EP0697069B1 - Pompe a vide rotative a friction comportant des sections de conception differente - Google Patents

Pompe a vide rotative a friction comportant des sections de conception differente Download PDF

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Publication number
EP0697069B1
EP0697069B1 EP94913098A EP94913098A EP0697069B1 EP 0697069 B1 EP0697069 B1 EP 0697069B1 EP 94913098 A EP94913098 A EP 94913098A EP 94913098 A EP94913098 A EP 94913098A EP 0697069 B1 EP0697069 B1 EP 0697069B1
Authority
EP
European Patent Office
Prior art keywords
pump
annular
rotor
stages
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP94913098A
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German (de)
English (en)
Other versions
EP0697069A1 (fr
Inventor
Günter Schütz
Heinrich Engländer
Friedrich Karl Von Schulz-Hausmann
Hinrich Henning
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Priority to EP98110191A priority Critical patent/EP0874159A3/fr
Publication of EP0697069A1 publication Critical patent/EP0697069A1/fr
Application granted granted Critical
Publication of EP0697069B1 publication Critical patent/EP0697069B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Definitions

  • the invention relates to a friction vacuum pump with the features of the preamble of the independent claims 1 and 2.
  • Frictional vacuum pumps include Gaede pumps (in one Housing rotating cylinder with pump gap and between Inlet and outlet located barrier gap), Holweck pumps (rotating cylinder in a housing with arranged helically, stator or rotor side Grooves), Siegbahn pumps (rotating and standing Washers with spiral grooves) and Turbomolecular pumps with rotor and guide vanes are equipped. It is known to use different friction pumps designed pump sections.
  • the present invention is based on the object as smooth a flow as possible between the different pump sections.
  • the pump section with the Siegbahn stages at least one further pump stage any Type - preferably a friction pump - that in the intermediate range between molecular flow and viscous flow has good pumping properties.
  • a vacuum pump designed in this way a relatively high backing pressure (greater than 10 mbar) is generated so that pumps of this type with small and inexpensive backing pumps can be operated.
  • the embodiment according to FIG. 1 is a Friction vacuum pump 1, the housing of which is designated 2.
  • The includes upper, cylindrical housing section 3 and centers the stator 4, which has a plurality of stator rings 5, 6 and 7.
  • the rotor 8 is supported on the bearings 9 and Pump shaft 10 in the pump housing 2.
  • the drive motor is with Designated 11.
  • the Inlet flange 12 a recipient to be evacuated connected.
  • the gases become the outlet 13 promoted to which a backing pump is connected.
  • the embodiment according to FIG. 1 is 3 in total Pump sections equipped.
  • the high vacuum pump section consists of turbomolecular pump stages.
  • the stator rings 5 each carry the inward stator blades 14, which are associated with rotor blades 15 attached to the rotor 8.
  • the second pump section has Siegbahn pump stages. This comprise rotating ring disks 16 fastened to the rotor 8, whose surfaces are flat. Between the rotor ring disks 16 are the stator ring washers 17.
  • the stator rings 6 wear the stator washers 17; they are preferably in one piece educated.
  • the stator washers 17 are on the end face with spiral projections 18 and corresponding grooves 19 equipped (see FIG. 2).
  • the spiral shape is each chosen so that a continuous gas flow from Inlet 12 to outlet 13 is secured, i.e. that at embodiment shown the above a stator washer 6 pump active areas of the Siegbahnhaven the gases from the outside in and those below one Stator ring 6 located pump active areas of the Siegbahnhaven convey the gases from the inside out.
  • There are three spiral grooves or projections are provided, which each extend over approximately 360 °.
  • the number, depth, The width and slope of the spirals determine the pump properties of the pump section consisting of Siegbahn stages.
  • the first Siegbahn stage following the turbomolecular pump stages the gases from the outside in.
  • the stator washer 17 rotor ring disk 16 upstream of the first Siegbahn stage has one smaller diameter than the other rotor ring disks 16 and bears on its circumference in relation to the other rotor blades 15 Shortened blades 27. This is as trouble-free as possible Transition between the different pump sections guaranteed.
  • the first Siegbahnlope If gases are to be conveyed from the inside out, one can do this accordingly designed first stator washer 17 with compared to the rest Disks with an enlarged inner diameter may be provided the inside carries shortened stator blades.
  • high vacuum or initially a turbomolecular pump section on the inlet side followed by a Siegbahn pump section.
