CA2545566A1 - Multi-stage friction vacuum pump - Google Patents
Multi-stage friction vacuum pump Download PDFInfo
- Publication number
- CA2545566A1 CA2545566A1 CA002545566A CA2545566A CA2545566A1 CA 2545566 A1 CA2545566 A1 CA 2545566A1 CA 002545566 A CA002545566 A CA 002545566A CA 2545566 A CA2545566 A CA 2545566A CA 2545566 A1 CA2545566 A1 CA 2545566A1
- Authority
- CA
- Canada
- Prior art keywords
- compressor stage
- turbo
- rotor
- compressor
- stage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 230000006835 compression Effects 0.000 claims abstract description 7
- 238000007906 compression Methods 0.000 claims abstract description 7
- 230000004323 axial length Effects 0.000 claims description 2
- 241000901720 Stator Species 0.000 claims 1
- 239000000543 intermediate Substances 0.000 description 11
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 208000036366 Sensation of pressure Diseases 0.000 description 1
- 229940000425 combination drug Drugs 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/02—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps having non-centrifugal stages, e.g. centripetal
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/10—Centrifugal pumps for compressing or evacuating
- F04D17/12—Multi-stage pumps
- F04D17/127—Multi-stage pumps with radially spaced stages, e.g. for contrarotating type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
The invention relates to a multi-stage vacuum pump comprising at least one turbocompressor stage (11) and equipped with a circular compressor stage (33) on the pressure side of the turbocompressor stage. Said pump has small axial dimensions, enabling the compression to be increased without significantly increasing the space requirement.
Description
A multi-stage friction vacuum pump The invention refers to a multi-stage friction vacuum pump with at least one axially compressing turbo-compressor stage having a rotor rotating about its axis and comprising rotor discs projecting between stationary stator discs.
Turbomolecular pumps belong in the group of friction vacuum pumps with which a high vacuum can be created, for example for recipients used in semi-conductor manufacturing or for mass spectrometers. A multi-stage friction vacuum pump described in DE 100 04 271 A1 (Leybold Vakuum AG) com-prises one or a plurality of turbo-compressor stages each formed by a rotor with radially projecting rotor discs and a stator with radially projecting stator discs. The rotor discs and the stator discs mesh in a comb-like manner with little space between them. They cause a molecular flow axial to the rotor axis.
In addition to the turbo-compressor stage, a circular compressor stage may be provided which comprises a rotor with axially projecting rotor blades arranged on a circular line and a stator with axially protruding stator blades arranged on a circular line. The rotor blades and the stator blades mesh alternately and cause a molecular flow that is directed either radially inward or radially out-ward, depending on the sense of rotation and the angle of attack of the blades.
It is the object of the invention to provide a multi-stage friction vacuum pump with at least one turbo-compressor stage, wherein the stages are arranged in series in the flow path and which is to yield higher compression.
The multi-stage friction vacuum pump of the present invention has the fea-tures of claim 1. The vacuum pump comprises a turbo-compressor stage and a circular compressor stage arranged downstream in the flow path. Whereas the turbo-compressor stage is suited to generate a high vacuum, the downstream circular compressor stage serves to effect a pressure increase. As a conse-quence, since the gas volume is reduced by compression, the circular com-pressor stage can have small dimensions. The circular compressor stage has a small axial dimension since it is flown through mainly in the radial direction.
The overall dimensions of the friction pump are not significantly increased by the circular compressor stage, but the compression is clearly intensified with respect to single-stage friction vacuum pumps. The present combination of an upstream turbo-compressor stage and a downstream circular compressor stage offers the advantage of requiring little space while having a high com-pression capacity.
According to a preferred embodiment of the invention, the turbo-compressor stage and the circular compressor stage are integrated in a common combina-tion of rotor and stator. This means that the rotors of both compressor stages are formed by a single combined rotor and the stators of both compressor stages are also formed by a single combined stator. Thus, the dimensions and the weight can be reduced further.
The present friction vacuum pump is preferably designed as a multiple inlet pump. It comprises at least two axially spaced, serially compressing turbo-compressor stages between which an intermediate inlet is located. A circular compressor stage is arranged on the compressor side of the first turbo-compressor stage and/or the second turbo-compressor stage. Such a pump is particularly suited for use in the context of mass spectrometers. Due to the increased gas flow at the intermediate inlet to which the analyzing means of the mass spectrometer is connected, the gas flow at the intermediate inlet is increased without a negative effect on the pressure at the high vacuum inlet.
