EP0697069B1 - Pompe a vide rotative a friction comportant des sections de conception differente - Google Patents
Pompe a vide rotative a friction comportant des sections de conception differente Download PDFInfo
- Publication number
- EP0697069B1 EP0697069B1 EP94913098A EP94913098A EP0697069B1 EP 0697069 B1 EP0697069 B1 EP 0697069B1 EP 94913098 A EP94913098 A EP 94913098A EP 94913098 A EP94913098 A EP 94913098A EP 0697069 B1 EP0697069 B1 EP 0697069B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- pump
- annular
- rotor
- stages
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
Definitions
- the invention relates to a friction vacuum pump with the features of the preamble of the independent claims 1 and 2.
- Frictional vacuum pumps include Gaede pumps (in one Housing rotating cylinder with pump gap and between Inlet and outlet located barrier gap), Holweck pumps (rotating cylinder in a housing with arranged helically, stator or rotor side Grooves), Siegbahn pumps (rotating and standing Washers with spiral grooves) and Turbomolecular pumps with rotor and guide vanes are equipped. It is known to use different friction pumps designed pump sections.
- the present invention is based on the object as smooth a flow as possible between the different pump sections.
- the pump section with the Siegbahn stages at least one further pump stage any Type - preferably a friction pump - that in the intermediate range between molecular flow and viscous flow has good pumping properties.
- a vacuum pump designed in this way a relatively high backing pressure (greater than 10 mbar) is generated so that pumps of this type with small and inexpensive backing pumps can be operated.
- the embodiment according to FIG. 1 is a Friction vacuum pump 1, the housing of which is designated 2.
- The includes upper, cylindrical housing section 3 and centers the stator 4, which has a plurality of stator rings 5, 6 and 7.
- the rotor 8 is supported on the bearings 9 and Pump shaft 10 in the pump housing 2.
- the drive motor is with Designated 11.
- the Inlet flange 12 a recipient to be evacuated connected.
- the gases become the outlet 13 promoted to which a backing pump is connected.
- the embodiment according to FIG. 1 is 3 in total Pump sections equipped.
- the high vacuum pump section consists of turbomolecular pump stages.
- the stator rings 5 each carry the inward stator blades 14, which are associated with rotor blades 15 attached to the rotor 8.
- the second pump section has Siegbahn pump stages. This comprise rotating ring disks 16 fastened to the rotor 8, whose surfaces are flat. Between the rotor ring disks 16 are the stator ring washers 17.
- the stator rings 6 wear the stator washers 17; they are preferably in one piece educated.
- the stator washers 17 are on the end face with spiral projections 18 and corresponding grooves 19 equipped (see FIG. 2).
- the spiral shape is each chosen so that a continuous gas flow from Inlet 12 to outlet 13 is secured, i.e. that at embodiment shown the above a stator washer 6 pump active areas of the Siegbahnhaven the gases from the outside in and those below one Stator ring 6 located pump active areas of the Siegbahnhaven convey the gases from the inside out.
- There are three spiral grooves or projections are provided, which each extend over approximately 360 °.
- the number, depth, The width and slope of the spirals determine the pump properties of the pump section consisting of Siegbahn stages.
- the first Siegbahn stage following the turbomolecular pump stages the gases from the outside in.
- the stator washer 17 rotor ring disk 16 upstream of the first Siegbahn stage has one smaller diameter than the other rotor ring disks 16 and bears on its circumference in relation to the other rotor blades 15 Shortened blades 27. This is as trouble-free as possible Transition between the different pump sections guaranteed.
- the first Siegbahnlope If gases are to be conveyed from the inside out, one can do this accordingly designed first stator washer 17 with compared to the rest Disks with an enlarged inner diameter may be provided the inside carries shortened stator blades.
- high vacuum or initially a turbomolecular pump section on the inlet side followed by a Siegbahn pump section.
- the pre-vacuum side that follows the Siegbahn pump section Pump stage is like a side channel pump educated. To do this, they face each other radially extending surfaces of the last rotor ring disk 28 (Fig. 5) and the last stator washer 29 (Fig. 6) in cross section essentially semicircular, facing each other circular grooves 31, 32 are provided.
- the arranged on the suction side rotating groove 31 is with a plurality of crosspieces 33 equipped.
