DE59409375D1 - Reibungsvakuumpumpe mit unterschiedlich gestalteten pumpenabschnitten - Google Patents

Reibungsvakuumpumpe mit unterschiedlich gestalteten pumpenabschnitten

Info

Publication number
DE59409375D1
DE59409375D1 DE59409375T DE59409375T DE59409375D1 DE 59409375 D1 DE59409375 D1 DE 59409375D1 DE 59409375 T DE59409375 T DE 59409375T DE 59409375 T DE59409375 T DE 59409375T DE 59409375 D1 DE59409375 D1 DE 59409375D1
Authority
DE
Germany
Prior art keywords
pump
differently designed
sections
friction vacuum
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59409375T
Other languages
English (en)
Inventor
Guenter Schuetz
Heinrich Englaender
Schulz-Hausmann Karl Von
Hinrich Henning
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Application granted granted Critical
Publication of DE59409375D1 publication Critical patent/DE59409375D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE59409375T 1993-05-03 1994-03-31 Reibungsvakuumpumpe mit unterschiedlich gestalteten pumpenabschnitten Expired - Fee Related DE59409375D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4314418A DE4314418A1 (de) 1993-05-03 1993-05-03 Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
PCT/EP1994/001011 WO1994025760A1 (de) 1993-05-03 1994-03-31 Reibungsvakuumpumpe mit unterschiedlich gestalteten pumpenabschnitten

Publications (1)

Publication Number Publication Date
DE59409375D1 true DE59409375D1 (de) 2000-06-29

Family

ID=6486923

Family Applications (2)

Application Number Title Priority Date Filing Date
DE4314418A Ceased DE4314418A1 (de) 1993-05-03 1993-05-03 Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
DE59409375T Expired - Fee Related DE59409375D1 (de) 1993-05-03 1994-03-31 Reibungsvakuumpumpe mit unterschiedlich gestalteten pumpenabschnitten

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE4314418A Ceased DE4314418A1 (de) 1993-05-03 1993-05-03 Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten

Country Status (5)

Country Link
US (1) US5695316A (de)
EP (2) EP0874159A3 (de)
JP (1) JPH08511071A (de)
DE (2) DE4314418A1 (de)
WO (1) WO1994025760A1 (de)

Families Citing this family (55)

