EP0856108B1 - Pompe a vide a friction a admission intermediaire - Google Patents

Pompe a vide a friction a admission intermediaire Download PDF

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Publication number
EP0856108B1
EP0856108B1 EP96928437A EP96928437A EP0856108B1 EP 0856108 B1 EP0856108 B1 EP 0856108B1 EP 96928437 A EP96928437 A EP 96928437A EP 96928437 A EP96928437 A EP 96928437A EP 0856108 B1 EP0856108 B1 EP 0856108B1
Authority
EP
European Patent Office
Prior art keywords
rings
stator
ring
spacer
blade
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP96928437A
Other languages
German (de)
English (en)
Other versions
EP0856108A1 (fr
Inventor
Thomas Böhm
Ralf Hirche
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP0856108A1 publication Critical patent/EP0856108A1/fr
Application granted granted Critical
Publication of EP0856108B1 publication Critical patent/EP0856108B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Definitions

  • the invention relates to a friction vacuum pump with the features of the preamble of claim 1.
  • a friction pump of this type is from DE-A-31 24 205 known. To design the junction of the intermediate inlet in the delivery chamber of the friction vacuum pump indicated that it is advantageous to provide an annular channel.
  • the present invention is based on the object the confluence of the intermediate inlet in the delivery room the friction vacuum pump is useful in two ways to design.
  • the ones that form the stator should be Components formed in the area of the ring channel in this way be that they enter the production area Impede gases as little as possible.
  • one should simple manufacture of the in the area of the ring channel components can be guaranteed.
  • a stator of the invention Art differs little from one Stator for a friction vacuum pump without an intermediate inlet. It is only necessary to use a spacer ring located at the level of the ring channel with Through openings - holes, millings or the like - equip. There are no other differences regarding the manufacture of the stator still on its Assembly available, so that the effort for manufacturing a friction vacuum pump with intermediate inlet only is insignificantly higher than the manufacturing effort a friction vacuum pump without an intermediate inlet.
  • a spacer ring can have a variety of through openings be equipped. Particularly useful it is when the spacer ring has multiple sections with reduced height. The sum of these sections can cover a total of 20 to 80% of the scope of the spacer ring so that the conductance of the passage openings are chosen to be very high can without affecting the stability of the stator.
  • turbomolecular vacuum pump with stator disks and Spacer rings each of the spacer rings with one turn and to be equipped with recesses on the front.
  • This known turbomolecular pump is However, it is not a pump of those concerned Genus, d. H. a pump with intermediate inlet.
  • By the proposed design of the spacer rings is intended Backflow problem in a turbomolecular pump be solved between the stator pack and the inner wall of the pump housing takes place.
  • FIG. 1 In the embodiment of Figure 1 is the outer Housing designated 1. It’s with a central, equipped inwardly projecting bearing bush 2, in which is a shaft 3 by means of a spindle bearing 4th supported.
  • the drive motor is coupled to the shaft 3 5, the rotor 6 of a molecular pump stage and the rotor 7 of a turbomolecular pump stage.
  • the rotor 7 is equipped with the rotor blades 8, which together with the stator blades held in the housing 1 9 form the turbomolecular pump stage. through the flange 11, the respective pump to the evacuating recipient connected.
  • the molecular pump (or pump stage) includes the Bell-shaped rotor 6 spanning storage space 12, the one on the outside with thread-like grooves 13 is equipped, in which the operation of the pump Gas production from the high vacuum side to the fore vacuum side takes place.
  • the rotor 6 is axially approximately the same length Assigned to the stator. Between the stator 14 and the The rotor 6 is the gap 10. This must be as possible be small to ensure a good seal between the thread grooves to reach.
  • At the backing vacuum chamber 19 is the Forevacuum connector 20 connected.
  • the stator 21 of the turbomolecular pump stage includes Stator blades 9 and spacer rings 22 to 24.
  • the stator blades 9 are components in a manner known per se of blade rings or blade ring sections 25 with outer edges 26, which are in the assembled state of the stator between the spacer rings.
  • the one out spacer rings 22 arranged alternately one above the other and blade rings 25 built stator is by the centered outer housing 1.
  • the turbomolecular pump stage 8, 9 is with a Intermediate inlet 28 equipped, the different Purposes - e.g. the vacuum generation with one opposite the pressure in the connected to the flange 11, not vacuum chamber shown higher pressure level or Test gas inlet when using the pump in one Counterflow leak detector - can serve.
  • the amount of Spacers 23, 24 located between inlets 28 are modified compared to the other spacer rings 22.
  • One or both spacer rings 23 and 24 have one reduced outer diameter and form together with the housing 1 the circumferential ring channel 31, in which the Intermediate inlet 28 opens.
  • the spacer ring or rings 23 or 24 with reduced outer diameter also have Openings 32 through which the connection of the Pump chamber of the turbomolecular pump stage with the Intermediate inlet 28 is made.
  • This Breakthroughs can e.g. be multiple holes, like shown at the spacer ring 24.
  • Another possibility consists in milling out a spacer ring 23 in such a way that it has a reduced (axial) height in sections having. The production of high-perforations This makes it possible to conductance.
  • Figures 2 to 4 show an embodiment, at the spacer rings 22 to 24 equipped with centering means are. These consist of an outer circumferential Recess 34 on one side and from one axially directed edge 35 on the other side of the spacer rings. The dimensions are chosen so that the Edge 35 on the one hand the outer edge 26 of the adjacent Vane ring disk 25 includes and thereby centered. Furthermore, the outer edge 35 engages in the recess 34 of the adjacent spacer ring, whereby a Centering of the entire stator 21 is achieved.
  • the ring channel 31 formed as a circumferential groove in the housing 1, so that it is not necessary for the spacer ring or rings 23 or 24 to give a reduced outer diameter.
  • the openings in the spacer ring 24 are, for example again formed as holes.
  • the spacer ring 23 is shown again in FIGS. 3 and 4. He has the centering means (outer edge 35, recess 34) on.
  • the openings 32 are formed that several sections of the ring have a reduced height to have. In the illustrated embodiment there are four Sections of this evenly distributed over the circumference Art available, each covering over 10% of the scope extend.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Rotary Pumps (AREA)

Abstract

L'invention concerne une pompe à vide à friction (1) comprenant une admission (11), une sortie (20), un rotor (6, 7) et un stator (14, 21) disposés entre l'admission (11) et la sortie (20) et porteurs d'ailettes de rotor et de stator respectivement (7 et 8). Dans le but de réaliser, d'une manière simple et fonctionnelle, une admission intermédiaire (28) débouchant dans un conduit annulaire (31) entourant les ailettes de rotor et de stator (7 et 8), la pompe selon l'invention est caractérisée en ce que le stator (21) est formé de bagues ou de segments de bague (25) et de bagues d'écartement (22, 23, 24), en ce que les bagues ou les segments de bague (25) présentent des bords extérieurs (26) disposés entre les bagues d'écartement (22, 23, 24), et en ce qu'au moins une bague d'écartement (23, 24) se trouvant au niveau du conduit annulaire (31) présente des perforations (32).

Claims (6)

  1. Pompe à vide à friction comportant une entrée, une sortie (20), un rotor (6,7) et un stator (14, 21), qui sont disposés entre l'entrée et la sortie (20) et portent des aubes de rotor et des aubes de stator (7,8), ainsi qu'une entrée intermédiaire (28), qui débouche dans un canal annulaire (31) entourant les aubes du stator et les aubes du rotor (7,8), caractérisée en ce que le stator (21) est constitué par des aubes annulaires ou par des sections (25) d'aubes annulaires et par des bagues-entretoises (22,23,24), que les aubes annulaires ou les sections (25) d'aubes annulaires comportent des bords extérieurs (26), qui sont situés entre les bagues-entretoises (22,23,24), qu'au moins une bague-entretoise (23,24) située à la hauteur du canal annulaire (31) est équipée de passages (32) et qu'au moins une bague-entretoise (23,24) possédant un diamètre extérieur réduit par rapport aux autres bagues-entretoises, forme sur toute sa hauteur axiale, conjointement avec le carter de pompe, le canal annulaire (31).
  2. Pompe selon la revendication 1, caractérisée en ce que les bagues-entretoises (22,23,24) sont équipées de moyens de centrage, qui sont constitués par un évidement périphérique extérieur (34) situé d'un côté et par un bord orienté axialement (35) situé sur l'autre côté des bagues-entretoises.
  3. Pompe selon la revendication 2, caractérisée en ce que les bords (35) enserrent et centrent les aubes annulaires ou les sections (25) d'aubes annulaires.
  4. Pompe selon la revendication 3, caractérisé en ce que les bords (35) s'engagent dans l'évidement (34) de bagues-entretoises voisines.
  5. Pompe selon l'une des revendications précédentes 1 à 4, caractérisée en ce que les passages (32) sont formés par le fait qu'une bague-entretoise (23,24) comporte plusieurs sections (36) ayant une hauteur réduite.
  6. Pompe selon la revendication 5, caractérisée en ce que les sections (36) de hauteur réduite sont réparties uniformément sur la périphérie de la bague-entretoise (23,24) et s'étendent respectivement sur 5 % à 15 % de la périphérie.
EP96928437A 1995-10-20 1996-08-09 Pompe a vide a friction a admission intermediaire Expired - Lifetime EP0856108B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE29516599U 1995-10-20
DE29516599U DE29516599U1 (de) 1995-10-20 1995-10-20 Reibungsvakuumpumpe mit Zwischeneinlaß