- the fixed groove 32 arranged on the pressure side has an inlet 34 and an inlet with respect to the extracted gases Outlet 35.
- Its inlet 34 is a radially outwardly extending one Groove section that through the peripheral pumping gap gases flowing between the annular disc 27 and the stator 4 records.
- the outlet 35 is substantially axial extending bore, which the groove 32 with the fore-vacuum space connects. Inlet 34 and outlet 35 are immediately adjacent and are separated from each other by a web (36), to avoid backflow. A division of the groove 32 in two or more groove sections, each with an inlet 34 and an outlet 35 is possible.
- the exemplary embodiment according to FIGS. 7 and 8 is based the shaft 10 via its bearings 9 initially on the inside a sleeve-shaped carrier 41.
- the top end of the carrier 41 is equipped with a collar 42.
- the lower end of the The carrier projects into a recess 43 in a housing component 44 into it, which has only a slightly larger diameter than the outer diameter of the carrier 41.
- An O-ring 45 between the carrier 41 and the inside of the recess 43 secures the central position of the carrier 41.
- To support the carrier 41 in the housing 2 are three substantially axially extending Bars 46 are provided on the collar 42 and on the housing component 44 are attached.
- the O-ring 45 acts Vibrations of this type as a damping element. This allows the pumping gaps between the active pumping surfaces, in particular between the stator and rotor ring disks of the Siegbahn stages, very small design and therefore a very good pump effect be achieved.
- Fig. 9 shows an embodiment for a pump according to the Invention in which the rotor is on a fixed Pins 51 of the housing 2 supports and the drive motor 11 as External rotor motor is formed.
- the bars 46 is the pin 51 at its upper end with a collar 52 equipped.
- the sleeve-shaped carrier 41 has on its lower end an inward edge 53. Between Collar 52 and edge 53 extend the rods 46.
- the Siegbahn pump section follows on the pressure side to a Holweck pump section that comes from the stator ring 55 with the helically shaped projections 56 and Outside of the cylindrical rotor section 57. This carries the motor rotor on the inside.
- Gaeda pump section there is also a Gaeda pump section on.
- This includes the stator ring 60 on the stator side with two circumferential webs 61, 62 which form the groove 63, and the correspondingly elongated rotor section on the rotor side 57.
- the inlet to the Gaedepumpgen form an or several openings 64 (see also FIG. 10) in the upper web 61. These are located directly next to one or more fixed, in the groove 63 protruding projections 65 which with the Rotor 57 form the blocking gap 66.
- the outlet opening (s) 67 are located in the lower web 62 and open into the fore-vacuum space the pump 1.
- the groove 63 divided into two sections. There are two in parallel mutually arranged gate pump stages are provided. You point in each case the inlet opening 64 and the outlet openings 67 and each extend over approximately 180 °.
- the arrow 68 indicates the direction of rotation of the rotor 57.
- the groove is 63 no longer designed in a ring shape.
- Groove depth or groove width
- Fig. 11 decreasing
- Fig. 12 constantly changing
- the desired pressure build-up is thereby achieved.
- several chambers 69 are present, in which a relatively slow pressure build-up in succession and relatively rapid expansion is taking place. The pressure increases from chamber to chamber.
- Figures 13 to 18 show embodiments for Siegbahnhaven, which are combined with gaed stages.
- the outside diameter of the rotating ring disks 17 are selected in such a way that between its periphery and that surrounding it Stator 4 each have an outer annular space 71, 72.
- the inner diameter of the stator washers 15 chosen such that an inner annular space 73, 74 is present is.
- Figure 13 which is a plan view of a Stator ring disk with two spiral grooves 19 shows is can be seen that stationary in the annular spaces 71, 72 Projections 75, 76 and 77, 78 are located together with the Outer circumference of the rotor ring disks 16 or the rotating one Central part (e.g. rotor 8 or shaft 10) locking gaps 79, 80 form.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Claims (20)
- Pompe à vide à friction (1) comprenant des tronçons de pompe conçus de manière différente, parmi lesquels le tronçon de pompe du côté entrée est constitué par des étages de pompe turbomoléculaire (14, 15) et un autre tronçon de pompe est constitué par des étages de Siegbahn (16, 17) avec des gorges (19) respectivement conçues sous forme spiralée, dans laquelle les surfaces actives de pompage des étages de Siegbahn sont formées respectivement par les surfaces tournées l'une vers l'autre d'un disque annulaire de rotor et d'un disque annulaire de stator (16, 17), caractérisée en ce que le premier des disques annulaires (16, 17) des étages de Siegbahn est un disque annulaire de rotor (16), en ce que ce premier disque annulaire de rotor présente un plus petit diamètre que les autres disques annulaires de rotor (16), et en ce qu'elle porte à sa périphérie des pales de rotor (27) raccourcies vis-à-vis des autres pales de rotor (15) des étages de pompe turbomoléculaire (14, 15).
