EP3327293B1 - Vacuum pump having multiple inlets - Google Patents

Vacuum pump having multiple inlets Download PDF

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Publication number
EP3327293B1
EP3327293B1 EP16200272.9A EP16200272A EP3327293B1 EP 3327293 B1 EP3327293 B1 EP 3327293B1 EP 16200272 A EP16200272 A EP 16200272A EP 3327293 B1 EP3327293 B1 EP 3327293B1
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EP
European Patent Office
Prior art keywords
inlets
vacuum pump
pump
housing
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP16200272.9A
Other languages
German (de)
French (fr)
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EP3327293A1 (en
Inventor
Tobias Stoll
Michael Schweighöfer
Martin Lohse
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP16200272.9A priority Critical patent/EP3327293B1/en
Priority to JP2017192675A priority patent/JP6479127B2/en
Publication of EP3327293A1 publication Critical patent/EP3327293A1/en
Application granted granted Critical
Publication of EP3327293B1 publication Critical patent/EP3327293B1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/50—Inlet or outlet
    • F05D2250/51—Inlet

Definitions

  • the present invention relates to a vacuum pump, in particular turbomolecular pump, comprising a housing having at least two separate inlets for connecting at least one recipient, at least one pumping stage arranged in the housing for conveying fluid, in particular from the at least one recipient aspirated fluid, in the direction of a housing provided outlet of the vacuum pump, wherein the pumping stage has at least one with respect to a stator rotatable about a rotation axis rotor, wherein the stator and the rotor are configured such that they cause a pumping action with rotating rotor through which the fluid promotes in the direction of the outlet becomes.
  • Such vacuum pumps are known from the prior art. They are also referred to as split-flow vacuum pumps or as multi-inlet vacuum pumps.
  • the WO 2004/068099 A1 discloses a high vacuum pump with leak detector and connected test gas detector.
  • the DE 20 2013 010 204 U1 shows a multi-inlet vacuum pump, which has an intermediate inlet in the region of a Holweckcut.
  • a vacuum pump is shown, which can achieve a very high pumping speed by means of a flange with multiple gas inlet openings.
  • the present invention has for its object to provide an improved vacuum pump with at least two separate inlets, the vacuum pump can be realized in a compact design.
  • a vacuum pump according to the invention in particular turbomolecular pump, preferably split-flow pump, comprises a housing with at least two separate inlets for connecting at least one recipient, at least one pumping stage arranged in the housing for conveying fluid, in particular from the at least one recipient aspirated fluid, in the direction of housing provided on the housing of the vacuum pump, wherein the pumping stage has at least one relative to a stator rotatable about a rotation axis rotor, wherein the stator and the rotor are configured such that they cause a pumping action with rotating rotor, through which the fluid in the direction of Outlet is promoted, and wherein the at least two inlets in the circumferential direction of the rotor seen offset from each other on the housing are arranged and at least one plane extending perpendicular to the axis of rotation extends through the at least two inlets.
  • the inlets are at least substantially at the same axial height on the housing of the vacuum pump.
  • the axial length of the vacuum pump according to the invention can be kept short.
  • the vacuum pump according to the invention can therefore be made compact and thus realize in a compact design.
  • a main inlet may be provided in addition to the at least two inlets on the housing.
  • the main inlet is located at an axial end of the housing, in particular at the end face of the housing lying at the axial end, wherein, preferably, the at least two inlets are not provided on this housing front side.
  • the main inlet and also the other inlets may in particular be ports of the vacuum pump, to which containers or receptacles to be evacuated can be connected.
  • the plane passing through the at least two inlets preferably does not pass through the main inlet.
  • the at least two inlets are thus seen in the axial direction offset from the main inlet.
  • the inlets are, in particular, secondary inlets at which the at least one pumping stage develops a lower pumping action than at the main inlet.
  • the inlets are preferably located at the other axial end of the housing, which faces the axial end with the main inlet.
  • the inlets may be arranged or formed on the peripheral surface of the housing. They are therefore preferably not on the housing front side at the other axial end of the housing.
  • the main inlet is located at an upper axial end of the housing, in particular at the upper end side, while the inlets are located at a lower axial end of the housing.
  • Each of the inlets may have an inlet opening with a center.
  • the inlet opening may be at least approximately circular, square or rectangular.
  • the plane passes through the midpoints the inlets.
  • the inlets can therefore be exactly at the same height, whereby a particularly compact design can be realized.
  • the plane can not pass through the center of at least one of the inlets.
  • the centers and thus the at least two inlets can therefore have an at least slight offset in the axial direction.
  • the axial offset of two inlets is preferably smaller than the sum of the radii of the two inlets.
  • the inlets are thus, although not exactly, still at least substantially at the same axial height, so that a compact, short design of the vacuum pump can be realized.
  • each inlet opening has a certain area, wherein at least 25%, preferably at least 30%, more preferably at least 40% and even more preferably at least 50% of the areas of the inlet openings are located at the same axial height when viewed in the axial direction. With reference to the axial direction, this results in a partial overlap of the inlet openings. It can thus be achieved that the inlet openings are at least substantially at the same axial height, and the vacuum pump can be realized in a compact design.
  • the inlets may be so connected to the pumping stage or be in fluid communication that at the inlets different pressure levels are generated.
  • the pumping stage therefore develops different pumping effects at the inlets.
  • the inlets may be connected to the pumping stage or in fluid communication with the pumping stage such that at least approximately the same pressure levels are created at the inlets.
  • the plane which intersects the inlets extends according to the invention through the outlet of the vacuum pump.
  • the inlets can thus be at least substantially at the same axial height as the outlet. This allows a particularly compact, axially short design of the vacuum pump can be realized.
  • the outlet is seen in the direction of rotation to the inlets offset from the housing arranged or formed. Preferably, the outlet is seen in the direction of rotation between the at least two inlets.
  • the outlet may have a circular, square or rectangular outlet opening.
  • the outlet opening may have a center point.
  • the plane may pass through the centers of the openings of the inlets and through the center of the outlet opening. This can be achieved that the outlet and the inlets are exactly at the same axial height. The compactness can be further improved. However, it may also be provided an at least slight axial offset between the mentioned centers.
  • the vacuum pump may have at least one Holweckpumptreatment, wherein the at least two inlets open into the Holweckpump thesis.
  • the inlets can thus be fluidly connected or coupled to the Holweckpumpcut.
  • the arrangement of the inlets on the at least substantially the same axial height of the vacuum pump can be realized particularly easily using a Holweckpumpcut, since the coupling between an inlet and Holweckpumptreatment can be particularly easily realized, for example by a channel which extends from the outside of the housing extends radially inward to the Holweckspalt the Holweckpumptreatment.
  • different pressure levels at the inlets can be realized in a simple manner.
  • the Holweckpump to the radially outer Holweckpumpmeasure of at least two nested Holweckpumpsayn.
  • the vacuum pump may comprise at least one turbomolecular pump stage, wherein the at least two inlets may open into the turbomolecular pump stage.
  • the inlets may thus be fluidly connected or coupled directly to the turbomolecular pumping stage.
  • the at least one turbomolecular pumping stage is preferably connected upstream of the at least one Holweckpumpnote in the vacuum pump. That a fluid conveyed via the main inlet into the vacuum pump first flows through the turbomolecular pumping stage and then first through the holweck pumping stage. A pumping channel extending between the main inlet and the outlet thus runs first through the turbomolecular pumping stage and then through the Holweck pumping stage.
  • the secondary inlets may be, e.g. in the area of the turbomolecular pumping stage or Holweckpumplay, lead into the pumping channel.
  • the inlets are preferably not inlets of intermediate aspirations of a vacuum pump, which serve to evacuate a volume between an inner and an outer seal.
  • the invention also relates to a vacuum system comprising at least one vacuum pump according to the invention and at least one recipient connected to the vacuum pump, which has at least two outlets, which are designed to connect to the at least two inlets of the vacuum pump and arranged on the housing of the recipient, wherein vacuum seals, in particular O-rings, for sealing the vacuum connections between the outlets the recipient and the inlets of the vacuum pump are provided.
  • the seals may have different thicknesses to provide tolerance compensation.
  • the outlets of the recipient are - as the inlets in the vacuum pump - in the circumferential direction of the recipient spaced from each other and are at least substantially at the same axial height.
  • the recipient can also be made compact.
  • turbomolecular pump 111 comprises a pump inlet 115 surrounded by an inlet flange 113, to which in a conventional manner, a non-illustrated recipient can be connected.
  • the gas from the recipient may be drawn from the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, may be connected.
  • the inlet flange 113 forms according to the orientation of the vacuum pump Fig. 1 the upper end of the housing 119 of the vacuum pump 111.
  • the housing 119 comprises a lower part 121, on which an electronics housing 123 is arranged laterally.
  • Housed in the electronics housing 123 are electrical and / or electronic components of the vacuum pump 111, eg for operating an electric motor 125 arranged in the vacuum pump.
  • a plurality of connections 127 for accessories are provided on the electronics housing 123.
  • a data interface 129 for example, according to the RS485 standard, and a power supply terminal 131 on the electronics housing 123 are arranged.
  • a flood inlet 133 in particular in the form of a flood valve, is provided, via which the vacuum pump 111 can be flooded.
  • a sealing gas connection 135, which is also referred to as purge gas arranged, via which purge gas for the protection of the electric motor 125 (see, eg Fig. 3 ) can be brought before the pumped by the pump gas in the engine compartment 137, in which the electric motor 125 is housed in the vacuum pump 111.
  • two coolant connections 139 are further arranged, wherein one of the coolant connections is provided as an inlet and the other coolant connection as an outlet for coolant, which can be passed for cooling purposes in the vacuum pump.
  • the lower side 141 of the vacuum pump can serve as a base, so that the vacuum pump 111 can be operated standing on the bottom 141.
  • the vacuum pump 111 can also be fastened to a recipient via the inlet flange 113 and thus be operated to a certain extent suspended.
  • the vacuum pump 111 can be designed so that it can also be put into operation, if it is aligned differently than in Fig. 1 is shown.
  • Embodiments of the vacuum pump can also be implemented in which the lower side 141 can not be turned down but can be turned to the side or directed upwards.
  • a bearing cap 145 is attached to the bottom 141.
  • mounting holes 147 are arranged, via which the pump 111 can be attached, for example, to a support surface.
  • a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.
  • the vacuum pump comprises a plurality of process gas pumping stages for conveying the process gas pending at the pump inlet 115 to the pump outlet 117.
  • a rotor 149 is arranged, which has a about a rotation axis 151 rotatable rotor shaft 153.
  • Turbomolecular pump 111 includes a plurality of turbomolecular pump stages operatively connected in series with a plurality of rotor disks 155 mounted on rotor shaft 153 and stator disks 157 disposed between rotor disks 155 and housed in housing 119.
  • a rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular one pump stage.
  • the stator disks 157 are held by spacer rings 159 at a desired axial distance from each other.
  • the vacuum pump 111 further comprises Holweck pumping stages which are arranged one inside the other in the radial direction and which are pumpingly connected to one another in series.
  • the rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylinder shell-shaped Holweck rotor sleeves 163, 165 fastened to the rotor hub 161 and oriented coaxially with the rotation axis 151 and nested in the radial direction.
  • two cylinder jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the rotation axis 151 and, as seen in the radial direction, are nested one inside the other.
  • the pump-active surfaces of the Holweck pump stages are formed by the lateral surfaces, ie by the radial inner and / or outer surfaces, the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169.
  • the radially inner surface of the outer Holweck stator sleeve 167 faces the radially outer surface of the outer Holweck rotor sleeve 163 to form a radial Holweck gap 171 and forms with this the first Holweck pump stage following the turbomolecular pump stages.
  • the radially inner surface of the outer Holweck rotor sleeve 163 faces the radially outer surface of the inner Holweck stator sleeve 169 forming a radial Holweck gap 173 and forms with this a second Holweck pumping stage.
  • the radially inner surface of the inner Holweck stator sleeve 169 faces the radially outer surface of the inner Holweck rotor sleeve 165 to form a radial Holweck gap 175 and forms with this the third Holweck pumping stage.
  • a radially extending channel may be provided, via which the radially outer Holweck gap 171 is connected to the middle Holweck gap 173.
  • a radially extending channel may be provided, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175.
  • a connecting channel 179 to the outlet 117 may be provided at the lower end of the radially inner Holweck rotor sleeve 165.
  • the above-mentioned pump-active surfaces of the Holweck stator sleeves 163, 165 each have a plurality of Holweck grooves running around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Drive vacuum pump 111 in the Holweck grooves.
  • a roller bearing 181 in the region of the pump outlet 117 and a permanent magnet bearing 183 in the region of the pump inlet 115 are provided.
  • a conical spray nut 185 with an outer diameter increasing toward the rolling bearing 181 is provided on the rotor shaft 153.
  • the spray nut 185 is in sliding contact with at least one scraper of a resource storage.
  • the resource storage comprises a plurality of stackable absorbent discs 187 provided with a rolling bearing bearing means 181, e.g. with a lubricant, soaked.
  • the operating medium is transferred by capillary action of the resource storage on the scraper on the rotating sprayer nut 185 and promoted in the direction of increasing outer diameter of the spray nut 185 to the roller bearing 181 through where the centrifugal force along the spray nut 185 eg fulfills a lubricating function.
  • the rolling bearing 181 and the resource storage are enclosed by a trough-shaped insert 189 and the bearing cap 145 in the vacuum pump.
  • the permanent magnet bearing 183 includes a rotor-side bearing half 191 and a stator-side bearing half 193, each comprising a ring stack of a plurality of stacked in the axial direction of permanent magnetic rings 195, 197 include.
  • the ring magnets 195, 197 are opposed to each other to form a radial bearing gap 199, wherein the rotor-side ring magnets 195 are disposed radially outward and the stator-side ring magnets 197 radially inward.
  • the magnetic field present in the bearing gap 199 causes magnetic repulsive forces between the ring magnets 195, 197, which cause a radial bearing of the rotor shaft 153.
  • the rotor-side ring magnets 195 are supported by a carrier section 201 of the rotor shaft 153, which surrounds the ring magnets 195 radially on the outside.
  • the stator-side ring magnets 197 are supported by a stator-side support portion 203 which extends through the ring magnets 197 and is suspended on radial struts 205 of the housing 119.
  • Parallel to the axis of rotation 151, the rotor-side ring magnets 195 are fixed by a lid element 207 coupled to the carrier section 203.
  • the stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203. Between the fastening ring 211 and the ring magnet 197, a plate spring 213 may also be provided.
  • an emergency bearing 215 which runs empty in the normal operation of the vacuum pump 111 without contact and engages only with an excessive radial deflection of the rotor 149 relative to the stator to a radial stop for the rotor 149th to form, since a collision of the rotor-side structures with the stator-side structures is prevented.
  • the safety bearing 215 is designed as an unlubricated rolling bearing and forms with the rotor 149 and / or the stator a radial gap, which causes the safety bearing 215 is disengaged in the normal pumping operation.
  • the radial deflection at which the safety bearing 215 engages is dimensioned large enough so that the safety bearing 215 does not engage during normal operation of the vacuum pump, and at the same time small enough so that a collision of the rotor-side structures with the stator-side structures under all circumstances is prevented.
  • the vacuum pump 111 includes the electric motor 125 for rotationally driving the rotor 149.
  • the armature of the electric motor 125 is formed by the rotor 149 whose rotor shaft 153 extends through the motor stator 217.
  • On the extending through the motor stator 217 through portion of the rotor shaft 153 may radially outside or embedded a permanent magnet assembly be arranged.
  • a gap 219 is arranged, which comprises a radial motor gap, via which the motor stator 217 and the permanent magnet arrangement for the transmission of the drive torque can influence magnetically.
  • the motor stator 217 is fixed in the housing within the motor space 137 provided for the electric motor 125.
  • a sealing gas which is also referred to as purge gas, and which may be, for example, air or nitrogen, enter the engine compartment 137.
  • the electric motor 125 can be provided with process gas, e.g. against corrosive fractions of the process gas.
  • the engine compartment 137 may also be evacuated via the pump outlet 117, i. In the engine compartment 137, at least approximately, the vacuum pressure caused by the backing pump connected to the pump outlet 117 prevails.
  • delimiting wall 221 Between the rotor hub 161 and a motor space 137 delimiting wall 221 may also be a so-called. And per se known labyrinth seal 223 may be provided, in particular to achieve a better seal of the engine compartment 217 against the Holweck pump stages located radially outside.
  • the above-described vacuum pump 111 may be configured as a split-flow vacuum pump to provide two or more auxiliary inlets serving as secondary inlets, in addition to the main intake pump inlet 115 formed on the upper end side of the pump 111 Fig. 1 to 5 not shown). These sub-inlets may be arranged on the peripheral surface of the vacuum pump 111 and the housing 119, including the lower part 121, respectively.
  • the at least two secondary inlets in the direction of rotation of the rotor shaft 153 offset from each other on the housing 119, which also includes the lower part 121, arranged and at least one perpendicular to the rotation or rotation axis 151 extending plane (not shown in FIG Fig. 1 to 5 ) runs through the side inlets.
  • the secondary inlets are therefore at least substantially, with respect to the longitudinal direction of the axis of rotation 151, at the same axial height.
  • the vacuum pump 111 can be designed to be compact or relatively short, in particular in comparison to an arrangement in which the secondary inlets are arranged or formed offset relative to one another in the longitudinal direction of the rotation axis 151.
  • the secondary inlets can open into the radially outer Holweck gap 171, in such a way that at each secondary inlet a different pressure level or alternatively the same pressure level can be effected.
  • the secondary inlets may open into one of the turbomolecular pumping stages or at another location in the pumping channel.
  • Vacuum pump 33 shown in a purely schematic cross-sectional illustration comprises a housing 11, which in the manner of the housing 119 with the lower part 121, can be configured, and in addition to the main inlet 13 at least two inlets 15, of which in Fig. 6 only one inlet 15 can be seen.
  • the inlets 15 serve as secondary inlets.
  • an outlet of a recipient may be connected to evacuate the recipient via the pump 33.
  • At least one pumping stage 17 is formed in the housing 11, which may be, for example, at least one turbomolecular pumping stage, a Holweck pumping stage or a combination of turbomolecular pumping stages and downstream Holweck pumping stages.
  • the pumping stage 17 has a rotor 19, cf. the above-mentioned rotor 149, which is rotatable about a rotation axis 21 with respect to a stator (not shown) about a Pumping effect to produce.
  • the pumping action allows fluid, such as process gas or air, to be pumped from the recipient or recipients through the inlets 13, 15 into the pump and through the pump to its outlet (not shown, see the pump outlet 117 in FIG Fig. 1 ) are pumped. From there it can be pumped on, for example by means of a backing pump.
  • the at least two inlets 15 are remote from the main inlet 13 and offset in particular in the direction of rotation U of the rotor 19 to each other on the housing 11.
  • At least one plane E1 extends perpendicular to the axis of rotation 21 and through the at least two inlets 15. With respect to the axis of rotation 21 seen The two inlets 15 are thus at the same axial height of the vacuum pump 33, whereby a compact and short design of the vacuum pump 33 is possible.
  • At least one other plane E2 which is perpendicular to the axis of rotation 21 and is offset in the axial direction to the plane E1, cuts the main inlet 13th
  • the vacuum pump shown in a side view Fig. 7 comprises a housing 11 having an upper housing part 23 and a lower housing part 25.
  • the vacuum pump is the Fig. 7 like the pump according to Fig. 6 built up.
  • an unillustrated main inlet may be provided on the upper housing part 23, for example on the upper end side of the housing part 23, in a manner similar to that of the vacuum pump of FIG Fig. 1 to 5 ,
  • the vacuum pump the Fig. 7 comprises two inlets 15a, 15b, which in the direction of rotation U of a rotor 19 (see. Fig. 6 ) Seen offset from one another on the lower housing part 25 are arranged, wherein the plane perpendicular to the axis of rotation 21 extending plane E1 through the two inlets 15a, 15b.
  • the two inlets 15a, 15b may have a circular cross-section with a respective center M1 or M2, respectively.
  • the plane E1 passes through the two midpoints M1 and M2.
  • the center points M1, M2 lie with respect to the axis of rotation 21 at the same axial height.
  • the midpoints M1 and M2 can have a slight axial offset seen in the axial direction, which is preferably smaller than the sum of the radii of the cross-sectional areas.
  • the plane E1 can not run through both centers M1 and M2 simultaneously, but very well cut both inlets 15a, 15b.
  • the inlets 15a, 15b then have slightly different axial heights.
  • the vacuum pump the Fig. 8 is like the vacuum pump the Fig. 7 constructed and shows an inventive arrangement of the two inlets 15a, 15b and the outlet 27. So is the case of the vacuum pump Fig. 8 the outlet 27 seen in the circumferential direction U between the two inlets 15a, 15b.
  • the outlet 27 has a circular outlet opening through whose center M3 the plane E1 extends. The same applies to the centers M1, M2 of the inlet openings of the inlets 15a, 15b.
  • the outlet 27 is thus exactly at the same axial height as the two inlets 15a, 15b.
  • the vacuum system 31 of the Fig. 9 comprises a vacuum pump 33 as described above and a recipient 35 with chambers 37, 39.
  • the one chamber 37 is vacuum-tightly connected to the main inlet 13 of the vacuum pump 33, while the other chamber 39 is vacuum-tightly connected to the one auxiliary inlet 15a.
  • other secondary inlet 15b is a further, not shown chamber of the recipient 35 vacuum-tight connected.
  • the chamber 37 jumps in the radial direction, relative to the axis of rotation 21, relative to the chamber 39 something out.
  • a thick seal 41 in particular O-ring seal
  • a thin seal 43 in particular O-ring seal
  • the vacuum pumps described allow a compact design, since the secondary inlets 15, 15a, 15b are arranged at least substantially at the same axial height.
  • the secondary inlets 15, 15a, 15b can be connected to the pumping stages such that different pressure levels are effected in the inlets during pump operation.

