CN101392750B - Dry vacuum pump - Google Patents
Dry vacuum pump Download PDFInfo
- Publication number
- CN101392750B CN101392750B CN2008102284318A CN200810228431A CN101392750B CN 101392750 B CN101392750 B CN 101392750B CN 2008102284318 A CN2008102284318 A CN 2008102284318A CN 200810228431 A CN200810228431 A CN 200810228431A CN 101392750 B CN101392750 B CN 101392750B
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- Prior art keywords
- vortex
- level
- groove
- rotor
- vacuum pump
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Abstract
The invention discloses a dry vacuum pump, which relates to the vacuum technology. The dry vacuum pump comprises a base, a motor, a rotor and a stator, wherein the rotor consists of at least one level of vortex level, and the outer side of each level of vortex level is circumferentially provided with an annular groove in which blades of same height as the groove are uniformly distributed; the inner circumference of the stator is provided with vortex grooves the level number of which is the same as the level number of vortex level of the rotor; a section of a risen convex plate is arranged in the vortex groove, and each level of vortex groove and the corresponding one level of vortex level form a level extraction compressing unit; and an exhaust duct is arranged between the adjacent extraction compressing units and is positioned between the adjacent vortex grooves of the inner circumference of the stator. The dry vacuum pump is capable of discharging into atmosphere directly, and has the advantages of simple structure, few parts, easy processing and simple maintenance; meanwhile, moving pieces in the pump have no friction to a pump cavity, so the pump has almost no wear, little vibration and low noise.
Description
Technical field
The present invention relates to the vacuum technique field, particularly a kind of dry vacuum pump.
Background technique
In recent years, people have developed polytype dried pump, are widely used in the every field that semi-conductor industry, analytical instrument and electronics industry equal vacuum are used.Existing dried pump can roughly be divided into dry vacuum pump according to the difference of mechanical structure form: roots-type, Roots+pawl formula, screw type, eddy type etc.Roots-type and Roots+pawl formula fabricated structure makes the gas passageway long and complicated, causes the accumulation of condensation product and is increased greatly by the possibility that chemical gas corrodes.Owing to be multistage design all, many again employing sealings make component more between level and the level, and leakage point is more, thereby makes maintenance work cumbersome.And the dried pump boundary dimension of Roots+pawl formula is bigger, and running noise is also bigger.Screw type and DRY SCROLL VACUUM PUMP rotor shapes are special, bring processing, assembling, positioning requirements precision height, and process and must use special plane, and the reject rate height is unfavorable for producing in batches, and cost is higher, and people are seeking the dry vacuum pump of energy discharging directly into atmosphere always.
Summary of the invention
In order to solve the deficiency of above device, the invention provides a kind of dry vacuum pump.
The technical solution used in the present invention is: a kind of dry vacuum pump, comprise base, motor, rotor and stator, rotor is made up of multistage vortex level rotor, and the outside of each grade vortex level rotor along the circumferential direction is provided with annular groove, is evenly distributed with the blade contour with groove in groove; The inside circumference of stator is provided with the vortex groove, and the progression of vortex groove is consistent with the progression of rotor vortex level, and the boss of one section rise is arranged in the vortex groove, and each grade vortex groove and corresponding one-level vortex level rotor constitute the one-level compression unit of bleeding; Bleeding at adjacent two is provided with air outlet flue between the compression unit, air outlet flue is between inboard adjacent two the vortex grooves of stator circumference.
The groove sectional shape is near semicircle.The blade number is at least 30, and leaf cross-section is shaped as rectangle or arc, and wherein arc opening direction is consistent with the rotor sense of rotation.The sectional shape of each grade vortex groove is near semicircle.Boss is positioned at the bleed gas compression termination of compression unit of each grade, and sectional shape is near semicircle.Air outlet flue is dented part formation naturally between two vortex grooves, and air outlet flue is as upper level the bleed suction port of compression unit of the relief opening of compression unit and next stage of bleeding.
The invention has the beneficial effects as follows: the present invention designs a kind of novel dry vacuum pump, and the principle that it adopts vortex to quicken can be used separately, and the fore pump that also can be used as in the dry vacuum pump assembly uses.In the dry vacuum pump of the discharging directly into atmosphere of equal volume, it can reach lower ultimate pressure; And in the discharging directly into atmosphere dry vacuum pump of identical ultimate pressure, this pump has littler volume, lighter quality.This pump gas passageway is short simultaneously, and gas can be discharged fast, has reduced the possibility that condensation product and molecule are piled up.This pump structure is simple, and component are few, is easy to processing, and is easy to maintenance, and movement parts and pump chamber do not have friction in this pump simultaneously, so almost there are not wearing and tearing, so this pump vibration is little, noise is low.
Description of drawings
Fig. 1 be an embodiment of the present invention structural representation;
Fig. 2 is the rotor structure schematic representation of an embodiment of the present invention;
Fig. 3 is the stator structure schematic representation of an embodiment of the present invention;
Among the figure: 1 gland, 2 stators, 3 rotors, 4 main shafts, 5 mechanical seals, 6 upper bearing (metal)s, 7 bases, 8 relief openings, 9 rotors, 10 motor stators, 11 lower bearings, 12 oil sumps, 13 intake ducts, 14 boss, 15 air outlet flues, 16 blades.
