trennung der abzudichtenden Räume 8 und 9 erreicht. Diese Anordnung hat den Vorteil, dass im zu schützenden Raum (z. B. 8) Dampfdrücke von Komponenten in diesem Raum nicht unzulässig unterschritten werden. Zusätzlich kann diese Trennung durch Einlass von Inertgas zwischen den beiden Gruppen unterstützt werden. Die Inertgaszufuhr erfolgt über das feststehende Bauteil 6. Eine Einlassbohrung ist dargestellt (auch mehrere können vorgesehen sein) und mit 14 bezeichnet.In FIGS. 3 and 4 show a double-flow design of a seal 1 according to the invention. An inner group of rows of blades delivers gases radially inward (arrow 11), an outer group of rows of blades inside out (arrow 12). As a result, an effective separation of the sealed spaces 8 and 9 is also achieved. This arrangement has the advantage that in the space to be protected (eg 8) vapor pressures of components in this room are not unduly fallen below. In addition, this separation can be assisted by the introduction of inert gas between the two groups. The inert gas is supplied via the stationary component 6. An inlet bore is shown (several can also be provided) and denoted by 14.

Figur 5 zeigt die Anwendung der Erfindung bei einem Gebläse 20. Es besteht aus dem Antriebsteil 21, in dem der nicht dargestellte Antriebsmotor untergebracht ist, und dem Gasförderteil 22. Der Antriebsmotor treibt eine Welle 23 an, die möglichst gasdicht (Labyrinthdichtung 24) durch den Flansch 25 des Antriebsgehäuses hindurch geführt ist. Auf dem freien Ende der Welle 23 ist das Gebläserad 26 befestigt. Zur Unterstützung der Labyrinthdichtung 24 ist im Spalt 5 zwischen der Unterseite des Gebläserades 26 und dem Flansch 25 die erfindungsgemäße Dichtung 1 realisiert. Der Flansch 25 trägt Statorschaufelreihen 2, das Gebläserad 25 rotierende Schaufelreihen 3, die konzentrisch um die Welle 23 angeordnet sind und im Bereich des Spaltes 5 ineinander greifen. Soll die Dichtung 1 die Wirkung haben, dass vom Gebläserad 26 geförderte Gase nicht in den Motorraum gelangen können, dann ist es zweckmäßig, die Dichtung so zu gestalten, dass sie eine radial nach außen fördernde Wirkung hat. FIG. 5 It consists of the drive part 21, in which the drive motor, not shown, is housed, and the gas delivery part 22. The drive motor drives a shaft 23, the gas-tight (labyrinth seal 24) through the flange 25th the drive housing is guided. On the free end of the shaft 23, the impeller 26 is attached. To support the labyrinth seal 24, the seal 1 according to the invention is realized in the gap 5 between the underside of the impeller 26 and the flange 25. The flange 25 carries Statorschaufelreihen 2, the impeller 25 rotating blade rows 3, which are arranged concentrically around the shaft 23 and engage in the region of the gap 5 in each other. If the gasket 1 has the effect that gases delivered by the impeller 26 can not get into the engine compartment, then it is expedient to make the gasket so that it has a radially outwardly promoting effect.