- Pompe à vide à friction (1) comprenant des tronçons de pompe conçus de manière différente, parmi lesquels le tronçon de pompe du côté entrée est constitué par des étages de pompe turbomoléculaire (14, 15) et un autre tronçon de pompe est constitué par des étages de Siegbahn (16, 17) avec des gorges (19) respectivement conçues sous forme spiralée, dans laquelle les surfaces actives de pompage des étages de Siegbahn sont formées respectivement par les surfaces tournées l'une vers l'autre d'un disque annulaire de rotor et d'un disque annulaire de stator (16, 17), caractérisée en ce que le premier des disques annulaires (16, 17) des étages de Siegbahn est un disque annulaire de stator (17), en ce que ce premier disque annulaire de stator présente un plus grand diamètre intérieur que les autres disques annulaires de stator (17), et en ce qu'elle porte sur son côté intérieur des pales de stator raccourcies vis-à-vis des autres pales de stator (14) des étages de pompe turbomoléculaire (14, 15).
- Pompe selon l'une ou l'autre des revendications 1 et 2, caractérisée en ce que les disques annulaires de stator (16) sont respectivement pourvus des gorges de forme spiralée (17).
- Pompe selon l'une des revendications 1, 2 et 3, caractérisée en ce que le tronçon de pompe constitué par les étages de Siegbahn (16, 17) est suivi d'un ou plusieurs autres tronçons de pompe qui sont appropriés pour la zone intermédiaire entre l'écoulement moléculaire et l'écoulement visqueux.
- Pompe selon la revendication 4, caractérisée en ce que le ou les autres tronçons de pompe sont réalisés à la manière d'un moteur à roue centrifuge, d'une pompe à canal latéral, d'une pompe de Holweck, d'une pompe de Gaede, ou similaire.
- Pompe selon la revendication 5, caractérisée en ce que les derniers étages de pompe, du côté vide préliminaire, comprennent des pales mobiles (22) côté rotor et des pales de guidage (23) côté stator, lesdites pales de guidage (23) formant des canaux d'écoulement qui sont pourvus d'ouvertures (25) dirigées vers le côté vide préliminaire.
- Pompe selon la revendication 5, caractérisée en ce que le dernier étage de pompe, du côté vide préliminaire, est réalisé à la manière d'une pompe à canal latéral, en ce qu'il est prévu un disque annulaire de rotor (28) et un disque annulaire de stator (29), en ce qu'il est prévu des gorges (31, 32) dans les surfaces tournées l'une vers l'autre du disque annulaire de rotor (28) et du disque annulaire de stator (29), et en ce que lesdites gorges sont réalisées comme faisant partie de la pompe à canal latéral.
- Pompe selon la revendication 7, caractérisée en ce que les gorges (31, 32) sont conçues essentiellement sous forme circulaire, et en ce qu'un ou plusieurs tronçons de gorge forment respectivement un étage de pompe à canal latéral.
- Pompe selon l'une ou l'autre des revendications 7 et 8, caractérisée en ce qu'il est prévu deux paires de gorges agencées de façon concentrique l'une par rapport à l'autre, et forment des étages de pompe à canal latéral.
- Pompe selon la revendication 5, caractérisée en ce que le tronçon de pompe côté vide préliminaire est constitué par un ou plusieurs étages de pompe de Gaede.
- Pompe selon la revendication 10, caractérisée en ce que deux barrettes (61, 62) agencées parallèlement l'une à l'autre et s'étendant radialement forment, conjointement avec un tronçon de rotor cylindrique (57), plusieurs étages de pompe de Gaede, du fait que la gorge formée par les barrettes (61, 62) est pourvue d'une ou plusieurs ouvertures d'entrée ou de sortie (64, 67), et d'une ou plusieurs saillies (65), afin de former une ou plusieurs fentes de blocage (66).
