EP1319131A1 - Compound friction vacuum pump - Google Patents

Compound friction vacuum pump

Info

Publication number
EP1319131A1
EP1319131A1 EP01974147A EP01974147A EP1319131A1 EP 1319131 A1 EP1319131 A1 EP 1319131A1 EP 01974147 A EP01974147 A EP 01974147A EP 01974147 A EP01974147 A EP 01974147A EP 1319131 A1 EP1319131 A1 EP 1319131A1
Authority
EP
European Patent Office
Prior art keywords
stage
pump
stator
transition
turbomolecular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01974147A
Other languages
German (de)
French (fr)
Other versions
EP1319131B1 (en
Inventor
Roland Blumenthal
Stefan Hundertmark
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1319131A1 publication Critical patent/EP1319131A1/en
Application granted granted Critical
Publication of EP1319131B1 publication Critical patent/EP1319131B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes

Definitions

  • the invention relates to a friction vacuum pump with at least one turbomolecular pump stage, with a molecular pump stage adjoining it on the pressure side, and with a transition stage located between the turbomolecular pump stage and the molecular pump stage.
  • turbomolecular pumps with downstream molecular stages which are generally designed as threaded pump stages, also called compound pumps
  • the flow behavior of the pumped gases in the transition region changes from molecular (at pressures below 10 ⁇ 3 mbar) to laminar (from about 10 "2 mbar)
  • the gas When the gas is moved from the turbo stage to the threaded stage, it has to be diverted from a primarily tangential flow direction to a primarily axial flow direction
  • Known designs of this transition area have the disadvantage that flow losses occur, which considerably impair the pumping speed of the pump. From DE 297 17 079 a friction vacuum pump with the features mentioned above is known.
  • a component of the transition stage is a centrifugal pump, which is formed by webs on the rotor side that extend essentially radially.
  • This solution has the effect that the gases are directed into the thread stage; however, their promotional impact is limited.
  • the previously known solution assumes that the diameter of the threaded pump stage is larger than the diameter of the turbopump stage. It can therefore not be used in friction pumps with high pumping capacities, since the diameter of the rotor of the molecular pump stage cannot be chosen arbitrarily large because of the high centrifugal forces.
  • the content of DE-A 196 32 874 also belongs to the prior art. From this it is known to provide a filling stage which is equipped with vanes between the turbomolecular pump stage and the subsequent threaded pump stage. This solution is also difficult to manufacture. In addition, high mechanical stresses arise in the area of the base of the wing during operation.
  • the present invention is based on the object of creating a vacuum-technically optimized transition from the turbomolecular range to the molecular range, which does not have the disadvantages described. According to the invention, this object is achieved in that the transition stage is part of the stator and has a flow cross-section which essentially extends in the tangential direction and tapers continuously in the flow direction.
  • the solution according to the invention also takes into account that the flow velocity of the gases in the transition area concerned here is substantially greater in the tangential direction than in the axial direction (factor between 10 and 30). To avoid sudden changes in the flow cross-section, it is therefore advantageous to implement a tapering that extends essentially in the tangential direction, so that a tapering with a slight slope results.
  • the pitch depends on the number of blades in the transition stage and the ratio of blade length and diameter of the subsequent thread stage. The number of blades in the transition stage is determined using the same criteria as the previous turbo stages.
  • the flow openings designed according to the invention are formed in a stator ring disk, they can be manufactured in a simple manner by milling.
  • the inexpensive "forehead" can be used as the milling process, with a cylindrical tool if the blades that limit the flow cross-sections do not overlap. If the blades overlap, they can be manufactured with a milling cutter that has an enlarged diameter on the face.
  • FIGS. 1 to 7. Show it
  • FIG. 1 shows a section through a compound pump according to the invention
  • FIG. 2 shows a stator half ring designed according to the invention
  • FIG. 3 shows a plan view of a developed section of a stator half ring
