CN201292959Y - Dry vacuum pump - Google Patents
Dry vacuum pump Download PDFInfo
- Publication number
- CN201292959Y CN201292959Y CNU2008202187830U CN200820218783U CN201292959Y CN 201292959 Y CN201292959 Y CN 201292959Y CN U2008202187830 U CNU2008202187830 U CN U2008202187830U CN 200820218783 U CN200820218783 U CN 200820218783U CN 201292959 Y CN201292959 Y CN 201292959Y
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- vortex
- groove
- level
- vacuum pump
- rotor
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Abstract
The utility model provides a dry vacuum pump belonging to the vacuum technology field. The vacuum pump comprises a base, a motor, a rotor and a stator. The rotor comprises at least one level of vortex grades, annular grooves are arranged at the outer side of each grade of vortex grades along the circumference direction, and blades as high as the grooves are uniformly arranged in the groove. A vortex groove is arranged at the inner side of the circumference of the stator, and the level number of the vortex grooves is the same as that of the rotor vortex. A segment of risen convex platform is arranged in the vortex groove, and each level of vortex groove and the corresponding vortex grade form a level of air pumping compression unit. An exhaust channel is arranged between the two adjacent air pumping compression units, and the exhaust channel is arranged between the two adjacent vortex grooves at the inner side of the circumference of the stator. The dry vacuum pump achieves the function of direct exhausting air, has simple structure, few parts, easy machining and maintenance, no friction between moving parts in the pump and the pump cavity, almost no abrasion, less libration and low noise.
Description
Technical field
The utility model relates to the vacuum technique field, particularly a kind of dry vacuum pump.
Background technique
For the cost of the vacuum system that reduces semiconductor equipment, realize that high vacuum obtains cleaning, oversimplifying of equipment and microminiaturized.Existing dried pump can roughly be divided into dry vacuum pump according to the difference of mechanical structure form: roots-type, Roots+pawl formula, screw type, eddy type etc.Roots-type and Roots+pawl formula fabricated structure makes the gas passageway long and complicated, causes the accumulation of condensation product and is increased greatly by the possibility that chemical gas corrodes.Owing to be multistage design all, many again employing sealings make component more between level and the level, and leakage point is more, thereby makes maintenance work cumbersome.And the dried pump boundary dimension of Roots+pawl formula is bigger, and running noise is also bigger.Screw type and DRY SCROLL VACUUM PUMP rotor shapes are special, bring processing, assembling, positioning requirements precision height, and process and must use special plane, and the reject rate height is unfavorable for producing in batches, and cost is higher, and people are seeking the dry vacuum pump of energy discharging directly into atmosphere always.
The model utility content
In order to solve the deficiency of above device, the utility model provides a kind of dry vacuum pump.
The technical solution adopted in the utility model is: a kind of dry vacuum pump, comprise base, motor, rotor and stator, rotor is made up of one-level vortex level at least, and the outside of each grade vortex level along the circumferential direction is provided with annular groove, is evenly distributed with the blade contour with groove in groove; The inside circumference of stator is provided with the vortex groove, and the progression of vortex groove is consistent with the progression of rotor vortex level, and the boss of one section rise is arranged in the vortex groove, and each grade vortex groove and corresponding one-level vortex level constitute the one-level compression unit of bleeding; Be provided with air outlet flue between two adjacent compression units, air outlet flue is between inboard adjacent two the vortex grooves of stator circumference.
The groove sectional shape is near semicircle.The blade number is at least 30, and leaf cross-section is shaped as rectangle or arc, and wherein arc opening direction is consistent with the rotor sense of rotation.The sectional shape of each grade vortex groove is near semicircle.Boss is positioned at the bleed gas compression termination of compression unit of each grade, and sectional shape is near semicircle.Air outlet flue is dented part formation naturally between two vortex grooves, and air outlet flue is as upper level the bleed suction port of compression unit of the relief opening of compression unit and next stage of bleeding.
The beneficial effects of the utility model are: the utility model designs a kind of novel dry vacuum pump, and the principle that it adopts vortex to quicken can be used separately, and the fore pump that also can be used as in the dry vacuum pump assembly uses.In the dry vacuum pump of the discharging directly into atmosphere of equal volume, it can reach lower ultimate pressure; And in the discharging directly into atmosphere dry vacuum pump of identical ultimate pressure, this pump has littler volume, lighter quality.This pump gas passageway is short simultaneously, and gas can be discharged fast, has reduced the possibility that condensation product and molecule are piled up.This pump structure is simple, and component are few, is easy to processing, and is easy to maintenance, and movement parts and pump chamber do not have friction in this pump simultaneously, so almost there are not wearing and tearing, so this pump vibration is little, noise is low.
Description of drawings
Fig. 1 is a structural representation of the present utility model;
Fig. 2 is a kind of embodiment's of the utility model a rotor structure schematic representation;
Fig. 3 is a kind of embodiment's of the utility model a stator structure schematic representation;
Among the figure: 1 gland, 2 stators, 3 rotors, 4 main shafts, 5 mechanical seals, 6 upper bearing (metal)s, 7 bases, 8 relief openings, 9 rotors, 10 motor stators, 11 lower bearings, 12 oil sumps, 13 intake ducts, 14 boss, 15 air outlet flues, 16 blades.