- Pompe selon la revendication 11, caractérisée en ce que la gorge (63), ou bien un tronçon de gorge (63) qui s'étend depuis une entrée (64) jusqu'à une sortie (67), présente une section transversale qui diminue en continu.
- Pompe selon la revendication 11, caractérisée en ce que la gorge (63), ou bien un tronçon de gorge (63) qui s'étend depuis une entrée (64) jusqu'à une sortie (67), présente une section transversale constamment variable.
- Pompe selon la revendication 13, caractérisée en ce que la section transversale de la gorge (63), ou bien d'un tronçon de la gorge (63) est ainsi conçue qu'il se produit en succession et plusieurs fois une montée en pression relativement lente et une expansion relativement rapide.
- Pompe selon l'une des revendications précédentes, caractérisée en ce que l'un au moins des étages de Siegbahn (16, 17) est combiné avec un étage de Gaede.
- Pompe selon la revendication 15, caractérisée en ce qu'au moins un disque annulaire de rotor (17) forme conjointement avec le stator (4) une chambre annulaire extérieure (71, 72), laquelle est réalisée dans son ensemble ou par tronçons sous forme d'un étage de pompe de Gaede avec une ou plusieurs saillies (75, 76).
- Pompe selon l'une ou l'autre des revendications 15 et 16, caractérisée en ce qu'un disque annulaire de stator (16) au moins forme, conjointement avec le rotor (8), une chambre annulaire (73, 74), laquelle est réalisée dans son ensemble ou par tronçons sous forme d'un étage de pompe de Gaede.
- Pompe selon l'une des revendications 15, 16 et 17, caractérisée en ce que la hauteur des chambres annulaires extérieures (71, 72) est supérieure à l'épaisseur des disques annulaires de rotor (17), et en ce que les disques (17) pénètrent avec leurs bordures extérieures dans les chambres annulaires (71, 72).
- Pompe selon l'une des revendications 15 à 18, caractérisée en ce que le rotor (8) est pourvu, dans la région des chambres annulaires intérieures (73, 74), de moyens (86) pour augmenter la surface active de pompage.
- Pompe selon l'une des revendications précédentes, caractérisée en ce que le rotor (8) s'appuie par l'intermédiaire de paliers (9) sur la face intérieure d'un support (41) en forme de douille, et en ce que le support (41) s'appuie de son côté dans le boítier (2) à l'aide de plusieurs tiges (46), de préférence au nombre de trois, qui s'étendent essentiellement axialement.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP98110191A EP0874159A3 (fr) | 1993-05-03 | 1994-03-31 | Pompe à vide à friction avec étage du type à canal de Gaede |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4314418A DE4314418A1 (de) | 1993-05-03 | 1993-05-03 | Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten |
DE4314418 | 1993-05-03 | ||
PCT/EP1994/001011 WO1994025760A1 (fr) | 1993-05-03 | 1994-03-31 | Pompe a vide rotative a friction comportant des sections de conception differente |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP98110191A Division EP0874159A3 (fr) | 1993-05-03 | 1994-03-31 | Pompe à vide à friction avec étage du type à canal de Gaede |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0697069A1 EP0697069A1 (fr) | 1996-02-21 |
EP0697069B1 true EP0697069B1 (fr) | 2000-05-24 |
Family
ID=6486923
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP98110191A Withdrawn EP0874159A3 (fr) | 1993-05-03 | 1994-03-31 | Pompe à vide à friction avec étage du type à canal de Gaede |