In Figur 6 ist ein Teilschnitt durch eine Turbomolekularpumpe 31 dargestellt, deren Basisteil mit 32 bezeichnet ist. Im Basisteil 32 mit dem Antriebsmotor 33 stützt sich die Welle 34 über Lager 35 ab. Die Welle 34 trägt den Rotor 36 mit seinen Rotorschaufeln 37, die sich gemeinsam mit den Statorschaufeln 38 im Förderraum 39 befinden. Um diesen Förderraum 39 vom Motor- und Lagerraum 41 wirksam zu trennen, ist ein erfindungsgemäß gestaltetes Dichtungssystem 1 vorgesehen. Es umfasst auf zwei Ebenen angeordnete Statorschaufeln 2, die ein gehäusefestes, im Schnitt L-förmiges, die Welle 34 umgebendes Ringbauteil 42 trägt. Der Rotor 36 ist mit einer der Form des Ringbauteiles 42 angepassten Aussparung 43 ausgerüstet. Am Rotor 36 sind die den Statorschaufeln 2 zugeordneten Rotorschaufeln 3 befestigt. Soll bei einer Ausführung dieser Art z. B. eine sichere Trennung der Räume 39 und 41 erreicht werden, ist es zweckmäßig, die Dichtung 1 so auszubilden, dass die innere (obere) Schaufelreihengruppe 2, 3 eine Förderwirkung in Richtung Motorraum 41 und die äußere (untere) Schaufelreihengruppe 2, 3 eine Förderrichtung in Richtung Förderraum 39 hat. Durch Einlass eines Inertgases zwischen die beiden Schaufelreihengruppen kann die Trennwirkung noch verbessert werden. Sowohl das Eindringen von Kohlenwasserstoffen aus dem Motor- und Lagerraum 41 in den Förderraum 39 als auch das Eindringen schädlicher (z. B. korrosiver oder toxischer) Gase aus dem Förderraum 39 in den Motorraum 41 kann sicher vermieden werden. Der zu den Figuren 3 und 4 noch erwähnte Vorteil besteht ebenfalls.In FIG. 6 a partial section through a turbomolecular pump 31 is shown, the base part is denoted by 32. In the base part 32 with the drive motor 33, the shaft 34 is supported by bearings 35. The shaft 34 carries the rotor 36 with its rotor blades 37, which are located together with the stator blades 38 in the delivery chamber 39. In order to effectively separate this delivery chamber 39 from the engine and storage space 41, a sealing system 1 designed according to the invention is provided. It comprises stator blades 2 which are arranged on two levels and which carries a ring-shaped component 42 which is fixed to the housing and has an L-shaped section, surrounding the shaft 34. The rotor 36 is equipped with a recess 43 adapted to the shape of the ring component 42. On the rotor 36, the stator blades 2 associated rotor blades 3 are attached. If in an embodiment of this type z. B. a secure separation of the spaces 39 and 41 are achieved, it is expedient, the seal 1 in such a way that the inner (upper) blade row group 2, 3 a conveying action towards the engine compartment 41 and the outer (lower) blade row group 2, 3 a Conveying direction in the direction of delivery chamber 39 has. By introducing an inert gas between the two blade row groups, the separation effect can be further improved. Both the penetration of hydrocarbons from the engine and storage space 41 into the delivery chamber 39 and the penetration of harmful (eg, corrosive or toxic) gases from the delivery chamber 39 into the engine compartment 41 can be reliably avoided. The one to the FIGS. 3 and 4 mentioned advantage also exists.

Figur 7 zeigt den Einsatz einer erfindungsgemäßen Dichtung in einer axial verdichtenden Reibungspumpe 51 nach dem Stand der Technik. Die Reibungspumpe 51 besteht aus einer saugseitig angeordneten Turbomolekularpumpenstufe 52 und einer druckseitig angeordneten Molekularpumpstufen 53, die als Holweckpumpe (wie dargestellt) oder auch als Gaede-, Siegbahn-, Engländer- oder Seitenkanalpumpe ausgebildet sein kann. FIG. 7 shows the use of a seal according to the invention in an axially compressing friction pump 51 according to the prior art. The friction pump 51 consists of a suction side arranged turbomolecular pump stage 52 and a pressure side arranged Molekularpumpstufen 53, which may be designed as Holweckpumpe (as shown) or as Gaede-, Siegbahn-, Engländer- or side channel pump.

Die Dichtung 1 und die Reibungspumpe 51 befinden sich in einem gemeinsamen, etwa zylindrischen Gehäuse 55 mit seitlichem Einlass 56. Eine auf beiden Stirnseiten gelagerte (Lager 57, 58) Welle 59 trägt die jeweils rotierenden Bauteile (Rotorscheibe 6 der Dichtung 1, Rotor 61 der Turbomolekularpumpstufe 52, Zylinder 62 der Holweckpumpstufe 53). Der seitliche Einlass 56 der Pumpe 51 mündet zwischen der Dichtung 1 und den axial verdichtenden Pumpstufen 52, 53. Der Auslass 64 der Pumpe 51 befindet sich auf der Druckseite der Molekularpumpstufe 53.The seal 1 and the friction pump 51 are located in a common, approximately cylindrical housing 55 with lateral inlet 56. A bearing on both ends (bearing 57, 58) shaft 59 carries the respective rotating components (rotor disk 6 of the seal 1, rotor 61 of Turbomolecular pumping stage 52, cylinder 62 of Holweck pumping stage 53). The lateral inlet 56 of the pump 51 opens between the seal 1 and the axially compressing pumping stages 52, 53. The outlet 64 of the pump 51 is located on the pressure side of the molecular pumping stage 53.