The increase in the gas flow at the intermediate inlet means an increased sen-sitivity of the mass spectrometer.
Depending on the compression ratio, different types and structures may be used for the circular compressor stages, such as described in DE 100 94 271 A1.
Turbomolecular pumps belong in the group of friction vacuum pumps with which a high vacuum can be created, for example for recipients used in semi-conductor manufacturing or for mass spectrometers. A multi-stage friction vacuum pump described in DE 100 04 271 A1 (Leybold Vakuum AG) com-prises one or a plurality of turbo-compressor stages each formed by a rotor with radially projecting rotor discs and a stator with radially projecting stator discs. The rotor discs and the stator discs mesh in a comb-like manner with little space between them. They cause a molecular flow axial to the rotor axis.
In addition to the turbo-compressor stage, a circular compressor stage may be provided which comprises a rotor with axially projecting rotor blades arranged on a circular line and a stator with axially protruding stator blades arranged on a circular line. The rotor blades and the stator blades mesh alternately and cause a molecular flow that is directed either radially inward or radially out-ward, depending on the sense of rotation and the angle of attack of the blades.
It is the object of the invention to provide a multi-stage friction vacuum pump with at least one turbo-compressor stage, wherein the stages are arranged in series in the flow path and which is to yield higher compression.
The multi-stage friction vacuum pump of the present invention has the fea-tures of claim 1. The vacuum pump comprises a turbo-compressor stage and a circular compressor stage arranged downstream in the flow path. Whereas the turbo-compressor stage is suited to generate a high vacuum, the downstream circular compressor stage serves to effect a pressure increase. As a conse-quence, since the gas volume is reduced by compression, the circular com-pressor stage can have small dimensions. The circular compressor stage has a small axial dimension since it is flown through mainly in the radial direction.
The overall dimensions of the friction pump are not significantly increased by the circular compressor stage, but the compression is clearly intensified with respect to single-stage friction vacuum pumps. The present combination of an upstream turbo-compressor stage and a downstream circular compressor stage offers the advantage of requiring little space while having a high com-pression capacity.
According to a preferred embodiment of the invention, the turbo-compressor stage and the circular compressor stage are integrated in a common combina-tion of rotor and stator. This means that the rotors of both compressor stages are formed by a single combined rotor and the stators of both compressor stages are also formed by a single combined stator. Thus, the dimensions and the weight can be reduced further.
The present friction vacuum pump is preferably designed as a multiple inlet pump. It comprises at least two axially spaced, serially compressing turbo-compressor stages between which an intermediate inlet is located. A circular compressor stage is arranged on the compressor side of the first turbo-compressor stage and/or the second turbo-compressor stage. Such a pump is particularly suited for use in the context of mass spectrometers. Due to the increased gas flow at the intermediate inlet to which the analyzing means of the mass spectrometer is connected, the gas flow at the intermediate inlet is increased without a negative effect on the pressure at the high vacuum inlet.
The increase in the gas flow at the intermediate inlet means an increased sen-sitivity of the mass spectrometer.
Depending on the compression ratio, different types and structures may be used for the circular compressor stages, such as described in DE 100 94 271 A1.
The following is a detailed description of embodiments of the invention with reference to the drawings. These embodiments should not be seen as limiting the scope of protection of the present invention. Rather, this scope is defined by the claims and the equivalents thereof.
In the Figures:
Fig. 1 illustrates a longitudinal section through a friction vacuum pump of the present invention, Fig. 2 is an illustration of the circular compressor stage, Figs. 3 and 4 are longitudinal sections through different embodiments of circular compressor stages.
The friction vacuum pump illustrated in Figure 1 comprises a housing 10 of substantially cylindrical design, which has a high vacuum port HV at one end.
In the housing wall an intermediate inlet ZE1 is provided that is open to the side. The intermediate inlet ZE1 is bridged by webs 18 that connect the stator parts with each other.
In the front portion 10a of the housing 10, a first turbo-compressor stage 11 formed by a stator 12 and a rotor 13 is arranged. The stator 12 has a plurality of stator discs 15 directed radially inward from a circumferential wall 14.
