EP0874159A3 - Reibungsvakuumpumpe mit einer Gaedepumpenstufe - Google Patents
Reibungsvakuumpumpe mit einer Gaedepumpenstufe Download PDFInfo
- Publication number
- EP0874159A3 EP0874159A3 EP98110191A EP98110191A EP0874159A3 EP 0874159 A3 EP0874159 A3 EP 0874159A3 EP 98110191 A EP98110191 A EP 98110191A EP 98110191 A EP98110191 A EP 98110191A EP 0874159 A3 EP0874159 A3 EP 0874159A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- projection
- stage
- stator
- pump
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4314418A DE4314418A1 (de) | 1993-05-03 | 1993-05-03 | Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten |
DE4314418 | 1993-05-03 | ||
EP94913098A EP0697069B1 (de) | 1993-05-03 | 1994-03-31 | Reibungsvakuumpumpe mit unterschiedlich gestalteten pumpenabschnitten |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP94913098A Division EP0697069B1 (de) | 1993-05-03 | 1994-03-31 | Reibungsvakuumpumpe mit unterschiedlich gestalteten pumpenabschnitten |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0874159A2 EP0874159A2 (de) | 1998-10-28 |
EP0874159A3 true EP0874159A3 (de) | 1998-11-18 |
Family
ID=6486923
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP98110191A Withdrawn EP0874159A3 (de) | 1993-05-03 | 1994-03-31 | Reibungsvakuumpumpe mit einer Gaedepumpenstufe |
EP94913098A Expired - Lifetime EP0697069B1 (de) | 1993-05-03 | 1994-03-31 | Reibungsvakuumpumpe mit unterschiedlich gestalteten pumpenabschnitten |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP94913098A Expired - Lifetime EP0697069B1 (de) | 1993-05-03 | 1994-03-31 | Reibungsvakuumpumpe mit unterschiedlich gestalteten pumpenabschnitten |
Country Status (5)
Country | Link |
---|---|
US (1) | US5695316A (de) |
EP (2) | EP0874159A3 (de) |
JP (1) | JPH08511071A (de) |
DE (2) | DE4314418A1 (de) |
WO (1) | WO1994025760A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101517240B (zh) * | 2006-09-22 | 2013-08-14 | 爱德华兹有限公司 | 分子拖曳泵送机构 |
Families Citing this family (54)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9318801D0 (en) * | 1993-09-10 | 1993-10-27 | Boc Group Plc | Improved vacuum pumps |
US5496149A (en) * | 1995-03-10 | 1996-03-05 | Basf Corporation | Thin plate turbine |
DE29516599U1 (de) * | 1995-10-20 | 1995-12-07 | Leybold AG, 50968 Köln | Reibungsvakuumpumpe mit Zwischeneinlaß |
IT1281025B1 (it) * | 1995-11-10 | 1998-02-11 | Varian Spa | Pompa turbomolecolare. |
DE19632874A1 (de) * | 1996-08-16 | 1998-02-19 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe |
DE59912626D1 (de) * | 1998-05-26 | 2006-02-16 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit chassis, rotor und gehäuse sowie einrichtung, ausgerüstet mit einer reibungsvakuumpumpe dieser art |
TW504548B (en) * | 1998-06-30 | 2002-10-01 | Ebara Corp | Turbo molecular pump |
JP3788558B2 (ja) | 1999-03-23 | 2006-06-21 | 株式会社荏原製作所 | ターボ分子ポンプ |