  • FIG. 4 shows a section through the stator half ring according to FIG. 3,
  • Figures 5 and 6 plan views of further (developed) versions
  • FIG. 7 shows a section through the stator half ring according to FIG. 6.
  • the pump itself is denoted by 1, its inlet by 2 and its outlet by 3.
  • the housing of the pump 1 comprises the two sections 4 and 5.
  • the housing section 4 surrounds the stator 6 and the rotor 7 of the turbomolecular pump stage.
  • the stator 6 comprises schematically indicated blade half rings 8 and spacer rings 9, which together form a self-centering stator package.
  • the rotor 7 is equipped with the rotor blades 10. Only the stator half rings, the blades of which together with the last rotor blade row 10 on the pressure side form the last turbomolecular pump stage on the pressure side, are shown somewhat more precisely and are designated by 23.
  • FIG. 2 shows a perspective view of one of these stator half rings 23.
  • the housing section 4 likewise surrounds the stator 15 and the rotor 12 of the threaded pump stage, the delivery space or delivery gap of which is designated by 13.
  • the thread 14 of this stage can be arranged on the stator or rotor side. In the exemplary embodiment shown, it is arranged on the stator side and is part of a stator sleeve 15 which can be mounted independently of the housing section 4.
  • the rotor 7 of the turbomolecular pump stage 7, 8 and the rotor 12 of the threaded pump stage 11, 12 are components of a jointly rotating system 7, 12.
  • the rotor 12 of the threaded pump stage forms the pressure side end of this system and can be designed as a disc or G ⁇ Ockeniform (as shown in Figure 1).
  • the housing section 5 surrounds the drive motor 16, the stator of which is designated 17 and the rotor of which is designated 18.
  • the housing section 5 is part of a chassis 19 with an interior in which the drive motor 16 and other components are located.
  • the shaft 21, which carries the rotors 7 and 12 of the compound pump, is also mounted in the chassis 19. Only the upper bearing 22 is visible. It is a mechanical bearing that can also be replaced by a magnetic bearing. Otherwise, the chassis 19 is the carrier of all other components of the pump 1.
  • the stator half-ring 23 shown in FIG. 2 consists of a half-ring disk 24 with a plurality of through-openings 25 distributed over its circumference. These are formed by blade sections .26, which extend essentially radially and are preferably produced by milling.
  • the throughflow openings 25 are designed such that overall there is a throughflow cross section which extends essentially in the tangential direction and tapers continuously in the flow direction. This is achieved in that the length of the blade sections 26 (their radial extension) is greater on their suction side (ls) than on their pressure side (ld), i. H. that the distance between the lateral boundary surfaces 27, 28 of the throughflow openings 25 decreases in the direction of flow.
  • FIGS. 2, 3 and 4 show designs of a stator half ring 23 in which the blade sections 26 do not overlap. They allow a look through the half ring disk 23 in the axial direction (indicated by the arrow 38 in FIG. 4).
  • the blade sections can be produced by “foreheading”, specifically with a cylindrical tool 29 (cf. FIG. 4).
  • the blade sections 26 overlap one another. These designs also allow the production of the stator half rings by milling. The prerequisite is that the tool 29 has an enlarged diameter at the end (see FIG. 7).
  • the conveyor gap 13 of the threaded stage 12, 15 adjoining the turbo stages is indicated by dashed lines.
  • the conveying gaps 13 have different diameters di, d 2 and d 3 in these designs.
  • the design of the flow openings 25 according to the invention permits adaptation to different diameters of the delivery gap 13. This can be done by selecting the position of the boundary surfaces 27, 28, specifically their inclinations to the respective tangents, such that the conveying gap 13 lies approximately in the middle of the radial extensions ld of the blade sections 26 on their pressure side.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

The invention relates to a friction vacuum pump (1) comprising at least one turbomolecular pump stage, with a molecular pump stage that is subsequently connected on the pressure side, and with a transition stage mounted between the turbomolecular pump stage and the molecular pump stage. In order to improve the transition from the turbomolecular zone to the molecular zone, the transition stage has a flow section that is continuously tapered in the tangential direction.