Description

Die vorliegende Erfindung betrifft eine Vakuumpumpe, insbesondere Turbomolekularpumpe, umfassend ein Gehäuse mit wenigstens zwei voneinander getrennten Einlässen zum Anschließen wenigstens eines Rezipients, wenigstens eine im Gehäuse angeordnete Pumpstufe zum Fördern von Fluid, insbesondere aus dem wenigstens einen Rezipient abgesaugtes Fluid, in Richtung eines am Gehäuse vorgesehenen Auslasses der Vakuumpumpe, wobei die Pumpstufe wenigstens einen gegenüber einem Stator um eine Drehachse drehbaren Rotor aufweist, wobei der Stator und der Rotor derart ausgestaltet sind, dass diese bei sich drehendem Rotor eine Pumpwirkung bewirken, durch welche das Fluid in die Richtung des Auslasses gefördert wird.The present invention relates to a vacuum pump, in particular turbomolecular pump, comprising a housing having at least two separate inlets for connecting at least one recipient, at least one pumping stage arranged in the housing for conveying fluid, in particular from the at least one recipient aspirated fluid, in the direction of a housing provided outlet of the vacuum pump, wherein the pumping stage has at least one with respect to a stator rotatable about a rotation axis rotor, wherein the stator and the rotor are configured such that they cause a pumping action with rotating rotor through which the fluid promotes in the direction of the outlet becomes.