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DE29516599U1 (de) * 1995-10-20 1995-12-07 Leybold AG, 50968 Köln Reibungsvakuumpumpe mit Zwischeneinlaß
IT1281025B1 (it) * 1995-11-10 1998-02-11 Varian Spa Pompa turbomolecolare.
DE19632874A1 (de) * 1996-08-16 1998-02-19 Leybold Vakuum Gmbh Reibungsvakuumpumpe
JP4520636B2 (ja) * 1998-05-26 2010-08-11 ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング シャシ、ロータ及びケーシングを有する摩擦真空ポンプ並びにこの形式の摩擦真空ポンプを備えた装置
TW504548B (en) * 1998-06-30 2002-10-01 Ebara Corp Turbo molecular pump
JP3788558B2 (ja) 1999-03-23 2006-06-21 株式会社荏原製作所 ターボ分子ポンプ
US6179573B1 (en) * 1999-03-24 2001-01-30 Varian, Inc. Vacuum pump with inverted motor
JP4104098B2 (ja) * 1999-03-31 2008-06-18 エドワーズ株式会社 真空ポンプ
US6220824B1 (en) * 1999-06-21 2001-04-24 Varian, Inc. Self-propelled vacuum pump
DK1070848T3 (da) * 1999-07-19 2004-08-09 Sterling Fluid Sys Gmbh Fortrængningsmaskine til kompressible medier
DE19942410A1 (de) * 1999-09-06 2001-03-08 Pfeiffer Vacuum Gmbh Vakuumpumpe
SG97943A1 (en) * 1999-10-04 2003-08-20 Ebara Corp Vacuum exhaust system
US6508631B1 (en) 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
US6394747B1 (en) 2000-06-21 2002-05-28 Varian, Inc. Molecular drag vacuum pumps
JP3777498B2 (ja) * 2000-06-23 2006-05-24 株式会社荏原製作所 ターボ分子ポンプ
DE10046766A1 (de) * 2000-09-21 2002-04-11 Leybold Vakuum Gmbh Compound-Reibungsvakuumpumpe
JP2002138987A (ja) 2000-10-31 2002-05-17 Seiko Instruments Inc 真空ポンプ
US6503050B2 (en) * 2000-12-18 2003-01-07 Applied Materials Inc. Turbo-molecular pump having enhanced pumping capacity
US6607351B1 (en) * 2002-03-12 2003-08-19 Varian, Inc. Vacuum pumps with improved impeller configurations
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
DE10353034A1 (de) * 2003-11-13 2005-06-09 Leybold Vakuum Gmbh Mehrstufige Reibungsvakuumpumpe
DE10357546A1 (de) * 2003-12-10 2005-07-07 Pfeiffer Vacuum Gmbh Seitenkanalpumpstufe
GB0614928D0 (en) * 2006-07-27 2006-09-06 Boc Group Plc Molecular Drag Pumping Mechanism
US7628577B2 (en) 2006-08-31 2009-12-08 Varian, S.P.A. Vacuum pumps with improved pumping channel configurations
US20080056886A1 (en) * 2006-08-31 2008-03-06 Varian, S.P.A. Vacuum pumps with improved pumping channel cross sections
DE102006043327A1 (de) * 2006-09-15 2008-03-27 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
GB0618745D0 (en) * 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
JP4885000B2 (ja) * 2007-02-13 2012-02-29 株式会社ニューフレアテクノロジー 気相成長装置および気相成長方法
JP5056152B2 (ja) * 2007-05-15 2012-10-24 株式会社島津製作所 ターボ分子ポンプ
DE102008004297A1 (de) * 2008-01-15 2009-07-16 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
EP2105615A3 (de) * 2008-03-26 2013-09-25 Ebara Corporation Turbovakuumpumpe
US8109744B2 (en) * 2008-03-26 2012-02-07 Ebara Corporation Turbo vacuum pump
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage
US8070419B2 (en) * 2008-12-24 2011-12-06 Agilent Technologies, Inc. Spiral pumping stage and vacuum pump incorporating such pumping stage
JP2010174779A (ja) * 2009-01-30 2010-08-12 Hitachi High-Technologies Corp 真空処理装置
JP5397138B2 (ja) * 2009-10-02 2014-01-22 株式会社島津製作所 ターボ分子ポンプ
GB2474507B (en) * 2009-10-19 2016-01-27 Edwards Ltd Vacuum pump
JP5758303B2 (ja) * 2009-12-11 2015-08-05 エドワーズ株式会社 ネジ溝排気部の筒形固定部材と、これを使用した真空ポンプ
US9759233B2 (en) * 2011-10-31 2017-09-12 Edwards Japan Limited Stator member and vacuum pump
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
JP6353195B2 (ja) * 2013-05-09 2018-07-04 エドワーズ株式会社 固定円板および真空ポンプ
DE102013213815A1 (de) * 2013-07-15 2015-01-15 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102013214662A1 (de) 2013-07-26 2015-01-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP6616560B2 (ja) * 2013-11-28 2019-12-04 エドワーズ株式会社 真空ポンプ用部品、および複合型真空ポンプ
JP6692635B2 (ja) 2015-12-09 2020-05-13 エドワーズ株式会社 連結型ネジ溝スペーサ、および真空ポンプ
JP7108377B2 (ja) * 2017-02-08 2022-07-28 エドワーズ株式会社 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法
IT201700075054A1 (it) * 2017-07-04 2017-10-04 Agilent Tech Inc A Delaware Corporation Stadio di pompaggio molecolare per pompa da vuoto e pompa da vuoto comprendente detto stadio di pompaggio molecolare
GB2569314A (en) * 2017-12-12 2019-06-19 Edwards Ltd A turbomolecular pump and method and apparatus for controlling the pressure in a process chamber
GB2575450B (en) * 2018-07-09 2022-01-26 Edwards Ltd A variable inlet conductance vacuum pump, vacuum pump arrangement and method
JP2020186687A (ja) * 2019-05-15 2020-11-19 エドワーズ株式会社 真空ポンプとそのネジ溝ポンプ部の固定部品
JP7348753B2 (ja) * 2019-05-31 2023-09-21 エドワーズ株式会社 真空ポンプ、および連結型ネジ溝スペーサ
GB2589151A (en) * 2019-11-25 2021-05-26 Edwards Ltd Molecular drag vacuum pump
JP2022143507A (ja) * 2021-03-17 2022-10-03 エドワーズ株式会社 真空ポンプ