Description

Compound-ReibungsvakuumpumpβCompound Reibungsvakuumpumpβ
Die Erfindung bezieht sich auf eine ReibungsVakuumpumpe mit mindestens einer Turbomolekularpumpenstufe, mit einer sich daran druckseitig anschließenden Molekularpumpenstufe sowie einer zwischen der Turbomolekularpumpenstufe und der Molekularpumpenstufe befindlichen Ubergangsstufe.The invention relates to a friction vacuum pump with at least one turbomolecular pump stage, with a molecular pump stage adjoining it on the pressure side, and with a transition stage located between the turbomolecular pump stage and the molecular pump stage.
Bei Turbomolekularpumpen mit nachgeschalteten, in der Regel als Gewindepumpenstufe ausgebildet Molekularstufen, auch Compoundpumpen genannt, besteht das Problem, dass sich das Strömungsverhalten der geförderten Gase im Übergangsbereich von molekular (bei Drücken kleiner 10~3 mbar) auf laminar (von etwa 10"2 mbar aufwärts) ändert. Das geförderte Gas muss bei dem Wechsel aus der Turbostufe in die Gewindestufe von einer primär tangen- tialen Strömungsrichtung in eine primär axiale Strömungsrichtung umgeleitet werden. Die radiale Ausdehnung des Strömungskanals verjüngt sich dabei beträchtlich. Auf sehr kurzer Distanz muss daher eine große Änderung des axialen Querschnittes des Förderraumes verwirklicht werden. Bekannte Gestaltungen dieses Übergangsbereichs haben den Nachteil, dass es zu Strömungsverlusten kommt. Diese beeinträchtigen in erheblichem Maße das Saugvermögen der Pumpe. Aus der DE 297 17 079 ist eine Reibungsvakuumpumpe mit den eingangs genannten Merkmalen bekannt. Bestandteil der Ubergangsstufe ist eine Zentrifugalpumpe, die von rotorseitigen, sich im wesentlichen radial erstreckenden Stegen gebildet wird. Diese Lösung hat zwar die Wirkung, dass die Gase in die Gewindestufe gelenkt werden; ihre Förderwirkung ist jedoch begrenzt. Außerdem setzt die vorbekannte Lösung voraus, dass der Durchmesser der Gewindepumpenstufe größer ist als der Durchmesser der Turbopumpenstufe. Sie ist deshalb bei Reibungspumpen mit großen Pumpleistungen nicht einsetzbar, da der Durchmesser des Rotors der Molekularpumpenstufe wegen der hohen Fliehkräfte nicht beliebig groß gewählt werden kann. Schließlich gilt für die rotorseitige Anordnung der Stege, dass ihre Fertigung aufwendig ist und dass sie in Bezug auf Materialspannungen nicht unkritisch sind.In the case of turbomolecular pumps with downstream molecular stages, which are generally designed as threaded pump stages, also called compound pumps, there is the problem that the flow behavior of the pumped gases in the transition region changes from molecular (at pressures below 10 ~ 3 mbar) to laminar (from about 10 "2 mbar) When the gas is moved from the turbo stage to the threaded stage, it has to be diverted from a primarily tangential flow direction to a primarily axial flow direction Known designs of this transition area have the disadvantage that flow losses occur, which considerably impair the pumping speed of the pump. From DE 297 17 079 a friction vacuum pump with the features mentioned above is known. A component of the transition stage is a centrifugal pump, which is formed by webs on the rotor side that extend essentially radially. This solution has the effect that the gases are directed into the thread stage; however, their promotional impact is limited. In addition, the previously known solution assumes that the diameter of the threaded pump stage is larger than the diameter of the turbopump stage. It can therefore not be used in friction pumps with high pumping capacities, since the diameter of the rotor of the molecular pump stage cannot be chosen arbitrarily large because of the high centrifugal forces. Finally, it applies to the arrangement of the webs on the rotor side that their production is complex and that they are not uncritical with regard to material stresses.
