CN2625602Y - Multi-stag vacuum pump - Google Patents

Multi-stag vacuum pump Download PDF

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Publication number
CN2625602Y
CN2625602Y CN 03251574 CN03251574U CN2625602Y CN 2625602 Y CN2625602 Y CN 2625602Y CN 03251574 CN03251574 CN 03251574 CN 03251574 U CN03251574 U CN 03251574U CN 2625602 Y CN2625602 Y CN 2625602Y
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CN
China
Prior art keywords
cavity
rotor
blade
vacuum pump
rotors
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Expired - Fee Related
Application number
CN 03251574
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Chinese (zh)
Inventor
林恒毅
庄丰铭
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LIUNG FENG CO Ltd
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LIUNG FENG CO Ltd
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Priority to CN 03251574 priority Critical patent/CN2625602Y/en
Application granted granted Critical
Publication of CN2625602Y publication Critical patent/CN2625602Y/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

The utility model relates to a multilevel vacuum pump, comprising a plurality of bodies that are connected in series into an integral cavity. The interior of each cavity accommodates two rotors that are meshed with each other; each rotor is provided with at least two equidistant vanes, and each vane is provided with an end surface and a meshed surface which rest against in the inner wall of the cavity; one sides of the two shafts that respectively run through each cavity and are articulated with the two rotors in the cavity can be articulated with the motor; wherein, the number of vanes of the rotors that are meshed with each other in each cavity is different, and the number of vanes is smaller for the rotors in the cavity that is nearer to the cavity one side of the drive end of the motor, and the rotors with a plurality of vanes have relative thin thickness. The utility model has the advantages of reducing noise and vibration in operation and increasing the transportation volume of compressed gas.

