CN101122294A - Cantilever type high rate turbine vacuum pump and its evacuation method - Google Patents

Cantilever type high rate turbine vacuum pump and its evacuation method Download PDF

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Publication number
CN101122294A
CN101122294A CNA2007100712453A CN200710071245A CN101122294A CN 101122294 A CN101122294 A CN 101122294A CN A2007100712453 A CNA2007100712453 A CN A2007100712453A CN 200710071245 A CN200710071245 A CN 200710071245A CN 101122294 A CN101122294 A CN 101122294A
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impeller
pump
high speed
vacuum
spiral case
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CN100478571C (en
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吴大转
温建新
王乐勤
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HANGZHOU ZHENXING INDUSTRIAL PUMP MANUFACTURE Co Ltd
Zhejiang University ZJU
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HANGZHOU ZHENXING INDUSTRIAL PUMP MANUFACTURE Co Ltd
Zhejiang University ZJU
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Application filed by HANGZHOU ZHENXING INDUSTRIAL PUMP MANUFACTURE Co Ltd, Zhejiang University ZJU filed Critical HANGZHOU ZHENXING INDUSTRIAL PUMP MANUFACTURE Co Ltd
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Abstract

The invention discloses a cantilever-type high-speed vacuum turbine pump and the vacuum pumping method. A high-speed eccentric impeller of 10000 revolutions per minute to 30000 revolutions per minute is used to realize the pumping of vacuum with minus 30kPa to minus 70kPa. The pump comprises a gear increase box, independent pump heads and a high-speed rotor. A large gear of the gear increase box is connected with a prime motor. Independent pump heads stand separately at both sides or a single side of the gear increase box. The pump heads adopt a split structure and comprise a suction inlet, an internal volute body, an impeller stopping cover, a volute shell and an air seal. The high-speed rotor comprises a high-speed gear shaft, a thrust collar, an impeller, and a fastening bolt, and is supported by a sliding bearing on the gear increase box. An impeller cantilever is arranged on the tail end of the high-speed gear shaft. The invention uses a high-speed turbine to realize the rapid vacuum pumping with a large flow. Moreover, a multi-pump head structure can make a single pump realize the multi-position, multi-vacuum degree and simultaneous pumping in the fields of paper making, chlor-alkali chemical industry, and so on and greatly reduce the vacuum system energy consumption. Meanwhile, the pump is provided with the advantage that the pump is concise in the structure, highly reliable, widely applicable, and environment-friendly, and does not need a liquid working ring, and so on.

Description

Cantilever type high rate turbine vacuum pump and vacuum pumping method thereof
Technical field
The present invention relates to a kind of vacuum pump, say so more specifically a kind of cantilever type high rate turbine vacuum pump and vacuum pumping method thereof belong to vacuum equipment and turbomachinery technical field.
Background technique
Common and other equipment composition vacuum systems of vacuum pump, be widely used in departments such as oil, chemical industry, machinery, mine, light industry, medicine, food, electronics, metallurgy, space flight, use wider conventional vacuum pump product and mainly comprise liquid-ring vacuum pump, reciprocating vacuum pump, Roots pump and rotary-vane vaccum pump etc.
Wherein, liquid-ring vacuum pump is a kind of coarse vacuum pump, also can be used as compressor, is used widely in manufacturing processs such as industrial vacuum filtration, vacuum water diversion, vacuum feeding, vacuum evaporation, vacuum concentration, vacuum conditioning and vacuum outgas.An amount of liquid is housed as working solution in the pump housing of liquid-ring vacuum pump, and relies on the variation of pump chamber to realize air-breathing, compression and exhaust, it belongs to the variable capacity vacuum pump.Because the existence of circulating liquid, when making liquid-ring vacuum pump have better seal and explosion-proof, efficient is on the low side.
The speed of exhaust of reciprocating vacuum pump is bigger, and degree of vacuum is higher, extensive use in the chemical plant.The reciprocating pump cavity connects two one-way valves, and a mouth sucks, and a mouth is discharged, and comes pumpback compression leg plug, vacuumizes by the suction side.Comparatively speaking, its complex structure, amount of maintenance is big, and efficient is relatively low.
