CN101392749B

CN101392749B - Vortex vacuum pump

Info

Publication number: CN101392749B
Application number: CN2008102284290A
Authority: CN
Inventors: 刘坤; 肖玉; 常学森; 巴德纯
Original assignee: CHENGDU RANKUUM MACHINERY Ltd; Northeastern University China
Current assignee: CHENGDU RANKUUM MACHINERY Ltd; Northeastern University China
Priority date: 2008-10-31
Filing date: 2008-10-31
Publication date: 2012-05-23
Anticipated expiration: 2028-10-31
Also published as: CN101392749A

Abstract

The invention discloses a vortex vacuum pump, which relates to the technical field of vacuum. The vortex vacuum pump comprises a base, a motor, a rotor and a stator, wherein the rotor is a multilevel rotor which is formed by a plurality of layers of single-level rotors and the single-level rotor is piled up by three layers of disks; the outer side of the rotor is provided with a convex plate, an inlet duct and an exhaust duct; the stator is a multilevel stator, and the inner side of each level of stator is provided with radial blades; each level of rotor and the corresponding one level of stator form a level of extraction compressing unit; and the exhaust duct is arranged between the adjacent extraction compressing units. By adopting the principle of vortex acceleration, the vortex vacuum pump can be used alone and also be used as a backing pump in a dry vacuum pump machine set, and has the advantages of simple structure, few parts, easy processing and simple maintenance; meanwhile, moving pieces in the pump have no friction to a pump cavity, so the pump has almost no wear, little vibration and low noise.

Description

Vortex vacuum pump

Technical field

The present invention relates to the vacuum technique field, particularly a kind of vortex vacuum pump.

Background technique

In recent years, people have developed polytype dried pump, are widely used in the every field that semi-conductor industry, analytical instrument and electronics industry equal vacuum are used.The dried pump of existing discharging directly into atmosphere can roughly be divided into dry vacuum pump according to the difference of mechanical structure form: roots-type, Roots+pawl formula, screw type, eddy type etc.Roots-type and Roots+pawl formula fabricated structure makes the gas passageway long and complicated, causes the accumulation of condensation product and is increased greatly by the possibility of chemical gas corrosion.Owing to be multistage design all, many again employing sealings make component more between level and the level, and leakage point is more, thereby makes maintenance work cumbersome.And the dried pump boundary dimension of Roots+pawl formula is bigger, and running noise is also bigger.Screw type and DRY SCROLL VACUUM PUMP rotor shapes are special, bring processing, assembling, positioning requirements precision height, and process and must use special plane, and reject rate is high, be unfavorable for producing in batches,

Summary of the invention

Cost is higher, and people are seeking the dry vacuum pump of ability discharging directly into atmosphere always.

In order to solve the deficiency that exists in the above device, the present invention provides a kind of vortex vacuum pump, and it adopts the former of vortex acceleration

Reason can be used separately, and the fore pump that also can be used as in the dry vacuum pump assembly uses.

Technological scheme of the present invention is achieved in that a kind of vortex vacuum pump; Comprise base, motor, rotor and stator, rotor is a multi-stage rotor, and multi-stage rotor is formed by multilayer single-stage rotor; The single-stage rotor is formed by three layers of disk stack, and there are boss, intake duct and air outlet flue in the rotor outside; Stator is multistage stator, and each grade stator inboard is provided with radial blade, and each grade rotor and corresponding primary stator are formed the one-level compression unit of bleeding; Bleed for adjacent two and be provided with air outlet flue between the compression unit.

Described boss is positioned on the second layer disk of single-stage rotor, and boss is positioned at the second layer disk gas compression termination of single-stage rotor, and boss is as the air-flow stop valve.Described intake duct is positioned at the rotor circumference outside, is that a first layer disk and the common dented part of second layer disk by the single-stage rotor forms naturally.Described air outlet flue is positioned at the rotor circumference outside; Naturally form by the second layer disk of single-stage rotor and the 3rd layer of common dented part of disk; Air outlet flue is as upper level the bleed suction port of compression unit of relief opening and the next stage of compression unit of bleeding, and in the compression unit of bleeding, when air-flow arrives stop valve, will enter into the next one compression unit of bleeding along air outlet flue; Air-flow flows with vortical bleeding between the compression unit, until last discharge.It is radial that radial blade becomes, and the radial blade height is consistent with the stator height, and the radial blade number is at least 30, and the radial blade shape of cross section is a rectangle or arc, and arc opening direction is opposite with the rotor sense of rotation.