  • the pre-vacuum side that follows the Siegbahn pump section Pump stage is like a side channel pump educated. To do this, they face each other radially extending surfaces of the last rotor ring disk 28 (Fig. 5) and the last stator washer 29 (Fig. 6) in cross section essentially semicircular, facing each other circular grooves 31, 32 are provided.
  • the arranged on the suction side rotating groove 31 is with a plurality of crosspieces 33 equipped.
  • the fixed groove 32 arranged on the pressure side has an inlet 34 and an inlet with respect to the extracted gases Outlet 35.
  • Its inlet 34 is a radially outwardly extending one Groove section that through the peripheral pumping gap gases flowing between the annular disc 27 and the stator 4 records.
  • the outlet 35 is substantially axial extending bore, which the groove 32 with the fore-vacuum space connects. Inlet 34 and outlet 35 are immediately adjacent and are separated from each other by a web (36), to avoid backflow. A division of the groove 32 in two or more groove sections, each with an inlet 34 and an outlet 35 is possible.
  • the exemplary embodiment according to FIGS. 7 and 8 is based the shaft 10 via its bearings 9 initially on the inside a sleeve-shaped carrier 41.
  • the top end of the carrier 41 is equipped with a collar 42.
  • the lower end of the The carrier projects into a recess 43 in a housing component 44 into it, which has only a slightly larger diameter than the outer diameter of the carrier 41.
  • An O-ring 45 between the carrier 41 and the inside of the recess 43 secures the central position of the carrier 41.
  • To support the carrier 41 in the housing 2 are three substantially axially extending Bars 46 are provided on the collar 42 and on the housing component 44 are attached.
  • the O-ring 45 acts Vibrations of this type as a damping element. This allows the pumping gaps between the active pumping surfaces, in particular between the stator and rotor ring disks of the Siegbahn stages, very small design and therefore a very good pump effect be achieved.
  • Fig. 9 shows an embodiment for a pump according to the Invention in which the rotor is on a fixed Pins 51 of the housing 2 supports and the drive motor 11 as External rotor motor is formed.
  • the bars 46 is the pin 51 at its upper end with a collar 52 equipped.
  • the sleeve-shaped carrier 41 has on its lower end an inward edge 53. Between Collar 52 and edge 53 extend the rods 46.
  • the Siegbahn pump section follows on the pressure side to a Holweck pump section that comes from the stator ring 55 with the helically shaped projections 56 and Outside of the cylindrical rotor section 57. This carries the motor rotor on the inside.
  • Gaeda pump section there is also a Gaeda pump section on.
  • This includes the stator ring 60 on the stator side with two circumferential webs 61, 62 which form the groove 63, and the correspondingly elongated rotor section on the rotor side 57.
  • the inlet to the Gaedepumpgen form an or several openings 64 (see also FIG. 10) in the upper web 61. These are located directly next to one or more fixed, in the groove 63 protruding projections 65 which with the Rotor 57 form the blocking gap 66.
  • the outlet opening (s) 67 are located in the lower web 62 and open into the fore-vacuum space the pump 1.
  • the groove 63 divided into two sections. There are two in parallel mutually arranged gate pump stages are provided. You point in each case the inlet opening 64 and the outlet openings 67 and each extend over approximately 180 °.
  • the arrow 68 indicates the direction of rotation of the rotor 57.
  • the groove is 63 no longer designed in a ring shape.
  • Groove depth or groove width
  • Fig. 11 decreasing
  • Fig. 12 constantly changing
  • the desired pressure build-up is thereby achieved.
  • several chambers 69 are present, in which a relatively slow pressure build-up in succession and relatively rapid expansion is taking place. The pressure increases from chamber to chamber.
  • Figures 13 to 18 show embodiments for Siegbahnhaven, which are combined with gaed stages.
  • the outside diameter of the rotating ring disks 17 are selected in such a way that between its periphery and that surrounding it Stator 4 each have an outer annular space 71, 72.
  • the inner diameter of the stator washers 15 chosen such that an inner annular space 73, 74 is present is.
  • Figure 13 which is a plan view of a Stator ring disk with two spiral grooves 19 shows is can be seen that stationary in the annular spaces 71, 72 Projections 75, 76 and 77, 78 are located together with the Outer circumference of the rotor ring disks 16 or the rotating one Central part (e.g. rotor 8 or shaft 10) locking gaps 79, 80 form.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (20)