Roots pump is a kind of rotary positive-displacement vacuum pump, and it is developed by Roots blower.Roots pump has bigger pumping speed in the pressure range of broad, and have that driving power is little, compact structure, advantage such as floor space is little and the during-operation service expense is low, therefore, be widely used in metallurgy, petrochemical industry, papermaking, food, electronics industry.Roots pump has the rotor of two figures of eight to be installed in mutual vertically on the pair of parallel axle in pump chamber, by reverse each other the rotatablely moving synchronously of a pair of gear band action.Between rotor, between rotor and the pump case inwall, maintain certain clearance, can realize the high rotational speed operation.
Rotary-vane vaccum pump is a kind of oil seal type oil-sealed rotary pump.It can use separately, also can be used as the fore pump of other high vacuum pump or ultrahigh vacuum pump.It is widely used in metallurgy, machinery, military project, electronics, chemical industry, light industry, oil and medicine etc. and produces and scientific research department.Sliding vane rotary pump mainly is made up of the pump housing, rotor, blade, end cap, spring etc.A rotor is installed in the chamber of sliding vane rotary pump prejudicially, and rotor cylindrical and pump chamber internal surface tangent (the two has very little gap) are equipped with two blades being with spring in the rotor.During rotation, lean on the tension force of centrifugal force and spring that the inwall of blade top and pump chamber is kept in touch, the rotor rotation drives blade and slides along the pump chamber inwall.Rotary-vane vaccum pump belongs to Roughing pump, is one of pumping equipment the most basic in the vacuum technique, but sliding vane rotary pump mostly is middle-size and small-size pump.
In sum, the vacuum pump product of widespread usage is mostly with vacuum displacement pump at present, the situation that ubiquity efficient is lower, and be subjected to rotating speed and be difficult to reach very high restriction, need big rate of air sucked in required coarse vacuum to obtain occasion at some especially, often volume is big, energy consumption is high for required vacuum pump, noise is big.For example, the dewatering process of paper-making process needs a large amount of vacuum pump extracting vacuum of using, and it is very big to require to extract flow, and the diverse location of dehydration plant has different degree of vacuum requirements.At present, what this technology occasion was generally used is that vacuum equipment is Nash hytor (liquid-ring vacuum pump), but the Nash hytor volume that satisfies this occasion performance need is big, noise is big, energy consumption is big, and needs to be equipped with many Nash hytors.In addition, also there is similar problem in the occasion of the big flow extracting vacuum of other industrial field.
In view of the foregoing, can be from another angle, consider that the medium compression of most rotating machinery and suction are two and the process of depositing.For example, liquid-ring vacuum pump can be used as liquid-piston compressor simultaneously, and their difference just is to utilize the inlet intake-gas still to utilize the outlet pressurized gas.Similarly, also there is certain degree of vacuum in general turbocompressor inlet, has certain suction process gas ability, and can realize that big flow extracts, and the efficient of turbine engine can reach more than 80%, far above liquid-ring vacuum pump.Therefore, consider to utilize turbine engine impeller suction capactity, and in the design of impeller blade, adopt the suction side to extend degree of vacuum and the suction capactity that improves suction eye with method such as free form surface forward, utilize the unique turbine vacuum pump of this thinking design energy efficient significantly.Consider volume and weight that reduces machine and the arts demand that obtains high vacuum, turbomachinery can adopt the rotating speed far above the conventional vacuum pump, and this makes high rate turbine vacuum pump have remarkable advantages on volume and weight.Further, consider the extraction of a high rate turbine vacuum pump realization multiposition, a plurality of degree of vacuum, can adopt multistage or many pump heads structure.
Based on above thought, Germany MAN company is once at the technology characteristics in paper mill, for dewatering process process specialized designs with single-stage and multi-stage vacuum blower fan TURBAIR be provided, it is to utilize the closed centrifugal impeller to realize the extraction of vacuum, and each impeller all is connected on the main shaft, be the multistage turbine blower fan structure, it is very high that its rotating speed is difficult to reach, and causes its volume comparatively huge.
