WO2005047707A1 - Pompe à vide à frottement à plusieurs étages - Google Patents
Pompe à vide à frottement à plusieurs étages Download PDFInfo
- Publication number
- WO2005047707A1 WO2005047707A1 PCT/EP2004/012196 EP2004012196W WO2005047707A1 WO 2005047707 A1 WO2005047707 A1 WO 2005047707A1 EP 2004012196 W EP2004012196 W EP 2004012196W WO 2005047707 A1 WO2005047707 A1 WO 2005047707A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- stage
- rotor
- vacuum pump
- compressor
- circular
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/02—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps having non-centrifugal stages, e.g. centripetal
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/10—Centrifugal pumps for compressing or evacuating
- F04D17/12—Multi-stage pumps
- F04D17/127—Multi-stage pumps with radially spaced stages, e.g. for contrarotating type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
Definitions
- the invention relates to a multi-stage friction vacuum pump with at least one axially compressing turbocompressor stage, which has a rotor rotating about its axis with rotor disks protruding between fixed stator disks.
- Turbomolecular pumps belong to the group of friction vacuum pumps with which a high vacuum can be generated, for example for recipients for semiconductor production or also for mass spectrometers.
- a multi-stage friction vacuum pump which is described in DE 100 04 271 AI (Leybold Vacuum GmbH), has one or more turbocompressor stages, each consisting of a rotor with radially projecting rotor disks and a stator there are radially protruding stator disks. The rotor disks and stator disks mesh with one another at a short distance. They cause a molecular flow axially to the rotor axis.
- a circular compressor stage which has a rotor with axially projecting rotor blades arranged on circular paths and a stator with axially projecting stator blades arranged on circular paths.
- Rotor blades and stator blades alternate with one another and produce a molecular flow which, depending on the direction of rotation of the rotor and the angle of attack of the blades, is either directed radially inwards or radially outwards.
- the invention has for its object to provide a multi-stage friction vacuum pump with at least one turbocompressor stage, in which the stages are arranged in series in the flow path and which is intended to provide increased compression.
- the multi-stage friction vacuum pump has the features of claim 1.
- the vacuum pump contains a turbocompressor stage and a circular compressor stage downstream in the flow path. While the turbocompressor stage is suitable for generating a high vacuum, the downstream circular compressor stage serves to increase the pressure. Consequently, the circular compressor stage can have small dimensions because of the gas volume reduced by the compression.
- the circular compressor stage has a small axial extent because the flow is mainly in the radial direction.
- the overall dimensions of the friction pump are not significantly increased by the circular compressor stage, but the compression is significantly increased compared to single-stage friction vacuum pumps.
- the combination according to the invention of an upstream turbocompressor stage and a downstream circular compressor stage offers the advantage of a small space requirement with high compression performance.
- the turbocompressor stage and the circular compressor stage are integrated in a common combination of rotor and stator.
- the rotors of both compressor stages consist of a single overall rotor and that the stators of both compressor stages likewise consist of a single overall stator. In this way, the dimensions and weight can be further reduced.
- the friction vacuum pump according to the invention is preferably designed as a multiple inlet pump. It has at least two axially spaced, in series compressing turbocompression stages, between which there is an intermediate inlet.
- a circular compressor stage is arranged on the compressor side of the first turbocompressor stage and / or the second turbocompressor stage.
- Such a pump is particularly suitable for use in connection with mass spectrometers. Due to the increased gas flow at the intermediate inlet, to which the analysis device of the mass spectrometer is connected, the gas flow at the intermediate inlet is increased without a negative influence on the pressure at the high vacuum inlet. The increase in gas flow at the intermediate inlet means an increase in sensitivity for the mass spectrometer.
- FIG. 1 shows a longitudinal section through a friction vacuum pump according to the invention
- FIGS. 1 A first figure.
- the friction vacuum pump shown in FIG. 1 has a housing 10 which is essentially cylindrical and has a high vacuum connection HV at one end. There is an intermediate inlet ZE1 in the housing wall, which is open on the side. The intermediate inlet ZE1 is bridged by webs 18 which connect the stator parts to one another.
- first turbocompressor stage 11 comprising a stator 12 and a rotor 13.
- the stator 12 has a plurality of stator disks 15 directed radially inwards from a peripheral wall 14.
- the rotor 13 has a plurality of rotor disks 16 projecting between the stator disks 15 and projecting radially outwards.
- the rotor 13 is driven by a drive 17, which contains a high-speed electric motor, at a speed of 30,000 to 60,000 rpm. driven.
- a second turbocompressor stage 21 is arranged on the compressor side of the first turbocompressor stage 11 and is connected on the inlet side to the intermediate inlet ZE1.
- the turbocompressor stage 21 consists of a stator 22 and a rotor 23.
- the stator 22 has a plurality of stator disks 25 directed radially inwards from a peripheral wall 22.