  1. Pompe à vide à friction (1) comprenant des tronçons de pompe conçus de manière différente, parmi lesquels le tronçon de pompe du côté entrée est constitué par des étages de pompe turbomoléculaire (14, 15) et un autre tronçon de pompe est constitué par des étages de Siegbahn (16, 17) avec des gorges (19) respectivement conçues sous forme spiralée, dans laquelle les surfaces actives de pompage des étages de Siegbahn sont formées respectivement par les surfaces tournées l'une vers l'autre d'un disque annulaire de rotor et d'un disque annulaire de stator (16, 17), caractérisée en ce que le premier des disques annulaires (16, 17) des étages de Siegbahn est un disque annulaire de rotor (16), en ce que ce premier disque annulaire de rotor présente un plus petit diamètre que les autres disques annulaires de rotor (16), et en ce qu'elle porte à sa périphérie des pales de rotor (27) raccourcies vis-à-vis des autres pales de rotor (15) des étages de pompe turbomoléculaire (14, 15).
  2. Pompe à vide à friction (1) comprenant des tronçons de pompe conçus de manière différente, parmi lesquels le tronçon de pompe du côté entrée est constitué par des étages de pompe turbomoléculaire (14, 15) et un autre tronçon de pompe est constitué par des étages de Siegbahn (16, 17) avec des gorges (19) respectivement conçues sous forme spiralée, dans laquelle les surfaces actives de pompage des étages de Siegbahn sont formées respectivement par les surfaces tournées l'une vers l'autre d'un disque annulaire de rotor et d'un disque annulaire de stator (16, 17), caractérisée en ce que le premier des disques annulaires (16, 17) des étages de Siegbahn est un disque annulaire de stator (17), en ce que ce premier disque annulaire de stator présente un plus grand diamètre intérieur que les autres disques annulaires de stator (17), et en ce qu'elle porte sur son côté intérieur des pales de stator raccourcies vis-à-vis des autres pales de stator (14) des étages de pompe turbomoléculaire (14, 15).
  3. Pompe selon l'une ou l'autre des revendications 1 et 2, caractérisée en ce que les disques annulaires de stator (16) sont respectivement pourvus des gorges de forme spiralée (17).
  4. Pompe selon l'une des revendications 1, 2 et 3, caractérisée en ce que le tronçon de pompe constitué par les étages de Siegbahn (16, 17) est suivi d'un ou plusieurs autres tronçons de pompe qui sont appropriés pour la zone intermédiaire entre l'écoulement moléculaire et l'écoulement visqueux.
  5. Pompe selon la revendication 4, caractérisée en ce que le ou les autres tronçons de pompe sont réalisés à la manière d'un moteur à roue centrifuge, d'une pompe à canal latéral, d'une pompe de Holweck, d'une pompe de Gaede, ou similaire.
  6. Pompe selon la revendication 5, caractérisée en ce que les derniers étages de pompe, du côté vide préliminaire, comprennent des pales mobiles (22) côté rotor et des pales de guidage (23) côté stator, lesdites pales de guidage (23) formant des canaux d'écoulement qui sont pourvus d'ouvertures (25) dirigées vers le côté vide préliminaire.
  7. Pompe selon la revendication 5, caractérisée en ce que le dernier étage de pompe, du côté vide préliminaire, est réalisé à la manière d'une pompe à canal latéral, en ce qu'il est prévu un disque annulaire de rotor (28) et un disque annulaire de stator (29), en ce qu'il est prévu des gorges (31, 32) dans les surfaces tournées l'une vers l'autre du disque annulaire de rotor (28) et du disque annulaire de stator (29), et en ce que lesdites gorges sont réalisées comme faisant partie de la pompe à canal latéral.
  8. Pompe selon la revendication 7, caractérisée en ce que les gorges (31, 32) sont conçues essentiellement sous forme circulaire, et en ce qu'un ou plusieurs tronçons de gorge forment respectivement un étage de pompe à canal latéral.
  9. Pompe selon l'une ou l'autre des revendications 7 et 8, caractérisée en ce qu'il est prévu deux paires de gorges agencées de façon concentrique l'une par rapport à l'autre, et forment des étages de pompe à canal latéral.
  10. Pompe selon la revendication 5, caractérisée en ce que le tronçon de pompe côté vide préliminaire est constitué par un ou plusieurs étages de pompe de Gaede.
  11. Pompe selon la revendication 10, caractérisée en ce que deux barrettes (61, 62) agencées parallèlement l'une à l'autre et s'étendant radialement forment, conjointement avec un tronçon de rotor cylindrique (57), plusieurs étages de pompe de Gaede, du fait que la gorge formée par les barrettes (61, 62) est pourvue d'une ou plusieurs ouvertures d'entrée ou de sortie (64, 67), et d'une ou plusieurs saillies (65), afin de former une ou plusieurs fentes de blocage (66).
  12. Pompe selon la revendication 11, caractérisée en ce que la gorge (63), ou bien un tronçon de gorge (63) qui s'étend depuis une entrée (64) jusqu'à une sortie (67), présente une section transversale qui diminue en continu.
  13. Pompe selon la revendication 11, caractérisée en ce que la gorge (63), ou bien un tronçon de gorge (63) qui s'étend depuis une entrée (64) jusqu'à une sortie (67), présente une section transversale constamment variable.
  14. Pompe selon la revendication 13, caractérisée en ce que la section transversale de la gorge (63), ou bien d'un tronçon de la gorge (63) est ainsi conçue qu'il se produit en succession et plusieurs fois une montée en pression relativement lente et une expansion relativement rapide.
  15. Pompe selon l'une des revendications précédentes, caractérisée en ce que l'un au moins des étages de Siegbahn (16, 17) est combiné avec un étage de Gaede.
  16. Pompe selon la revendication 15, caractérisée en ce qu'au moins un disque annulaire de rotor (17) forme conjointement avec le stator (4) une chambre annulaire extérieure (71, 72), laquelle est réalisée dans son ensemble ou par tronçons sous forme d'un étage de pompe de Gaede avec une ou plusieurs saillies (75, 76).
  17. Pompe selon l'une ou l'autre des revendications 15 et 16, caractérisée en ce qu'un disque annulaire de stator (16) au moins forme, conjointement avec le rotor (8), une chambre annulaire (73, 74), laquelle est réalisée dans son ensemble ou par tronçons sous forme d'un étage de pompe de Gaede.
  18. Pompe selon l'une des revendications 15, 16 et 17, caractérisée en ce que la hauteur des chambres annulaires extérieures (71, 72) est supérieure à l'épaisseur des disques annulaires de rotor (17), et en ce que les disques (17) pénètrent avec leurs bordures extérieures dans les chambres annulaires (71, 72).
  19. Pompe selon l'une des revendications 15 à 18, caractérisée en ce que le rotor (8) est pourvu, dans la région des chambres annulaires intérieures (73, 74), de moyens (86) pour augmenter la surface active de pompage.
  20. Pompe selon l'une des revendications précédentes, caractérisée en ce que le rotor (8) s'appuie par l'intermédiaire de paliers (9) sur la face intérieure d'un support (41) en forme de douille, et en ce que le support (41) s'appuie de son côté dans le boítier (2) à l'aide de plusieurs tiges (46), de préférence au nombre de trois, qui s'étendent essentiellement axialement.
EP94913098A 1993-05-03 1994-03-31 Pompe a vide rotative a friction comportant des sections de conception differente Expired - Lifetime EP0697069B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP98110191A EP0874159A3 (fr) 1993-05-03 1994-03-31 Pompe à vide à friction avec étage du type à canal de Gaede