Consider that multistage turbine exists not enough at the aspects such as Maintainability And Reliability of structural compactness, machine, the cantilever type high rate turbine vacuum pump of further considering a kind of many pump heads structure completely newly is very important, the impeller working speed of this structure is more than 10000r/min, be up to 30000r/min, make to have less impeller size under same degree of vacuum and the impeller linear velocity condition.Therefore, the advantage of its relative conventional vacuum pump aspect energy-conservation and compactedness is very obvious, and the multistage turbine structure has better energy-saving effect and flexibility again relatively.This structure will have very high using value in every profession and trades such as papermaking, chemical industry, metallurgy.Starting point below just of the present invention.
Summary of the invention
The objective of the invention is the raising of and environmental requirement energy-conservation to vacuum system, a kind of cantilever type high rate turbine vacuum pump and vacuum pumping method thereof are provided according to every profession and trades such as papermaking, chemical industry, metallurgy.
It comprises gear speedup case, independent pump head and high speed rotor, and gear speedup case adopts the single-stage speedup, and the axle on the gearwheel connects with prime mover; Independent pump head is discrete in gear speedup case both sides or one-sided, independent pump head is a split-type structural, comprise suction port, spiral case endosome, the quiet wheel cap of impeller, spiral case and sealing gland, the quiet wheel cap of suction port and impeller is installed on the spiral case endosome to be formed one and is embedded in the spiral case, be combined to form Diffuser and medium goes out runner by spiral case endosome and spiral case cavity, sealing gland is installed in the spiral case side by flange; High speed rotor comprises high speed gear shaft, thrust button, impeller and fastening screw trip bolt, by the support of the sliding bearing on the gear speedup case and by the gearwheel transmission, thrust button is fixedly mounted on and is positioned at the gearwheel both sides on the high speed gear shaft, and the impeller cantilever is installed in the high gear shaft end.
The cantilever type high rate turbine vacuum pumping method of vacuum pump is to drive the rotating speed rotation of high speed centrifugation impeller with 10000r/min to 30000r/min by high speed gear shaft, gas is sucked at a high speed from suction port, the runner of rotary blade, Diffuser through having 300m/s to 500m/s linear velocity, the final high-temperature gas that forms 80 ℃ to 160 ℃ is discharged at a high speed from the spiral case outlet, thereby to-70kPa degree of vacuum, realize vacuum drawn at the inlet of impeller and suction port formation-30kPa.
The present invention utilizes the suction capactity of turbine engine Centrifugal Impeller Inlet, and utilizes the high advantage of turbomachinery efficient, realizes that by the high speed centrifugation impeller of 10000r/min to 30000r/min the big flow of vacuum efficiently extracts, thereby reduces the energy consumption of vacuum system greatly.
For improving the impeller manufacturability, it adopts half-opened impeller, and in the design of impeller blade, adopt the suction side to extend degree of vacuum and the suction capactity that improves suction eye with method such as three-dimensional twisted forward, and wheel disc and blade adopt welded structure, and impeller and high speed gear shaft adopt conical surface interference fit and add fastening screw attachment.It is equipped with the quiet wheel cap of impeller of nonmetallic material in wheel rim the place ahead, guarantee that impeller shaft also can prevent the wearing and tearing of spiral case or protecgulum when the gap is in reasonable size.
Consider volume and weight that reduces machine and the arts demand that obtains high vacuum, increase substantially wheel speed to more than the 10000r/min, be up to 30000r/min, this high rotating speed makes it obviously be different from other type vacuum pump.
Consider the deficiency of multi-stage impeller turbine engine structure aspect Maintainability And Reliability, it utilizes cantilever type self-contained pump header structure flexibly to realize the extraction of technology occasion multiposition, different degree of vacuum, can be as required at gear speedup case one-sided or both sides arrange one or more independent pump heads.
