EP0874159A3 - Friction vacuum pump with Gaede pump stage - Google Patents

Friction vacuum pump with Gaede pump stage Download PDF

Info

Publication number
EP0874159A3
EP0874159A3 EP98110191A EP98110191A EP0874159A3 EP 0874159 A3 EP0874159 A3 EP 0874159A3 EP 98110191 A EP98110191 A EP 98110191A EP 98110191 A EP98110191 A EP 98110191A EP 0874159 A3 EP0874159 A3 EP 0874159A3
Authority
EP
European Patent Office
Prior art keywords
projection
stage
stator
pump
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP98110191A
Other languages
German (de)
French (fr)
Other versions
EP0874159A2 (en
Inventor
Günter Schütz
Heinrich Engländer
Friedrich Karl Dr. Von Schulz-Hausmann
Hinrich Dr. Henning
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP0874159A2 publication Critical patent/EP0874159A2/en
Publication of EP0874159A3 publication Critical patent/EP0874159A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Die Erfindung betrifft eine Reibungsvakuumpumpe mit einem Rotor (8, 10) und einem Stator (4) sowie mit einer Gaedepumpenstufe, die von einem Statorabschnitt (60) und einem Rotorabschnitt (15, 57) gebildet wird; um bei einer Reibungsvakuumpumpe dieser Art im Übergangsbereich zwischen molekularer und viskoser Strömung gute Fördereigenschaften zu erzielen, wird vorgeschlagen, dass der Statorabschnitt in Höhe der Gaedepumpenstufe mit einer Nut (63, 71, 72) ausgerüstet ist, die von radial einwärts gerichteten Stegen (61, 62) oder von Statorringscheiben (16) seitlich begrenzt ist, dass in die Nut (63, 71, 72) mindestens ein feststehender Vorsprung (65, 75, 76) hineinragt, der mit dem Rotorabschnitt (17, 57) einen Sperrspalt (66, 79) bildet, und dass sich Einlass (19, 64) und Auslass (67) der Gaedepumpenstufe in der Nähe des Vorsprungs (65, 75, 76) befinden, und zwar derart, dass sich der Einlass - in Drehrichtung des Rotorabschnittes (17, 57) gesehen - hinter dem Vorsprung (65, 75, 76) und der Auslass (67) vor dem Vorsprung (65, 75, 76) befindet.

Figure 00000001
The invention relates to a friction vacuum pump with a rotor (8, 10) and a stator (4) and with a gate pump stage which is formed by a stator section (60) and a rotor section (15, 57); In order to achieve good delivery properties in the case of a friction vacuum pump of this type in the transition region between molecular and viscous flow, it is proposed that the stator section at the level of the Gaedepump stage be equipped with a groove (63, 71, 72) which is provided by webs (61, 62) or laterally delimited by stator ring disks (16) that at least one fixed projection (65, 75, 76) projects into the groove (63, 71, 72), which with the rotor section (17, 57) has a locking gap (66, 79), and that the inlet (19, 64) and outlet (67) of the gate pump stage are in the vicinity of the projection (65, 75, 76), in such a way that the inlet - in the direction of rotation of the rotor section (17, 57) seen - behind the projection (65, 75, 76) and the outlet (67) in front of the projection (65, 75, 76).
Figure 00000001
EP98110191A 1993-05-03 1994-03-31 Friction vacuum pump with Gaede pump stage Withdrawn EP0874159A3 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4314418 1993-05-03
DE4314418A DE4314418A1 (en) 1993-05-03 1993-05-03 Friction vacuum pump with differently designed pump sections
EP94913098A EP0697069B1 (en) 1993-05-03 1994-03-31 Friction vacuum pump with pump sections of different designs

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP94913098A Division EP0697069B1 (en) 1993-05-03 1994-03-31 Friction vacuum pump with pump sections of different designs

Publications (2)

Publication Number Publication Date
EP0874159A2 EP0874159A2 (en) 1998-10-28
EP0874159A3 true EP0874159A3 (en) 1998-11-18

Family

ID=6486923

Family Applications (2)

Application Number Title Priority Date Filing Date
EP98110191A Withdrawn EP0874159A3 (en) 1993-05-03 1994-03-31 Friction vacuum pump with Gaede pump stage
EP94913098A Expired - Lifetime EP0697069B1 (en) 1993-05-03 1994-03-31 Friction vacuum pump with pump sections of different designs

Family Applications After (1)