The rotor 13 has a plurality of rotor discs 16 projecting radially outward between the stator discs 15. A drive 17 including a fast rotating electric motor drives the rotor 13 at a number of rotations between 30,000 and 60,000 rpm.
A second turbo-compressor stage 21 is arranged on the compressor side of the first turbo-compressor stage 11 and has its inlet connected with the inter-mediate inlet ZE1. The turbo-compressor stage 21 is formed by a stator 22 and a rotor 23. The stator 22 comprises a plurality of stator discs 25 directed radially inward from a circumferential wall 22. The rotor 23 comprises a plural-ity of rotor discs 26 projecting radially outward between the stator discs 25.
The rotors 13 and 23 are fixedly interconnected and are driven together by the drive 17.
In the housing 10, a further compressor stage 30 follows the second turbo-compressor stage 21, this further compressor stage being additionally con-nected with an intermediate inlet ZE2. For example, the compressor stage 30 is a Holweck stage or another molecular pump, for example a Gaede pump, a Siegbahn pump, an Englander pump or a side channel pump.
In the present embodiment, a circular compressor stage 33 is provided follow-ing the first turbo-compressor stage 11. It comprises a rotor disc 34 which is a part of the rotor 13 of the turbo-compressor stage 11, and a stator disc 32 which is a part of the stator 12. The rotor disc 34 comprises rotor blades 35 arranged on concentric circles, and the stator disc 32 comprises stator blades 36 also arranged on concentric circles and engaging in gaps between the rotor circles, as is illustrated in Figure 2. The stator blades and the rotor blades are inclined oppositely with respect to the radial direction. Depending on the sense of rotation of the rotor, the circular compressor stage 33 conveys either ra-dially outward or radially inward. In the present embodiment, the conveying direction is indicated by the arrow 37. The gas transport passes from the high vacuum inlet HV through the turbo-compressor stage 11 and radially inward from the circumference thereof through the circular compressor stage 33 and from there through a gap 38 to the intermediate inlet ZE1. From the interme-diate inlet ZE1, the turbo-compressor stage 21 conveys the gas to the com-pressor stage 30. The second intermediate inlet ZE2 also opens into the com-pressor stage 30. The compressor stage 30 conveys to an outlet (not illus-trated).
One of the rotor discs 16 of the turbo compressor stage 11 is the supporting disc for the rotor blades of the circular compressor stage 33. The stator disc of the circular compressor disc simultaneously forms the end wall of the pres-sure-side end of the turbo-compressor stage 11.
It is a special advantage that the circular compressor stage 33 is quasi inte-grated in the turbo-compressor stage 11. The only additional effort required are the rotor and stator blades 35, 36 additionally provided at the rotor and the stator of the turbo compressor stage.
As an alternative to the present embodiment, a circular compressor stage 33 may also be provided behind the second turbo-compressor stage 21. The cir-cular compressor stage arranged on the pressure side of the respective turbo-compressor stage and integrated in the turbo-compressor stage increases the gas flow on the pressure side. For a mass spectrometer connected thereto, this means an increase in sensitivity.
Figure 3 illustrates the gas flow 40 through the circular compressor stage 33 flowing radially from the outside inward.
In the embodiment of Figure 4, the blade surface of the rotor disc 34 is coni-cal. The rotor blades 35 have an axial length that decreases as the radius of the circular path decreases.
It is also possible to use a circular compressor stage with a plurality of discs and alternately outward and inward directed flow paths, as is generally illus-trated in Figure 7 of DE 100 04 271 A1.
In the Figures:
Fig. 1 illustrates a longitudinal section through a friction vacuum pump of the present invention, Fig. 2 is an illustration of the circular compressor stage, Figs. 3 and 4 are longitudinal sections through different embodiments of circular compressor stages.
The friction vacuum pump illustrated in Figure 1 comprises a housing 10 of substantially cylindrical design, which has a high vacuum port HV at one end.
In the housing wall an intermediate inlet ZE1 is provided that is open to the side. The intermediate inlet ZE1 is bridged by webs 18 that connect the stator parts with each other.
In the front portion 10a of the housing 10, a first turbo-compressor stage 11 formed by a stator 12 and a rotor 13 is arranged. The stator 12 has a plurality of stator discs 15 directed radially inward from a circumferential wall 14.