Derartige Vakuumpumpen sind aus dem Stand der Technik bekannt. Sie werden auch als Splitflow-Vakuumpumpen oder als Multi-Inlet-Vakuumpumpen bezeichnet. Die WO 2004/068099 A1 offenbart eine Hochvakuumpumpe mit Lecksuchgerät und angeschlossenem Testgasdetektor. In der EP 2 975 268 A2 wird ein Vakuumsystem beschrieben, wobei in dem an die Vakuumpumpe angeschlossenen Rezipienten dauerhaft Drücke im Bereich des Ultrahochvakuums erreichbar sind. Die DE 20 2013 010 204 U1 zeigt eine Multi-Inlet-Vakuumpumpe auf, welche im Bereich einer Holweckstufe einen Zwischeneinlass aufweist. In der EP 1 626 179 A2 wird eine Vakuumpumpe dargestellt, welche mit Hilfe eines Flansches mit mehreren Gaseintrittsöffnungen ein sehr hohes Saugvermögen erzielen kann.Such vacuum pumps are known from the prior art. They are also referred to as split-flow vacuum pumps or as multi-inlet vacuum pumps. The WO 2004/068099 A1 discloses a high vacuum pump with leak detector and connected test gas detector. In the EP 2 975 268 A2 describes a vacuum system, wherein in the connected to the vacuum pump recipient permanently pressures in the range of ultra-high vacuum can be achieved. The DE 20 2013 010 204 U1 shows a multi-inlet vacuum pump, which has an intermediate inlet in the region of a Holweckstufe. In the EP 1 626 179 A2 a vacuum pump is shown, which can achieve a very high pumping speed by means of a flange with multiple gas inlet openings.

Bei derartigen, mehrere Einlässe aufweisenden Vakuumpumpen tritt das Problem auf, dass sich diese nicht in einfacher Weise in kompakter Form realisieren lassen, da die mehreren Einlässe einen entsprechend großen Bauraum am Gehäuse der Vakuumpumpe benötigen.In such, several inlets having vacuum pumps, the problem arises that they can not be implemented in a simple manner in a compact form, since the multiple inlets require a correspondingly large space on the housing of the vacuum pump.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine verbesserte Vakuumpumpe mit wenigstens zwei voneinander getrennten Einlässen bereitzustellen, wobei die Vakuumpumpe in einer kompakten Bauform realisiert werden kann.The present invention has for its object to provide an improved vacuum pump with at least two separate inlets, the vacuum pump can be realized in a compact design.

Die Aufgabe wird durch eine Vakuumpumpe mit den Merkmalen des Anspruchs 1 gelöst. Bevorzugte Ausführungsformen und Weiterbildungen der Erfindung sind in den abhängigen Ansprüchen angegeben.The object is achieved by a vacuum pump with the features of claim 1. Preferred embodiments and further developments of the invention are specified in the dependent claims.

Eine erfindungsgemäße Vakuumpumpe, insbesondere Turbomolekularpumpe, vorzugsweise Splitflow-Pumpe, umfasst ein Gehäuse mit wenigstens zwei voneinander getrennten Einlässen zum Anschließen wenigstens eines Rezipients, wenigstens eine im Gehäuse angeordnete Pumpstufe zum Fördern von Fluid, insbesondere aus dem wenigstens einen Rezipient abgesaugtes Fluid, in Richtung eines am Gehäuse vorgesehenen Auslasses der Vakuumpumpe, wobei die Pumpstufe wenigstens einen gegenüber einem Stator um eine Drehachse drehbaren Rotor aufweist, wobei der Stator und der Rotor derart ausgestaltet sind, dass diese bei sich drehendem Rotor eine Pumpwirkung bewirken, durch welche das Fluid in die Richtung des Auslasses gefördert wird, und wobei die wenigstens zwei Einlässe in Umlaufrichtung des Rotors gesehen versetzt zueinander am Gehäuse angeordnet sind und zumindest eine senkrecht zur Drehachse verlaufende Ebene durch die wenigstens zwei Einlässe verläuft.A vacuum pump according to the invention, in particular turbomolecular pump, preferably split-flow pump, comprises a housing with at least two separate inlets for connecting at least one recipient, at least one pumping stage arranged in the housing for conveying fluid, in particular from the at least one recipient aspirated fluid, in the direction of housing provided on the housing of the vacuum pump, wherein the pumping stage has at least one relative to a stator rotatable about a rotation axis rotor, wherein the stator and the rotor are configured such that they cause a pumping action with rotating rotor, through which the fluid in the direction of Outlet is promoted, and wherein the at least two inlets in the circumferential direction of the rotor seen offset from each other on the housing are arranged and at least one plane extending perpendicular to the axis of rotation extends through the at least two inlets.

Da bei der erfindungsgemäßen Vakuumpumpe die Ebene senkrecht zur Drehachse und außerdem durch die beiden Einlässe verläuft bzw. die beiden Einlässe schneidet, liegen die Einlässe zumindest im Wesentlichen auf der gleichen axialen Bauhöhe am Gehäuse der Vakuumpumpe. Im Unterschied zu einer längs der axialen Richtung versetzten Anordnung der Einlässe kann somit die axiale Länge der erfindungsgemäßen Vakuumpumpe kurz gehalten werden. Die erfindungsgemäße Vakuumpumpe lässt sich daher kompakt ausgestalten und somit in kompakter Bauform realisieren.Since in the vacuum pump according to the invention, the plane perpendicular to the axis of rotation and also passes through the two inlets and cuts the two inlets, the inlets are at least substantially at the same axial height on the housing of the vacuum pump. In contrast to an offset along the axial direction arrangement of the inlets, thus the axial length of the vacuum pump according to the invention can be kept short. The vacuum pump according to the invention can therefore be made compact and thus realize in a compact design.

Mit den Begriffen "axial" und "axiale Richtung" wird auf eine längs der Drehachse verlaufende Richtung abgestellt, während mit dem Begriff "Umlaufrichtung" auf eine in Umfangsrichtung um die Drehachse herum verlaufende Richtung abgestellt wird.With the terms "axial" and "axial direction" is turned off in a direction extending along the axis of rotation, while with the term "circulation direction" on a parked in the circumferential direction about the axis of rotation around direction is turned off.

Bei der erfindungsgemäßen Vakuumpumpe kann ein Haupteinlass zusätzlich zu den wenigstens zwei Einlässen am Gehäuse vorgesehen sein. Vorzugsweise befindet sich der Haupteinlass an einem axialen Ende des Gehäuses, insbesondere an der am axialen Ende liegenden Stirnseite des Gehäuses, wobei, bevorzugt, die wenigstens zwei Einlässe nicht an dieser Gehäusestirnseite vorgesehen sind.In the vacuum pump according to the invention, a main inlet may be provided in addition to the at least two inlets on the housing. Preferably, the main inlet is located at an axial end of the housing, in particular at the end face of the housing lying at the axial end, wherein, preferably, the at least two inlets are not provided on this housing front side.

Bei dem Haupteinlass und auch bei den anderen Einlässen kann es sich insbesondere um Ports der Vakuumpumpe handeln, an die zu evakuierende Behälter bzw. Rezipienten anschließbar sind.The main inlet and also the other inlets may in particular be ports of the vacuum pump, to which containers or receptacles to be evacuated can be connected.

Die Ebene, welche durch die wenigstens zwei Einlässe verläuft, läuft vorzugsweise nicht durch den Haupteinlass. Die wenigstens zwei Einlässe liegen somit in axialer Richtung gesehen versetzt zum Haupteinlass. Bei den Einlässen handelt es sich insbesondere um Nebeneinlässe, an denen die wenigstens eine Pumpstufe eine geringere Pumpwirkung entfaltet als am Haupteinlass.The plane passing through the at least two inlets preferably does not pass through the main inlet. The at least two inlets are thus seen in the axial direction offset from the main inlet. The inlets are, in particular, secondary inlets at which the at least one pumping stage develops a lower pumping action than at the main inlet.

Die Einlässe liegen vorzugsweise an dem anderen axialen Ende des Gehäuses, welches dem axialen Ende mit dem Haupteinlass gegenüberliegt. Die Einlässe können an der Umfangsfläche des Gehäuses angeordnet oder ausgebildet sein. Sie liegen daher vorzugsweise nicht an der Gehäusestirnseite an dem anderen axialen Ende des Gehäuses. Vorzugsweise liegt der Haupteinlass an einem oberen axialen Ende des Gehäuses, insbesondere an der oberen Stirnseite, während die Einlässe an einem unteren axialen Ende des Gehäuses liegen.The inlets are preferably located at the other axial end of the housing, which faces the axial end with the main inlet. The inlets may be arranged or formed on the peripheral surface of the housing. They are therefore preferably not on the housing front side at the other axial end of the housing. Preferably, the main inlet is located at an upper axial end of the housing, in particular at the upper end side, while the inlets are located at a lower axial end of the housing.

Jeder der Einlässe kann eine Einlassöffnung mit einem Mittelpunkt aufweisen. Die Einlassöffnung kann zumindest annähernd kreisförmig, quadratisch oder rechteckig ausgebildet sein. Vorzugsweise verläuft die Ebene durch die Mittelpunkte der Einlässe. Die Einlässe können daher exakt auf der gleichen Bauhöhe liegen, wodurch eine besonders kompakte Bauform realisiert werden kann.Each of the inlets may have an inlet opening with a center. The inlet opening may be at least approximately circular, square or rectangular. Preferably, the plane passes through the midpoints the inlets. The inlets can therefore be exactly at the same height, whereby a particularly compact design can be realized.

Die Ebene kann auch nicht durch den Mittelpunkt von zumindest einem der Einlässe verlaufen. Die Mittelpunkte und somit die wenigstens zwei Einlässe können daher in axialer Richtung gesehen einen zumindest leichten Versatz aufweisen. Der axiale Versatz zweier Einlässe ist dabei bevorzugt kleiner als die Summe der Radien der beiden Einlässe. Die Einlässe liegen somit, wenn auch nicht exakt, immer noch zumindest im Wesentlichen auf der gleichen axialen Bauhöhe, so dass sich eine kompakte, kurze Bauform der Vakuumpumpe realisieren lässt.Also, the plane can not pass through the center of at least one of the inlets. The centers and thus the at least two inlets can therefore have an at least slight offset in the axial direction. The axial offset of two inlets is preferably smaller than the sum of the radii of the two inlets. The inlets are thus, although not exactly, still at least substantially at the same axial height, so that a compact, short design of the vacuum pump can be realized.

Vorzugsweise weist jede Einlassöffnung eine bestimmte Fläche auf, wobei zumindest 25%, bevorzugt zumindest 30%, weiter bevorzugt zumindest 40% und noch weiter bevorzugt zumindest 50% der Flächen der Einlassöffnungen in axialer Richtung gesehen auf derselben axialen Höhe liegen. Auf die axiale Richtung bezogen ergibt sich somit eine teilweise Überlappung der Einlassöffnungen. Dadurch kann erreicht werden, dass die Einlassöffnungen zumindest im Wesentlichen auf der gleichen axialen Bauhöhe liegen, und die Vakuumpumpe kann in kompakter Bauform realisiert werden.Preferably, each inlet opening has a certain area, wherein at least 25%, preferably at least 30%, more preferably at least 40% and even more preferably at least 50% of the areas of the inlet openings are located at the same axial height when viewed in the axial direction. With reference to the axial direction, this results in a partial overlap of the inlet openings. It can thus be achieved that the inlet openings are at least substantially at the same axial height, and the vacuum pump can be realized in a compact design.

Die Einlässe können derart mit der Pumpstufe verbunden sein bzw. damit in Fluidverbindung stehen, dass an den Einlässen unterschiedliche Druckniveaus erzeugt werden. Die Pumpstufe entfaltet daher unterschiedliche Pumpwirkungen an den Einlässen.The inlets may be so connected to the pumping stage or be in fluid communication that at the inlets different pressure levels are generated. The pumping stage therefore develops different pumping effects at the inlets.