Die Besonderheit der Lösung nach Figur 7 besteht darin, dass sich der Antriebsmotor 68 auf der Hochvakuumseite der axial fördernden Pumpe 51 befindet (und nicht wie üblich auf der Druckseite der Holweckpumpstufe 53). Dadurch, dass sich die Dichtung 1 zwischen dem Einlass 56 und dem Antriebsmotor 68 befindet, kann im Motorraum 41 ein relativ hoher Druck aufrecht erhalten werden (z. B. 1 x 10-2 mbar). Die Verwendung hochvakuumtauglicher Werkstoffe im Motorraum 41 ist nicht erforderlich.The peculiarity of the solution FIG. 7 is that the drive motor 68 is located on the high vacuum side of the axially conveying pump 51 (and not as usual on the pressure side of Holweckpumpstufe 53). By having the gasket 1 between the inlet 56 and the drive motor 68, a relatively high pressure can be maintained in the engine compartment 41 (eg, 1 × 10 -2 mbar). The use of highly vacuum-compatible materials in the engine compartment 41 is not required.

Die Ausführung nach Figur 8 unterscheidet sich von der Ausführung nach Figur 7 dadurch, dass die Dichtung 1 eine radial von außen nach innen fördernde Wirkung hat. Außerdem ist ein Bypass 67 an den Motorraum 41 angeschlossen, der mit der Saugseite der Molekularpumpstufe 62 in Verbindung steht. Entsprechend den eingezeichneten Pfeilen 69 gelangen die von der Dichtung 1 geförderten Gase durch den Motorraum 41 in den Bypass 67 und von dort aus zur Molekularpumpstufe 53. Die Aufrechterhaltung eines Vorvakuumdruckes im Motorraum 41 ist dadurch sichergestellt. Außerdem unterstützt die Dichtung 1 die Förderleistung der Turbomolekularpumpstufe 52, ohne dass sich damit die Baulänge der Pumpe 51 wesentlich vergrößert.The execution after FIG. 8 differs from the execution FIG. 7 in that the seal 1 has a radially from outside to inside promoting effect. In addition, a bypass 67 is connected to the engine compartment 41 which communicates with the suction side of the molecular pumping stage 62. In accordance with the arrows 69, the gases conveyed by the seal 1 pass through the engine compartment 41 into the bypass 67 and from there to the molecular pumping stage 53. The maintenance of a backing pressure in the engine compartment 41 is thereby ensured. In addition, the seal 1 supports the flow rate of the turbomolecular pumping stage 52 without significantly increasing the overall length of the pump 51.

Figur 9 zeigt eine Ausführung einer Pumpe 51 für den Einsatz bei Mehrkammersystemen, hier Zweikammersystemen. Dabei handelt es sich z. B. um Analysengeräte mit mehreren Kammern, die auf unterschiedliche Drücke evakuiert werden müssen. Dadurch ist der Abstand der Ansaugstutzen vorgegeben, was beim Stand der Technik häufig dazu führt, dass relativ lange, fliegend gelagerte Rotorsysteme nötig sind, die aufwendige Lagersysteme erfordern. FIG. 9 shows an embodiment of a pump 51 for use in multi-chamber systems, here two-chamber systems. These are z. As to analyzers with multiple chambers that need to be evacuated to different pressures. As a result, the distance of the intake is predetermined, which often leads in the prior art that relatively long, cantilevered rotor systems are required, requiring complex storage systems.