Application Number Title Priority Date Filing Date
EP94913098A Expired - Lifetime EP0697069B1 (en) 1993-05-03 1994-03-31 Friction vacuum pump with pump sections of different designs

Country Status (5)

Country Link
US (1) US5695316A (en)
EP (2) EP0874159A3 (en)
JP (1) JPH08511071A (en)
DE (2) DE4314418A1 (en)
WO (1) WO1994025760A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101517240B (en) * 2006-09-22 2013-08-14 爱德华兹有限公司 Molecular drag pumping mechanism

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GB9318801D0 (en) * 1993-09-10 1993-10-27 Boc Group Plc Improved vacuum pumps
US5496149A (en) * 1995-03-10 1996-03-05 Basf Corporation Thin plate turbine
DE29516599U1 (en) * 1995-10-20 1995-12-07 Leybold AG, 50968 Köln Friction vacuum pump with intermediate inlet
IT1281025B1 (en) * 1995-11-10 1998-02-11 Varian Spa TURBOMOLECULAR PUMP.
DE19632874A1 (en) * 1996-08-16 1998-02-19 Leybold Vakuum Gmbh Friction vacuum pump
WO1999061799A1 (en) * 1998-05-26 1999-12-02 Leybold Vakuum Gmbh Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump
TW504548B (en) * 1998-06-30 2002-10-01 Ebara Corp Turbo molecular pump
JP3788558B2 (en) * 1999-03-23 2006-06-21 株式会社荏原製作所 Turbo molecular pump
US6179573B1 (en) * 1999-03-24 2001-01-30 Varian, Inc. Vacuum pump with inverted motor
JP4104098B2 (en) * 1999-03-31 2008-06-18 エドワーズ株式会社 Vacuum pump
US6220824B1 (en) * 1999-06-21 2001-04-24 Varian, Inc. Self-propelled vacuum pump
DE59909182D1 (en) * 1999-07-19 2004-05-19 Sterling Fluid Sys Gmbh Displacement machine for compressible media
DE19942410A1 (en) * 1999-09-06 2001-03-08 Pfeiffer Vacuum Gmbh Vacuum pump
US6382249B1 (en) * 1999-10-04 2002-05-07 Ebara Corporation Vacuum exhaust system
US6508631B1 (en) 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
US6394747B1 (en) 2000-06-21 2002-05-28 Varian, Inc. Molecular drag vacuum pumps
JP3777498B2 (en) * 2000-06-23 2006-05-24 株式会社荏原製作所 Turbo molecular pump
DE10046766A1 (en) * 2000-09-21 2002-04-11 Leybold Vakuum Gmbh Compound-friction vacuum pump
JP2002138987A (en) 2000-10-31 2002-05-17 Seiko Instruments Inc Vacuum pump
US6503050B2 (en) * 2000-12-18 2003-01-07 Applied Materials Inc. Turbo-molecular pump having enhanced pumping capacity
US6607351B1 (en) * 2002-03-12 2003-08-19 Varian, Inc. Vacuum pumps with improved impeller configurations
GB0409139D0 (en) 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
DE10353034A1 (en) * 2003-11-13 2005-06-09 Leybold Vakuum Gmbh Multi-stage friction vacuum pump
DE10357546A1 (en) * 2003-12-10 2005-07-07 Pfeiffer Vacuum Gmbh Side channel pump stage
GB0614928D0 (en) * 2006-07-27 2006-09-06 Boc Group Plc Molecular Drag Pumping Mechanism
US20080056886A1 (en) * 2006-08-31 2008-03-06 Varian, S.P.A. Vacuum pumps with improved pumping channel cross sections
US7628577B2 (en) † 2006-08-31 2009-12-08 Varian, S.P.A. Vacuum pumps with improved pumping channel configurations
DE102006043327A1 (en) * 2006-09-15 2008-03-27 Oerlikon Leybold Vacuum Gmbh vacuum pump
JP4885000B2 (en) * 2007-02-13 2012-02-29 株式会社ニューフレアテクノロジー Vapor growth apparatus and vapor growth method
JP5056152B2 (en) * 2007-05-15 2012-10-24 株式会社島津製作所 Turbo molecular pump
DE102008004297A1 (en) * 2008-01-15 2009-07-16 Oerlikon Leybold Vacuum Gmbh Turbo molecular pump
US8087907B2 (en) * 2008-03-26 2012-01-03 Ebara Corporation Turbo vacuum pump
US8109744B2 (en) * 2008-03-26 2012-02-07 Ebara Corporation Turbo vacuum pump
US8070419B2 (en) * 2008-12-24 2011-12-06 Agilent Technologies, Inc. Spiral pumping stage and vacuum pump incorporating such pumping stage
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage
JP2010174779A (en) * 2009-01-30 2010-08-12 Hitachi High-Technologies Corp Vacuum process device
JP5397138B2 (en) * 2009-10-02 2014-01-22 株式会社島津製作所 Turbo molecular pump
GB2474507B (en) * 2009-10-19 2016-01-27 Edwards Ltd Vacuum pump
CN102667169B (en) * 2009-12-11 2016-03-02 埃地沃兹日本有限公司 The tubular fixed component of thread groove exhaust portion and use the vacuum pump of these parts
EP2775148B1 (en) * 2011-10-31 2019-03-27 Edwards Japan Limited Stationary member and vacuum pump
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
JP6353195B2 (en) * 2013-05-09 2018-07-04 エドワーズ株式会社 Fixed disk and vacuum pump
DE102013213815A1 (en) * 2013-07-15 2015-01-15 Pfeiffer Vacuum Gmbh vacuum pump
DE102013214662A1 (en) * 2013-07-26 2015-01-29 Pfeiffer Vacuum Gmbh vacuum pump
JP6616560B2 (en) * 2013-11-28 2019-12-04 エドワーズ株式会社 Vacuum pump parts and composite vacuum pump
JP6692635B2 (en) * 2015-12-09 2020-05-13 エドワーズ株式会社 Connectable thread groove spacer and vacuum pump
JP7108377B2 (en) * 2017-02-08 2022-07-28 エドワーズ株式会社 Vacuum pumps, rotating parts of vacuum pumps, and unbalance correction methods
IT201700075054A1 (en) * 2017-07-04 2017-10-04 Agilent Tech Inc A Delaware Corporation Molecular pumping stage for vacuum pump and vacuum pump comprising said molecular pumping stage
GB2569314A (en) * 2017-12-12 2019-06-19 Edwards Ltd A turbomolecular pump and method and apparatus for controlling the pressure in a process chamber
GB2575450B (en) * 2018-07-09 2022-01-26 Edwards Ltd A variable inlet conductance vacuum pump, vacuum pump arrangement and method
JP2020186687A (en) * 2019-05-15 2020-11-19 エドワーズ株式会社 Vacuum pump and stationary component for screw groove pump part
JP7348753B2 (en) * 2019-05-31 2023-09-21 エドワーズ株式会社 Vacuum pump and connected thread groove spacer
GB2589151A (en) * 2019-11-25 2021-05-26 Edwards Ltd Molecular drag vacuum pump
JP2022143507A (en) * 2021-03-17 2022-10-03 エドワーズ株式会社 Vacuum pump