- the rotor 23 has a plurality of projecting radially outwardly projecting between the stator disks 25 Rotor disks 26 on.
- the rotors 13 and 23 are firmly connected to one another and are driven jointly by the drive 17.
- a second compressor stage 30 is connected to the second turbocompressor stage 21 in the housing 10 and is additionally connected to an intermediate inlet ZE2.
- the compressor stage 30 is, for example, a Holweck stage or another molecular pump, for example a Gaede, Siegbahn, English or side channel pump.
- a circular compressor stage 33 is provided after the first turbocompressor stage 11. This has a rotor disk 34, which is part of the rotor 13 of the turbocompressor stage 11, and a stator disk 32, which is part of the stator 12.
- the rotor disk 34 has rotor blades 35 which are arranged on concentric circles and the stator disk 32 has stator blades 36 which are likewise arranged on concentric circles and engage in the gaps between the rotor circles, as shown in FIG. 2.
- the stator blades and rotor blades have opposite inclinations with respect to the radial direction.
- the circular compressor stage 33 conveys either radially outwards or radially inwards.
- the direction of conveyance is indicated by the arrow 37 in the present exemplary embodiment.
- the gas transport goes from the high vacuum inlet HV through the turbocompressor stage 11 and from its circumference radially inward through the circular compressor stage 33 and from there through a gap 38 to the intermediate inlet ZE1.
- the turbocompressor stage 21 conveys the gas from the intermediate inlet ZE1 to the compressor stage 30.
- the second intermediate inlet ZE2 also opens into the compressor stage 30.
- the compressor stage 30 delivers to an outlet (not shown).
- One of the rotor disks 16 of the turbocompressor stage 11 is the carrier disk for the rotor blades of the circular compressor stage 33.
- the stator disk of the The circular compressor stage also forms the end wall for the pressure-side end of the turbocompressor stage 11.
- a particular advantage is that the circular compressor stage 33 is, as it were, integrated into the turbocompressor stage 11.
- the only additional effort required is the rotor and stator blades 35, 36, which are additionally provided on the rotor and stator of the turbocompressor stage.
- a circular compressor stage 33 can also be provided behind the second turbocompressor stage 21.
- the gas flow on the pressure side is increased by the circular compressor stage provided on the pressure side by the respective turbocompressor stage and integrated in the turbocompressor stage. For a connected mass spectrometer, this means an increase in sensitivity.
- FIG. 3 shows the gas flow 40 through the circular compressor stage 33 radially from the outside inwards.
- the blade surface of the rotor disk 34 is conical.
- the rotor blades 35 have an axial length that decreases as the radius of the circular path becomes smaller.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/578,989 US20070081889A1 (en) | 2003-11-13 | 2004-10-28 | Multi-stage friction vacuum pump |
EP04790966A EP1706645B1 (fr) | 2003-11-13 | 2004-10-28 | Pompe à vide à frottement à plusieurs étages |
DE502004008709T DE502004008709D1 (de) | 2003-11-13 | 2004-10-28 | Mehrstufige reibungsvakuumpumpe |
JP2006538704A JP2007510853A (ja) | 2003-11-13 | 2004-10-28 | 多段式の摩擦真空ポンプ |
CA002545566A CA2545566A1 (fr) | 2003-11-13 | 2004-10-28 | Pompe a vide a frottement a plusieurs etages |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10353034A DE10353034A1 (de) | 2003-11-13 | 2003-11-13 | Mehrstufige Reibungsvakuumpumpe |
DE10353034.7 | 2003-11-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2005047707A1 true WO2005047707A1 (fr) | 2005-05-26 |
Family
ID=34559626
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2004/012196 WO2005047707A1 (fr) | 2003-11-13 | 2004-10-28 | Pompe à vide à frottement à plusieurs étages |
Country Status (7)
Country | Link |
---|---|
US (1) | US20070081889A1 (fr) |
EP (1) | EP1706645B1 (fr) |
JP (1) | JP2007510853A (fr) |
CN (1) | CN100453817C (fr) |
CA (1) | CA2545566A1 (fr) |
DE (2) | DE10353034A1 (fr) |