Die Ausführung nach Figur 9 weist zwei seitliche Einlässe 56, 56'. Sie sind durch mindestens eine Dichtung 1 voneinander getrennt. Die Dichtung 1 ist so ausgebildet, dass sie eine von außen nach innen fördernde Wirkung hat. Der Einlass 56 "sieht" den Eintrittsbereich der axial fördernden Reibungspumpe 51 sowie die Peripherie der radial von außen nach innen fördernden Dichtung 1. Der Auslass der radial fördernden Dichtung 1 mündet in den Einlassbereich einer zweiten Turbomolekularpumpenstufe 52', an den der zweite Einlass 56' angeschlossen ist. Die Dichtung 1 bewirkt, dass der Druck am Einlass 56 niedriger ist als am Einlass 56'. Auf der Druckseite der Turbomolekularpumpenstufe 52' befindet sich der Antriebsmotor 68. Diese Druckseite ist über den Bypass 67 mit der Saugseite der Molekularpumpstufe 53 verbunden.The execution after FIG. 9 has two lateral inlets 56, 56 '. They are separated by at least one seal 1 from each other. The gasket 1 is formed so as to have an outside-in promoting effect. The inlet 56 "sees" the inlet region of the axially conveying friction pump 51 as well as the periphery of the radially outwardly inwardly promoting seal 1. The outlet of the radially conveying seal 1 opens into the inlet region of a second turbomolecular pump stage 52 ', to which the second inlet 56' is connected. The seal 1 causes the pressure at the inlet 56 to be lower than at the inlet 56 '. The drive motor 68 is located on the pressure side of the turbomolecular pump stage 52 '. This pressure side is connected to the suction side of the molecular pumping stage 53 via the bypass 67.

Claims (11)

  1. Seal between a rotating and a stationary component, wherein at least one of the components is equipped with projections that project into the sealing gap, characterized in that the sealing gap (5) extends approximately radially, that both components are equipped with axially extending, intermeshing projections, which are disposed concentrically with the axis of rotation of the rotating component and take the form of rows of blades.
  2. Seal according to claim 1, characterized in that the rows of blades (2, 3) have a feeding effect.
  3. Seal according to claim 1 or 2, characterized in that it is of a double-flow design.
  4. Seal according to claim 3, characterized in that the properties of the rows of blades (2, 3) forming the double-flow seal are selected in such a way that external rows of blades feed in the opposite direction to the internal rows of blades.
  5. Seal according to claim 4, characterized in that between the two groups of rows of blades forming the double-flow seal (1) an inert gas inlet (14) is provided.
  6. Seal according to one of the preceding claims, characterized in that it is a component part of a fan (20) or pump (31) and is situated between the delivery compartment and the motor compartment.
  7. Seal according to claim 6, characterized in that it has a feeding effect in suction chamber direction.
  8. Seal according to claim 6, characterized in that it is a component part of a turbomolecular vacuum pump, that it has a feeding effect in motor compartment direction and that the motor compartment is connected by a bypass (67) to a backing-pressure pumping stage.
  9. Seal according to claim 8, characterized in that the motor compartment (41) is situated at the suction side of the turbomolecular vacuum pump.
  10. Seal according to one of claims 1 to 5, characterized in that it is a component part of a turbomolecular vacuum pump having at least two inlets (56, 56') and is situated between the inlet areas.
  11. Seal according to claim 10, characterized in that it has a feeding effect and that its periphery is connected to a first inlet area and its centre to a second inlet area.
EP00988779A 2000-02-01 2000-12-09 Dynamic seal Expired - Lifetime EP1252446B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10004263A DE10004263A1 (en) 2000-02-01 2000-02-01 Seal between stationary and rotating component in vacuum pump consists of blades arranged in herringbone pattern attached to each component
DE10004263 2000-02-01
PCT/EP2000/012469 WO2001057403A1 (en) 2000-02-01 2000-12-09 Dynamic seal

Publications (2)

Publication Number Publication Date
EP1252446A1 EP1252446A1 (en) 2002-10-30
EP1252446B1 true EP1252446B1 (en) 2008-10-08

Family

ID=7629398

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00988779A Expired - Lifetime EP1252446B1 (en) 2000-02-01 2000-12-09 Dynamic seal

Country Status (5)

Country Link
US (1) US6705844B2 (en)
EP (1) EP1252446B1 (en)
JP (1) JP4805515B2 (en)
DE (2) DE10004263A1 (en)
WO (1) WO2001057403A1 (en)

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Also Published As

Publication number Publication date
WO2001057403A1 (en) 2001-08-09
DE50015396D1 (en) 2008-11-20
DE10004263A1 (en) 2001-08-02
EP1252446A1 (en) 2002-10-30
US6705844B2 (en) 2004-03-16
US20030108440A1 (en) 2003-06-12
JP4805515B2 (en) 2011-11-02
JP2003521651A (en) 2003-07-15

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