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GB336001A (en) * 1929-07-09 1930-10-09 Edwin Rodolph Grote Improvements in pumps for obtaining high vacua
US1942139A (en) * 1930-12-26 1934-01-02 Central Scientific Co Molecular vacuum pump
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FR1443239A (en) * 1965-05-05 1966-06-24 Mechanical rotary vacuum pump
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EP0445855A1 (en) * 1990-03-09 1991-09-11 VARIAN S.p.A. Improved turbomolecular pump

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DE239213C (en) *
GB336001A (en) * 1929-07-09 1930-10-09 Edwin Rodolph Grote Improvements in pumps for obtaining high vacua
US1942139A (en) * 1930-12-26 1934-01-02 Central Scientific Co Molecular vacuum pump
US1975568A (en) * 1932-03-18 1934-10-02 Central Scientific Co Molecular vacuum pump
FR1443239A (en) * 1965-05-05 1966-06-24 Mechanical rotary vacuum pump
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EP0445855A1 (en) * 1990-03-09 1991-09-11 VARIAN S.p.A. Improved turbomolecular pump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101517240B (en) * 2006-09-22 2013-08-14 爱德华兹有限公司 Molecular drag pumping mechanism

Also Published As

Publication number Publication date
DE59409375D1 (en) 2000-06-29
WO1994025760A1 (en) 1994-11-10
EP0697069A1 (en) 1996-02-21
US5695316A (en) 1997-12-09
DE4314418A1 (en) 1994-11-10
EP0697069B1 (en) 2000-05-24
JPH08511071A (en) 1996-11-19
EP0874159A2 (en) 1998-10-28

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