Description

The multistage vacuum pump
Technical field
The utility model relates to a kind of vacuum pump, is meant a kind of intake and exhaust continuously especially, can reduce noise in operating and vibrations, can increase the multistage vacuum pump of the delivery volume of pressurized gas.
Background technique
The application of vacuum technique is very extensive, all needs vacuum technique that suitable operating environment is provided in the equipment such as the little shadow technology in the semiconductor fabrication process, dry etching technology, film deposition techniques, ion embedding technology.Have important effect at the vacuum technique intermediate pump, it has a direct impact the control of whole vacuum environment and the control of product quality.Thereby the vacuum pump performance, all constantly is being modified to the requirement of post-production and assembly precision and the improvement of vacuum environment quality etc. from early stage pure function design, assembling easily.In numerous vacuum pump structures, the multistage vacuum pump is the equipment that generally is employed at present in the vacuum system, and this vacuum pump has plural cavity, is combined with the rotor that is rotated in each cavity, reaching the function of intake and exhaust, as No. the 4943214th, 5013227, U. S. Patent etc.Though the multistage vacuum pump that these U. S. Patents disclosed has good assembly precision, also there are many flaws that haves much room for improvement: 1, be easy to generate noise and vibrations.The rotor blade of existing multistage vacuum pump is equal number (2 or 3) in each cavity, is easy to generate the intake and exhaust non-continuous event.And rotor blade ties up to the gap that has incomplete compression in its intermeshing operation process because of the pass of shape, can produce the incomplete phenomenon of compression, thereby influences the air inlet of vacuum pump, and can cause noise and vibrations when turning round.2, the delivery volume of pressurized gas can't increase.Existing multistage vacuum pump gas delivery volume is that the rotor thickness in each cavity of nationality is controlled, and what carried out in first cavity is gas delivery than low pressure, and gas specific volume is higher, so the thickness of rotor is thicker; And the gas in the terminal cavity has been compressed, and gas specific volume reduces, and relative pressure strengthens, and therefore the strength of materials of the rotor in the terminal cavity must be strengthened.Therefore, terminal cavity can't effectively increase the delivery volume of pressurized gas owing to the restriction that taken up space by rotor thickness.3, the cost of material of rotor can't reduce.As previously mentioned, control because the gas delivery volume in each cavity is the thickness of nationality rotor, therefore, under certain gas compression power, the cost of material of rotor can't be reduced.
Summary of the invention
The purpose of this utility model is to provide a kind of can reduce noise in operating and vibrations, and can increase the delivery volume of pressurized gas, reduces the multistage vacuum pump of rotor material cost.
The purpose of this utility model realizes by following technological means: a kind of multistage vacuum pump, comprise a body and two rotating shafts, wherein body has several serial connections and is the cavity of one, each cavity has suction port and exhaust port, and accommodate intermeshing two rotors in each cavity, each rotor has the equidistant blade of at least two leaves, and each blade has end face and the Surface of action that is against cavity inner wall; Two rotating shafts are applied in each cavity respectively and articulate respectively with two rotors in the cavity, and a side of two rotating shafts can articulate with motor, it is characterized in that: the blade quantity difference of intermeshing rotor in each cavity, and more the blade quantity near the cavity internal rotor of motor driven end one side is fewer, the thinner thickness of the blade in the few rotor of the relative blade quantity of blade in the many rotor of blade quantity.
Described multistage vacuum pump is characterized in that: cavity has more than three or three, and the number of blade difference of interior any two cavitys of series connection cavity or the cavity internal rotor more than two cavitys.Being meshing with each other in each cavity, intermeshing mating face keeps coincideing mutually between the rotor that rotates, and has a micro-gap that is fit between the rotor.The Surface of action of the blade of each rotor cavity is made up of inside and outside equal circular full cycloid.Each rotating shaft is provided with bearing.Two rotating shafts are articulated by driving wheel each other, and one of two rotating shafts are articulated with motor.The number of blade of the least significant end cavity internal rotor of described multistage vacuum pump is more than the number of blade of cavity internal rotors at different levels before.
Advantage of the present utility model is: intake and exhaust continuously, can reduce noise in operating and vibrations, and can increase the delivery volume of pressurized gas, reduce the rotor material cost.
Description of drawings
Fig. 1 is the combination longitudinal sectional view of the utility model multistage vacuum pump.
Fig. 2 to Fig. 4 is the transverse sectional view of each cavity of the utility model.
Fig. 5 to Fig. 7 is the longitudinal sectional view of each cavity of the utility model.
Embodiment
Describe structure of the present utility model in detail below in conjunction with accompanying drawing.
As shown in Figure 1, multistage vacuum pump 1 of the present utility model comprises body 2 and two rotating shafts 3,4, wherein: and the cavity 20,21,22 that it is one that body 2 has three serial connections, so that the space of pressurized gas to be provided, each cavity has suction port 23 and exhaust port 24, as the passage of air inlet and exhaust; Extremely shown in Figure 7 as Fig. 2, accommodate intermeshing two rotors 50 in each cavity, 51, each rotor has equidistant blade 52, each blade 52 has end face 521 and the Surface of action 522 that is against cavity inner wall, what deserves to be mentioned is, rotor 50 in the cavity 20,51 blade 52 is 2, and the rotor 50 in the cavity 21,51 blade 52 is 4, rotor 50 in the cavity 22,51 blade 52 is 6, and the thickness of the rotor that blade quantity is few is thicker relatively, the thickness of the rotor that blade quantity is many is thinner relatively, so that control the volume of gas delivery in each cavity; In addition, the Surface of action 522 of blade 52 and end face 521 are formed by inside and outside equal circular full cycloid, so that when two intermeshing rotors 50 and 51 runnings, its mating face matches, and possess an atomic little gap between rotor, do not have noise and vibrations when guaranteeing to turn round, and the gas after preventing to compress returns leakage; Two rotors 3,4 run through each cavity 20,21,22 respectively, and articulate respectively with two rotors 50,51 in the cavity, two rotating shafts 3,4 are articulated by driving wheel 6 each other, and rotating shaft 3 is articulated with the motor (not shown) and becomes live axle, when revolution, drive rotating shaft 3 and rotate, simultaneously by live axle 6 interlock rotating shafts 4, thereby the rotor 50,51 that starts in the rotating shaft 3,4 carries out gas compression; In addition, rotating shaft 3,4 is provided with bearing 30,40, so that the rotating shaft rotation is smooth and easy.
Extremely shown in Figure 4 as Fig. 2, multistage vacuum pump 1 of the present utility model is at 3 cavitys 20,21, rotor 50 in 22,51 blade 52 adopts 2,4,6 configuration, and rotor 50,51 thickness is gradually thin (extremely shown in Figure 7 as Fig. 5) along with blade 52 increasing of quantity, the main cause of She Zhiing is because what be positioned at that the cavity 20 of primary importance run into is conveying gas than low pressure like this, the gas of one's respective area is the high gas of compressibility that enters from suction port 23, the pressure of gas is low and gas specific volume is higher, rotor 50,51 material thickness requires thicker, therefore, can increase the gas delivery volume; In like manner, be positioned at the gas of the cavity 22 of least significant end, the pressure when suction port 23 enters is higher, and gas specific volume descends, and the gas delivery volume of required load descends, the thickness of rotor thereby can be thinner, but the strength of materials of rotor is had relatively high expectations relatively.Like this, gas can be more continuous aspect inlet and outlet from blade 52 compressions of the most last cavity 20,21,22 of first arrival by more rotor 50,51, and can reduce noise and vibrations.This point, from test result of the present utility model is confirmed: with actual the recording of identical motor rotary speed (rpu1740), effective speed of exhaust of each cavity 20,21,22 all improves many than prior art to the utility model.