US6179573B1 (en) * | 1999-03-24 | 2001-01-30 | Varian, Inc. | Vacuum pump with inverted motor |
JP4104098B2 (ja) * | 1999-03-31 | 2008-06-18 | エドワーズ株式会社 | 真空ポンプ |
US6220824B1 (en) * | 1999-06-21 | 2001-04-24 | Varian, Inc. | Self-propelled vacuum pump |
ES2219956T3 (es) * | 1999-07-19 | 2004-12-01 | Sterling Fluid Systems (Germany) Gmbh | Maquina volumetrica para medios comprimibles. |
DE19942410A1 (de) * | 1999-09-06 | 2001-03-08 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
US6382249B1 (en) | 1999-10-04 | 2002-05-07 | Ebara Corporation | Vacuum exhaust system |
US6508631B1 (en) | 1999-11-18 | 2003-01-21 | Mks Instruments, Inc. | Radial flow turbomolecular vacuum pump |
US6394747B1 (en) | 2000-06-21 | 2002-05-28 | Varian, Inc. | Molecular drag vacuum pumps |
JP3777498B2 (ja) * | 2000-06-23 | 2006-05-24 | 株式会社荏原製作所 | ターボ分子ポンプ |
DE10046766A1 (de) * | 2000-09-21 | 2002-04-11 | Leybold Vakuum Gmbh | Compound-Reibungsvakuumpumpe |
JP2002138987A (ja) | 2000-10-31 | 2002-05-17 | Seiko Instruments Inc | 真空ポンプ |
US6503050B2 (en) * | 2000-12-18 | 2003-01-07 | Applied Materials Inc. | Turbo-molecular pump having enhanced pumping capacity |
US6607351B1 (en) * | 2002-03-12 | 2003-08-19 | Varian, Inc. | Vacuum pumps with improved impeller configurations |
GB0409139D0 (en) | 2003-09-30 | 2004-05-26 | Boc Group Plc | Vacuum pump |
DE10353034A1 (de) * | 2003-11-13 | 2005-06-09 | Leybold Vakuum Gmbh | Mehrstufige Reibungsvakuumpumpe |
DE10357546A1 (de) * | 2003-12-10 | 2005-07-07 | Pfeiffer Vacuum Gmbh | Seitenkanalpumpstufe |
GB0614928D0 (en) * | 2006-07-27 | 2006-09-06 | Boc Group Plc | Molecular Drag Pumping Mechanism |
US7628577B2 (en) * | 2006-08-31 | 2009-12-08 | Varian, S.P.A. | Vacuum pumps with improved pumping channel configurations |
US20080056886A1 (en) * | 2006-08-31 | 2008-03-06 | Varian, S.P.A. | Vacuum pumps with improved pumping channel cross sections |
DE102006043327A1 (de) * | 2006-09-15 | 2008-03-27 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpe |
JP4885000B2 (ja) * | 2007-02-13 | 2012-02-29 | 株式会社ニューフレアテクノロジー | 気相成長装置および気相成長方法 |
JP5056152B2 (ja) * | 2007-05-15 | 2012-10-24 | 株式会社島津製作所 | ターボ分子ポンプ |
DE102008004297A1 (de) * | 2008-01-15 | 2009-07-16 | Oerlikon Leybold Vacuum Gmbh | Turbomolekularpumpe |
EP2108844A3 (de) * | 2008-03-26 | 2013-09-18 | Ebara Corporation | Turbovakuumpumpe |
EP2105615A3 (de) * | 2008-03-26 | 2013-09-25 | Ebara Corporation | Turbovakuumpumpe |
US8070419B2 (en) * | 2008-12-24 | 2011-12-06 | Agilent Technologies, Inc. | Spiral pumping stage and vacuum pump incorporating such pumping stage |
US8152442B2 (en) * | 2008-12-24 | 2012-04-10 | Agilent Technologies, Inc. | Centripetal pumping stage and vacuum pump incorporating such pumping stage |
JP2010174779A (ja) * | 2009-01-30 | 2010-08-12 | Hitachi High-Technologies Corp | 真空処理装置 |