EP94913098A Expired - Lifetime EP0697069B1 (fr) | 1993-05-03 | 1994-03-31 | Pompe a vide rotative a friction comportant des sections de conception differente |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP98110191A Withdrawn EP0874159A3 (fr) | 1993-05-03 | 1994-03-31 | Pompe à vide à friction avec étage du type à canal de Gaede |
Country Status (5)
Country | Link |
---|---|
US (1) | US5695316A (fr) |
EP (2) | EP0874159A3 (fr) |
JP (1) | JPH08511071A (fr) |
DE (2) | DE4314418A1 (fr) |
WO (1) | WO1994025760A1 (fr) |
Families Citing this family (55)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9318801D0 (en) * | 1993-09-10 | 1993-10-27 | Boc Group Plc | Improved vacuum pumps |
US5496149A (en) * | 1995-03-10 | 1996-03-05 | Basf Corporation | Thin plate turbine |
DE29516599U1 (de) * | 1995-10-20 | 1995-12-07 | Leybold AG, 50968 Köln | Reibungsvakuumpumpe mit Zwischeneinlaß |
IT1281025B1 (it) * | 1995-11-10 | 1998-02-11 | Varian Spa | Pompa turbomolecolare. |
DE19632874A1 (de) * | 1996-08-16 | 1998-02-19 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe |
US6457954B1 (en) * | 1998-05-26 | 2002-10-01 | Leybold Vakuum Gmbh | Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump |
TW504548B (en) * | 1998-06-30 | 2002-10-01 | Ebara Corp | Turbo molecular pump |
JP3788558B2 (ja) * | 1999-03-23 | 2006-06-21 | 株式会社荏原製作所 | ターボ分子ポンプ |
US6179573B1 (en) * | 1999-03-24 | 2001-01-30 | Varian, Inc. | Vacuum pump with inverted motor |
JP4104098B2 (ja) * | 1999-03-31 | 2008-06-18 | エドワーズ株式会社 | 真空ポンプ |
US6220824B1 (en) * | 1999-06-21 | 2001-04-24 | Varian, Inc. | Self-propelled vacuum pump |
ES2219956T3 (es) * | 1999-07-19 | 2004-12-01 | Sterling Fluid Systems (Germany) Gmbh | Maquina volumetrica para medios comprimibles. |
DE19942410A1 (de) * | 1999-09-06 | 2001-03-08 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
SG97943A1 (en) * | 1999-10-04 | 2003-08-20 | Ebara Corp | Vacuum exhaust system |
US6508631B1 (en) | 1999-11-18 | 2003-01-21 | Mks Instruments, Inc. | Radial flow turbomolecular vacuum pump |
US6394747B1 (en) | 2000-06-21 | 2002-05-28 | Varian, Inc. | Molecular drag vacuum pumps |
JP3777498B2 (ja) * | 2000-06-23 | 2006-05-24 | 株式会社荏原製作所 | ターボ分子ポンプ |
DE10046766A1 (de) * | 2000-09-21 | 2002-04-11 | Leybold Vakuum Gmbh | Compound-Reibungsvakuumpumpe |
JP2002138987A (ja) * | 2000-10-31 | 2002-05-17 | Seiko Instruments Inc | 真空ポンプ |
US6503050B2 (en) * | 2000-12-18 | 2003-01-07 | Applied Materials Inc. | Turbo-molecular pump having enhanced pumping capacity |
US6607351B1 (en) * | 2002-03-12 | 2003-08-19 | Varian, Inc. | Vacuum pumps with improved impeller configurations |
GB0409139D0 (en) | 2003-09-30 | 2004-05-26 | Boc Group Plc | Vacuum pump |
DE10353034A1 (de) * | 2003-11-13 | 2005-06-09 | Leybold Vakuum Gmbh | Mehrstufige Reibungsvakuumpumpe |
DE10357546A1 (de) * | 2003-12-10 | 2005-07-07 | Pfeiffer Vacuum Gmbh | Seitenkanalpumpstufe |
GB0614928D0 (en) * | 2006-07-27 | 2006-09-06 | Boc Group Plc | Molecular Drag Pumping Mechanism |
US20080056886A1 (en) * | 2006-08-31 | 2008-03-06 | Varian, S.P.A. | Vacuum pumps with improved pumping channel cross sections |
US7628577B2 (en) | 2006-08-31 | 2009-12-08 | Varian, S.P.A. | Vacuum pumps with improved pumping channel configurations |
DE102006043327A1 (de) * | 2006-09-15 | 2008-03-27 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe |
GB0618745D0 (en) † | 2006-09-22 | 2006-11-01 | Boc Group Plc | Molecular drag pumping mechanism |
JP4885000B2 (ja) * | 2007-02-13 | 2012-02-29 | 株式会社ニューフレアテクノロジー | 気相成長装置および気相成長方法 |