Claims (7)

1, a kind of multistage vacuum pump, comprise a body and two rotating shafts, wherein body has several serial connections and is the cavity of one, each cavity has suction port and exhaust port, and accommodate intermeshing two rotors in each cavity, each rotor has the equidistant blade of at least two leaves, and each blade has end face and the Surface of action that is against cavity inner wall; Two rotating shafts are applied in each cavity respectively and articulate respectively with two rotors in the cavity, and a side of two rotating shafts can articulate with motor, it is characterized in that: the blade quantity difference of intermeshing rotor in each cavity, and more the blade quantity near the cavity internal rotor of motor driven end one side is fewer, the thinner thickness of the blade in the few rotor of the relative blade quantity of blade in the many rotor of blade quantity.
2, multistage vacuum pump according to claim 1, it is characterized in that: cavity has more than three or three, and the number of blade difference of interior any two cavitys of series connection cavity or the cavity internal rotor more than two cavitys.
3, multistage vacuum pump according to claim 1 is characterized in that: being meshing with each other in each cavity, intermeshing mating face keeps coincideing mutually between the rotor that rotates, and has a micro-gap that is fit between the rotor.
4, multistage vacuum pump according to claim 3 is characterized in that: the Surface of action of the blade of each rotor cavity is made up of inside and outside equal circular full cycloid.
5, multistage vacuum pump according to claim 1, it is characterized in that: each rotating shaft is provided with bearing.
6, multistage vacuum pump according to claim 5 is characterized in that: two rotating shafts are articulated by driving wheel each other, and one of two rotating shafts are articulated with motor.
7, multistage vacuum pump according to claim 1 is characterized in that: the number of blade of least significant end cavity internal rotor is more than the number of blade of cavity internal rotors at different levels before.
CN 03251574 2003-04-30 2003-04-30 Multi-stag vacuum pump Expired - Fee Related CN2625602Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 03251574 CN2625602Y (en) 2003-04-30 2003-04-30 Multi-stag vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 03251574 CN2625602Y (en) 2003-04-30 2003-04-30 Multi-stag vacuum pump

Publications (1)

Publication Number Publication Date
CN2625602Y true CN2625602Y (en) 2004-07-14

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CN 03251574 Expired - Fee Related CN2625602Y (en) 2003-04-30 2003-04-30 Multi-stag vacuum pump

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103032325A (en) * 2011-10-05 2013-04-10 株式会社神户制钢所 Screw compressor
CN113417852A (en) * 2021-08-11 2021-09-21 四川莱斯特真空科技有限公司 Dry vacuum pump

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103032325A (en) * 2011-10-05 2013-04-10 株式会社神户制钢所 Screw compressor
CN103032325B (en) * 2011-10-05 2015-04-29 株式会社神户制钢所 Screw compressor
CN113417852A (en) * 2021-08-11 2021-09-21 四川莱斯特真空科技有限公司 Dry vacuum pump

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GR01 Patent grant
C17 Cessation of patent right
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20040714