Zum Stand der Technik gehört weiterhin der Inhalt der DE-A 196 32 874. Daraus ist es bekannt, zwischen der Turbomolekularpumpenstufe und der sich daran anschließenden Gewindepumpenstufe eine Füllstufe vorzusehen, die mit Flügeln ausgerüstet ist. Auch diese Lösung ist schwierig zu fertigen. Außerdem entstehen während des Betriebs hohe mechanische Spannungen im Bereich des Fußes der Flügel .The content of DE-A 196 32 874 also belongs to the prior art. From this it is known to provide a filling stage which is equipped with vanes between the turbomolecular pump stage and the subsequent threaded pump stage. This solution is also difficult to manufacture. In addition, high mechanical stresses arise in the area of the base of the wing during operation.
Der vorliegenden Erfindung liegt die Aufgabe zu Grunde, einen vakuumtechnisch optimierten Übergang des Turbomolekularbereichs zum Molekularbereich zu schaffen, dem die geschilderten Nachteile nicht anhaften. Erfindungsgemäß wird diese Aufgabe dadurch gelöst, dass die Ubergangsstufe Bestandteil des Stators ist und einen sich im wesentlichen in tangentialer Richtung erstreckenden, kontinuierlich in Strömungsrichtung verjüngenden Durchströmungsquerschnitt aufweist.The present invention is based on the object of creating a vacuum-technically optimized transition from the turbomolecular range to the molecular range, which does not have the disadvantages described. According to the invention, this object is achieved in that the transition stage is part of the stator and has a flow cross-section which essentially extends in the tangential direction and tapers continuously in the flow direction.
Durch die Verlagerung der Ubergangsstufe in den Stator wird erreicht, dass ihre Gestaltung frei von den Werkstoff-Problemen ist, die bei einer rotorseitigen Anordnung der Ubergangsstufe wegen der auftretenden Fliehkräfte zu beachten sind. Die erfindungsgemäße Lösung berücksichtigt außerdem, dass die Strömungsgeschwindigkeit der Gase im hier betroffenen Übergangsbereich in tangentialer Richtung wesentlich größer ist als in axialer Richtung (Faktor zwischen 10 und 30) . Zur Vermeidung sprunghafter Änderungen des Durchströmungsquerschnittes ist es deshalb vorteilhaft, eine sich im wesentlichen in tangentialer Richtung erstreckende Verjüngung zu realisieren, so dass sich eine Verjüngung mit geringer Steigung ergibt. Die Steigung ist abhängig von der Schaufelanzahl der Ubergangsstufe sowie dem Verhältnis aus Schaufellänge und Durchmesser der sich anschließenden Gewindestufe. Die Schaufelanzahl der Ü- bergangsstufe wird anhand der gleichen Kriterien wie die vorhergehenden Turbostufen bestimmt.By shifting the transition stage into the stator, it is achieved that its design is free of the material problems that have to be taken into account in a rotor-side arrangement of the transition stage because of the centrifugal forces that occur. The solution according to the invention also takes into account that the flow velocity of the gases in the transition area concerned here is substantially greater in the tangential direction than in the axial direction (factor between 10 and 30). To avoid sudden changes in the flow cross-section, it is therefore advantageous to implement a tapering that extends essentially in the tangential direction, so that a tapering with a slight slope results. The pitch depends on the number of blades in the transition stage and the ratio of blade length and diameter of the subsequent thread stage. The number of blades in the transition stage is determined using the same criteria as the previous turbo stages.