Consider the balance of axial force of impeller, pump head is taked the symmetric arrangement form.Simultaneously, it is used for balancing axial thrust at high speed gear shaft small gear both sides dress thrust button.
For the ease of adjusting function, diffuser vane is designed to the adjustable angle structure.
Description of drawings
Accompanying drawing is the cantilever type high rate turbine vacuum pump structural representation;
Among the figure: suction port 1, fastening screw trip bolt 2, impeller 3, spiral case 4, spiral case endosome 5, the quiet wheel cap 6 of impeller, sealing gland 7, sliding bearing 8, gear speedup case 9, high speed gear shaft 10, thrust button 11, gearwheel 12, diffuser vane 13.
Embodiment
As shown in drawings, cantilever type high rate turbine vacuum pump comprises gear speedup case 9, independent pump head and high speed rotor, and gear speedup case 9 adopts the single-stage speedup, and the axle on the gearwheel 12 connects with prime mover; Independent pump head is discrete in gear speedup case 9 both sides or one-sided, independent pump head is a split-type structural, comprise suction port 1, spiral case endosome 5, the quiet wheel cap 6 of impeller, spiral case 4 and sealing gland 7, the quiet wheel cap 6 of suction port 1 and impeller is installed on the spiral case endosome 5 to be formed one and is embedded in the spiral case 4, by spiral case endosome 5 with spiral case 4 cavitys are combined to form Diffuser and medium goes out runner, sealing gland 7 is installed in spiral case 4 sides by flange; High speed rotor comprises high speed gear shaft 10, thrust button 11, impeller 3 and fastening screw trip bolt 2, by 8 supports of the sliding bearing on the gear speedup case 9 and by gearwheel 12 transmissions, thrust button 11 is fixedly mounted on and is positioned at gearwheel 12 both sides on the high speed gear shaft 10, and impeller 3 cantilevers are installed in high speed gear shaft 10 ends.
The cantilever type high rate turbine vacuum pumping method of vacuum pump is to drive the rotating speed rotation of high speed centrifugation impeller 3 with 10000r/min to 30000r/min by high speed gear shaft 10, gas is sucked at a high speed from suction port 1, runner, the Diffuser of rotary blade 3 through having 300m/s to 500m/s linear velocity, the final high-temperature gas that forms 80 ℃ to 160 ℃ is discharged at a high speed from spiral case 4 outlets, thereby to-70kPa degree of vacuum, realize vacuum drawn at the inlet of impeller 3 and suction port 1 formation-30kPa.
Cantilever type high rate turbine vacuum pump impeller 3 is the semi-open type structure, and also can make closed type structure, and the wheel disc of impeller 3 and blade adopt welded structure, and impeller 3 adopts conical surface interference and adds fastening screw 2 with high speed gear shaft 10 and connects.The quiet wheel cap 6 of impeller of nonmetallic material is equipped with in impeller 3 wheel rim the place aheads.
The diffuser vane 13 of cantilever type high rate turbine vacuum pump is designed to adjustable angle structure or fixed structure.
The high speed gear shaft 10 of cantilever type high rate turbine vacuum pump is equipped with thrust button 11 in the small gear both sides.
Cantilever type high rate turbine vacuum pump high speed gear shaft 10 and impeller 3 working speeds are 10000r/min to 30000r/min.
The high speed sealing gland 7 of cantilever type high rate turbine vacuum pump is used for sealing technology gas.
A pump head of cantilever type high rate turbine vacuum pump stands in the either side that two pump heads stand in gear speedup case 9 homonymies, realizes the vacuum drawn of a single position of vacuum pump; Perhaps plural independent pump head stands in gear speedup case 9 both sides respectively or stands in one-sidedly, realizes the vacuum drawn of a vacuum pump to two above diverse locations.For the structure of two, four or six independent pump heads, can adopt one, two or corresponding two pump heads of 10, axles of three high speed gear shafts and adopt the symmetric arrangement structure.Each pump head can be designed to identical physical dimension or different physical dimensions satisfies the needs that multiple degree of vacuum extracts.The outlet of each pump head promptly can interconnect also and can discharge separately, from outlet discharge high-temperature gas can connect silencing apparatus and directly discharge, also can reclaim heat and be used for other purposes by heat exchanger.