Alternativ können die Einlässe derart mit der Pumpstufe verbunden sein bzw. derart mit der Pumpstufe in Fluidverbindung sein, dass zumindest annähernd die gleichen Druckniveaus an den Einlässen erzeugt werden.Alternatively, the inlets may be connected to the pumping stage or in fluid communication with the pumping stage such that at least approximately the same pressure levels are created at the inlets.

Die Ebene, welche die Einlässe schneidet, verläuft erfindungsgemäß durch den Auslass der Vakuumpumpe. Die Einlässe können somit zumindest im Wesentlichen auf der gleichen axialen Bauhöhe liegen wie der Auslass. Dadurch kann eine besonders kompakte, axial kurze Bauform der Vakuumpumpe realisiert werden. Der Auslass ist dabei in Umlaufrichtung gesehen zu den Einlässen versetzt am Gehäuse angeordnet bzw. ausgebildet. Vorzugsweise befindet sich der Auslass in Umlaufrichtung gesehen zwischen den wenigstens zwei Einlässen. Der Auslass kann eine kreisförmige, quadratische oder rechteckige Auslassöffnung aufweisen.The plane which intersects the inlets extends according to the invention through the outlet of the vacuum pump. The inlets can thus be at least substantially at the same axial height as the outlet. This allows a particularly compact, axially short design of the vacuum pump can be realized. The outlet is seen in the direction of rotation to the inlets offset from the housing arranged or formed. Preferably, the outlet is seen in the direction of rotation between the at least two inlets. The outlet may have a circular, square or rectangular outlet opening.

Insbesondere kann die Auslassöffnung einen Mittelpunkt aufweisen. Die Ebene kann durch die Mittelpunkte der Öffnungen der Einlässe und durch den Mittelpunkt der Auslassöffnung verlaufen. Dadurch kann erreicht werden, dass der Auslass und die Einlässe exakt auf der gleichen axialen Bauhöhe liegen. Die Kompaktheit kann dadurch weiter verbessert werden. Es kann allerdings auch ein zumindest leichter axialer Versatz zwischen den erwähnten Mittelpunkten vorgesehen sein.In particular, the outlet opening may have a center point. The plane may pass through the centers of the openings of the inlets and through the center of the outlet opening. This can be achieved that the outlet and the inlets are exactly at the same axial height. The compactness can be further improved. However, it may also be provided an at least slight axial offset between the mentioned centers.

Die Vakuumpumpe kann wenigstens eine Holweckpumpstufe aufweisen, wobei die wenigstens zwei Einlässe in die Holweckpumpstufe münden. Die Einlässe können somit mit der Holweckpumpstufe fluidisch verbunden bzw. gekoppelt sein.The vacuum pump may have at least one Holweckpumpstufe, wherein the at least two inlets open into the Holweckpumpstufe. The inlets can thus be fluidly connected or coupled to the Holweckpumpstufe.

Die Anordnung der Einlässe auf der zumindest im Wesentlichen gleichen axialen Bauhöhe der Vakuumpumpe lässt sich unter Verwendung einer Holweckpumpstufe besonders einfach realisieren, da die Ankopplung zwischen einem Einlass und der Holweckpumpstufe besonders einfach realisiert werden kann, z.B. durch einen Kanal, welcher sich von der Gehäuseaußenseite nach radial innen bis in den Holweckspalt der Holweckpumpstufe erstreckt. Außerdem lassen sich unterschiedliche Druckniveaus an den Einlässen auf einfache Weise realisieren.The arrangement of the inlets on the at least substantially the same axial height of the vacuum pump can be realized particularly easily using a Holweckpumpstufe, since the coupling between an inlet and Holweckpumpstufe can be particularly easily realized, for example by a channel which extends from the outside of the housing extends radially inward to the Holweckspalt the Holweckpumpstufe. In addition, different pressure levels at the inlets can be realized in a simple manner.

Vorzugsweise handelt es sich bei der Holweckpumpstufe um die radial außenliegende Holweckpumpstufe von wenigstens zwei ineinander geschachtelten Holweckpumpstufen.Preferably, the Holweckpumpstufe to the radially outer Holweckpumpstufe of at least two nested Holweckpumpstufen.

Die Vakuumpumpe kann wenigstens eine turbomolekularpumpe Pumpstufe aufweisen, wobei die wenigstens zwei Einlässe in die turbomolekularpumpe Pumpstufe münden können. Die Einlässe können somit direkt mit der turbomolekularen Pumpstufe fluidisch verbunden bzw. gekoppelt sein. Dadurch lassen sich insbesondere im Vergleich zu einer Ankopplung der Einlässe an eine Holweckpumpstufe tiefere Druckniveaus in den Einlässen realisieren.The vacuum pump may comprise at least one turbomolecular pump stage, wherein the at least two inlets may open into the turbomolecular pump stage. The inlets may thus be fluidly connected or coupled directly to the turbomolecular pumping stage. As a result, lower pressure levels in the inlets can be realized in particular in comparison to a coupling of the inlets to a Holweckpumpstufe.

Die wenigstens eine turbomolekulare Pumpstufe ist in der Vakuumpumpe vorzugsweise der wenigstens einen Holweckpumpstufe vorgeschaltet. D.h. ein über den Haupteinlass in die Vakuumpumpe gefördertes Fluid durchströmt zuerst die turbomolekulare Pumpstufe und danach erst die Holweckpumpstufe. Ein sich zwischen Haupteinlass und Auslass erstreckender Pumpkanal verläuft somit zuerst durch die turbomolekulare Pumpstufe und anschließend durch die Holweckpumpstufe. Die Nebeneinlässe können, z.B. im Bereich der turbomolekularen Pumpstufe oder der Holweckpumpstufe, in den Pumpkanal münden.The at least one turbomolecular pumping stage is preferably connected upstream of the at least one Holweckpumpstufe in the vacuum pump. That a fluid conveyed via the main inlet into the vacuum pump first flows through the turbomolecular pumping stage and then first through the holweck pumping stage. A pumping channel extending between the main inlet and the outlet thus runs first through the turbomolecular pumping stage and then through the Holweck pumping stage. The secondary inlets may be, e.g. in the area of the turbomolecular pumping stage or Holweckpumpstufe, lead into the pumping channel.

Bei den Einlässen handelt es sich bevorzugt nicht um Einlässe von Zwischenabsaugungen einer Vakuumpumpe, die dazu dienen, ein Volumen zwischen einer inneren und einer äußeren Dichtung zu evakuieren.The inlets are preferably not inlets of intermediate aspirations of a vacuum pump, which serve to evacuate a volume between an inner and an outer seal.

Die Erfindung betrifft außerdem ein Vakuumsystem mit wenigstens einer erfindungsgemäßen Vakuumpumpe und mit wenigstens einem an die Vakuumpumpe angeschlossenen Rezipient, der wenigstens zwei Auslässe aufweist, welche zum Anschließen an die wenigstens zwei Einlässe der Vakuumpumpe ausgebildet und am Gehäuse des Rezipients angeordnet sind, wobei Vakuumdichtungen, insbesondere O-Ringe, zur Abdichtung der Vakuumverbindungen zwischen den Auslässen des Rezipients und den Einlässen der Vakuumpumpe vorgesehen sind bzw. werden. Die Dichtungen können verschiedene Dicken aufweisen, um einen Toleranzausgleich zu schaffen. Die Auslässe des Rezipients sind - entsprechend wie die Einlässe bei der Vakuumpumpe - in Umfangsrichtung des Rezipients voneinander beabstandet und liegen zumindest im Wesentlichen auf der gleichen axialen Bauhöhe. Der Rezipient kann dadurch ebenfalls kompakt ausgestaltet werden.The invention also relates to a vacuum system comprising at least one vacuum pump according to the invention and at least one recipient connected to the vacuum pump, which has at least two outlets, which are designed to connect to the at least two inlets of the vacuum pump and arranged on the housing of the recipient, wherein vacuum seals, in particular O-rings, for sealing the vacuum connections between the outlets the recipient and the inlets of the vacuum pump are provided. The seals may have different thicknesses to provide tolerance compensation. The outlets of the recipient are - as the inlets in the vacuum pump - in the circumferential direction of the recipient spaced from each other and are at least substantially at the same axial height. The recipient can also be made compact.

Nachfolgend wird die Erfindung beispielhaft anhand vorteilhafter Ausführungsformen unter Bezugnahme auf die beigefügten Figuren beschrieben. Es zeigen, jeweils schematisch:

Fig. 1
eine perspektivische Ansicht einer Turbomolekularpumpe,
Fig. 2
eine Ansicht der Unterseite der Turbomolekularpumpe von Fig. 1,
Fig. 3
einen Querschnitt der Turbomolekularpumpe längs der in Fig. 2 gezeigten Schnittlinie A-A,
Fig. 4
eine Querschnittsansicht der Turbomolekularpumpe längs der in Fig. 2 gezeigten Schnittlinie B-B,
Fig. 5
eine Querschnittsansicht der Turbomolekularpumpe längs der in Fig. 2 gezeigten Schnittlinie C-C,
Fig. 6
eine Querschnittsdarstellung einer Vakuumpumpe,
Fig. 7
eine seitliche Ansicht einer weiteren Vakuumpumpe,
Fig. 8
eine seitliche Ansicht einer erfindungsgemäßen Vakuumpumpe, und
Fig. 9
eine Querschnittsdarstellung eines erfindungsgemäßen Vakuumsystems.
The invention will be described by way of example with reference to advantageous embodiments with reference to the accompanying figures. It show, each schematically:
Fig. 1
a perspective view of a turbomolecular pump,
Fig. 2
a view of the bottom of the turbomolecular pump from Fig. 1 .
Fig. 3
a cross section of the turbomolecular pump along in Fig. 2 shown section line AA,
Fig. 4
a cross-sectional view of the turbomolecular pump along in Fig. 2 shown section line BB,
Fig. 5
a cross-sectional view of the turbomolecular pump along in Fig. 2 shown section line CC,
Fig. 6
a cross-sectional view of a vacuum pump,
Fig. 7
a side view of another vacuum pump,
Fig. 8
a side view of a vacuum pump according to the invention, and
Fig. 9
a cross-sectional view of a vacuum system according to the invention.

Die in Fig. 1 gezeigte Turbomolekularpumpe 111 umfasst einen von einem Einlassflansch 113 umgebenen Pumpeneinlass 115, an welchen in an sich bekannter Weise ein nicht dargestellter Rezipient angeschlossen werden kann. Das Gas aus dem Rezipienten kann über den Pumpeneinlass 115 aus dem Rezipienten gesaugt und durch die Pumpe hindurch zu einem Pumpenauslass 117 gefördert werden, an den eine Vorvakuumpumpe, wie etwa eine Drehschieberpumpe, angeschlossen sein kann.In the Fig. 1 shown turbomolecular pump 111 comprises a pump inlet 115 surrounded by an inlet flange 113, to which in a conventional manner, a non-illustrated recipient can be connected. The gas from the recipient may be drawn from the recipient via the pump inlet 115 and conveyed through the pump to a pump outlet 117 to which a backing pump, such as a rotary vane pump, may be connected.