Dadurch wird eine Erhöhung der Pumpenleistung erreicht. Die Strömungsverluste werden vermindert.This increases the pump output. The flow losses are reduced.
Sind die erfindungsgemäß gestalteten Durchströmöffnungen in einer Statorringscheibe ausgebildet, so lassen sich diese in einfacher Weise durch Fräsen fertigen. Als Fräsverfahren kann das kostengünstige "Stirnen" eingesetzt werden, und zwar mit einem zylindrischen Werkzeug, wenn sich die Schaufeln, die die Durchströmquerschnitte begrenzen, nicht überlappen. Überlappen sich die Schaufeln, kann die Herstellung mit einem Fräser erfolgen, der stirnseitig einen vergrößerten Durchmesser hat.If the flow openings designed according to the invention are formed in a stator ring disk, they can be manufactured in a simple manner by milling. The inexpensive "forehead" can be used as the milling process, with a cylindrical tool if the blades that limit the flow cross-sections do not overlap. If the blades overlap, they can be manufactured with a milling cutter that has an enlarged diameter on the face.
Weitere Vorteile und Einzelheiten der Erfindung sollen an Hand von in den Figuren 1 bis 7 schematisch dargestellten Ausführungsbeispielen erläutert werden. Es zeigenFurther advantages and details of the invention will be explained with reference to exemplary embodiments schematically illustrated in FIGS. 1 to 7. Show it
II
Figur 1 einen Schnitt durch eine Compoundpumpe nach der Erfindung,FIG. 1 shows a section through a compound pump according to the invention,
Figur 2 einen erfindungsgemäß ausgebildeten Statorhalbring,FIG. 2 shows a stator half ring designed according to the invention,
Figur 3 eine Draufsicht auf einen abgewickelten Abschnitt eines Statorhalbringes,FIG. 3 shows a plan view of a developed section of a stator half ring,
Figur 4 einen Schnitt durch den Statorhalbring nach Figur 3,FIG. 4 shows a section through the stator half ring according to FIG. 3,
Figuren 5 und 6 Draufsichten auf weitere (abgewickelte) Ausführungen undFigures 5 and 6 plan views of further (developed) versions and
Figur 7 einen Schnitt durch den Statorhalbring nach Figur 6. Beim Ausführungsbeispiel nach Figur 1 sind die Pumpe selbst mit 1, ihr Einlass mit 2 und ihr Auslass mit 3 bezeichnet. Das Gehäuse der Pumpe 1 umfasst die beiden Abschnitte 4 und 5.FIG. 7 shows a section through the stator half ring according to FIG. 6. In the exemplary embodiment according to FIG. 1, the pump itself is denoted by 1, its inlet by 2 and its outlet by 3. The housing of the pump 1 comprises the two sections 4 and 5.
Der Gehäuseabschnitt 4 umgibt den Stator 6 und den Rotor 7 der Turbomolekularpumpenstufe. Der Stator 6 umfasst schematisch angedeutete Schaufelhalbringe 8 sowie Distanzringe 9, die zusammen ein sich selbst zentrierendes Statorpaket bilden. Der Rotor 7 ist mit den Rotorschaufeln 10 ausgerüstet. Nur die Statorhalbringe, deren Schaufeln zusammen mit der druckseitig letzten Rotorschaufelreihe 10 die druckseitig letzte Turbomle- kularpumpenstufe bilden, sind etwas genauer dargestellt und mit 23 bezeichnet. Figur 2 zeigt eine perspektivische Ansicht eines dieser Statorhalbringe 23.The housing section 4 surrounds the stator 6 and the rotor 7 of the turbomolecular pump stage. The stator 6 comprises schematically indicated blade half rings 8 and spacer rings 9, which together form a self-centering stator package. The rotor 7 is equipped with the rotor blades 10. Only the stator half rings, the blades of which together with the last rotor blade row 10 on the pressure side form the last turbomolecular pump stage on the pressure side, are shown somewhat more precisely and are designated by 23. FIG. 2 shows a perspective view of one of these stator half rings 23.