JP5056152B2 (ja) * | 2007-05-15 | 2012-10-24 | 株式会社島津製作所 | ターボ分子ポンプ |
DE102008004297A1 (de) * | 2008-01-15 | 2009-07-16 | Oerlikon Leybold Vacuum Gmbh | Turbomolekularpumpe |
US8109744B2 (en) * | 2008-03-26 | 2012-02-07 | Ebara Corporation | Turbo vacuum pump |
US8087907B2 (en) * | 2008-03-26 | 2012-01-03 | Ebara Corporation | Turbo vacuum pump |
US8152442B2 (en) * | 2008-12-24 | 2012-04-10 | Agilent Technologies, Inc. | Centripetal pumping stage and vacuum pump incorporating such pumping stage |
US8070419B2 (en) * | 2008-12-24 | 2011-12-06 | Agilent Technologies, Inc. | Spiral pumping stage and vacuum pump incorporating such pumping stage |
JP2010174779A (ja) * | 2009-01-30 | 2010-08-12 | Hitachi High-Technologies Corp | 真空処理装置 |
JP5397138B2 (ja) * | 2009-10-02 | 2014-01-22 | 株式会社島津製作所 | ターボ分子ポンプ |
GB2474507B (en) * | 2009-10-19 | 2016-01-27 | Edwards Ltd | Vacuum pump |
JP5758303B2 (ja) * | 2009-12-11 | 2015-08-05 | エドワーズ株式会社 | ネジ溝排気部の筒形固定部材と、これを使用した真空ポンプ |
JP6133213B2 (ja) * | 2011-10-31 | 2017-05-24 | エドワーズ株式会社 | 固定部材及び真空ポンプ |
GB2498816A (en) | 2012-01-27 | 2013-07-31 | Edwards Ltd | Vacuum pump |
JP6353195B2 (ja) | 2013-05-09 | 2018-07-04 | エドワーズ株式会社 | 固定円板および真空ポンプ |
DE102013213815A1 (de) * | 2013-07-15 | 2015-01-15 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE102013214662A1 (de) * | 2013-07-26 | 2015-01-29 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
JP6616560B2 (ja) * | 2013-11-28 | 2019-12-04 | エドワーズ株式会社 | 真空ポンプ用部品、および複合型真空ポンプ |
JP6692635B2 (ja) * | 2015-12-09 | 2020-05-13 | エドワーズ株式会社 | 連結型ネジ溝スペーサ、および真空ポンプ |
JP7108377B2 (ja) * | 2017-02-08 | 2022-07-28 | エドワーズ株式会社 | 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法 |
IT201700075054A1 (it) * | 2017-07-04 | 2017-10-04 | Agilent Tech Inc A Delaware Corporation | Stadio di pompaggio molecolare per pompa da vuoto e pompa da vuoto comprendente detto stadio di pompaggio molecolare |
GB2569314A (en) * | 2017-12-12 | 2019-06-19 | Edwards Ltd | A turbomolecular pump and method and apparatus for controlling the pressure in a process chamber |
GB2575450B (en) * | 2018-07-09 | 2022-01-26 | Edwards Ltd | A variable inlet conductance vacuum pump, vacuum pump arrangement and method |
JP2020186687A (ja) * | 2019-05-15 | 2020-11-19 | エドワーズ株式会社 | 真空ポンプとそのネジ溝ポンプ部の固定部品 |
JP7348753B2 (ja) * | 2019-05-31 | 2023-09-21 | エドワーズ株式会社 | 真空ポンプ、および連結型ネジ溝スペーサ |
GB2589151A (en) * | 2019-11-25 | 2021-05-26 | Edwards Ltd | Molecular drag vacuum pump |
JP2022143507A (ja) * | 2021-03-17 | 2022-10-03 | エドワーズ株式会社 | 真空ポンプ |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3104802A (en) * | 1963-09-24 | Unified system vacuum pump | ||
DE239213C (fr) * | ||||
GB336001A (en) * | 1929-07-09 | 1930-10-09 | Edwin Rodolph Grote | Improvements in pumps for obtaining high vacua |
US1942139A (en) * | 1930-12-26 | 1934-01-02 | Central Scientific Co | Molecular vacuum pump |
US1975568A (en) * | 1932-03-18 | 1934-10-02 | Central Scientific Co | Molecular vacuum pump |
FR1443239A (fr) * | 1965-05-05 | 1966-06-24 | Pompe à vide mécanique rotative | |
SU528388A1 (ru) * | 1965-06-25 | 1976-09-15 | Институт Металлургии Имени А.А.Байкова Ан Ссср | Молекул рный вакуумный насос |
FR2161179A5 (fr) * | 1971-11-16 | 1973-07-06 | Cit Alcatel | |
US3969039A (en) * | 1974-08-01 | 1976-07-13 | American Optical Corporation | Vacuum pump |
JPS5267810A (en) * | 1975-12-03 | 1977-06-04 | Aisin Seiki Co Ltd | High vacuum pump |
DE3239328C2 (de) * | 1982-10-23 | 1993-12-23 | Pfeiffer Vakuumtechnik | Magnetisch gelagerte Turbomolekularpumpe mit Schwingungsdämpfung |