JP5397138B2 (ja) * | 2009-10-02 | 2014-01-22 | 株式会社島津製作所 | ターボ分子ポンプ |
GB2474507B (en) * | 2009-10-19 | 2016-01-27 | Edwards Ltd | Vacuum pump |
CN102667169B (zh) * | 2009-12-11 | 2016-03-02 | 埃地沃兹日本有限公司 | 螺纹槽排气部的筒形固定部件以及使用该部件的真空泵 |
CN103857918B (zh) * | 2011-10-31 | 2016-08-24 | 埃地沃兹日本有限公司 | 固定部件及真空泵 |
GB2498816A (en) | 2012-01-27 | 2013-07-31 | Edwards Ltd | Vacuum pump |
JP6353195B2 (ja) * | 2013-05-09 | 2018-07-04 | エドワーズ株式会社 | 固定円板および真空ポンプ |
DE102013213815A1 (de) * | 2013-07-15 | 2015-01-15 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE102013214662A1 (de) | 2013-07-26 | 2015-01-29 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
JP6616560B2 (ja) * | 2013-11-28 | 2019-12-04 | エドワーズ株式会社 | 真空ポンプ用部品、および複合型真空ポンプ |
JP6692635B2 (ja) * | 2015-12-09 | 2020-05-13 | エドワーズ株式会社 | 連結型ネジ溝スペーサ、および真空ポンプ |
JP7108377B2 (ja) * | 2017-02-08 | 2022-07-28 | エドワーズ株式会社 | 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法 |
IT201700075054A1 (it) * | 2017-07-04 | 2017-10-04 | Agilent Tech Inc A Delaware Corporation | Stadio di pompaggio molecolare per pompa da vuoto e pompa da vuoto comprendente detto stadio di pompaggio molecolare |
GB2569314A (en) * | 2017-12-12 | 2019-06-19 | Edwards Ltd | A turbomolecular pump and method and apparatus for controlling the pressure in a process chamber |
GB2575450B (en) * | 2018-07-09 | 2022-01-26 | Edwards Ltd | A variable inlet conductance vacuum pump, vacuum pump arrangement and method |
JP2020186687A (ja) * | 2019-05-15 | 2020-11-19 | エドワーズ株式会社 | 真空ポンプとそのネジ溝ポンプ部の固定部品 |
JP7348753B2 (ja) * | 2019-05-31 | 2023-09-21 | エドワーズ株式会社 | 真空ポンプ、および連結型ネジ溝スペーサ |
GB2589151A (en) * | 2019-11-25 | 2021-05-26 | Edwards Ltd | Molecular drag vacuum pump |
JP2022143507A (ja) * | 2021-03-17 | 2022-10-03 | エドワーズ株式会社 | 真空ポンプ |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE239213C (de) * | ||||
GB336001A (en) * | 1929-07-09 | 1930-10-09 | Edwin Rodolph Grote | Improvements in pumps for obtaining high vacua |
US1942139A (en) * | 1930-12-26 | 1934-01-02 | Central Scientific Co | Molecular vacuum pump |
US1975568A (en) * | 1932-03-18 | 1934-10-02 | Central Scientific Co | Molecular vacuum pump |
FR1443239A (fr) * | 1965-05-05 | 1966-06-24 | Pompe à vide mécanique rotative | |
US4090815A (en) * | 1975-12-03 | 1978-05-23 | Aisin Seiki Kabushiki Kaisha | High vacuum pump |
EP0445855A1 (de) * | 1990-03-09 | 1991-09-11 | VARIAN S.p.A. | Verbesserte Turbomolekularpumpe |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3104802A (en) * | 1963-09-24 | Unified system vacuum pump | ||
SU528388A1 (ru) * | 1965-06-25 | 1976-09-15 | Институт Металлургии Имени А.А.Байкова Ан Ссср | Молекул рный вакуумный насос |
FR2161179A5 (de) * | 1971-11-16 | 1973-07-06 | Cit Alcatel | |
US3969039A (en) * | 1974-08-01 | 1976-07-13 | American Optical Corporation | Vacuum pump |