Der Gehäuseabschnitt 4 umgibt ebenfalls den Stator 15 und den Rotor 12 der Gewindepumpenstufe, deren Förderraum bzw. Förderspalt mit 13 bezeichnet ist. Das Gewinde 14 dieser Stufe kann Stator- oder rotorseitig angeordnet sein. Beim dargestellten Ausführungsbeispiel ist es statorseitig angeordnet und Bestandteil einer unabhängig vom Gehäuseabschnitt 4 montierbaren Statorhülse 15. Der Rotor 7 der Turbomolekularpumpenstufe 7, 8 und der Rotor 12 der Gewindepumpenstufe 11, 12 sind Bestandteile eines gemeinsam rotierenden Systems 7 , 12. Der Rotor 12 der Gewindepumpenstufe bildet das druckseitige Ende dieses Systems und kann als Scheibe oder gϊOckenförmig (wie in Figur 1 dargestellt) ausgebildet sein. Der Gehäuseabschnitt 5 umgibt den Antriebsmotor 16, dessen Stator mit 17 und dessen Rotor mit 18 bezeichnet sind. Der Gehäuseabschnitt 5 ist Bestandteil eines Chassis 19 mit einem Innenraum, in dem sich der Antriebsmotor 16 und weitere Bauteile befinden. Im Chassis 19 ist auch die die Rotoren 7 und 12 der Compound- pumpe tragende Welle 21 gelagert. Nur das obere Lager 22 ist sichtbar. Es ist ein mechanisches Lager, das auch durch ein Magnetlager ersetzt werden kann. Im übrigen ist das Chassis 19 Träger aller weiteren Bauteile der Pumpe 1.The housing section 4 likewise surrounds the stator 15 and the rotor 12 of the threaded pump stage, the delivery space or delivery gap of which is designated by 13. The thread 14 of this stage can be arranged on the stator or rotor side. In the exemplary embodiment shown, it is arranged on the stator side and is part of a stator sleeve 15 which can be mounted independently of the housing section 4. The rotor 7 of the turbomolecular pump stage 7, 8 and the rotor 12 of the threaded pump stage 11, 12 are components of a jointly rotating system 7, 12. The rotor 12 of the threaded pump stage forms the pressure side end of this system and can be designed as a disc or GϊOckeniform (as shown in Figure 1). The housing section 5 surrounds the drive motor 16, the stator of which is designated 17 and the rotor of which is designated 18. The housing section 5 is part of a chassis 19 with an interior in which the drive motor 16 and other components are located. The shaft 21, which carries the rotors 7 and 12 of the compound pump, is also mounted in the chassis 19. Only the upper bearing 22 is visible. It is a mechanical bearing that can also be replaced by a magnetic bearing. Otherwise, the chassis 19 is the carrier of all other components of the pump 1.
Der in Figur 2 dargestellte Statorhalbring 23 besteht aus einer Halbringscheibe 24 mit einer Mehrzahl auf ihrem Umfang verteilt angeordneten Durchströmöffnungen 25. Diese werden gebildet von Schaufelabschnitten .26, die sich im wesentlichen radial erstrecken und vorzugsweise durch Fräsen gefertigt sind. Die Durchströmöffnungen 25 sind derart gestaltet, dass sich insgesamt ein sich im wesentlichen in tangentialer Richtung erstreckender, kontinuierlich in Strömungsrichtung verjüngender Durchströmquerschnitt ergibt. Dieses wird dadurch erreicht, dass die Länge der Schaufelabschnitte 26 (ihre radiale Erstreckung) auf ihrer Saugseite (ls) größer ist als auf ihrer Druckseite (ld) , d. h. , dass der Abstand der seitlichen Begrenzungsflächen 27, 28 der Durchströmöffnungen 25 in Strömungsrichtung abnimmt.The stator half-ring 23 shown in FIG. 2 consists of a half-ring disk 24 with a plurality of through-openings 25 distributed over its circumference. These are formed by blade sections .26, which extend essentially radially and are preferably produced by milling. The throughflow openings 25 are designed such that overall there is a throughflow cross section which extends essentially in the tangential direction and tapers continuously in the flow direction. This is achieved in that the length of the blade sections 26 (their radial extension) is greater on their suction side (ls) than on their pressure side (ld), i. H. that the distance between the lateral boundary surfaces 27, 28 of the throughflow openings 25 decreases in the direction of flow.
Die Figuren 2, 3 und 4 zeigen Ausführungen eines Statorhalbringes 23, bei denen sich die Schaufelabschnitte 26 nicht überlappen. Sie erlauben eine Durchsicht durch die Halbringscheibe 23 in axialer Richtung (angedeutet durch den Pfeil 38 in Figur 4) . Bei Statorhalbringen dieser Art können die Schaufelabschnitte durch "Stirnen" hergestellt werden, und zwar mit einem zylindrisch ausgebildeten Werkzeug 29 (vgl. Fig. 4).FIGS. 2, 3 and 4 show designs of a stator half ring 23 in which the blade sections 26 do not overlap. They allow a look through the half ring disk 23 in the axial direction (indicated by the arrow 38 in FIG. 4). In the case of stator half rings of this type, the blade sections can be produced by “foreheading”, specifically with a cylindrical tool 29 (cf. FIG. 4).
Bei den Ausführungen nach den Figuren 5 bis 7 überlappen die Schaufelabschnitte 26 einander. Auch diese Ausführungen erlauben die Herstellung der Statorhalbringe durch Fräsen. Voraussetzung ist, dass das Werkzeug 29 stirnseitig einen vergrößerten Durchmesser hat (vgl . Fig. 7) .In the embodiments according to FIGS. 5 to 7, the blade sections 26 overlap one another. These designs also allow the production of the stator half rings by milling. The prerequisite is that the tool 29 has an enlarged diameter at the end (see FIG. 7).
In den Figuren 3, 5 und 6 ist jeweils gestrichelt der Förderspalt 13 der sich an die Turbostufen anschließenden Gewindestufe 12, 15 angedeutet. Die Förderspalte 13 haben bei diesen Ausführungen unterschiedliche Durchmesser di, d2 und d3. Die erfindungsgemäße Ausbildung der Durchströmöffnungen 25 lässt eine Anpassung an unterschiedliche Durchmesser des Förderspaltes 13 zu. Dieses kann dadurch geschehen, dass die Lage der Begrenzungsflächen 27, 28, und zwar ihre Neigungen zu den jeweiligen Tangenten, derart gewählt wird, dass der Förderspalt 13 etwa in der Mitte der radialen Erstreckungen ld der Schaufelabschnitte 26 auf ihrer Druckseite liegt. In FIGS. 3, 5 and 6, the conveyor gap 13 of the threaded stage 12, 15 adjoining the turbo stages is indicated by dashed lines. The conveying gaps 13 have different diameters di, d 2 and d 3 in these designs. The design of the flow openings 25 according to the invention permits adaptation to different diameters of the delivery gap 13. This can be done by selecting the position of the boundary surfaces 27, 28, specifically their inclinations to the respective tangents, such that the conveying gap 13 lies approximately in the middle of the radial extensions ld of the blade sections 26 on their pressure side.