The rotor 13 has a plurality of rotor discs 16 projecting radially outward between the stator discs 15. A drive 17 including a fast rotating electric motor drives the rotor 13 at a number of rotations between 30,000 and 60,000 rpm.
A second turbo-compressor stage 21 is arranged on the compressor side of the first turbo-compressor stage 11 and has its inlet connected with the inter-mediate inlet ZE1. The turbo-compressor stage 21 is formed by a stator 22 and a rotor 23. The stator 22 comprises a plurality of stator discs 25 directed radially inward from a circumferential wall 22. The rotor 23 comprises a plural-ity of rotor discs 26 projecting radially outward between the stator discs 25.
The rotors 13 and 23 are fixedly interconnected and are driven together by the drive 17.
In the housing 10, a further compressor stage 30 follows the second turbo-compressor stage 21, this further compressor stage being additionally con-nected with an intermediate inlet ZE2. For example, the compressor stage 30 is a Holweck stage or another molecular pump, for example a Gaede pump, a Siegbahn pump, an Englander pump or a side channel pump.
In the present embodiment, a circular compressor stage 33 is provided follow-ing the first turbo-compressor stage 11. It comprises a rotor disc 34 which is a part of the rotor 13 of the turbo-compressor stage 11, and a stator disc 32 which is a part of the stator 12. The rotor disc 34 comprises rotor blades 35 arranged on concentric circles, and the stator disc 32 comprises stator blades 36 also arranged on concentric circles and engaging in gaps between the rotor circles, as is illustrated in Figure 2. The stator blades and the rotor blades are inclined oppositely with respect to the radial direction. Depending on the sense of rotation of the rotor, the circular compressor stage 33 conveys either ra-dially outward or radially inward. In the present embodiment, the conveying direction is indicated by the arrow 37. The gas transport passes from the high vacuum inlet HV through the turbo-compressor stage 11 and radially inward from the circumference thereof through the circular compressor stage 33 and from there through a gap 38 to the intermediate inlet ZE1. From the interme-diate inlet ZE1, the turbo-compressor stage 21 conveys the gas to the com-pressor stage 30. The second intermediate inlet ZE2 also opens into the com-pressor stage 30. The compressor stage 30 conveys to an outlet (not illus-trated).
One of the rotor discs 16 of the turbo compressor stage 11 is the supporting disc for the rotor blades of the circular compressor stage 33. The stator disc of the circular compressor disc simultaneously forms the end wall of the pres-sure-side end of the turbo-compressor stage 11.
It is a special advantage that the circular compressor stage 33 is quasi inte-grated in the turbo-compressor stage 11. The only additional effort required are the rotor and stator blades 35, 36 additionally provided at the rotor and the stator of the turbo compressor stage.
As an alternative to the present embodiment, a circular compressor stage 33 may also be provided behind the second turbo-compressor stage 21. The cir-cular compressor stage arranged on the pressure side of the respective turbo-compressor stage and integrated in the turbo-compressor stage increases the gas flow on the pressure side. For a mass spectrometer connected thereto, this means an increase in sensitivity.
Figure 3 illustrates the gas flow 40 through the circular compressor stage 33 flowing radially from the outside inward.
In the embodiment of Figure 4, the blade surface of the rotor disc 34 is coni-cal. The rotor blades 35 have an axial length that decreases as the radius of the circular path decreases.
It is also possible to use a circular compressor stage with a plurality of discs and alternately outward and inward directed flow paths, as is generally illus-trated in Figure 7 of DE 100 04 271 A1.
Claims (8)
1. A multi-stage friction vacuum pump comprising at least one axially compressing turbo-compressor stage (11, 21) with a rotor (13) rotating about its axis and having rotor discs (16) projecting between stationary stator discs (15), characterized in that a radially compressing circular compressor stage (33) is arranged on the compressor side of the turbo-compressor stage (11), said circu-lar compressor stage comprising a rotor (34) having axially projecting rotor blades (35) arranged on circular paths and a stator (39) having axially projecting stator blades (36) arranged on circular paths.
2. The friction vacuum pump of claim 1, characterized in that the rotor blades (35) of the circular compressor stage are arranged on a rotor body of the turbo-compressor stage (11) carrying the rotor discs (16).
3. The friction vacuum pump of claim 1 or 2, characterized in that the sta-tor blades (36) are arranged on a stator body of the turbo-compressor stage (11) carrying the stator discs (15).