Embodiment
In conjunction with the accompanying drawings the utility model is described further:
As Fig. 1 is a kind of embodiment's of the utility model structural representation, comprise base 7, the rotor 9 that links to each other with base 7, the rotor 3 that links to each other with main shaft 4, main shaft 4 centers are provided with oil-sucking hole, oil-sucking hole feeds in the lubricating oil bath 12 of base bottom, and main shaft 4 is provided with fuel-displaced place, and fuel-displaced place is made of a plurality of oil outlets, oil outlet is positioned near upper bearing (metal) 6 and the lower bearing 11, for upper bearing (metal) 6 and lower bearing 11 provide lubricant oil, upper bearing (metal) 6 and lower bearing 11 adopt rolling bearings, and mechanical seal 5 is adopted in sealing; Rotor 3 is made up of three grades of vortex level rotors, the outside of each grade vortex level rotor along the circumferential direction is provided with annular groove, the groove sectional shape is near semicircle, in groove, be evenly distributed with the blade 16 contour with groove, blade 16 shape of cross sections are rectangle, rotor 3 tops are provided with the gland 1 that links to each other with stator 2, the inside circumference of stator 2 is provided with three grades of vortex grooves, each grade vortex groove and corresponding one-level vortex level rotor constitute the one-level compression unit of bleeding, the plane is provided with intakeport on the gland 1, when rotor 3 rotations, gas enters from intakeport, enter intake duct 13 subsequently, gas enters the one-level compression unit of bleeding then, obtain energy when passing through the blade 16 that rotates, quicken the motion of air-flow, gas in gas between the blade 16 and the vortex groove moves along rotor 3 sense of rotation with the form of vortex, until the bleed compression termination of compression unit of each grade, adjacent two-stage is bled and is provided with air outlet flue 15 between the compression unit, gas enters the next stage compression unit of bleeding by air outlet flue 15 from the upper level compression unit of bleeding, air outlet flue 15 links to each other with relief opening 8, arranges to atmosphere from relief opening 8 through the repeatedly compression of the compression unit of bleeding.
As Fig. 2 is a kind of embodiment's of the utility model rotor structure schematic representation, rotor 3 is made up of three grades of vortex level rotors, the outside of each grade vortex level rotor along the circumferential direction is provided with annular groove, the groove sectional shape is near semicircle, in groove, be evenly distributed with the blade 16 contour with groove, blade 16 shape of cross sections are rectangle, and rotor 3 constitutes the compression unit of bleeding jointly with stator 2.
As Fig. 3 is a kind of embodiment's of the utility model stator structure schematic representation, the boss 14 that there are three grades of vortex grooves stator 2 inboards and are complementary with the vortex rotor, stator 2 inboards are provided with intake duct 13 and air outlet flue 15, and intake duct 13 links to each other with suction port, and air outlet flue 15 links to each other with relief opening 8.
Claims (6)
1. dry vacuum pump, comprise base, motor, rotor and stator, it is characterized in that described rotor is made up of one-level vortex level at least, the outside of each grade vortex level along the circumferential direction is provided with annular groove, is evenly distributed with the blade contour with groove in groove; The inside circumference of described stator is provided with the vortex groove, and the progression of vortex groove is consistent with the progression of rotor vortex level, and the boss of one section rise is arranged in the vortex groove, and each grade vortex groove and corresponding one-level vortex level constitute the one-level compression unit of bleeding; Be provided with air outlet flue between two adjacent compression units, air outlet flue is between inboard adjacent two the vortex grooves of stator circumference.
2. a kind of dry vacuum pump according to claim 1 is characterized in that described groove sectional shape is near semicircle.
3. a kind of dry vacuum pump according to claim 1 is characterized in that described blade number is at least 30, and leaf cross-section is shaped as rectangle or arc, and wherein arc opening direction is consistent with the rotor sense of rotation.
4. a kind of dry vacuum pump according to claim 1, the sectional shape that it is characterized in that described each grade vortex groove is near semicircle.
5. a kind of dry vacuum pump according to claim 1 is characterized in that described boss is positioned at the bleed gas compression termination of compression unit of each grade, and sectional shape is near semicircle.
6. a kind of dry vacuum pump according to claim 1 is characterized in that described air outlet flue is dented part formation naturally between the vortex groove, and air outlet flue is as upper level the bleed suction port of compression unit of the relief opening of compression unit and next stage of bleeding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008202187830U CN201292959Y (en) | 2008-10-31 | 2008-10-31 | Dry vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008202187830U CN201292959Y (en) | 2008-10-31 | 2008-10-31 | Dry vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201292959Y true CN201292959Y (en) | 2009-08-19 |
Family
ID=41006436
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008202187830U Expired - Fee Related CN201292959Y (en) | 2008-10-31 | 2008-10-31 | Dry vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201292959Y (en) |
-
2008
- 2008-10-31 CN CNU2008202187830U patent/CN201292959Y/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090819 Termination date: 20101031 |