Claims

Compound-Reibungsvakw__mp mpePATENTANSPRUCHE Compound friction vacuum__mp mpePATENT CLAIMS
1. ReibungsVakuumpumpe (1) mit mindestens einer Turbomolekularpumpenstufe, mit einer sich daran druckseitig anschließenden Molekularpumpenstufe sowie einer zwischen der Turbomolekularpumpenstufe und der Molekularpumpenstufe befindlichen Ubergangsstufe, dadurch gekennzeichnet, dass die Ubergangsstufe einen sich in tangentialer Richtung kontinuierlich verjüngenden Durchströmungsquerschnitt besitzt.1. Friction vacuum pump (1) with at least one turbomolecular pump stage, with a molecular pump stage adjoining it on the pressure side and a transition stage located between the turbomolecular pump stage and the molecular pump stage, characterized in that the transition stage has a flow cross-section that tapers continuously in the tangential direction.
2. , Pumpe nach Anspruch 1, dadurch gekennzeichnet, dass die Ubergangsstufe von den Statorschaufeln der letzten, druckseitig angeordneten Statorschaufelreihe gebildet wird.2., Pump according to claim 1, characterized in that the transition stage is formed by the stator blades of the last stator blade row arranged on the pressure side.
3. Pumpe nach Anspruch 2 , dadurch gekennzeichnet, dass die Statorschaufeln (26) Bestandteile einer aus zwei Halbringen bestehenden Statorringscheibe sind und jeweils sich im wesentlichen in tangentialer Richtung verjüngende Durchströmöffnungen (25) begrenzen. 3. Pump according to claim 2, characterized in that the stator blades (26) are components of a stator ring disk consisting of two half rings and each delimit flow openings (25) tapering substantially in the tangential direction.
4. Pumpe nach Anspruch 3 , dadurch gekennzeichnet, dass neben den Schaufeln (26) seitliche Begrenzungsflächen (27, 28) die Durchströmöffnungen (25) begrenzen und dass der Abstand der seitlichen Begrenzungsflächen in Strömungsrichtung abnimmt.4. Pump according to claim 3, characterized in that in addition to the blades (26) lateral boundary surfaces (27, 28) limit the flow openings (25) and that the distance between the lateral boundary surfaces decreases in the direction of flow.
5. Pumpe nach Anspruch 4, dadurch gekennzeichnet, dass die Abnahme des Abstandes der Begrenzungsflachen (27, 28) derart ausgebildet ist, dass der Förderspalt (13) der sich an die Turbomolekularpumpenstufe anschließenden Gewindepumpenstufe etwa in der Mitte der radialen Erstreckungen (ld) der Schaufelabschnitte (26) auf ihrer Druckseite liegt. ;5. Pump according to claim 4, characterized in that the decrease in the distance between the boundary surfaces (27, 28) is designed such that the delivery gap (13) of the threaded pump stage adjoining the turbomolecular pump stage is approximately in the middle of the radial extensions (ld) of the Blade sections (26) is on their pressure side. ;
6. Pumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Schaufeln der Ubergangsstufe (23) durch Fräsen oder Giessen hergestellt sind. 6. Pump according to one of the preceding claims, characterized in that the blades of the transition stage (23) are produced by milling or casting.
EP01974147A 2000-09-21 2001-08-09 Compound friction vacuum pump Expired - Lifetime EP1319131B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10046766A DE10046766A1 (en) 2000-09-21 2000-09-21 Compound-friction vacuum pump
DE10046766 2000-09-21
PCT/EP2001/009194 WO2002027189A1 (en) 2000-09-21 2001-08-09 Compound friction vacuum pump

Publications (2)

Publication Number Publication Date
EP1319131A1 true EP1319131A1 (en) 2003-06-18
EP1319131B1 EP1319131B1 (en) 2008-10-01

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ID=7657084

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EP01974147A Expired - Lifetime EP1319131B1 (en) 2000-09-21 2001-08-09 Compound friction vacuum pump

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US (1) US6890146B2 (en)
EP (1) EP1319131B1 (en)
JP (1) JP2004510100A (en)
DE (2) DE10046766A1 (en)
WO (1) WO2002027189A1 (en)

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Also Published As

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DE10046766A1 (en) 2002-04-11
US20040033130A1 (en) 2004-02-19
EP1319131B1 (en) 2008-10-01
DE50114375D1 (en) 2008-11-13
JP2004510100A (en) 2004-04-02
US6890146B2 (en) 2005-05-10
WO2002027189A1 (en) 2002-04-04

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