EP0874159A3 - Friction vacuum pump with Gaede pump stage - Google Patents
Friction vacuum pump with Gaede pump stage Download PDFInfo
- Publication number
- EP0874159A3 EP0874159A3 EP98110191A EP98110191A EP0874159A3 EP 0874159 A3 EP0874159 A3 EP 0874159A3 EP 98110191 A EP98110191 A EP 98110191A EP 98110191 A EP98110191 A EP 98110191A EP 0874159 A3 EP0874159 A3 EP 0874159A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- projection
- stage
- stator
- pump
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Die Erfindung betrifft eine Reibungsvakuumpumpe mit einem Rotor (8, 10) und einem Stator (4) sowie mit einer Gaedepumpenstufe, die von einem Statorabschnitt (60) und einem Rotorabschnitt (15, 57) gebildet wird; um bei einer Reibungsvakuumpumpe dieser Art im Übergangsbereich zwischen molekularer und viskoser Strömung gute Fördereigenschaften zu erzielen, wird vorgeschlagen, dass der Statorabschnitt in Höhe der Gaedepumpenstufe mit einer Nut (63, 71, 72) ausgerüstet ist, die von radial einwärts gerichteten Stegen (61, 62) oder von Statorringscheiben (16) seitlich begrenzt ist, dass in die Nut (63, 71, 72) mindestens ein feststehender Vorsprung (65, 75, 76) hineinragt, der mit dem Rotorabschnitt (17, 57) einen Sperrspalt (66, 79) bildet, und dass sich Einlass (19, 64) und Auslass (67) der Gaedepumpenstufe in der Nähe des Vorsprungs (65, 75, 76) befinden, und zwar derart, dass sich der Einlass - in Drehrichtung des Rotorabschnittes (17, 57) gesehen - hinter dem Vorsprung (65, 75, 76) und der Auslass (67) vor dem Vorsprung (65, 75, 76) befindet. The invention relates to a friction vacuum pump with a rotor (8, 10) and a stator (4) and with a gate pump stage which is formed by a stator section (60) and a rotor section (15, 57); In order to achieve good delivery properties in the case of a friction vacuum pump of this type in the transition region between molecular and viscous flow, it is proposed that the stator section at the level of the Gaedepump stage be equipped with a groove (63, 71, 72) which is provided by webs (61, 62) or laterally delimited by stator ring disks (16) that at least one fixed projection (65, 75, 76) projects into the groove (63, 71, 72), which with the rotor section (17, 57) has a locking gap (66, 79), and that the inlet (19, 64) and outlet (67) of the gate pump stage are in the vicinity of the projection (65, 75, 76), in such a way that the inlet - in the direction of rotation of the rotor section (17, 57) seen - behind the projection (65, 75, 76) and the outlet (67) in front of the projection (65, 75, 76).
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4314418 | 1993-05-03 | ||
DE4314418A DE4314418A1 (en) | 1993-05-03 | 1993-05-03 | Friction vacuum pump with differently designed pump sections |
EP94913098A EP0697069B1 (en) | 1993-05-03 | 1994-03-31 | Friction vacuum pump with pump sections of different designs |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP94913098A Division EP0697069B1 (en) | 1993-05-03 | 1994-03-31 | Friction vacuum pump with pump sections of different designs |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0874159A2 EP0874159A2 (en) | 1998-10-28 |
EP0874159A3 true EP0874159A3 (en) | 1998-11-18 |
Family
ID=6486923
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP98110191A Withdrawn EP0874159A3 (en) | 1993-05-03 | 1994-03-31 | Friction vacuum pump with Gaede pump stage |