Family Cites Families (24)

* Cited by examiner, † Cited by third party
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US3104802A (en) * 1963-09-24 Unified system vacuum pump
DE239213C (de) *
GB336001A (en) * 1929-07-09 1930-10-09 Edwin Rodolph Grote Improvements in pumps for obtaining high vacua
US1942139A (en) * 1930-12-26 1934-01-02 Central Scientific Co Molecular vacuum pump
US1975568A (en) * 1932-03-18 1934-10-02 Central Scientific Co Molecular vacuum pump
FR1443239A (fr) * 1965-05-05 1966-06-24 Pompe à vide mécanique rotative
SU528388A1 (ru) * 1965-06-25 1976-09-15 Институт Металлургии Имени А.А.Байкова Ан Ссср Молекул рный вакуумный насос
FR2161179A5 (de) * 1971-11-16 1973-07-06 Cit Alcatel
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
JPS5267810A (en) * 1975-12-03 1977-06-04 Aisin Seiki Co Ltd High vacuum pump
DE3239328C2 (de) * 1982-10-23 1993-12-23 Pfeiffer Vakuumtechnik Magnetisch gelagerte Turbomolekularpumpe mit Schwingungsdämpfung
JPS60116896A (ja) * 1983-11-30 1985-06-24 Hitachi Ltd 真空ポンプ
JPS60116895A (ja) * 1983-11-30 1985-06-24 Hitachi Ltd 真空ポンプ
JPS60125795A (ja) * 1983-12-09 1985-07-05 Osaka Shinku Kiki Seisakusho:Kk 複合真空ポンプ
JPS60139098U (ja) * 1984-02-24 1985-09-13 セイコ−精機株式会社 組合せ型軸流分子ポンプ
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump
SU1285198A1 (ru) * 1985-01-04 1987-01-23 Предприятие П/Я А-1614 Двухступенчатый турбомолекул рный вакуумный насос
JPS61226596A (ja) * 1985-03-29 1986-10-08 Hitachi Ltd タ−ボ分子ポンプ
JPS6385291A (ja) * 1986-09-29 1988-04-15 Hitachi Ltd 真空ポンプ
DE3922782A1 (de) * 1988-07-12 1990-02-08 Beijing Lab Of Vacuum Physics Molekularpumpe in kombinierter bauart
US5219269A (en) * 1988-07-13 1993-06-15 Osaka Vacuum, Ltd. Vacuum pump
DE3919529C2 (de) * 1988-07-13 1994-09-29 Osaka Vacuum Ltd Vakuumpumpe
IT1241431B (it) * 1990-03-09 1994-01-17 Varian Spa Pompa turbomolecolare perfezionata.
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps

Also Published As

Publication number Publication date
US5695316A (en) 1997-12-09
EP0874159A2 (de) 1998-10-28
EP0874159A3 (de) 1998-11-18
EP0697069A1 (de) 1996-02-21
WO1994025760A1 (de) 1994-11-10
JPH08511071A (ja) 1996-11-19
DE4314418A1 (de) 1994-11-10
EP0697069B1 (de) 2000-05-24

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee