CN201292958Y - Vortices type vacuum pump - Google Patents
Vortices type vacuum pump Download PDFInfo
- Publication number
- CN201292958Y CN201292958Y CNU2008202187811U CN200820218781U CN201292958Y CN 201292958 Y CN201292958 Y CN 201292958Y CN U2008202187811 U CNU2008202187811 U CN U2008202187811U CN 200820218781 U CN200820218781 U CN 200820218781U CN 201292958 Y CN201292958 Y CN 201292958Y
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- rotor
- stator
- vacuum pump
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- type vacuum
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Abstract
The utility model provides a vortex type vacuum pump belonging to the vacuum technical field. The vortex type vacuum pump comprises a base, a motor, a rotor and a stator. The rotor is a multilevel rotor which is formed by multiple layers of single-level rotors. The single-level rotor is formed by the superposition of three layers of round disks. A convex platform, an air inlet channel and an exhaust channel are arranged outside the rotor. The stator is a multilevel stator, and radial blades are arranged at the inner side of each level of stator. Each level of rotor and the corresponding stator form a level of air pumping compression unit. An aerating channel is arranged between two adjacent air pumping compression units. The vortex type vacuum pump adopts the principle of vortex speedup, can be used separately, can be used as a front-level pump in the dry type vacuum pump unit, and has simple structure, few parts, easy machining and maintenance, no friction between moving parts in the pump and a pump cavity, almost no abrasion, less libration and low noise.
Description
Technical field
The utility model relates to the vacuum technique field, particularly a kind of vortex vacuum pump.
Background technique
In recent years, people have developed polytype dried pump, are widely used in the every field that semi-conductor industry, analytical instrument and electronics industry equal vacuum are used.The dried pump of existing discharging directly into atmosphere can roughly be divided into dry vacuum pump according to the difference of mechanical structure form: roots-type, Roots+pawl formula, screw type, eddy type etc.Roots-type and Roots+pawl formula fabricated structure makes the gas passageway long and complicated, causes the accumulation of condensation product and is increased greatly by the possibility that chemical gas corrodes.Owing to be multistage design all, many again employing sealings make component more between level and the level, and leakage point is more, thereby makes maintenance work cumbersome.And the dried pump boundary dimension of Roots+pawl formula is bigger, and running noise is also bigger.Screw type and DRY SCROLL VACUUM PUMP rotor shapes are special, bring processing, assembling, positioning requirements precision height, and process and must use special plane, and the reject rate height is unfavorable for producing in batches, and cost is higher, and people are seeking the dry vacuum pump of energy discharging directly into atmosphere always.
The model utility content
In order to solve the deficiency that exists in the above device, the utility model provides a kind of vortex vacuum pump, and the principle that it adopts vortex to quicken can be used separately, and the fore pump that also can be used as in the dry vacuum pump assembly uses.
The technical solution of the utility model is achieved in that a kind of vortex vacuum pump, comprise base, motor, rotor and stator, rotor is a multi-stage rotor, and multi-stage rotor is formed by multilayer single-stage rotor, the single-stage rotor is formed by three layers of disk stack, and there are boss, intake duct and air outlet flue in the rotor outside; Stator is multistage stator, and each grade stator inboard is provided with radial blade, and each grade rotor and corresponding primary stator are formed the one-level compression unit of bleeding; Bleed for adjacent two and be provided with air outlet flue between the compression unit.Boss is positioned at the second layer disk gas compression termination of single-stage rotor, and boss is as the air-flow stop valve.Intake duct is positioned at the rotor circumference outside, is to be formed naturally by a dented part between the first layer disk of single-stage rotor and the second layer disk.Air outlet flue is positioned at the rotor circumference outside, naturally form by a dented part between the second layer disk of single-stage rotor and the 3rd layer of disk, air outlet flue is as upper level the bleed suction port of compression unit of the relief opening of compression unit and next stage of bleeding, in the compression unit of bleeding, when arriving stop valve, air-flow will enter into the next one compression unit of bleeding, until last discharge along air outlet flue.It is radial that radial blade becomes, and the radial blade height is consistent with the stator height, and the radial blade number is at least 30, and the radial blade shape of cross section is a rectangle or arc, and arc opening direction is opposite with the rotor sense of rotation.
The beneficial effects of the utility model are: the utility model designs a kind of vortex vacuum pump, and the principle that it adopts vortex to quicken can be used separately, and the fore pump that also can be used as in the dry vacuum pump assembly uses.In the dry vacuum pump of the discharging directly into atmosphere of equal volume, it can reach lower ultimate pressure; And in the discharging directly into atmosphere dry vacuum pump of identical ultimate pressure, this pump has littler volume, lighter quality.This pump gas passageway is short, and gas can be discharged fast, has reduced the possibility that condensation product and molecule are piled up.Simple in structure, be easy to processing, easy to maintenance, movement parts and pump chamber do not have friction in this pump simultaneously, so almost there are not wearing and tearing, so this pump vibration is little, noise is low.