EP94913098A Expired - Lifetime EP0697069B1 (en) | 1993-05-03 | 1994-03-31 | Friction vacuum pump with pump sections of different designs |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP94913098A Expired - Lifetime EP0697069B1 (en) | 1993-05-03 | 1994-03-31 | Friction vacuum pump with pump sections of different designs |
Country Status (5)
Country | Link |
---|---|
US (1) | US5695316A (en) |
EP (2) | EP0874159A3 (en) |
JP (1) | JPH08511071A (en) |
DE (2) | DE4314418A1 (en) |
WO (1) | WO1994025760A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101517240B (en) * | 2006-09-22 | 2013-08-14 | 爱德华兹有限公司 | Molecular drag pumping mechanism |
Families Citing this family (54)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9318801D0 (en) * | 1993-09-10 | 1993-10-27 | Boc Group Plc | Improved vacuum pumps |
US5496149A (en) * | 1995-03-10 | 1996-03-05 | Basf Corporation | Thin plate turbine |
DE29516599U1 (en) * | 1995-10-20 | 1995-12-07 | Leybold AG, 50968 Köln | Friction vacuum pump with intermediate inlet |
IT1281025B1 (en) * | 1995-11-10 | 1998-02-11 | Varian Spa | TURBOMOLECULAR PUMP. |
DE19632874A1 (en) * | 1996-08-16 | 1998-02-19 | Leybold Vakuum Gmbh | Friction vacuum pump |
WO1999061799A1 (en) * | 1998-05-26 | 1999-12-02 | Leybold Vakuum Gmbh | Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump |
TW504548B (en) * | 1998-06-30 | 2002-10-01 | Ebara Corp | Turbo molecular pump |
JP3788558B2 (en) * | 1999-03-23 | 2006-06-21 | 株式会社荏原製作所 | Turbo molecular pump |
US6179573B1 (en) * | 1999-03-24 | 2001-01-30 | Varian, Inc. | Vacuum pump with inverted motor |
JP4104098B2 (en) * | 1999-03-31 | 2008-06-18 | エドワーズ株式会社 | Vacuum pump |
US6220824B1 (en) * | 1999-06-21 | 2001-04-24 | Varian, Inc. | Self-propelled vacuum pump |
DE59909182D1 (en) * | 1999-07-19 | 2004-05-19 | Sterling Fluid Sys Gmbh | Displacement machine for compressible media |
DE19942410A1 (en) * | 1999-09-06 | 2001-03-08 | Pfeiffer Vacuum Gmbh | Vacuum pump |
US6382249B1 (en) * | 1999-10-04 | 2002-05-07 | Ebara Corporation | Vacuum exhaust system |
US6508631B1 (en) | 1999-11-18 | 2003-01-21 | Mks Instruments, Inc. | Radial flow turbomolecular vacuum pump |
US6394747B1 (en) | 2000-06-21 | 2002-05-28 | Varian, Inc. | Molecular drag vacuum pumps |
JP3777498B2 (en) * | 2000-06-23 | 2006-05-24 | 株式会社荏原製作所 | Turbo molecular pump |
DE10046766A1 (en) * | 2000-09-21 | 2002-04-11 | Leybold Vakuum Gmbh | Compound-friction vacuum pump |
JP2002138987A (en) | 2000-10-31 | 2002-05-17 | Seiko Instruments Inc | Vacuum pump |
US6503050B2 (en) * | 2000-12-18 | 2003-01-07 | Applied Materials Inc. | Turbo-molecular pump having enhanced pumping capacity |
US6607351B1 (en) * | 2002-03-12 | 2003-08-19 | Varian, Inc. | Vacuum pumps with improved impeller configurations |
GB0409139D0 (en) | 2003-09-30 | 2004-05-26 | Boc Group Plc | Vacuum pump |
DE10353034A1 (en) * | 2003-11-13 | 2005-06-09 | Leybold Vakuum Gmbh | Multi-stage friction vacuum pump |
DE10357546A1 (en) * | 2003-12-10 | 2005-07-07 | Pfeiffer Vacuum Gmbh | Side channel pump stage |
GB0614928D0 (en) * | 2006-07-27 | 2006-09-06 | Boc Group Plc | Molecular Drag Pumping Mechanism |
US20080056886A1 (en) * | 2006-08-31 | 2008-03-06 | Varian, S.P.A. | Vacuum pumps with improved pumping channel cross sections |
US7628577B2 (en) † | 2006-08-31 | 2009-12-08 | Varian, S.P.A. | Vacuum pumps with improved pumping channel configurations |
DE102006043327A1 (en) * | 2006-09-15 | 2008-03-27 | Oerlikon Leybold Vacuum Gmbh | vacuum pump |