Embodiment 1:
The cantilever type high rate turbine vacuum pump of present embodiment, its detailed structure as shown in drawings, it comprises gear speedup case 9, two independent pump heads and high speed rotors, gear speedup case 9 adopts the single-stage speedups, the axle on the gearwheel 12 connects with prime mover; Two independent pump heads are discrete in gear speedup case 9 both sides, be symplex structure, independent pump head is a split-type structural, comprise suction port 1, spiral case endosome 5, the quiet wheel cap 6 of impeller, spiral case 4 and sealing gland 7, the quiet wheel cap 6 of suction port 1 and impeller is installed on the spiral case endosome 5 to be formed one and is embedded in the spiral case 4, by spiral case endosome 5 with spiral case 4 cavitys are combined to form Diffuser and medium goes out runner, sealing gland 7 is installed in spiral case 4 sides by flange; High speed rotor comprises high speed gear shaft 10, thrust button 11, impeller 3 and fastening screw trip bolt 2, by 8 supports of the sliding bearing on the gear speedup case 9 and by gearwheel 12 transmissions, thrust button 11 is fixedly mounted on and is positioned at gearwheel 12 both sides on the high speed gear shaft 10, and impeller 3 cantilevers are installed in high speed gear shaft 10 ends.
The cantilever type high rate turbine vacuum pumping method of vacuum pump is to drive the rotating speed rotation of high speed centrifugation impeller 3 with 30000r/min by high speed gear shaft 10, gas is sucked at a high speed from suction port 1, runner, the Diffuser of rotary blade 3 through having 300m/s to 500m/s linear velocity, the final high-temperature gas that forms 80 ℃ to 160 ℃ is discharged at a high speed from spiral case 4 outlets, thereby to-70kPa degree of vacuum, realize vacuum drawn at the inlet of impeller 3 and suction port 1 formation-30kPa.
Impeller 3 is the semi-open type structure, and the wheel disc of impeller 3 and blade adopt welded structure, and impeller 3 adopts conical surface interference and adds fastening screw 2 with high speed gear shaft 10 and connects.The quiet wheel cap 6 of impeller of nonmetallic material is equipped with in impeller 3 wheel rim the place aheads.
Diffuser vane is the fixed angle structure.
High speed gear shaft 10 is equipped with thrust button 11 in the small gear both sides.
The impeller 3 that is symmetrically arranged in the independent pump head of gear-box 9 both sides and configuration adopts different structural parameter, is respectively applied for and extracts coarse vacuum and medium vacuum degree, and the outlet on two pump heads is communicated with and leads to heat exchanger finally to airborne release.
In the course of the work, by prime mover by the gearwheel on the input shaft driven gear speedup box 9, by the large gear turn the small gear speedup transmission, make intermediate arrangement that the rotating speed rotation of the high speed gear shaft 10 of small gear with 30000r/min be arranged, and then the impeller 3 that driven gear speedup box 9 bilateral symmetry are arranged rotate synchronously.Because the rotation of impeller 3, two symmetric arrangement impellers 3 go into the required degree of vacuum of interruption-forming, process gas is with suction port 1, impeller 3, Diffuser, the spiral case 4 of certain speed priority through two pump heads, and the high-temperature gas that forms is from spiral case 4 outlet discharges separately, the outlet of two spiral cases 4 flows to heat exchanger together by connecting tube, arranges to atmosphere by heat exchanger at last.The motive sealing of the medium on the pump head of two symmetric arrangement realizes that by sealing gland 7 axial force that the different size impeller of symmetric arrangement produces is finally by the thrust button balance.Realize the fundamental function of this embodiment's cantilever type high rate turbine vacuum pump by above process.
Embodiment 2:
The cantilever type high rate turbine vacuum pump of present embodiment, its detailed structure as shown in drawings, it comprises gear speedup case 9, four independent pump heads and two high speed rotors, gear speedup case 9 adopts the single-stage speedups, the axle on the gearwheel 12 connects with prime mover; Four independent pump heads are discrete in gear speedup case 9 both sides, two of each sides are symplex structure, independent pump head is a split-type structural, comprise suction port 1, spiral case endosome 5, the quiet wheel cap 6 of impeller, spiral case 4 and sealing gland 7, the quiet wheel cap 6 of suction port 1 and impeller is installed on the spiral case endosome 5 to be formed one and is embedded in the spiral case 4, by spiral case endosome 5 with spiral case 4 cavitys are combined to form Diffuser and medium goes out runner, sealing gland 7 is installed in spiral case 4 sides by flange; High speed rotor comprises high speed gear shaft 10, thrust button 11, impeller 3 and fastening screw trip bolt 2, by 8 supports of the sliding bearing on the gear speedup case 9 and by gearwheel 12 transmissions, thrust button 11 is fixedly mounted on and is positioned at gearwheel 12 both sides on the high speed gear shaft 10, and impeller 3 cantilevers are installed in high speed gear shaft 10 ends.
The cantilever type high rate turbine vacuum pumping method of vacuum pump is to drive the rotating speed rotation of high speed centrifugation impeller 3 with 15000r/min by high speed gear shaft 10, gas is sucked at a high speed from suction port 1, runner, the Diffuser of rotary blade 3 through having 300m/s to 500m/s linear velocity, the final high-temperature gas that forms 80 ℃ to 160 ℃ is discharged at a high speed from spiral case 4 outlets, thereby to-70kPa degree of vacuum, realize vacuum drawn at the inlet of impeller 3 and suction port 1 formation-30kPa.
Impeller 3 is the semi-open type structure, and the wheel disc of impeller 3 and blade adopt welded structure, and impeller 3 adopts conical surface interference and adds fastening screw 2 with high speed gear shaft 10 and connects.The quiet wheel cap 6 of impeller of nonmetallic material is equipped with in impeller 3 wheel rim the place aheads.
Diffuser vane is the fixed angle structure.
High speed gear shaft 10 is equipped with thrust button 11 in the small gear both sides.
Be symmetrically arranged in four the independent pump heads of gear-box 9 both sides and the impeller 3 of configuration and adopt different structural parameter, be respectively applied for and extract coarse vacuum, medium vacuum and high vacuum, the outlet on four pump heads is communicated with and leads to heat exchanger finally to airborne release.
In the course of the work, by prime mover by the gearwheel on the input shaft driven gear speedup box 9, drive the transmission of two small gear speedups by gearwheel, make intermediate arrangement that the rotating speed rotation of the high speed gear shaft 10 of small gear with 15000r/min be arranged, and then the impeller 3 that driven gear speedup box 9 bilateral symmetry are arranged rotate synchronously.Because the rotation of impeller 3, four symmetric arrangement impellers 3 go into the required degree of vacuum of interruption-forming, process gas is with suction port 1, impeller 3, Diffuser, the spiral case 4 of certain speed priority through two pump heads, and the high-temperature gas that forms is from spiral case 4 outlet discharges separately, the outlet of four spiral cases 4 flows to heat exchanger together by connecting tube, arranges to atmosphere by heat exchanger at last.The motive sealing of the medium on the pump head of four symmetric arrangement realizes that by sealing gland 7 axial force that the different size impeller of symmetric arrangement produces is finally by the thrust button balance.Realize the fundamental function of this embodiment's cantilever type high rate turbine vacuum pump by above process.

Claims (7)

1. cantilever type high rate turbine vacuum pump, it is characterized in that: it comprises gear speedup case (9), independent pump head and high speed rotor, and gear speedup case (9) adopts the single-stage speedup, and the axle on the gearwheel (12) connects with prime mover; Independent pump head is discrete in gear speedup case (9) both sides or one-sided, independent pump head is a split-type structural, comprise suction port (1), spiral case endosome (5), the quiet wheel cap of impeller (6), spiral case (4) and sealing gland (7), suction port (1) and the quiet wheel cap of impeller (6) are installed in the last one of forming of spiral case endosome (5) and are embedded in the spiral case (4), by spiral case endosome (5) with spiral case (4) cavity is combined to form Diffuser and medium goes out runner, sealing gland (7) is installed in spiral case (4) side by flange; High speed rotor comprises high speed gear shaft (10), thrust button (11), impeller (3) and fastening screw trip bolt (2), by the support of the sliding bearing (8) on the gear speedup case (9) and by gearwheel (12) transmission, thrust button (11) is fixedly mounted on and is positioned at gearwheel (12) both sides on the high speed gear shaft (10), and impeller (3) cantilever is installed in high speed gear shaft (10) end.
2. a kind of cantilever type high rate turbine vacuum pump according to claim 1 is characterized in that: described impeller (3) is the semi-open type structure.
3. a kind of cantilever type high rate turbine vacuum pump according to claim 2 is characterized in that: described impeller (3) wheel disc and blade adopt welded structure.
4. a kind of cantilever type high rate turbine vacuum pump according to claim 1 is characterized in that: the quiet wheel cap of impeller (6) of nonmetallic material is equipped with in described impeller (3) wheel rim the place ahead.
5. a kind of cantilever type high rate turbine vacuum pump according to claim 1 is characterized in that: described diffuser vane (13) is installed on the spiral case rear wall, diffuser vane (13) adjustable angle.
6. a kind of cantilever type high rate turbine vacuum pump according to claim 1 is characterized in that: described impeller (3) adopts conical surface interference fit and adds fastening screw (2) with high speed gear shaft (10) and connects.
7. cantilever type high rate turbine vacuum pumping method that uses vacuum pump as claimed in claim 1, it is characterized in that: drive the rotating speed rotation of high speed centrifugation impeller (3) with 10000r/min to 30000r/min by high speed gear shaft (10), gas is sucked at a high speed from suction port (1), the runner of the rotary blade through having 300m/s to 500m/s linear velocity (3), Diffuser, the final high-temperature gas that forms 80 ℃ to 160 ℃ is discharged at a high speed from spiral case (4) outlet, thereby to-70kPa degree of vacuum, realize vacuum drawn at the inlet of impeller (3) and suction port (1) formation-30kPa.
CNB2007100712453A 2007-09-07 2007-09-07 Cantilever type high rate turbine vacuum pump and its evacuation method Expired - Fee Related CN100478571C (en)

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CN101774304A (en) * 2010-02-28 2010-07-14 詹洪明 Negative pressure generator special for ink supply system of inkjet printer
CN103104538A (en) * 2011-11-14 2013-05-15 湖北双剑鼓风机制造有限公司 Sliding bearing with double main thrust surfaces
CN102678582A (en) * 2012-04-16 2012-09-19 杭州萧山美特轻工机械有限公司 High-speed cantilever multistage turbine vacuum pump
CN104806568A (en) * 2015-04-07 2015-07-29 罗明哲 Pressurizer for centrifugal fan
CN105065330A (en) * 2015-08-06 2015-11-18 中国北方发动机研究所(天津) Gas compressor structure of double-gas-inflow turbocharger under share diffuser
CN105673295A (en) * 2016-02-22 2016-06-15 江苏大学 Rotary casing type integrated electricity generating device for energy recovery
CN109996966A (en) * 2016-12-14 2019-07-09 开利公司 Two-stage centrifugal compressor
US10968919B2 (en) 2016-12-14 2021-04-06 Carrier Corporation Two-stage centrifugal compressor
CN107299905A (en) * 2016-12-15 2017-10-27 江苏国泉泵业制造有限公司 A kind of multistage high rate turbine vacuum pump of both-end entrance
CN106837849B (en) * 2017-01-16 2018-01-30 湖南航翔燃气轮机有限公司 Centrifugal blower high speed rotor structure
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CN111237023A (en) * 2020-03-20 2020-06-05 杭州汽轮机股份有限公司 Rotating mechanical shafting structure based on supercritical carbon dioxide and working method
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