Der Einlassflansch 113 bildet bei der Ausrichtung der Vakuumpumpe gemäß Fig. 1 das obere Ende des Gehäuses 119 der Vakuumpumpe 111. Das Gehäuse 119 umfasst ein Unterteil 121, an welchem seitlich ein Elektronikgehäuse 123 angeordnet ist. In dem Elektronikgehäuse 123 sind elektrische und/oder elektronische Komponenten der Vakuumpumpe 111 untergebracht, z.B. zum Betreiben eines in der Vakuumpumpe angeordneten Elektromotors 125. Am Elektronikgehäuse 123 sind mehrere Anschlüsse 127 für Zubehör vorgesehen. Außerdem sind eine Datenschnittstelle 129, z.B. gemäß dem RS485-Standard, und ein Stromversorgungsanschluss 131 am Elektronikgehäuse 123 angeordnet.The inlet flange 113 forms according to the orientation of the vacuum pump Fig. 1 the upper end of the housing 119 of the vacuum pump 111. The housing 119 comprises a lower part 121, on which an electronics housing 123 is arranged laterally. Housed in the electronics housing 123 are electrical and / or electronic components of the vacuum pump 111, eg for operating an electric motor 125 arranged in the vacuum pump. A plurality of connections 127 for accessories are provided on the electronics housing 123. In addition, a data interface 129, for example, according to the RS485 standard, and a power supply terminal 131 on the electronics housing 123 are arranged.

Am Gehäuse 119 der Turbomolekularpumpe 111 ist ein Fluteinlass 133, insbesondere in Form eines Flutventils, vorgesehen, über den die Vakuumpumpe 111 geflutet werden kann. Im Bereich des Unterteils 121 ist ferner noch ein Sperrgasanschluss 135, der auch als Spülgasanschluss bezeichnet wird, angeordnet, über welchen Spülgas zum Schutz des Elektromotors 125 (siehe z.B. Fig. 3) vor dem von der Pumpe geförderten Gas in den Motorraum 137, in welchem der Elektromotor 125 in der Vakuumpumpe 111 untergebracht ist, gebracht werden kann. Im Unterteil 121 sind ferner noch zwei Kühlmittelanschlüsse 139 angeordnet, wobei einer der Kühlmittelanschlüsse als Einlass und der andere Kühlmittelanschluss als Auslass für Kühlmittel vorgesehen ist, das zu Kühlzwecken in die Vakuumpumpe geleitet werden kann.On the housing 119 of the turbomolecular pump 111, a flood inlet 133, in particular in the form of a flood valve, is provided, via which the vacuum pump 111 can be flooded. In the region of the lower part 121 is still a sealing gas connection 135, which is also referred to as purge gas, arranged, via which purge gas for the protection of the electric motor 125 (see, eg Fig. 3 ) can be brought before the pumped by the pump gas in the engine compartment 137, in which the electric motor 125 is housed in the vacuum pump 111. In the lower part 121 two coolant connections 139 are further arranged, wherein one of the coolant connections is provided as an inlet and the other coolant connection as an outlet for coolant, which can be passed for cooling purposes in the vacuum pump.

Die untere Seite 141 der Vakuumpumpe kann als Standfläche dienen, sodass die Vakuumpumpe 111 auf der Unterseite 141 stehend betrieben werden kann. Die Vakuumpumpe 111 kann aber auch über den Einlassflansch 113 an einem Rezipienten befestigt werden und somit gewissermaßen hängend betrieben werden. Außerdem kann die Vakuumpumpe 111 so gestaltet sein, dass sie auch in Betrieb genommen werden kann, wenn sie auf andere Weise ausgerichtet ist als in Fig. 1 gezeigt ist. Es lassen sich auch Ausführungsformen der Vakuumpumpe realisieren, bei der die Unterseite 141 nicht nach unten, sondern zur Seite gewandt oder nach oben gerichtet angeordnet werden kann.The lower side 141 of the vacuum pump can serve as a base, so that the vacuum pump 111 can be operated standing on the bottom 141. However, the vacuum pump 111 can also be fastened to a recipient via the inlet flange 113 and thus be operated to a certain extent suspended. In addition, the vacuum pump 111 can be designed so that it can also be put into operation, if it is aligned differently than in Fig. 1 is shown. Embodiments of the vacuum pump can also be implemented in which the lower side 141 can not be turned down but can be turned to the side or directed upwards.

An der Unterseite 141, die in Fig. 2 dargestellt ist, sind noch diverse Schrauben 143 angeordnet, mittels denen hier nicht weiter spezifizierte Bauteile der Vakuumpumpe aneinander befestigt sind. Beispielsweise ist ein Lagerdeckel 145 an der Unterseite 141 befestigt.At the bottom 141, the in Fig. 2 is shown, various screws 143 are still arranged, by means of which here unspecified components of the vacuum pump are attached to each other. For example, a bearing cap 145 is attached to the bottom 141.

An der Unterseite 141 sind außerdem Befestigungsbohrungen 147 angeordnet, über welche die Pumpe 111 beispielsweise an einer Auflagefläche befestigt werden kann.On the bottom 141 also mounting holes 147 are arranged, via which the pump 111 can be attached, for example, to a support surface.

In den Figuren 2 bis 5 ist eine Kühlmittelleitung 148 dargestellt, in welcher das über die Kühlmittelanschlüsse 139 ein- und ausgeleitete Kühlmittel zirkulieren kann.In the FIGS. 2 to 5 For example, a coolant line 148 is shown, in which the coolant introduced and discharged via the coolant connections 139 can circulate.

Wie die Schnittdarstellungen der Figuren 3 bis 5 zeigen, umfasst die Vakuumpumpe mehrere Prozessgaspumpstufen zur Förderung des an dem Pumpeneinlass 115 anstehenden Prozessgases zu dem Pumpenauslass 117.Like the sectional views of the FIGS. 3 to 5 1, the vacuum pump comprises a plurality of process gas pumping stages for conveying the process gas pending at the pump inlet 115 to the pump outlet 117.

In dem Gehäuse 119 ist ein Rotor 149 angeordnet, der eine um eine Rotationsachse 151 drehbare Rotorwelle 153 aufweist.In the housing 119, a rotor 149 is arranged, which has a about a rotation axis 151 rotatable rotor shaft 153.

Die Turbomolekularpumpe 111 umfasst mehrere pumpwirksam miteinander in Serie geschaltete turbomolekulare Pumpstufen mit mehreren an der Rotorwelle 153 befestigten radialen Rotorscheiben 155 und zwischen den Rotorscheiben 155 angeordneten und in dem Gehäuse 119 festgelegten Statorscheiben 157. Dabei bilden eine Rotorscheibe 155 und eine benachbarte Statorscheibe 157 jeweils eine turbomolekulare Pumpstufe. Die Statorscheiben 157 sind durch Abstandsringe 159 in einem gewünschten axialen Abstand zueinander gehalten.Turbomolecular pump 111 includes a plurality of turbomolecular pump stages operatively connected in series with a plurality of rotor disks 155 mounted on rotor shaft 153 and stator disks 157 disposed between rotor disks 155 and housed in housing 119. A rotor disk 155 and an adjacent stator disk 157 each form a turbomolecular one pump stage. The stator disks 157 are held by spacer rings 159 at a desired axial distance from each other.

Die Vakuumpumpe 111 umfasst außerdem in radialer Richtung ineinander angeordnete und pumpwirksam miteinander in Serie geschaltete Holweck-Pumpstufen. Der Rotor der Holweck-Pumpstufen umfasst eine an der Rotorwelle 153 angeordnete Rotornabe 161 und zwei an der Rotornabe 161 befestigte und von dieser getragene zylindermantelförmige Holweck-Rotorhülsen 163, 165, die koaxial zur Rotationsachse 151 orientiert und in radialer Richtung ineinander geschachtelt sind. Ferner sind zwei zylindermantelförmige Holweck-Statorhülsen 167, 169 vorgesehen, die ebenfalls koaxial zu der Rotationsachse 151 orientiert und in radialer Richtung gesehen ineinander geschachtelt sind.The vacuum pump 111 further comprises Holweck pumping stages which are arranged one inside the other in the radial direction and which are pumpingly connected to one another in series. The rotor of the Holweck pump stages comprises a rotor hub 161 arranged on the rotor shaft 153 and two cylinder shell-shaped Holweck rotor sleeves 163, 165 fastened to the rotor hub 161 and oriented coaxially with the rotation axis 151 and nested in the radial direction. Furthermore, two cylinder jacket-shaped Holweck stator sleeves 167, 169 are provided, which are also oriented coaxially to the rotation axis 151 and, as seen in the radial direction, are nested one inside the other.

Die pumpaktiven Oberflächen der Holweck-Pumpstufen sind durch die Mantelflächen, also durch die radialen Innen- und/oder Außenflächen, der Holweck-Rotorhülsen 163, 165 und der Holweck-Statorhülsen 167, 169 gebildet. Die radiale Innenfläche der äußeren Holweck-Statorhülse 167 liegt der radialen Außenfläche der äußeren Holweck-Rotorhülse 163 unter Ausbildung eines radialen Holweck-Spalts 171 gegenüber und bildet mit dieser die den turbomolekularen Pumpstufen nachfolgende erste Holweck-Pumpstufe. Die radiale Innenfläche der äußeren Holweck-Rotorhülse 163 steht der radialen Außenfläche der inneren Holweck-Statorhülse 169 unter Ausbildung eines radialen Holweck-Spalts 173 gegenüber und bildet mit dieser eine zweite Holweck-Pumpstufe. Die radiale Innenfläche der inneren Holweck-Statorhülse 169 liegt der radialen Außenfläche der inneren Holweck-Rotorhülse 165 unter Ausbildung eines radialen Holweck-Spalts 175 gegenüber und bildet mit dieser die dritte Holweck-Pumpstufe.The pump-active surfaces of the Holweck pump stages are formed by the lateral surfaces, ie by the radial inner and / or outer surfaces, the Holweck rotor sleeves 163, 165 and the Holweck stator sleeves 167, 169. The radially inner surface of the outer Holweck stator sleeve 167 faces the radially outer surface of the outer Holweck rotor sleeve 163 to form a radial Holweck gap 171 and forms with this the first Holweck pump stage following the turbomolecular pump stages. The radially inner surface of the outer Holweck rotor sleeve 163 faces the radially outer surface of the inner Holweck stator sleeve 169 forming a radial Holweck gap 173 and forms with this a second Holweck pumping stage. The radially inner surface of the inner Holweck stator sleeve 169 faces the radially outer surface of the inner Holweck rotor sleeve 165 to form a radial Holweck gap 175 and forms with this the third Holweck pumping stage.

Am unteren Ende der Holweck-Rotorhülse 163 kann ein radial verlaufender Kanal vorgesehen sein, über den der radial außenliegende Holweck-Spalt 171 mit dem mittleren Holweck-Spalt 173 verbunden ist. Außerdem kann am oberen Ende der inneren Holweck-Statorhülse 169 ein radial verlaufender Kanal vorgesehen sein, über den der mittlere Holweck-Spalt 173 mit dem radial innenliegenden Holweck-Spalt 175 verbunden ist. Dadurch werden die ineinander geschachtelten Holweck-Pumpstufen in Serie miteinander geschaltet. Am unteren Ende der radial innenliegenden Holweck-Rotorhülse 165 kann ferner ein Verbindungskanal 179 zum Auslass 117 vorgesehen sein.At the lower end of the Holweck rotor sleeve 163, a radially extending channel may be provided, via which the radially outer Holweck gap 171 is connected to the middle Holweck gap 173. In addition, at the upper end of the inner Holweck stator sleeve 169, a radially extending channel may be provided, via which the middle Holweck gap 173 is connected to the radially inner Holweck gap 175. As a result, the nested Holweck pump stages are connected in series. Furthermore, a connecting channel 179 to the outlet 117 may be provided at the lower end of the radially inner Holweck rotor sleeve 165.

Die vorstehend genannten pumpaktiven Oberflächen der Holweck-Statorhülsen 163, 165 weisen jeweils mehrere spiralförmig um die Rotationsachse 151 herum in axialer Richtung verlaufende Holweck-Nuten auf, während die gegenüberliegenden Mantelflächen der Holweck-Rotorhülsen 163, 165 glatt ausgebildet sind und das Gas zum Betrieb der Vakuumpumpe 111 in den Holweck-Nuten vorantreiben.The above-mentioned pump-active surfaces of the Holweck stator sleeves 163, 165 each have a plurality of Holweck grooves running around the axis of rotation 151 in the axial direction, while the opposite lateral surfaces of the Holweck rotor sleeves 163, 165 are smooth and the gas for operating the Drive vacuum pump 111 in the Holweck grooves.