Embodiment
In conjunction with the accompanying drawings the present invention is described further:
As Fig. 1 is the structural representation of an embodiment of the present invention, comprise base 7, the rotor 9 that links to each other with base 7, the rotor 3 that links to each other with main shaft 4, main shaft 4 centers are provided with oil-sucking hole, oil-sucking hole feeds in the lubricating oil bath 12 of base bottom, and main shaft 4 is provided with fuel-displaced place, and fuel-displaced place is made of a plurality of oil outlets, oil outlet is positioned near upper bearing (metal) 6 and the lower bearing 11, for upper bearing (metal) 6 and lower bearing 11 provide lubricant oil, upper bearing (metal) 6 and lower bearing 11 adopt rolling bearings, and mechanical seal 5 is adopted in sealing; Rotor 3 is made up of three grades of vortex level rotors, the outside of each grade vortex level rotor along the circumferential direction is provided with annular groove, the groove sectional shape is near semicircle, in groove, be evenly distributed with the blade 16 contour with groove, blade 16 shape of cross sections are rectangle, rotor 3 tops are provided with the gland 1 that links to each other with stator 2, the inside circumference of stator 2 is provided with three grades of vortex grooves, each grade vortex groove and corresponding one-level vortex level rotor constitute the one-level compression unit of bleeding, the plane is provided with intakeport on the gland 1, when rotor 3 rotations, gas enters from intakeport, enter intake duct 13 subsequently, gas enters the one-level compression unit of bleeding then, obtain energy when passing through the blade 16 that rotates, quicken the motion of air-flow, gas in gas between the blade 16 and the vortex groove moves along rotor 3 sense of rotation with the form of vortex, until the bleed compression termination of compression unit of each grade, adjacent two-stage is bled and is provided with air outlet flue 15 between the compression unit, gas enters the next stage compression unit of bleeding by air outlet flue 15 from the upper level compression unit of bleeding, air outlet flue 15 links to each other with relief opening 8, arranges to atmosphere from relief opening 8 through the repeatedly compression of the compression unit of bleeding.
As Fig. 2 is the rotor structure schematic representation of an embodiment of the present invention, rotor 3 is made up of three grades of vortex level rotors, the outside of each grade vortex level rotor along the circumferential direction is provided with annular groove, the groove sectional shape is near semicircle, in groove, be evenly distributed with the blade 16 contour with groove, blade 16 shape of cross sections are rectangle, and rotor 3 constitutes the compression unit of bleeding jointly with stator 2.
As Fig. 3 is the stator structure schematic representation of an embodiment of the present invention, the boss 14 that there are three grades of vortex grooves stator 2 inboards and are complementary with the vortex rotor, stator 2 inboards are provided with intake duct 13 and air outlet flue 15, and intake duct 13 links to each other with suction port, and air outlet flue 15 links to each other with relief opening 8.
Claims (4)
1. dry vacuum pump, comprise base, motor, rotor and stator, it is characterized in that described rotor is made up of multistage vortex level rotor, the outside of each grade vortex level rotor along the circumferential direction is provided with annular groove, is evenly distributed with the blade contour with groove in groove; The inside circumference of described stator is provided with the vortex groove, the progression of vortex groove is consistent with the progression of rotor vortex level, the boss that one section rise is arranged in the vortex groove, boss is positioned at each level compression unit gas compression termination of bleeding, sectional shape is near semicircle, each grade vortex groove and the corresponding one-level vortex level rotor formation one-level compression unit of bleeding; Between two adjacent compression units, be provided with air outlet flue, air outlet flue is between inboard adjacent two the vortex grooves of stator circumference, described air outlet flue is dented part formation naturally between the vortex groove, and air outlet flue is as upper level the bleed suction port of compression unit of the relief opening of compression unit and next stage of bleeding.
2. dry vacuum pump according to claim 1 is characterized in that described groove sectional shape is near semicircle.
3. dry vacuum pump according to claim 1 is characterized in that described blade number is at least 30, and leaf cross-section is shaped as rectangle or arc, and wherein arc opening direction is consistent with the rotor sense of rotation.
4. dry vacuum pump according to claim 1, the sectional shape that it is characterized in that described each grade vortex groove is near semicircle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008102284318A CN101392750B (en) | 2008-10-31 | 2008-10-31 | Dry vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008102284318A CN101392750B (en) | 2008-10-31 | 2008-10-31 | Dry vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101392750A CN101392750A (en) | 2009-03-25 |
| CN101392750B true CN101392750B (en) | 2010-12-29 |
Family
ID=40493216
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008102284318A Expired - Fee Related CN101392750B (en) | 2008-10-31 | 2008-10-31 | Dry vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101392750B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101786380B (en) * | 2010-02-28 | 2011-12-21 | 詹洪明 | Electromagetic positive and negative pressure generator for ink supply system of ink-jet printer |
| CN101774304B (en) * | 2010-02-28 | 2011-12-21 | 詹洪明 | Negative pressure generator special for ink supply system of inkjet printer |
-
2008
- 2008-10-31 CN CN2008102284318A patent/CN101392750B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN101392750A (en) | 2009-03-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20101229 Termination date: 20121031 |