4. The friction vacuum pump of one of claims 1 - 3, as a multi-inlet pump, characterized in that at least two axially spaced, serially compressing turbo-compressor stages (11, 12) are provided between which an in-termediate inlet (ZE1) is situated, and that a circular compressor stage (33) is provided on the compressor side of the first turbo-compressor stage (11).
5. The friction vacuum pump of one of claims 1-3, as a multi-inlet pump, characterized in that at least two axially spaced, serially compressing turbo-compressor stages (11, 12) are provided between which an in-termediate inlet (ZE1) is situated, and that a circular compressor stage (33) is provided on the compressor side of the second turbo-compressor stage (21).
6. The friction vacuum pump of one of claims 1 -5, characterized in that the circular compressor stage (33) compresses radially inward.
7. The friction vacuum pump of one of claims 1-6, characterized in that the circular compressor stage (33) is designed with at least two stages and alternately compresses radially inward and radially outward (or vice versa).
8. The friction vacuum pump of one of claims 1-7, characterized in that the rotor blades (35) have an axial length that tapers in the direction of compression.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10353034.7 | 2003-11-13 | ||
DE10353034A DE10353034A1 (en) | 2003-11-13 | 2003-11-13 | Multi-stage friction vacuum pump |
PCT/EP2004/012196 WO2005047707A1 (en) | 2003-11-13 | 2004-10-28 | Multi-stage friction vacuum pump |
Publications (1)
Publication Number | Publication Date |
---|---|
CA2545566A1 true CA2545566A1 (en) | 2005-05-26 |
Family
ID=34559626
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002545566A Abandoned CA2545566A1 (en) | 2003-11-13 | 2004-10-28 | Multi-stage friction vacuum pump |
Country Status (7)
Country | Link |
---|---|
US (1) | US20070081889A1 (en) |
EP (1) | EP1706645B1 (en) |
JP (1) | JP2007510853A (en) |
CN (1) | CN100453817C (en) |
CA (1) | CA2545566A1 (en) |
DE (2) | DE10353034A1 (en) |
WO (1) | WO2005047707A1 (en) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0322883D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
DE102007048703A1 (en) * | 2007-10-11 | 2009-04-16 | Oerlikon Leybold Vacuum Gmbh | Multi-stage turbomolecular pump pump rotor |
CN101392749B (en) * | 2008-10-31 | 2012-05-23 | 东北大学 | Vortex vacuum pump |
GB0901872D0 (en) | 2009-02-06 | 2009-03-11 | Edwards Ltd | Multiple inlet vacuum pumps |
DE102009011082A1 (en) * | 2009-02-28 | 2010-09-02 | Oerlikon Leybold Vacuum Gmbh | Multi-inlet vacuum pump |
EP2589814B3 (en) | 2010-07-02 | 2024-01-24 | Edwards Japan Limited | Vacuum pump |
GB2498816A (en) | 2012-01-27 | 2013-07-31 | Edwards Ltd | Vacuum pump |
EP2620649B1 (en) | 2012-01-27 | 2019-03-13 | Edwards Limited | Gas transfer vacuum pump |
JP6079052B2 (en) * | 2012-08-24 | 2017-02-15 | 株式会社島津製作所 | Vacuum pump |
NL2013493A (en) | 2013-10-16 | 2015-04-20 | Asml Netherlands Bv | Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing method. |
DE102014105582A1 (en) * | 2014-04-17 | 2015-10-22 | Pfeiffer Vacuum Gmbh | vacuum pump |
GB2558921B (en) * | 2017-01-20 | 2020-06-17 | Edwards Ltd | A multiple stage turbomolecular pump with inter-stage inlet |
CN108105121B (en) * | 2017-12-29 | 2020-03-24 | 东北大学 | Multistage composite high-vacuum dry pump |
WO2021102583A1 (en) * | 2019-11-28 | 2021-06-03 | Laminar Lift Systems Inc. | Tesla turbine pump and associated methods |
CN112160919A (en) * | 2020-09-28 | 2021-01-01 | 东北大学 | Turbo molecular pump and composite molecular pump comprising same |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2224009A5 (en) * | 1973-03-30 | 1974-10-25 | Cit Alcatel | |