The invention has the beneficial effects as follows: the principle that adopts vortex to quicken, can use separately, the fore pump that also can be used as in the dry vacuum pump assembly uses.In the dry vacuum pump of the discharging directly into atmosphere of equal volume, it can reach lower ultimate pressure; And in the discharging directly into atmosphere dry vacuum pump of identical ultimate pressure, have littler volume, lighter quality.This pump gas passageway is short simultaneously, and gas can be discharged fast, has reduced the possibility that condensation product and molecule are piled up.Simple in structure, be easy to processing, easy to maintenance, movement parts and pump chamber do not have friction in this pump simultaneously, so almost there are not wearing and tearing, so this pump vibration is little, noise is low.

Description of drawings

Fig. 1 is the structural representation that the present invention has the single-stage rotor;

Fig. 2 is a single-stage rotor structure schematic representation;

Fig. 3 is the plan view of Fig. 2;

Fig. 4 is the stator structure schematic representation of an embodiment of the present invention;

Fig. 5 is the rotor structure schematic representation of an embodiment of the present invention;

Fig. 6 is the plan view of Fig. 5;

Fig. 7 is the structural representation that the present invention has multi-stage rotor;

Among the figure: 1 gland, 2 rotors, 3 stators, 4 motor shafts, 5 upper bearing (metal)s, 6 motor stators, 7 rotors, 8 lower bearings, 9 bases, 10 base plates, 11 intake ducts, 12 boss, 13 air outlet flues, 14 radial blades.

Embodiment

Like Fig. 1,2, shown in 3, structural representation and single-stage rotor structure schematic representation for having the single-stage rotor include base 9; The rotor 7 that links to each other with base 9, the rotor 2 that links to each other with motor shaft 4, the center is provided with oil-sucking hole on the motor shaft 4; Oil-sucking hole feeds in the lubricating oil bath of base bottom, and motor shaft 4 is provided with fuel-displaced place, and fuel-displaced place is made up of a plurality of oil outlets; Oil outlet is positioned near upper bearing (metal) 5, the lower bearing 8, for upper bearing (metal) 5, lower bearing 8 provide lubricant oil.Rotor 2 is the single-stage rotor, and the single-stage rotor is integral by 3 layers of disc set, and the first layer disk is similar with the 3rd layer of disk diameter; With the stator 3 of single-stage rotor coupling be single stage stator, single-stage rotor and the single stage stator formation one-level compression unit of bleeding has the boss 12 that is complementary with stator 3 outside the single-stage rotor; Stator 3 is enclosed in the excircle of rotor 2, and stator 3 inboards are provided with 42 radial blades 14, and 14 one-tenth of radial blades are radial; Radial blade 14 shape of cross sections are rectangle, and the rotor top is provided with the gland 1 that links to each other with stator 3, and the plane is provided with intakeport on the gland 1; Rotor 2 rotates, and gas gets into from intakeport, gets into intake duct 11 subsequently; When gas passes through the radial blade 14 of rotation, can quicken the motion of air-flow, when gas arrives stop valve, will discharge along air outlet flue 13; Air outlet flue 13 links to each other with relief opening, and relief opening is positioned on the base 9, and air-flow flows with vortical in this process.

Another kind of embodiment of the present invention, rotor 2 is Pyatyis, cooperates with Pyatyi stator 3 to constitute the compression unit of bleeding; Rotor 2 rotates, and gas gets into from intakeport, gets into intake duct 11 subsequently; When gas passes through the radial blade 14 of rotation, can quicken the motion of air-flow, adjacent two-stage is bled and is provided with air outlet flue 13 between the compression unit; Gas gets into the next stage compression unit of bleeding through air outlet flue 13 from the upper level compression unit of bleeding, through the repeatedly compression of the compression unit of bleeding from relief opening row to atmosphere.

Claims

1. vortex vacuum pump; Comprise base, motor, rotor and stator, it is characterized in that described rotor is a multi-stage rotor, multi-stage rotor is formed by multilayer single-stage rotor; The single-stage rotor is formed by three layers of disk stack, and there are boss, intake duct and air outlet flue in the rotor outside; Described boss is positioned on the second layer disk of single-stage rotor; Boss is positioned at the second layer disk gas compression termination of single-stage rotor, and boss is as the air-flow stop valve; Described intake duct is positioned at the rotor circumference outside, is that a first layer disk and the common dented part of second layer disk by the single-stage rotor forms naturally; Described air outlet flue is positioned at the rotor circumference outside, is that second layer disk and the 3rd layer of common dented part of disk by the single-stage rotor forms naturally; Described stator is multistage stator, and each grade stator inboard is provided with radial blade, and each grade rotor and corresponding primary stator are formed the one-level compression unit of bleeding; Bleeding for adjacent two has air outlet flue between the compression unit, described air outlet flue is as upper level the bleed suction port of compression unit of relief opening and the next stage of compression unit of bleeding.

2. vortex vacuum pump according to claim 1; It is characterized in that described radial blade becomes radial; The radial blade height is consistent with the stator height; The radial blade number is at least 30, and the radial blade shape of cross section is a rectangle or arc, and arc opening direction is opposite with the rotor sense of rotation.