Zur drehbaren Lagerung der Rotorwelle 153 sind ein Wälzlager 181 im Bereich des Pumpenauslasses 117 und ein Permanentmagnetlager 183 im Bereich des Pumpeneinlasses 115 vorgesehen.For rotatably supporting the rotor shaft 153, a roller bearing 181 in the region of the pump outlet 117 and a permanent magnet bearing 183 in the region of the pump inlet 115 are provided.

Im Bereich des Wälzlagers 181 ist an der Rotorwelle 153 eine konische Spritzmutter 185 mit einem zu dem Wälzlager 181 hin zunehmenden Außendurchmesser vorgesehen. Die Spritzmutter 185 steht mit mindestens einem Abstreifer eines Betriebsmittelspeichers in gleitendem Kontakt. Der Betriebsmittelspeicher umfasst mehrere aufeinander gestapelte saugfähige Scheiben 187, die mit einem Betriebsmittel für das Wälzlager 181, z.B. mit einem Schmiermittel, getränkt sind.In the area of the roller bearing 181, a conical spray nut 185 with an outer diameter increasing toward the rolling bearing 181 is provided on the rotor shaft 153. The spray nut 185 is in sliding contact with at least one scraper of a resource storage. The resource storage comprises a plurality of stackable absorbent discs 187 provided with a rolling bearing bearing means 181, e.g. with a lubricant, soaked.

Im Betrieb der Vakuumpumpe 111 wird das Betriebsmittel durch kapillare Wirkung von dem Betriebsmittelspeicher über den Abstreifer auf die rotierende Spritzmutter 185 übertragen und in Folge der Zentrifugalkraft entlang der Spritzmutter 185 in Richtung des größer werdenden Außendurchmessers der Spritzmutter 185 zu dem Wälzlager 181 hin gefördert, wo es z.B. eine schmierende Funktion erfüllt. Das Wälzlager 181 und der Betriebsmittelspeicher sind durch einen wannenförmigen Einsatz 189 und den Lagerdeckel 145 in der Vakuumpumpe eingefasst.During operation of the vacuum pump 111, the operating medium is transferred by capillary action of the resource storage on the scraper on the rotating sprayer nut 185 and promoted in the direction of increasing outer diameter of the spray nut 185 to the roller bearing 181 through where the centrifugal force along the spray nut 185 eg fulfills a lubricating function. The rolling bearing 181 and the resource storage are enclosed by a trough-shaped insert 189 and the bearing cap 145 in the vacuum pump.

Das Permanentmagnetlager 183 umfasst eine rotorseitige Lagerhälfte 191 und eine statorseitige Lagerhälfte 193, welche jeweils einen Ringstapel aus mehreren in axialer Richtung aufeinander gestapelten permanentmagnetischen Ringen 195, 197 umfassen. Die Ringmagnete 195, 197 liegen einander unter Ausbildung eines radialen Lagerspalts 199 gegenüber, wobei die rotorseitigen Ringmagnete 195 radial außen und die statorseitigen Ringmagnete 197 radial innen angeordnet sind. Das in dem Lagerspalt 199 vorhandene magnetische Feld ruft magnetische Abstoßungskräfte zwischen den Ringmagneten 195, 197 hervor, welche eine radiale Lagerung der Rotorwelle 153 bewirken. Die rotorseitigen Ringmagnete 195 sind von einem Trägerabschnitt 201 der Rotorwelle 153 getragen, welcher die Ringmagnete 195 radial außenseitig umgibt. Die statorseitigen Ringmagnete 197 sind von einem statorseitigen Trägerabschnitt 203 getragen, welcher sich durch die Ringmagnete 197 hindurch erstreckt und an radialen Streben 205 des Gehäuses 119 aufgehängt ist. Parallel zu der Rotationsachse 151 sind die rotorseitigen Ringmagnete 195 durch ein mit dem Trägerabschnitt 203 gekoppeltes Deckelelement 207 festgelegt. Die statorseitigen Ringmagnete 197 sind parallel zu der Rotationsachse 151 in der einen Richtung durch einen mit dem Trägerabschnitt 203 verbundenen Befestigungsring 209 sowie einen mit dem Trägerabschnitt 203 verbundenen Befestigungsring 211 festgelegt. Zwischen dem Befestigungsring 211 und den Ringmagneten 197 kann außerdem eine Tellerfeder 213 vorgesehen sein.The permanent magnet bearing 183 includes a rotor-side bearing half 191 and a stator-side bearing half 193, each comprising a ring stack of a plurality of stacked in the axial direction of permanent magnetic rings 195, 197 include. The ring magnets 195, 197 are opposed to each other to form a radial bearing gap 199, wherein the rotor-side ring magnets 195 are disposed radially outward and the stator-side ring magnets 197 radially inward. The magnetic field present in the bearing gap 199 causes magnetic repulsive forces between the ring magnets 195, 197, which cause a radial bearing of the rotor shaft 153. The rotor-side ring magnets 195 are supported by a carrier section 201 of the rotor shaft 153, which surrounds the ring magnets 195 radially on the outside. The stator-side ring magnets 197 are supported by a stator-side support portion 203 which extends through the ring magnets 197 and is suspended on radial struts 205 of the housing 119. Parallel to the axis of rotation 151, the rotor-side ring magnets 195 are fixed by a lid element 207 coupled to the carrier section 203. The stator-side ring magnets 197 are fixed parallel to the axis of rotation 151 in one direction by a fastening ring 209 connected to the carrier section 203 and a fastening ring 211 connected to the carrier section 203. Between the fastening ring 211 and the ring magnet 197, a plate spring 213 may also be provided.

Innerhalb des Magnetlagers ist ein Not- bzw. Fanglager 215 vorgesehen, welches im normalen Betrieb der Vakuumpumpe 111 ohne Berührung leer läuft und erst bei einer übermäßigen radialen Auslenkung des Rotors 149 relativ zu dem Stator in Eingriff gelangt, um einen radialen Anschlag für den Rotor 149 zu bilden, da eine Kollision der rotorseitigen Strukturen mit den statorseitigen Strukturen verhindert wird. Das Fanglager 215 ist als ungeschmiertes Wälzlager ausgebildet und bildet mit dem Rotor 149 und/oder dem Stator einen radialen Spalt, welcher bewirkt, dass das Fanglager 215 im normalen Pumpbetrieb außer Eingriff ist. Die radiale Auslenkung, bei der das Fanglager 215 in Eingriff gelangt, ist groß genug bemessen, sodass das Fanglager 215 im normalen Betrieb der Vakuumpumpe nicht in Eingriff gelangt, und gleichzeitig klein genug, sodass eine Kollision der rotorseitigen Strukturen mit den statorseitigen Strukturen unter allen Umständen verhindert wird.Within the magnetic bearing, an emergency bearing 215 is provided, which runs empty in the normal operation of the vacuum pump 111 without contact and engages only with an excessive radial deflection of the rotor 149 relative to the stator to a radial stop for the rotor 149th to form, since a collision of the rotor-side structures with the stator-side structures is prevented. The safety bearing 215 is designed as an unlubricated rolling bearing and forms with the rotor 149 and / or the stator a radial gap, which causes the safety bearing 215 is disengaged in the normal pumping operation. The radial deflection at which the safety bearing 215 engages is dimensioned large enough so that the safety bearing 215 does not engage during normal operation of the vacuum pump, and at the same time small enough so that a collision of the rotor-side structures with the stator-side structures under all circumstances is prevented.

Die Vakuumpumpe 111 umfasst den Elektromotor 125 zum drehenden Antreiben des Rotors 149. Der Anker des Elektromotors 125 ist durch den Rotor 149 gebildet, dessen Rotorwelle 153 sich durch den Motorstator 217 hindurch erstreckt. Auf den sich durch den Motorstator 217 hindurch erstreckenden Abschnitt der Rotorwelle 153 kann radial außenseitig oder eingebettet eine Permanentmagnetanordnung angeordnet sein. Zwischen dem Motorstator 217 und dem sich durch den Motorstator 217 hindurch erstreckenden Abschnitt des Rotors 149 ist ein Zwischenraum 219 angeordnet, welcher einen radialen Motorspalt umfasst, über den sich der Motorstator 217 und die Permanentmagnetanordnung zur Übertragung des Antriebsmoments magnetisch beeinflussen können.The vacuum pump 111 includes the electric motor 125 for rotationally driving the rotor 149. The armature of the electric motor 125 is formed by the rotor 149 whose rotor shaft 153 extends through the motor stator 217. On the extending through the motor stator 217 through portion of the rotor shaft 153 may radially outside or embedded a permanent magnet assembly be arranged. Between the motor stator 217 and the portion of the rotor 149 extending through the motor stator 217, a gap 219 is arranged, which comprises a radial motor gap, via which the motor stator 217 and the permanent magnet arrangement for the transmission of the drive torque can influence magnetically.

Der Motorstator 217 ist in dem Gehäuse innerhalb des für den Elektromotor 125 vorgesehenen Motorraums 137 festgelegt. Über den Sperrgasanschluss 135 kann ein Sperrgas, das auch als Spülgas bezeichnet wird, und bei dem es sich beispielsweise um Luft oder um Stickstoff handeln kann, in den Motorraum 137 gelangen. Über das Sperrgas kann der Elektromotor 125 vor Prozessgas, z.B. vor korrosiv wirkenden Anteilen des Prozessgases, geschützt werden. Der Motorraum 137 kann auch über den Pumpenauslass 117 evakuiert werden, d.h. im Motorraum 137 herrscht zumindest annäherungsweise der von der am Pumpenauslass 117 angeschlossenen Vorvakuumpumpe bewirkte Vakuumdruck.The motor stator 217 is fixed in the housing within the motor space 137 provided for the electric motor 125. About the sealing gas port 135, a sealing gas, which is also referred to as purge gas, and which may be, for example, air or nitrogen, enter the engine compartment 137. Via the blocking gas, the electric motor 125 can be provided with process gas, e.g. against corrosive fractions of the process gas. The engine compartment 137 may also be evacuated via the pump outlet 117, i. In the engine compartment 137, at least approximately, the vacuum pressure caused by the backing pump connected to the pump outlet 117 prevails.

Zwischen der Rotornabe 161 und einer den Motorraum 137 begrenzenden Wandung 221 kann außerdem eine sog. und an sich bekannte Labyrinthdichtung 223 vorgesehen sein, insbesondere um eine bessere Abdichtung des Motorraums 217 gegenüber den radial außerhalb liegenden Holweck-Pumpstufen zu erreichen.Between the rotor hub 161 and a motor space 137 delimiting wall 221 may also be a so-called. And per se known labyrinth seal 223 may be provided, in particular to achieve a better seal of the engine compartment 217 against the Holweck pump stages located radially outside.

Die vorstehend beschriebene Vakuumpumpe 111 kann als eine Splitflow-Vakuumpumpe ausgestaltet sein, so dass diese zusätzlich zu dem als Haupteinlass dienenden Pumpeneinlass 115, welcher an der oberen Stirnseite der Pumpe 111 ausgebildet ist, noch zwei oder mehr als Nebeneinlässe dienende, zusätzliche Einlässe (in Fig. 1 bis 5 nicht dargestellt) aufweist. Diese Nebeneinlässe können an der Umfangsfläche der Vakuumpumpe 111 bzw. des Gehäuses 119, einschließlich des Unterteils 121, angeordnet bzw. ausgebildet sein.The above-described vacuum pump 111 may be configured as a split-flow vacuum pump to provide two or more auxiliary inlets serving as secondary inlets, in addition to the main intake pump inlet 115 formed on the upper end side of the pump 111 Fig. 1 to 5 not shown). These sub-inlets may be arranged on the peripheral surface of the vacuum pump 111 and the housing 119, including the lower part 121, respectively.