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4314418 1993-05-03
DE4314418A DE4314418A1 (de) 1993-05-03 1993-05-03 Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
PCT/EP1994/001011 WO1994025760A1 (fr) 1993-05-03 1994-03-31 Pompe a vide rotative a friction comportant des sections de conception differente

Related Child Applications (1)

Application Number Title Priority Date Filing Date
EP98110191A Division EP0874159A3 (fr) 1993-05-03 1994-03-31 Pompe à vide à friction avec étage du type à canal de Gaede

Publications (2)

Publication Number Publication Date
EP0697069A1 EP0697069A1 (fr) 1996-02-21
EP0697069B1 true EP0697069B1 (fr) 2000-05-24

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Application Number Title Priority Date Filing Date
EP94913098A Expired - Lifetime EP0697069B1 (fr) 1993-05-03 1994-03-31 Pompe a vide rotative a friction comportant des sections de conception differente
EP98110191A Withdrawn EP0874159A3 (fr) 1993-05-03 1994-03-31 Pompe à vide à friction avec étage du type à canal de Gaede

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP98110191A Withdrawn EP0874159A3 (fr) 1993-05-03 1994-03-31 Pompe à vide à friction avec étage du type à canal de Gaede

Country Status (5)

Country Link
US (1) US5695316A (fr)
EP (2) EP0697069B1 (fr)
JP (1) JPH08511071A (fr)
DE (2) DE4314418A1 (fr)
WO (1) WO1994025760A1 (fr)

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Also Published As

Publication number Publication date
DE59409375D1 (de) 2000-06-29
DE4314418A1 (de) 1994-11-10
EP0697069A1 (fr) 1996-02-21
WO1994025760A1 (fr) 1994-11-10
EP0874159A3 (fr) 1998-11-18
US5695316A (en) 1997-12-09
JPH08511071A (ja) 1996-11-19
EP0874159A2 (fr) 1998-10-28

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