US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
DE4314418A1 (en) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Friction vacuum pump with differently designed pump sections |
DE29516599U1 (en) * | 1995-10-20 | 1995-12-07 | Leybold AG, 50968 Köln | Friction vacuum pump with intermediate inlet |
GB9609281D0 (en) * | 1996-05-03 | 1996-07-10 | Boc Group Plc | Improved vacuum pumps |
DE19821634A1 (en) * | 1998-05-14 | 1999-11-18 | Leybold Vakuum Gmbh | Friction vacuum pump with staged rotor and stator |
GB9810872D0 (en) * | 1998-05-20 | 1998-07-22 | Boc Group Plc | Improved vacuum pump |
US6508631B1 (en) * | 1999-11-18 | 2003-01-21 | Mks Instruments, Inc. | Radial flow turbomolecular vacuum pump |
DE10004271A1 (en) * | 2000-02-01 | 2001-08-02 | Leybold Vakuum Gmbh | Friction vacuum pump has component parts supporting rotor and stator blade rows extending radially and longitudinal axes of blades extend axially, and medium flows through pump from outside inwards |
DE10004263A1 (en) * | 2000-02-01 | 2001-08-02 | Leybold Vakuum Gmbh | Seal between stationary and rotating component in vacuum pump consists of blades arranged in herringbone pattern attached to each component |
FR2859250B1 (en) * | 2003-08-29 | 2005-11-11 | Cit Alcatel | VACUUM PUMP |
-
2003
- 2003-11-13 DE DE10353034A patent/DE10353034A1/en not_active Withdrawn
-
2004
- 2004-10-28 DE DE502004008709T patent/DE502004008709D1/en active Active
- 2004-10-28 EP EP04790966A patent/EP1706645B1/en not_active Not-in-force
- 2004-10-28 US US10/578,989 patent/US20070081889A1/en not_active Abandoned
- 2004-10-28 JP JP2006538704A patent/JP2007510853A/en active Pending
- 2004-10-28 WO PCT/EP2004/012196 patent/WO2005047707A1/en active Application Filing
- 2004-10-28 CA CA002545566A patent/CA2545566A1/en not_active Abandoned
- 2004-10-28 CN CNB2004800334295A patent/CN100453817C/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20070081889A1 (en) | 2007-04-12 |
EP1706645B1 (en) | 2008-12-17 |
CN100453817C (en) | 2009-01-21 |
DE10353034A1 (en) | 2005-06-09 |
WO2005047707A1 (en) | 2005-05-26 |
JP2007510853A (en) | 2007-04-26 |
CN1878962A (en) | 2006-12-13 |
DE502004008709D1 (en) | 2009-01-29 |
EP1706645A1 (en) | 2006-10-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7011491B2 (en) | Friction vacuum pump | |
JP4395210B2 (en) | Improvement of vacuum pump | |
US5893702A (en) | Gas friction pump | |
CA2545566A1 (en) | Multi-stage friction vacuum pump | |
JP4805515B2 (en) | Dynamic seal member | |
EP0775829A1 (en) | Turbomolecular vacuum pumps | |
JP4173637B2 (en) | Friction vacuum pump with stator and rotor | |
CN102648351B (en) | Vacuum pump | |
JP4520636B2 (en) | Friction vacuum pump with chassis, rotor and casing, and apparatus with this type of friction vacuum pump | |
CA2563306A1 (en) | Vacuum pump | |
JPH037039B2 (en) | ||
WO2012032863A1 (en) | Turbo-molecular pump | |
JP5560263B2 (en) | Multistage vacuum pump | |
JP4584420B2 (en) | Vacuum pump | |
JPH04224295A (en) | Turbo-molecular pump | |
JP5069264B2 (en) | Friction vacuum pump with chassis, rotor and casing and apparatus with this type of friction vacuum pump | |
KR20160102160A (en) | Vacuum exhaust mechanism, compound vacuum pump, and rotating body component | |
JP5670095B2 (en) | Vacuum pump | |
US20020136643A1 (en) | Gas friction pump | |
JP2012520961A (en) | Multiple inlet vacuum pump | |
JP2001090690A (en) | Vacuum pump | |
KR20010011629A (en) | Diffuser for turbo compressor | |
JPS6385291A (en) | Vacuum pump | |
JPH03115797A (en) | Vacuum pump | |
JPS6385289A (en) | Vacuum pump |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
FZDE | Dead |