Erfindungsgemäß sind die zumindest zwei Nebeneinlässe in Umlaufrichtung der Rotorwelle 153 versetzt zueinander am Gehäuse 119, das auch das Unterteil 121 mit umfasst, angeordnet und zumindest eine senkrecht zur Dreh- bzw. Rotationsachse 151 verlaufende Ebene (nicht dargestellt in Fig. 1 bis 5) verläuft durch die Nebeneinlässe. Die Nebeneinlässe liegen daher zumindest im Wesentlichen, bezogen auf die Längsrichtung der Rotationsachse 151, auf der gleichen axialen Bauhöhe. Dadurch kann die Vakuumpumpe 111 trotz der Nebeneinlässe kompakt bzw. verhältnismäßig kurz ausgestaltet werden, insbesondere im Vergleich zu einer Anordnung, bei der die Nebeneinlässe versetzt zueinander in Längsrichtung der Rotationsachse 151 angeordnet bzw. ausgebildet sind. Die Nebeneinlässe können dabei in den radial außen liegenden Holweck-Spalt 171 münden, und zwar so, dass an jedem Nebeneinlass ein anderes Druckniveau oder alternativ das gleiche Druckniveau bewirkt werden kann. Alternativ können die Nebeneinlässe in eine der turbomolekularen Pumpstufen oder an einer anderen Stelle in den Pumpkanal münden.According to the invention, the at least two secondary inlets in the direction of rotation of the rotor shaft 153 offset from each other on the housing 119, which also includes the lower part 121, arranged and at least one perpendicular to the rotation or rotation axis 151 extending plane (not shown in FIG Fig. 1 to 5 ) runs through the side inlets. The secondary inlets are therefore at least substantially, with respect to the longitudinal direction of the axis of rotation 151, at the same axial height. As a result, despite the secondary inlets, the vacuum pump 111 can be designed to be compact or relatively short, in particular in comparison to an arrangement in which the secondary inlets are arranged or formed offset relative to one another in the longitudinal direction of the rotation axis 151. The secondary inlets can open into the radially outer Holweck gap 171, in such a way that at each secondary inlet a different pressure level or alternatively the same pressure level can be effected. Alternatively, the secondary inlets may open into one of the turbomolecular pumping stages or at another location in the pumping channel.

Die in Fig. 6 in einer rein schematischen Querschnittsdarstellung gezeigte Vakuumpumpe 33 umfasst ein Gehäuse 11, welches in Art des Gehäuses 119 mit dem Unterteil 121, ausgestaltet sein kann, und weist neben dem Haupteinlass 13 noch wenigstens zwei Einlässe 15 auf, wovon in Fig. 6 nur ein Einlass 15 zu sehen ist. Die Einlässe 15 dienen als Nebeneinlässe. An jeden der Einlässe 13, 15 kann ein Auslass eines Rezipients (nicht gezeigt) angeschlossen werden, um den Rezipient über die Pumpe 33 zu evakuieren.In the Fig. 6 Vacuum pump 33 shown in a purely schematic cross-sectional illustration comprises a housing 11, which in the manner of the housing 119 with the lower part 121, can be configured, and in addition to the main inlet 13 at least two inlets 15, of which in Fig. 6 only one inlet 15 can be seen. The inlets 15 serve as secondary inlets. To each of the inlets 13, 15, an outlet of a recipient (not shown) may be connected to evacuate the recipient via the pump 33.

Ferner ist im Gehäuse 11 wenigstens eine Pumpstufe 17 ausgebildet, bei der es sich zum Beispiel um wenigstens eine turbomolekulare Pumpstufe, eine Holweck-Pumpstufe oder eine Kombination aus turbomolekularen Pumpstufen und nachgeordneten Holweck-Pumpstufen handeln kann. Die Pumpstufe 17 weist einen Rotor 19 auf, vgl. den vorstehend erwähnten Rotor 149, der um eine Dreh- bzw. Rotationsachse 21 gegenüber einem Stator (nicht gezeigt) drehbar ist, um eine Pumpwirkung zu erzeugen. Durch die Pumpwirkung kann Fluid, wie etwa Prozessgas oder Luft, aus dem oder den angeschlossenen Rezipienten durch die Einlässe 13, 15 in die Pumpe gefördert und durch die Pumpe hindurch zu deren Auslass (nicht gezeigt, vgl. den Pumpenauslass 117 in Fig. 1) gepumpt werden. Von dort kann sie zum Beispiel mittels einer Vorvakuumpumpe weitergepumpt werden.Furthermore, at least one pumping stage 17 is formed in the housing 11, which may be, for example, at least one turbomolecular pumping stage, a Holweck pumping stage or a combination of turbomolecular pumping stages and downstream Holweck pumping stages. The pumping stage 17 has a rotor 19, cf. the above-mentioned rotor 149, which is rotatable about a rotation axis 21 with respect to a stator (not shown) about a Pumping effect to produce. The pumping action allows fluid, such as process gas or air, to be pumped from the recipient or recipients through the inlets 13, 15 into the pump and through the pump to its outlet (not shown, see the pump outlet 117 in FIG Fig. 1 ) are pumped. From there it can be pumped on, for example by means of a backing pump.

Bei der Vakuumpumpe 33 der Fig. 6 liegen die wenigstens zwei Einlässe 15 entfernt von dem Haupteinlass 13 und insbesondere in Umlaufrichtung U des Rotors 19 versetzt zueinander am Gehäuse 11. Dabei verläuft zumindest eine Ebene E1 senkrecht zur Drehachse 21 und durch die wenigstens zwei Einlässe 15. In Bezug auf die Drehachse 21 gesehen liegen die beiden Einlässe 15 somit auf der gleichen axialen Bauhöhe der Vakuumpumpe 33, wodurch eine kompakte und kurze Ausgestaltung der Vakuumpumpe 33 möglich ist.In the vacuum pump 33 of Fig. 6 the at least two inlets 15 are remote from the main inlet 13 and offset in particular in the direction of rotation U of the rotor 19 to each other on the housing 11. At least one plane E1 extends perpendicular to the axis of rotation 21 and through the at least two inlets 15. With respect to the axis of rotation 21 seen The two inlets 15 are thus at the same axial height of the vacuum pump 33, whereby a compact and short design of the vacuum pump 33 is possible.

Wie ferner in Fig. 6 gezeigt ist, verläuft die Ebene E1 nicht durch den Haupteinlass 13. Wenigstens eine andere Ebene E2, die senkrecht zur Drehachse 21 verläuft und in axialer Richtung zur Ebene E1 versetzt ist, schneidet den Haupteinlass 13.As further in Fig. 6 At least one other plane E2, which is perpendicular to the axis of rotation 21 and is offset in the axial direction to the plane E1, cuts the main inlet 13th

Die in einer seitlichen Ansicht gezeigte Vakuumpumpe der Fig. 7 umfasst ein Gehäuse 11 mit einem oberen Gehäuseteil 23 und einem unteren Gehäuseteil 25. Im Gehäuseinneren ist die Vakuumpumpe der Fig. 7 wie die Pumpe gemäß Fig. 6 aufgebaut. Ferner kann ein nicht dargestellter Haupteinlass am oberen Gehäuseteil 23 vorgesehen sein, z.B. an der oberen Stirnseite des Gehäuseteils 23, in ähnlicher Weise wie bei der Vakuumpumpe der Fig. 1 bis 5.The vacuum pump shown in a side view Fig. 7 comprises a housing 11 having an upper housing part 23 and a lower housing part 25. In the housing interior, the vacuum pump is the Fig. 7 like the pump according to Fig. 6 built up. Furthermore, an unillustrated main inlet may be provided on the upper housing part 23, for example on the upper end side of the housing part 23, in a manner similar to that of the vacuum pump of FIG Fig. 1 to 5 ,

Die Vakuumpumpe der Fig. 7 umfasst zwei Einlässe 15a, 15b, die in Umlaufrichtung U eines Rotors 19 (vgl. Fig. 6) gesehen versetzt zueinander am unteren Gehäuseteil 25 angeordnet sind, wobei die senkrecht zur Drehachse 21 verlaufende Ebene E1 durch die beiden Einlässe 15a, 15b verläuft.The vacuum pump the Fig. 7 comprises two inlets 15a, 15b, which in the direction of rotation U of a rotor 19 (see. Fig. 6 ) Seen offset from one another on the lower housing part 25 are arranged, wherein the plane perpendicular to the axis of rotation 21 extending plane E1 through the two inlets 15a, 15b.

Wie dargestellt, können die beiden Einlässe 15a, 15b einen kreisförmigen Querschnitt mit einem jeweiligen Mittelpunkt M1 bzw. M2 aufweisen. Die Ebene E1 verläuft durch die beiden Mittelpunkte M1 und M2. Dadurch liegen die Mittelpunkte M1, M2 in Bezug auf die Drehachse 21 auf der gleichen axialen Bauhöhe. Alternativ können die Mittelpunkte M1 und M2 in axialer Richtung gesehen einen leichten axialen Versatz aufweisen, der vorzugsweise kleiner ist als die Summe der Radien der Querschnittsflächen. Bei einem derartigen axialen Versatz kann die Ebene E1 nicht durch beide Mittelpunkte M1 und M2 gleichzeitig verlaufen, sehr wohl aber beide Einlässe 15a, 15b schneiden. Die Einlässe 15a, 15b weisen dann leicht unterschiedliche axiale Bauhöhen auf.As shown, the two inlets 15a, 15b may have a circular cross-section with a respective center M1 or M2, respectively. The plane E1 passes through the two midpoints M1 and M2. As a result, the center points M1, M2 lie with respect to the axis of rotation 21 at the same axial height. Alternatively, the midpoints M1 and M2 can have a slight axial offset seen in the axial direction, which is preferably smaller than the sum of the radii of the cross-sectional areas. In such an axial offset, the plane E1 can not run through both centers M1 and M2 simultaneously, but very well cut both inlets 15a, 15b. The inlets 15a, 15b then have slightly different axial heights.

Die Vakuumpumpe der Fig. 8 ist wie die Vakuumpumpe der Fig. 7 aufgebaut und zeigt eine erfindungsgemäße Anordnung der beiden Einlässe 15a, 15b und des Auslasses 27. So liegt bei der Vakuumpumpe der Fig. 8 der Auslass 27 in Umfangsrichtung U gesehen zwischen den beiden Einlässen 15a, 15b. Der Auslass 27 weist eine kreisförmige Auslassöffnung auf, durch deren Mittelpunkt M3 die Ebene E1 verläuft. Gleiches gilt für die Mittelpunkte M1, M2 der Einlassöffnungen der Einlässe 15a, 15b. Der Auslass 27 liegt somit exakt auf der gleichen axialen Bauhöhe wie die beiden Einlässe 15a, 15b.The vacuum pump the Fig. 8 is like the vacuum pump the Fig. 7 constructed and shows an inventive arrangement of the two inlets 15a, 15b and the outlet 27. So is the case of the vacuum pump Fig. 8 the outlet 27 seen in the circumferential direction U between the two inlets 15a, 15b. The outlet 27 has a circular outlet opening through whose center M3 the plane E1 extends. The same applies to the centers M1, M2 of the inlet openings of the inlets 15a, 15b. The outlet 27 is thus exactly at the same axial height as the two inlets 15a, 15b.