PCT/EP1996/003524 WO1997015760A1 (fr) 1995-10-20 1996-08-09 Pompe a vide a friction a admission intermediaire

Publications (2)

Publication Number Publication Date
EP0856108A1 EP0856108A1 (fr) 1998-08-05
EP0856108B1 true EP0856108B1 (fr) 2002-07-03

Family

ID=8014363

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96928437A Expired - Lifetime EP0856108B1 (fr) 1995-10-20 1996-08-09 Pompe a vide a friction a admission intermediaire

Country Status (5)

Country Link
US (1) US6030189A (fr)
EP (1) EP0856108B1 (fr)
JP (1) JP3939352B2 (fr)
DE (2) DE29516599U1 (fr)
WO (1) WO1997015760A1 (fr)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19821634A1 (de) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
DE59912629D1 (de) * 1998-05-26 2006-02-16 Leybold Vakuum Gmbh Gerät mit evakuierbarer Kammer
JP3038432B2 (ja) 1998-07-21 2000-05-08 セイコー精機株式会社 真空ポンプ及び真空装置
JP3010529B1 (ja) * 1998-08-28 2000-02-21 セイコー精機株式会社 真空ポンプ、及び真空装置
US6193461B1 (en) * 1999-02-02 2001-02-27 Varian Inc. Dual inlet vacuum pumps
JP3788558B2 (ja) * 1999-03-23 2006-06-21 株式会社荏原製作所 ターボ分子ポンプ
DE19951954A1 (de) * 1999-10-28 2001-05-03 Pfeiffer Vacuum Gmbh Turbomolekularpumpe
DE10008691B4 (de) 2000-02-24 2017-10-26 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE10032607B4 (de) * 2000-07-07 2004-08-12 Leo Elektronenmikroskopie Gmbh Teilchenstrahlgerät mit einer im Ultrahochvakuum zu betreibenden Teilchenquelle und kaskadenförmige Pumpanordnung für ein solches Teilchenstrahlgerät
DE10111603A1 (de) * 2001-03-10 2002-09-12 Pfeiffer Vacuum Gmbh Gasreibungspumpe mit zusätzlichem Gaseinlass
EP1249613B1 (fr) * 2001-03-15 2004-01-28 VARIAN S.p.A. Turbine-pompe avec un étage statorique intégré avec un anneau d'espacement
DE10150015A1 (de) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür
GB0124731D0 (en) 2001-10-15 2001-12-05 Boc Group Plc Vacuum pumps
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
DE10353034A1 (de) * 2003-11-13 2005-06-09 Leybold Vakuum Gmbh Mehrstufige Reibungsvakuumpumpe
JP2007071139A (ja) * 2005-09-08 2007-03-22 Osaka Vacuum Ltd 複合真空ポンプのロータ
US20080066859A1 (en) * 2006-08-30 2008-03-20 Michiaki Kobayashi Plasma processing apparatus capable of adjusting pressure within processing chamber
JP5190214B2 (ja) * 2007-03-29 2013-04-24 東京エレクトロン株式会社 ターボ分子ポンプ、基板処理装置、及びターボ分子ポンプの堆積物付着抑制方法
DE102008013142A1 (de) * 2008-03-07 2009-09-10 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
JP5486184B2 (ja) * 2008-12-10 2014-05-07 エドワーズ株式会社 真空ポンプ
DE102009011082A1 (de) 2009-02-28 2010-09-02 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe
GB2474507B (en) * 2009-10-19 2016-01-27 Edwards Ltd Vacuum pump
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
EP2757265B1 (fr) * 2013-01-22 2016-05-18 Agilent Technologies, Inc. Étage de pompage en spiral et pompe à vide intégrant un tel étage de pompage
DE202013010204U1 (de) * 2013-11-11 2015-02-13 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe
EP3133290B1 (fr) * 2015-08-20 2021-06-09 Pfeiffer Vacuum Gmbh Pompe à vide
KR102576491B1 (ko) * 2016-02-12 2023-09-08 에드워즈 가부시키가이샤 진공 펌프 및 그 진공 펌프에 이용되는 가요성 커버 및 로터
GB2601515B (en) 2020-12-02 2022-12-28 Agilent Technologies Inc Vacuum pump with elastic spacer