JP4885000B2 (en) * | 2007-02-13 | 2012-02-29 | 株式会社ニューフレアテクノロジー | Vapor growth apparatus and vapor growth method |
JP5056152B2 (en) * | 2007-05-15 | 2012-10-24 | 株式会社島津製作所 | Turbo molecular pump |
DE102008004297A1 (en) * | 2008-01-15 | 2009-07-16 | Oerlikon Leybold Vacuum Gmbh | Turbo molecular pump |
US8087907B2 (en) * | 2008-03-26 | 2012-01-03 | Ebara Corporation | Turbo vacuum pump |
US8109744B2 (en) * | 2008-03-26 | 2012-02-07 | Ebara Corporation | Turbo vacuum pump |
US8070419B2 (en) * | 2008-12-24 | 2011-12-06 | Agilent Technologies, Inc. | Spiral pumping stage and vacuum pump incorporating such pumping stage |
US8152442B2 (en) * | 2008-12-24 | 2012-04-10 | Agilent Technologies, Inc. | Centripetal pumping stage and vacuum pump incorporating such pumping stage |
JP2010174779A (en) * | 2009-01-30 | 2010-08-12 | Hitachi High-Technologies Corp | Vacuum process device |
JP5397138B2 (en) * | 2009-10-02 | 2014-01-22 | 株式会社島津製作所 | Turbo molecular pump |
GB2474507B (en) * | 2009-10-19 | 2016-01-27 | Edwards Ltd | Vacuum pump |
CN102667169B (en) * | 2009-12-11 | 2016-03-02 | 埃地沃兹日本有限公司 | The tubular fixed component of thread groove exhaust portion and use the vacuum pump of these parts |
EP2775148B1 (en) * | 2011-10-31 | 2019-03-27 | Edwards Japan Limited | Stationary member and vacuum pump |
GB2498816A (en) | 2012-01-27 | 2013-07-31 | Edwards Ltd | Vacuum pump |
JP6353195B2 (en) * | 2013-05-09 | 2018-07-04 | エドワーズ株式会社 | Fixed disk and vacuum pump |
DE102013213815A1 (en) * | 2013-07-15 | 2015-01-15 | Pfeiffer Vacuum Gmbh | vacuum pump |
DE102013214662A1 (en) * | 2013-07-26 | 2015-01-29 | Pfeiffer Vacuum Gmbh | vacuum pump |
JP6616560B2 (en) * | 2013-11-28 | 2019-12-04 | エドワーズ株式会社 | Vacuum pump parts and composite vacuum pump |
JP6692635B2 (en) * | 2015-12-09 | 2020-05-13 | エドワーズ株式会社 | Connectable thread groove spacer and vacuum pump |
JP7108377B2 (en) * | 2017-02-08 | 2022-07-28 | エドワーズ株式会社 | Vacuum pumps, rotating parts of vacuum pumps, and unbalance correction methods |
IT201700075054A1 (en) * | 2017-07-04 | 2017-10-04 | Agilent Tech Inc A Delaware Corporation | Molecular pumping stage for vacuum pump and vacuum pump comprising said molecular pumping stage |
GB2569314A (en) * | 2017-12-12 | 2019-06-19 | Edwards Ltd | A turbomolecular pump and method and apparatus for controlling the pressure in a process chamber |
GB2575450B (en) * | 2018-07-09 | 2022-01-26 | Edwards Ltd | A variable inlet conductance vacuum pump, vacuum pump arrangement and method |
JP2020186687A (en) * | 2019-05-15 | 2020-11-19 | エドワーズ株式会社 | Vacuum pump and stationary component for screw groove pump part |
JP7348753B2 (en) * | 2019-05-31 | 2023-09-21 | エドワーズ株式会社 | Vacuum pump and connected thread groove spacer |
GB2589151A (en) * | 2019-11-25 | 2021-05-26 | Edwards Ltd | Molecular drag vacuum pump |
JP2022143507A (en) * | 2021-03-17 | 2022-10-03 | エドワーズ株式会社 | Vacuum pump |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE239213C (en) * | ||||
GB336001A (en) * | 1929-07-09 | 1930-10-09 | Edwin Rodolph Grote | Improvements in pumps for obtaining high vacua |
US1942139A (en) * | 1930-12-26 | 1934-01-02 | Central Scientific Co | Molecular vacuum pump |
US1975568A (en) * | 1932-03-18 | 1934-10-02 | Central Scientific Co | Molecular vacuum pump |
FR1443239A (en) * | 1965-05-05 | 1966-06-24 | Mechanical rotary vacuum pump | |
US4090815A (en) * | 1975-12-03 | 1978-05-23 | Aisin Seiki Kabushiki Kaisha | High vacuum pump |