JPS60116896A (ja) * | 1983-11-30 | 1985-06-24 | Hitachi Ltd | 真空ポンプ |
JPS60116895A (ja) * | 1983-11-30 | 1985-06-24 | Hitachi Ltd | 真空ポンプ |
JPS60125795A (ja) * | 1983-12-09 | 1985-07-05 | Osaka Shinku Kiki Seisakusho:Kk | 複合真空ポンプ |
JPS60139098U (ja) * | 1984-02-24 | 1985-09-13 | セイコ−精機株式会社 | 組合せ型軸流分子ポンプ |
US4732529A (en) * | 1984-02-29 | 1988-03-22 | Shimadzu Corporation | Turbomolecular pump |
SU1285198A1 (ru) * | 1985-01-04 | 1987-01-23 | Предприятие П/Я А-1614 | Двухступенчатый турбомолекул рный вакуумный насос |
JPS61226596A (ja) * | 1985-03-29 | 1986-10-08 | Hitachi Ltd | タ−ボ分子ポンプ |
JPS6385291A (ja) * | 1986-09-29 | 1988-04-15 | Hitachi Ltd | 真空ポンプ |
DE3922782A1 (de) * | 1988-07-12 | 1990-02-08 | Beijing Lab Of Vacuum Physics | Molekularpumpe in kombinierter bauart |
US5219269A (en) * | 1988-07-13 | 1993-06-15 | Osaka Vacuum, Ltd. | Vacuum pump |
DE3919529C2 (de) * | 1988-07-13 | 1994-09-29 | Osaka Vacuum Ltd | Vakuumpumpe |
IT1241431B (it) * | 1990-03-09 | 1994-01-17 | Varian Spa | Pompa turbomolecolare perfezionata. |
US5358373A (en) * | 1992-04-29 | 1994-10-25 | Varian Associates, Inc. | High performance turbomolecular vacuum pumps |
-
1993
- 1993-05-03 DE DE4314418A patent/DE4314418A1/de not_active Ceased
-
1994
- 1994-03-31 JP JP6523801A patent/JPH08511071A/ja active Pending
- 1994-03-31 EP EP98110191A patent/EP0874159A3/fr not_active Withdrawn
- 1994-03-31 WO PCT/EP1994/001011 patent/WO1994025760A1/fr active IP Right Grant
- 1994-03-31 EP EP94913098A patent/EP0697069B1/fr not_active Expired - Lifetime
- 1994-03-31 DE DE59409375T patent/DE59409375D1/de not_active Expired - Fee Related
- 1994-03-31 US US08/545,646 patent/US5695316A/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
EP0874159A3 (fr) | 1998-11-18 |
DE59409375D1 (de) | 2000-06-29 |
EP0697069A1 (fr) | 1996-02-21 |
WO1994025760A1 (fr) | 1994-11-10 |
DE4314418A1 (de) | 1994-11-10 |
EP0874159A2 (fr) | 1998-10-28 |
US5695316A (en) | 1997-12-09 |
JPH08511071A (ja) | 1996-11-19 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0697069B1 (fr) | Pompe a vide rotative a friction comportant des sections de conception differente | |
EP0414127B1 (fr) | Pompe à vide avec palier magnétique | |
EP0856108B1 (fr) | Pompe a vide a friction a admission intermediaire | |
DE69734028T3 (de) | Vakuumpumpe | |
EP2295812B1 (fr) | Récipient repliable | |
DE19709205A1 (de) | Vakuumpumpe mit Wellenlagerung | |
DE69104749T2 (de) | Verbesserte Turbomolekularpumpe. | |
DE4216237A1 (de) | Gasreibungsvakuumpumpe | |
EP0697068B1 (fr) | Pompe a vide a friction munie d'un support de palier | |
EP2631488A2 (fr) | Pompe à vide | |
EP1017944B1 (fr) | Pompe compound | |
DE19680800B4 (de) | Axialwälzlager | |
WO2005047707A1 (fr) | Pompe à vide à frottement à plusieurs étages | |
EP2253851A2 (fr) | Pompe à vide | |
EP0825346B1 (fr) | Etage d'entrée pour une pompe à gaz à friction à double flux | |
EP0567874A1 (fr) | Machine à courant pour la compression d'un gaz | |
EP0316470B1 (fr) | Ventilateur radial avec volute interne | |
EP2863063A2 (fr) | Pompe à vide | |
EP1319131A1 (fr) | Pompe a vide a friction composee | |
EP0386193A1 (fr) | Dispositif d'etancheite entre l'arbre et le carter d'une turbomachine ayant au moins une roue mobile. | |
EP1200739A1 (fr) | Pompe a vide a friction avec elements actifs de pompage | |
WO2003031823A1 (fr) | Pompe a vide rotative a refoulement axial | |
EP3088746A1 (fr) | Pompe à vide | |
EP3767109B1 (fr) | Système à vide | |