Das Vakuumsystem 31 der Fig. 9 umfasst eine Vakuumpumpe 33 wie vorstehend beschrieben wurde und einen Rezipient 35 mit Kammern 37, 39. Die eine Kammer 37 ist an den Haupteinlass 13 der Vakuumpumpe 33 vakuumdicht angeschlossen, während die andere Kammer 39 an den einen Nebeneinlass 15a vakuumdicht angeschlossen ist. An den in Fig. 9 nicht gezeigten, anderen Nebeneinlass 15b ist eine weitere, nicht gezeigte Kammer des Rezipienten 35 vakuumdicht angeschlossen.The vacuum system 31 of the Fig. 9 comprises a vacuum pump 33 as described above and a recipient 35 with chambers 37, 39. The one chamber 37 is vacuum-tightly connected to the main inlet 13 of the vacuum pump 33, while the other chamber 39 is vacuum-tightly connected to the one auxiliary inlet 15a. To the in Fig. 9 not shown, other secondary inlet 15b is a further, not shown chamber of the recipient 35 vacuum-tight connected.

Wie in Fig. 9 gezeigt ist, springt die Kammer 37 in radialer Richtung, bezogen auf die Drehachse 21, gegenüber der Kammer 39 etwas hervor. Um diesen Vorsprung auszugleichen bzw. um sonstige Toleranzen auszugleichen, kann eine dicke Dichtung 41, insbesondere O-Ring-Dichtung, zwischen den Auslass der Kammer 39 und den Einlass 15a eingelegt sein, während eine dünne Dichtung 43, insbesondere O-Ring-Dichtung, zwischen dem Auslass der Kammer 37 und dem Haupteinlass 13 angeordnet ist.As in Fig. 9 is shown, the chamber 37 jumps in the radial direction, relative to the axis of rotation 21, relative to the chamber 39 something out. To get this lead To compensate or to compensate for other tolerances, a thick seal 41, in particular O-ring seal, between the outlet of the chamber 39 and the inlet 15 a to be inserted, while a thin seal 43, in particular O-ring seal, between the outlet the chamber 37 and the main inlet 13 is arranged.

Die beschriebenen Vakuumpumpen erlauben eine kompakte Bauweise, da die Nebeneinlässe 15, 15a, 15b zumindest im Wesentlichen auf der gleichen axialen Bauhöhe angeordnet sind. Dabei können die Nebeneinlässe 15, 15a, 15b so mit den Pumpstufen verschaltet sein, dass während des Pumpenbetriebs in den Einlässen unterschiedliche Druckniveaus bewirkt werden.The vacuum pumps described allow a compact design, since the secondary inlets 15, 15a, 15b are arranged at least substantially at the same axial height. In this case, the secondary inlets 15, 15a, 15b can be connected to the pumping stages such that different pressure levels are effected in the inlets during pump operation.

BezugszeichenlisteLIST OF REFERENCE NUMBERS

1111
Gehäusecasing
1313
Haupteinlassmain inlet
1515
Einlass, NebeneinlassInlet, secondary inlet
15a15a
Einlass, NebeneinlassInlet, secondary inlet
15b15b
Einlass, NebeneinlassInlet, secondary inlet
1717
Pumpstufepump stage
1919
Rotorrotor
2121
Drehachseaxis of rotation
2323
oberes GehäuseteilUpper housing part
2525
unteres Gehäuseteillower housing part
2727
Auslassoutlet
3131
Vakuumsystemvacuum system
3333
Vakuumpumpevacuum pump
3535
Rezipientrecipient
3737
Kammerchamber
3939
Kammerchamber
4141
Dichtungpoetry
4343
Dichtungpoetry
111111
TurbomolekularpumpeTurbo molecular pump
113113
Einlassflanschinlet flange
115115
Pumpeneinlasspump inlet
117117
Pumpenauslasspump outlet
119119
Gehäusecasing
121121
Unterteillower part
123123
Elektronikgehäuseelectronics housing
125125
Elektromotorelectric motor
127127
Zubehöranschlussaccessory port
129129
DatenschnittstelleData Interface
131131
StromversorgungsanschlussPower connector
133133
Fluteinlassflood inlet
135135
SperrgasanschlussSealing gas connection
137137
Motorraumengine compartment
139139
KühlmittelanschlussCoolant connection
141141
Unterseitebottom
143143
Schraubescrew
145145
Lagerdeckelbearing cap
147147
Befestigungsbohrungmounting hole
148148
KühlmittelleitungCoolant line
149149
Rotorrotor
151151
Rotationsachseaxis of rotation
153153
Rotorwellerotor shaft
155155
Rotorscheiberotor disc
157157
Statorscheibestator
159159
Abstandsringspacer ring
161161
Rotornaberotor hub
163163
Holweck-RotorhülseHolweck rotor sleeve
165165
Holweck-RotorhülseHolweck rotor sleeve
167167
Holweck-StatorhülseHolweck stator
169169
Holweck-StatorhülseHolweck stator
171171
Holweck-SpaltHolweck gap
173173
Holweck-SpaltHolweck gap
175175
Holweck-SpaltHolweck gap
179179
Verbindungskanalconnecting channel
181181
Wälzlagerroller bearing
183183
PermanentmagnetlagerPermanent magnetic bearings
185185
Spritzmutterspray mother
187187
Scheibedisc
189189
Einsatzcommitment
191191
rotorseitige LagerhälfteRotor-side bearing half
193193
statorseitige Lagerhälftestator side half
195195
Ringmagnetring magnet
197197
Ringmagnetring magnet
199199
Lagerspaltbearing gap
201201
Trägerabschnittsupport section
203203
Trägerabschnittsupport section
205205
radiale Streberadial strut
207207
Deckelelementcover element
209209
Stützringsupport ring
211211
Befestigungsringfixing ring
213213
TellerfederBelleville spring
215215
Not- bzw. FanglagerEmergency or catch camp
217217
Motorstatormotor stator
219219
Zwischenraumgap
221221
Wandungwall
223223
Labyrinthdichtunglabyrinth seal
UU
Umfangsrichtungcircumferentially
E1E1
Ebenelevel
E2E2
Ebenelevel
M1M1
MittelpunktFocus
M2M2
MittelpunktFocus
M3M3
MittelpunktFocus

Claims (9)

  1. A vacuum pump, in particular a turbomolecular pump, comprising
    a housing (11, 119, 121) having at least two inlets (15, 15a, 15b) separate from one another for connecting at least one recipient (35); and
    at least one pump stage (17) arranged in the housing (11, 119, 121) for conveying fluid, in particular fluid sucked from the at least one recipient (35), in the direction of an outlet (27, 117) of the vacuum pump provided at the housing (11, 119, 121),
    wherein the pump stage (17) has at least one rotor (19, 149) rotatable about an axis of rotation (21, 151) with respect to a stator, with the stator and the rotor (19, 149) being designed such that, when the rotor (19, 149) rotates, they bring about a pumping effect by which the fluid is conveyed in the direction of the outlet (27, 117); and
    wherein the at least two inlets (15, 15a, 15b) are arranged offset from one another at the housing (11, 119, 121), viewed in a peripheral direction (U) of the rotor (19, 149), and at least one plane (E1) extending perpendicular to the axis of rotation (21, 151) passes through the at least two inlets (15, 15a, 15b),
    characterized in that
    the plane (E1) passes through the outlet (27, 117).
  2. A vacuum pump in accordance with claim 1,
    characterized in that
    a main inlet (13, 115) is provided at the housing (11, 119, 121) in addition to the at least two inlets (15, 15a, 15b), in particular at an axial end of the housing (11, 119, 121), with the plane (E1) not passing through the main inlet (13, 115).
  3. A vacuum pump in accordance with claim 1 or claim 2,
    characterized in that
    each of the inlets (15, 15a, 15b) has an inlet opening which is in particular circular and which has a center (M1, M2), with the plane (E1) passing through the centers (M1, M2) of the inlets (15, 15a, 15b).
  4. A vacuum pump in accordance with claim 1 or claim 2,
    characterized in that
    each of the inlets (15, 15a, 15b) has an inlet opening which is in particular circular and which has a center (M1, M2), with the plane (E1) not passing through the center (M1, M2) of at least one of the inlets (15, 15a, 15b).
  5. A vacuum pump in accordance with any one of the preceding claims,
    characterized in that
    each of the inlets (15, 15a, 15b) has an inlet opening which is in particular circular, with each inlet opening (15, 15a, 15b) having a specific area, and with at least 25%, preferably 30%, further preferably 40%, even further preferably 50%, of the areas of the inlet openings being at the same axial height, viewed in the axial direction.
  6. A vacuum pump in accordance with any one of the preceding claims,
    characterized in that
    the inlets (15, 15a, 15b) are connected to the pump stage (17) such that different pressure levels or at least approximately the same pressure levels can be generated at the inlets (15, 15a, 15b).
  7. A vacuum pump in accordance with any one of the preceding claims,
    characterized in that
    it has at least one Holweck pump stage (163, 165, 167, 169), with the at least two inlets (15, 15a, 15b) opening into the Holweck pump stage (163, 165, 167, 169).
  8. A vacuum pump in accordance with any one of the claims 1 to 6,
    characterized in that
    it has at least one turbomolecular pump stage (155, 157), with the at least two inlets (15, 15a, 15b) opening into the turbomolecular pump stage (155, 157).
  9. A vacuum system (31) comprising at least one vacuum pump (33) in accordance with any one of the claims 1 to 8; and at least one recipient (35) which is connected to the vacuum pump (33) and which has at least two outlets which are configured for connection to the at least two inlets (15, 15a, 15b) of the vacuum pump (33) and are arranged at the housing of the recipient (35), wherein vacuum seals (41, 43), in particular O-ring seals, which preferably have different thicknesses are provided to seal the vacuum connections between the outlets of the recipient (33) and the inlets (13, 15, 15a, 15b) of the vacuum pump (33).
EP16200272.9A 2016-11-23 2016-11-23 Vacuum pump having multiple inlets Active EP3327293B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP16200272.9A EP3327293B1 (en) 2016-11-23 2016-11-23 Vacuum pump having multiple inlets
JP2017192675A JP6479127B2 (en) 2016-11-23 2017-10-02 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP16200272.9A EP3327293B1 (en) 2016-11-23 2016-11-23 Vacuum pump having multiple inlets

Publications (2)

Publication Number Publication Date
EP3327293A1 EP3327293A1 (en) 2018-05-30
EP3327293B1 true EP3327293B1 (en) 2019-11-06

Family

ID=57391891

Family Applications (1)

Application Number Title Priority Date Filing Date
EP16200272.9A Active EP3327293B1 (en) 2016-11-23 2016-11-23 Vacuum pump having multiple inlets

Country Status (2)

Country Link
EP (1) EP3327293B1 (en)
JP (1) JP6479127B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2584603B (en) * 2019-04-11 2021-10-13 Edwards Ltd Vacuum chamber module

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6193461B1 (en) * 1999-02-02 2001-02-27 Varian Inc. Dual inlet vacuum pumps
GB0124731D0 (en) * 2001-10-15 2001-12-05 Boc Group Plc Vacuum pumps
DE10302987A1 (en) * 2003-01-25 2004-08-05 Inficon Gmbh Leak detector with an inlet
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
DE102004038677B4 (en) * 2004-08-10 2016-11-24 Pfeiffer Vacuum Gmbh vacuum pump
DE102007010068A1 (en) * 2007-02-28 2008-09-04 Thermo Fisher Scientific (Bremen) Gmbh Vacuum pump or vacuum device for evacuation of multiple volumes, has two suction inlets with multiple pressure stages and outer suction inlet for one pressure stage spatially encompasses inner suction inlet for another pressure stage
DE202013010204U1 (en) * 2013-11-11 2015-02-13 Oerlikon Leybold Vacuum Gmbh Multi-inlet vacuum pump
DE102014110078A1 (en) * 2014-07-17 2016-01-21 Pfeiffer Vacuum Gmbh vacuum system

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
None *

Also Published As

Publication number Publication date
JP6479127B2 (en) 2019-03-06
EP3327293A1 (en) 2018-05-30
JP2018084231A (en) 2018-05-31

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