EP0445855A1 (en) * | 1990-03-09 | 1991-09-11 | VARIAN S.p.A. | Improved turbomolecular pump |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3104802A (en) * | 1963-09-24 | Unified system vacuum pump | ||
SU528388A1 (en) * | 1965-06-25 | 1976-09-15 | Институт Металлургии Имени А.А.Байкова Ан Ссср | Molecular Vacuum Pump |
FR2161179A5 (en) * | 1971-11-16 | 1973-07-06 | Cit Alcatel | |
US3969039A (en) * | 1974-08-01 | 1976-07-13 | American Optical Corporation | Vacuum pump |
DE3239328C2 (en) * | 1982-10-23 | 1993-12-23 | Pfeiffer Vakuumtechnik | Magnetically mounted turbomolecular pump with vibration damping |
JPS60116896A (en) * | 1983-11-30 | 1985-06-24 | Hitachi Ltd | Vacuum pump |
JPS60116895A (en) * | 1983-11-30 | 1985-06-24 | Hitachi Ltd | Vacuum pump |
JPS60125795A (en) * | 1983-12-09 | 1985-07-05 | Osaka Shinku Kiki Seisakusho:Kk | Composite vacuum pump |
JPS60139098U (en) * | 1984-02-24 | 1985-09-13 | セイコ−精機株式会社 | Combined axial flow molecular pump |
US4732529A (en) * | 1984-02-29 | 1988-03-22 | Shimadzu Corporation | Turbomolecular pump |
SU1285198A1 (en) * | 1985-01-04 | 1987-01-23 | Предприятие П/Я А-1614 | Two-stage turbomolecular vacuum pump |
JPS61226596A (en) * | 1985-03-29 | 1986-10-08 | Hitachi Ltd | Turbo particle pump |
JPS6385291A (en) * | 1986-09-29 | 1988-04-15 | Hitachi Ltd | Vacuum pump |
DE3922782A1 (en) * | 1988-07-12 | 1990-02-08 | Beijing Lab Of Vacuum Physics | Molecular pump in a unit design |
DE3919529C2 (en) * | 1988-07-13 | 1994-09-29 | Osaka Vacuum Ltd | Vacuum pump |
US5219269A (en) * | 1988-07-13 | 1993-06-15 | Osaka Vacuum, Ltd. | Vacuum pump |
US5358373A (en) * | 1992-04-29 | 1994-10-25 | Varian Associates, Inc. | High performance turbomolecular vacuum pumps |
-
1993
- 1993-05-03 DE DE4314418A patent/DE4314418A1/en not_active Ceased
-
1994
- 1994-03-31 DE DE59409375T patent/DE59409375D1/en not_active Expired - Fee Related
- 1994-03-31 US US08/545,646 patent/US5695316A/en not_active Expired - Fee Related
- 1994-03-31 WO PCT/EP1994/001011 patent/WO1994025760A1/en active IP Right Grant
- 1994-03-31 EP EP98110191A patent/EP0874159A3/en not_active Withdrawn
- 1994-03-31 JP JP6523801A patent/JPH08511071A/en active Pending
- 1994-03-31 EP EP94913098A patent/EP0697069B1/en not_active Expired - Lifetime
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE239213C (en) * | ||||
GB336001A (en) * | 1929-07-09 | 1930-10-09 | Edwin Rodolph Grote | Improvements in pumps for obtaining high vacua |
US1942139A (en) * | 1930-12-26 | 1934-01-02 | Central Scientific Co | Molecular vacuum pump |
US1975568A (en) * | 1932-03-18 | 1934-10-02 | Central Scientific Co | Molecular vacuum pump |
FR1443239A (en) * | 1965-05-05 | 1966-06-24 | Mechanical rotary vacuum pump | |
US4090815A (en) * | 1975-12-03 | 1978-05-23 | Aisin Seiki Kabushiki Kaisha | High vacuum pump |
EP0445855A1 (en) * | 1990-03-09 | 1991-09-11 | VARIAN S.p.A. | Improved turbomolecular pump |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101517240B (en) * | 2006-09-22 | 2013-08-14 | 爱德华兹有限公司 | Molecular drag pumping mechanism |
Also Published As
Publication number | Publication date |
---|---|
DE59409375D1 (en) | 2000-06-29 |
WO1994025760A1 (en) | 1994-11-10 |
EP0697069A1 (en) | 1996-02-21 |
US5695316A (en) | 1997-12-09 |
DE4314418A1 (en) | 1994-11-10 |
EP0697069B1 (en) | 2000-05-24 |
JPH08511071A (en) | 1996-11-19 |
EP0874159A2 (en) | 1998-10-28 |
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