EP1541871B1 (fr) | Etage d' une pompe à canal latéral |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
17P | Request for examination filed |
Effective date: 19950930 |
|
AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): CH DE FR GB IT LI |
|
17Q | First examination report despatched |
Effective date: 19960528 |
|
GRAG | Despatch of communication of intention to grant |
Free format text: ORIGINAL CODE: EPIDOS AGRA |
|
GRAG | Despatch of communication of intention to grant |
Free format text: ORIGINAL CODE: EPIDOS AGRA |
|
RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: LEYBOLD VAKUUM GMBH |
|
GRAG | Despatch of communication of intention to grant |
Free format text: ORIGINAL CODE: EPIDOS AGRA |
|
GRAG | Despatch of communication of intention to grant |
Free format text: ORIGINAL CODE: EPIDOS AGRA |
|
GRAH | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOS IGRA |
|
GRAH | Despatch of communication of intention to grant a patent |
Free format text: ORIGINAL CODE: EPIDOS IGRA |
|
GRAA | (expected) grant |
Free format text: ORIGINAL CODE: 0009210 |
|
AK | Designated contracting states |
Kind code of ref document: B1 Designated state(s): CH DE FR GB IT LI |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: EP |
|
REF | Corresponds to: |
Ref document number: 59409375 Country of ref document: DE Date of ref document: 20000629 |
|
ITF | It: translation for a ep patent filed |
Owner name: BARZANO' E ZANARDO MILANO S.P.A. |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: NV Representative=s name: ISLER & PEDRAZZINI AG |
|
GBT | Gb: translation of ep patent filed (gb section 77(6)(a)/1977) |
Effective date: 20000717 |
|
ET | Fr: translation filed | ||
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: FR Payment date: 20010208 Year of fee payment: 8 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: CH Payment date: 20010216 Year of fee payment: 8 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: GB Payment date: 20010219 Year of fee payment: 8 |
|
PGFP | Annual fee paid to national office [announced via postgrant information from national office to epo] |
Ref country code: DE Payment date: 20010222 Year of fee payment: 8 |
|
PLBE | No opposition filed within time limit |
Free format text: ORIGINAL CODE: 0009261 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT |
|
26N | No opposition filed | ||
REG | Reference to a national code |
Ref country code: GB Ref legal event code: IF02 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: LI Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20020331 Ref country code: GB Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20020331 Ref country code: CH Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20020331 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: DE Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20021001 |
|
REG | Reference to a national code |
Ref country code: CH Ref legal event code: PL |
|
GBPC | Gb: european patent ceased through non-payment of renewal fee |
Effective date: 20020331 |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: FR Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20021129 |
|
REG | Reference to a national code |
Ref country code: FR Ref legal event code: ST |
|
PG25 | Lapsed in a contracting state [announced via postgrant information from national office to epo] |
Ref country code: IT Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES Effective date: 20050331 |