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DE1403493A1 (de) * 1961-01-20 1969-01-30 Akad Wissenschaften Ddr Molekularpumpe
DE2119857A1 (de) * 1971-04-23 1972-11-02 Leybold-Heraeus GmbH & Co KG, 5000 Köln Einrichtung zur Ölversorgung von Lagerstellen
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DE3124205A1 (de) * 1981-06-19 1982-12-30 Balzers Hochvakuum Gmbh, 6200 Wiesbaden Lecksuchanordnung
US4472962A (en) * 1981-08-03 1984-09-25 Balzers Aktiengesellschaft Low pressure leak detector
DE3133781A1 (de) * 1981-08-26 1983-03-10 Leybold-Heraeus GmbH, 5000 Köln Fuer die durchfuehrung der gegenstrom-lecksuche geeignete turbomolekularpumpe
JPS60139098U (ja) * 1984-02-24 1985-09-13 セイコ−精機株式会社 組合せ型軸流分子ポンプ
JPS6341695A (ja) * 1986-08-07 1988-02-22 Seiko Seiki Co Ltd タ−ボ分子ポンプ
DE3722164C2 (de) * 1987-07-04 1995-04-20 Balzers Pfeiffer Gmbh Turbomolekularpumpe
DE3865012D1 (de) * 1988-06-01 1991-10-24 Leybold Ag Pumpsystem fuer ein lecksuchgeraet.
EP0408792B1 (fr) * 1989-07-20 1993-09-29 Leybold Aktiengesellschaft Pompe à effet visqueux avec au moins un étage hélicoidal à côté du refoulement
DE9013671U1 (de) * 1990-09-29 1992-01-30 Leybold AG, 6450 Hanau Stator für eine Turbomolekularvakuumpumpe
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DE9304435U1 (de) * 1993-03-24 1993-06-09 Leybold AG, 6450 Hanau Hochvakuumpumpe mit Einlaßflansch
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten

Also Published As

Publication number Publication date
US6030189A (en) 2000-02-29
DE29516599U1 (de) 1995-12-07
DE59609415D1 (de) 2002-08-08
WO1997015760A1 (fr) 1997-05-01
JP3939352B2 (ja) 2007-07-04
EP0856108A1 (fr) 1998-08-05
JPH11513775A (ja) 1999-11-24

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