DE3239328C2 (de) * | 1982-10-23 | 1993-12-23 | Pfeiffer Vakuumtechnik | Magnetisch gelagerte Turbomolekularpumpe mit Schwingungsdämpfung |
JPS60116895A (ja) * | 1983-11-30 | 1985-06-24 | Hitachi Ltd | 真空ポンプ |
JPS60116896A (ja) * | 1983-11-30 | 1985-06-24 | Hitachi Ltd | 真空ポンプ |
JPS60125795A (ja) * | 1983-12-09 | 1985-07-05 | Osaka Shinku Kiki Seisakusho:Kk | 複合真空ポンプ |
JPS60139098U (ja) * | 1984-02-24 | 1985-09-13 | セイコ−精機株式会社 | 組合せ型軸流分子ポンプ |
US4732529A (en) * | 1984-02-29 | 1988-03-22 | Shimadzu Corporation | Turbomolecular pump |
SU1285198A1 (ru) * | 1985-01-04 | 1987-01-23 | Предприятие П/Я А-1614 | Двухступенчатый турбомолекул рный вакуумный насос |
JPS61226596A (ja) * | 1985-03-29 | 1986-10-08 | Hitachi Ltd | タ−ボ分子ポンプ |
JPS6385291A (ja) * | 1986-09-29 | 1988-04-15 | Hitachi Ltd | 真空ポンプ |
DE3922782A1 (de) * | 1988-07-12 | 1990-02-08 | Beijing Lab Of Vacuum Physics | Molekularpumpe in kombinierter bauart |
DE3919529C2 (de) * | 1988-07-13 | 1994-09-29 | Osaka Vacuum Ltd | Vakuumpumpe |
US5219269A (en) * | 1988-07-13 | 1993-06-15 | Osaka Vacuum, Ltd. | Vacuum pump |
US5358373A (en) * | 1992-04-29 | 1994-10-25 | Varian Associates, Inc. | High performance turbomolecular vacuum pumps |
-
1993
- 1993-05-03 DE DE4314418A patent/DE4314418A1/de not_active Ceased
-
1994
- 1994-03-31 WO PCT/EP1994/001011 patent/WO1994025760A1/de active IP Right Grant
- 1994-03-31 DE DE59409375T patent/DE59409375D1/de not_active Expired - Fee Related
- 1994-03-31 US US08/545,646 patent/US5695316A/en not_active Expired - Fee Related
- 1994-03-31 EP EP98110191A patent/EP0874159A3/de not_active Withdrawn
- 1994-03-31 JP JP6523801A patent/JPH08511071A/ja active Pending
- 1994-03-31 EP EP94913098A patent/EP0697069B1/de not_active Expired - Lifetime
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE239213C (de) * | ||||
GB336001A (en) * | 1929-07-09 | 1930-10-09 | Edwin Rodolph Grote | Improvements in pumps for obtaining high vacua |
US1942139A (en) * | 1930-12-26 | 1934-01-02 | Central Scientific Co | Molecular vacuum pump |
US1975568A (en) * | 1932-03-18 | 1934-10-02 | Central Scientific Co | Molecular vacuum pump |
FR1443239A (fr) * | 1965-05-05 | 1966-06-24 | Pompe à vide mécanique rotative | |
US4090815A (en) * | 1975-12-03 | 1978-05-23 | Aisin Seiki Kabushiki Kaisha | High vacuum pump |
EP0445855A1 (de) * | 1990-03-09 | 1991-09-11 | VARIAN S.p.A. | Verbesserte Turbomolekularpumpe |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101517240B (zh) * | 2006-09-22 | 2013-08-14 | 爱德华兹有限公司 | 分子拖曳泵送机构 |
Also Published As
Publication number | Publication date |
---|---|
JPH08511071A (ja) | 1996-11-19 |
DE59409375D1 (de) | 2000-06-29 |
EP0874159A2 (de) | 1998-10-28 |
EP0697069A1 (de) | 1996-02-21 |
EP0697069B1 (de) | 2000-05-24 |
WO1994025760A1 (de) | 1994-11-10 |
US5695316A (en) | 1997-12-09 |
DE4314418A1 (de) | 1994-11-10 |
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