Description of drawings
Fig. 1 is the structural representation that the utlity model has the single-stage rotor;
Fig. 2 is a single-stage rotor structure schematic representation;
Fig. 3 is the plan view of Fig. 2;
Fig. 4 is a kind of embodiment's of the utility model a stator structure schematic representation;
Fig. 5 is a kind of embodiment's of the utility model a rotor structure schematic representation;
Fig. 6 is the plan view of Fig. 5;
Fig. 7 is the structural representation that the utlity model has multi-stage rotor;
Among the figure: 1 gland, 2 rotors, 3 stators, 4 motor shafts, 5 upper bearing (metal)s, 6 motor stators, 7 rotors, 8 lower bearings, 9 bases, 10 base plates, 11 intake ducts, 12 boss, 13 air outlet flues, 14 radial blades.
Embodiment
As shown in Figure 1, 2, 3, be structural representation and the single-stage rotor structure schematic representation that the utlity model has the single-stage rotor, include base 9, the rotor 7 that links to each other with base 9, the rotor 2 that links to each other with motor shaft 4, the center is provided with oil-sucking hole on the motor shaft 4, oil-sucking hole feeds in the lubricating oil bath of base bottom, and motor shaft 4 is provided with fuel-displaced place, and fuel-displaced place is made of a plurality of oil outlets, oil outlet is positioned near upper bearing (metal) 5, the lower bearing 8, for upper bearing (metal) 5, lower bearing 8 provide lubricant oil.Rotor 2 is the single-stage rotor, the single-stage rotor is integral by three layers of disc set, the first layer disk is similar to the 3rd layer of disk diameter, the stator 3 that mates with the single-stage rotor is a single stage stator, single-stage rotor and single stage stator constitute the one-level compression unit of bleeding, there is the boss 12 that is complementary with stator 3 in the single-stage rotor outside, stator 3 is enclosed in the excircle of rotor 2, stator 3 inboards are provided with 42 radial blades 14,14 one-tenth of radial blades are radial, and radial blade 14 shape of cross sections are rectangle, and the rotor top is provided with the gland 1 that links to each other with stator 3, the plane is provided with intakeport on the gland 1, rotor 2 rotates, and gas enters from intakeport, enters intake duct 11 subsequently, when gas passes through the radial blade 14 of rotation, can quicken the motion of air-flow, will discharge along air outlet flue 13 when gas arrives stop valve, air outlet flue 13 links to each other with relief opening, relief opening is positioned on the base 9, and air-flow flows with vortical in this process.
Another kind of embodiment of the present utility model, shown in Fig. 5,6,7, rotor 2 is Pyatyis, cooperation constitutes the compression unit of bleeding with Pyatyi stator 3, rotor 2 rotates, gas sucks from intakeport, when gas passes through the radial blade 14 of rotation, can quicken the motion of air-flow, adjacent two-stage is bled and is provided with air outlet flue 13 between the compression unit, gas enters next stage bleed compression unit by air outlet flue 13 from the upper level compression unit of bleeding with vortical, through the repeatedly compression of the compression unit of bleeding from relief opening row to atmosphere.
Claims (5)
1. vortex vacuum pump, comprise base, motor, rotor and stator, it is characterized in that described rotor is a multi-stage rotor, multi-stage rotor is formed by multilayer single-stage rotor, the single-stage rotor is formed by three layers of disk stack, and there are boss, intake duct and air outlet flue in the rotor outside; Described stator is multistage stator, and each grade stator inboard is provided with radial blade, and each grade rotor and corresponding primary stator are formed the one-level compression unit of bleeding; Between two adjacent compression units air outlet flue is arranged.
2. a kind of vortex vacuum pump according to claim 1 is characterized in that described boss is positioned on the second layer disk of single-stage rotor.
3. a kind of vortex vacuum pump according to claim 1 is characterized in that described intake duct is positioned at the rotor circumference outside, is to be formed naturally by a dented part between the first layer disk of single-stage rotor and the second layer disk.
4. a kind of vortex vacuum pump according to claim 1 is characterized in that described air outlet flue is positioned at the rotor circumference outside, is to be formed naturally by a dented part between the second layer disk of single-stage rotor and the 3rd layer of disk.
5. a kind of vortex vacuum pump according to claim 1, it is characterized in that described radial blade becomes radial, the radial blade height is consistent with the stator height, the radial blade number is at least 30, the radial blade shape of cross section is a rectangle or arc, and arc opening direction is opposite with the rotor sense of rotation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008202187811U CN201292958Y (en) | 2008-10-31 | 2008-10-31 | Vortices type vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008202187811U CN201292958Y (en) | 2008-10-31 | 2008-10-31 | Vortices type vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201292958Y true CN201292958Y (en) | 2009-08-19 |
Family
ID=41006435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008202187811U Expired - Fee Related CN201292958Y (en) | 2008-10-31 | 2008-10-31 | Vortices type vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201292958Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101392749B (en) * | 2008-10-31 | 2012-05-23 | 东北大学 | Vortex vacuum pump |
| CN110500300A (en) * | 2019-08-02 | 2019-11-26 | 烟台菱辰能源有限公司 | A kind of spiral vortex type hydrogen circulating pump |
-
2008
- 2008-10-31 CN CNU2008202187811U patent/CN201292958Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101392749B (en) * | 2008-10-31 | 2012-05-23 | 东北大学 | Vortex vacuum pump |
| CN110500300A (en) * | 2019-08-02 | 2019-11-26 | 烟台菱辰能源有限公司 | A kind of spiral vortex type hydrogen circulating pump |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090819 Termination date: 20111031 |