WO (1) | WO2005047707A1 (fr) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0322883D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
DE102007048703A1 (de) * | 2007-10-11 | 2009-04-16 | Oerlikon Leybold Vacuum Gmbh | Mehrstufiger Turbomolekularpumpen-Pumpenrotor |
CN101392749B (zh) * | 2008-10-31 | 2012-05-23 | 东北大学 | 旋涡式真空泵 |
GB0901872D0 (en) * | 2009-02-06 | 2009-03-11 | Edwards Ltd | Multiple inlet vacuum pumps |
DE102009011082A1 (de) * | 2009-02-28 | 2010-09-02 | Oerlikon Leybold Vacuum Gmbh | Multi-Inlet-Vakuumpumpe |
US9217439B2 (en) | 2010-07-02 | 2015-12-22 | Edwards Japan Limited | Vacuum pump |
EP2620649B1 (fr) | 2012-01-27 | 2019-03-13 | Edwards Limited | Pompe à vide de transfert gazeux |
GB2498816A (en) | 2012-01-27 | 2013-07-31 | Edwards Ltd | Vacuum pump |
JP6079052B2 (ja) * | 2012-08-24 | 2017-02-15 | 株式会社島津製作所 | 真空ポンプ |
WO2015055374A1 (fr) * | 2013-10-16 | 2015-04-23 | Asml Netherlands B.V. | Source de rayonnement, procédé de fabrication d'un appareil lithographique, système de détection et procédé de détection |
DE102014105582A1 (de) * | 2014-04-17 | 2015-10-22 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
GB2558921B (en) * | 2017-01-20 | 2020-06-17 | Edwards Ltd | A multiple stage turbomolecular pump with inter-stage inlet |
CN108105121B (zh) * | 2017-12-29 | 2020-03-24 | 东北大学 | 一种多级复合高真空干泵 |
CA3159329A1 (fr) * | 2019-11-28 | 2021-06-03 | Laminar Lift Systems Inc. | Pompe a turbine tesla et procedes associes |
CN112160919A (zh) * | 2020-09-28 | 2021-01-01 | 东北大学 | 涡轮分子泵和包括该分子泵的复合分子泵 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1994025760A1 (fr) * | 1993-05-03 | 1994-11-10 | Leybold Aktiengesellschaft | Pompe a vide rotative a friction comportant des sections de conception differente |
US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
WO1999060275A1 (fr) * | 1998-05-14 | 1999-11-25 | Leybold Vakuum Gmbh | Pompe a vide a friction dotee d'un stator et d'un rotor |
WO2001036825A1 (fr) * | 1999-11-18 | 2001-05-25 | Mks Instruments, Inc. | Pompe turbomoleculaire a vide et a flux radial |
DE10004271A1 (de) * | 2000-02-01 | 2001-08-02 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2224009A5 (fr) * | 1973-03-30 | 1974-10-25 | Cit Alcatel | |
DE29516599U1 (de) * | 1995-10-20 | 1995-12-07 | Leybold AG, 50968 Köln | Reibungsvakuumpumpe mit Zwischeneinlaß |
GB9609281D0 (en) * | 1996-05-03 | 1996-07-10 | Boc Group Plc | Improved vacuum pumps |
GB9810872D0 (en) * | 1998-05-20 | 1998-07-22 | Boc Group Plc | Improved vacuum pump |
DE10004263A1 (de) * | 2000-02-01 | 2001-08-02 | Leybold Vakuum Gmbh | Dynamische Dichtung |
FR2859250B1 (fr) * | 2003-08-29 | 2005-11-11 | Cit Alcatel | Pompe a vide |
-
2003
- 2003-11-13 DE DE10353034A patent/DE10353034A1/de not_active Withdrawn
-
2004
- 2004-10-28 US US10/578,989 patent/US20070081889A1/en not_active Abandoned
- 2004-10-28 JP JP2006538704A patent/JP2007510853A/ja active Pending
- 2004-10-28 DE DE502004008709T patent/DE502004008709D1/de active Active
- 2004-10-28 CA CA002545566A patent/CA2545566A1/fr not_active Abandoned
- 2004-10-28 CN CNB2004800334295A patent/CN100453817C/zh not_active Expired - Fee Related
- 2004-10-28 WO PCT/EP2004/012196 patent/WO2005047707A1/fr active Application Filing
- 2004-10-28 EP EP04790966A patent/EP1706645B1/fr not_active Not-in-force
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
WO1994025760A1 (fr) * | 1993-05-03 | 1994-11-10 | Leybold Aktiengesellschaft | Pompe a vide rotative a friction comportant des sections de conception differente |
WO1999060275A1 (fr) * | 1998-05-14 | 1999-11-25 | Leybold Vakuum Gmbh | Pompe a vide a friction dotee d'un stator et d'un rotor |
WO2001036825A1 (fr) * | 1999-11-18 | 2001-05-25 | Mks Instruments, Inc. | Pompe turbomoleculaire a vide et a flux radial |
DE10004271A1 (de) * | 2000-02-01 | 2001-08-02 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe |
Also Published As
Publication number | Publication date |
---|---|
CN100453817C (zh) | 2009-01-21 |
JP2007510853A (ja) | 2007-04-26 |
DE502004008709D1 (de) | 2009-01-29 |
US20070081889A1 (en) | 2007-04-12 |
EP1706645B1 (fr) | 2008-12-17 |
EP1706645A1 (fr) | 2006-10-04 |
CA2545566A1 (fr) | 2005-05-26 |
CN1878962A (zh) | 2006-12-13 |
DE10353034A1 (de) | 2005-06-09 |
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