EP1354138B1 - Turbomolecular vacuum pump with rotor and stator vanes - Google Patents
Turbomolecular vacuum pump with rotor and stator vanes Download PDFInfo
- Publication number
- EP1354138B1 EP1354138B1 EP01994664A EP01994664A EP1354138B1 EP 1354138 B1 EP1354138 B1 EP 1354138B1 EP 01994664 A EP01994664 A EP 01994664A EP 01994664 A EP01994664 A EP 01994664A EP 1354138 B1 EP1354138 B1 EP 1354138B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- rotor
- vanes
- convex
- turbomolecular
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
- F04D29/324—Blades
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2250/00—Geometry
- F05D2250/70—Shape
Definitions
- the invention relates to a turbomolecular vacuum pump with the features of the preamble of patent claim 1.
- Turbomolecular vacuum pumps are constructed in the manner of a turbine with stator and rotor blades. A significant pumping effect is achieved only in the range of molecular flow (p ⁇ 10 -3 mbar). In the adjoining area of the Knudsen current, the delivery rates decrease more and more with increasing pressure.
- the pumping principle of a turbomolecular vacuum pump is based on the fact that the gas molecules to be pumped receive an impulse in the conveying direction as a result of collisions with the rotor and stator blades. This effect is achieved only if the peripheral speeds of the rotor blades are of the order of the average thermal velocity of the gas molecules to be pumped.
- the average thermal velocity of gas molecules depends on their molar mass. It is about 1760 m / s for H 2 (mass 2) and about 470 m / s for N 2 (mass 28). These numbers indicate that the pumping properties of a turbomolecular vacuum pump are gas-dependent. This is true less for the pumping speed, but more so for the compression ratio (ratio between the partial pressure of a gas component on the pressure side of the turbomolecular vacuum pump to the partial pressure of this gas component on the high vacuum side of this pump). The compression ratio of a known turbomolecular vacuum pump increases between the masses of the aforementioned gases H 2 and N 2 of about 10 3 to 10 8 at.
- the usual design of the blades of a turbomolecular pump is from the DE-U 72 37 362 known. They have flat boundary surfaces. Their angle of attack (angle between the plane of the blades and a plane perpendicular to the axis of rotation) decreases from the suction side of the pump to the pressure side.
- the object of the present invention is to improve the conveying properties of a turbomolecular vacuum pump for gases with a low specific mass.
- the object is achieved, that is, the promotion of light gases is improved.
- the advantage is achieved that the measures according to the invention do not affect the compression and delivery rates of the pump (compression, pumping speed, throughput) for gases with higher molar mass.
- the blades designed according to the invention retain their improved conveying properties well into the Kundsen range, so that the fore-vacuum resistance of a turbomolecular pump equipped therewith is considerably more favorable compared with the prior art or the outlay for the backing pumps can be significantly reduced.
- the illustrated turbomolecular vacuum pump 1 comprises a housing / stator 2, an inlet 3, an outlet 4, stator blades 5 and rotor blades 6.
- the stator blades 5 are components of Statorschaufelschschsch, which are in communication with the housing / stator 2.
- the rotor blades 6 are components of rotor blade rows, which are fastened to the rotary body 7, for example a shaft, or are formed integrally therewith. The rotor and stator blade rows alternately engage with oppositely directed angles of attack and cause the delivery of the gases from the inlet 3 to the outlet 4.
- FIGS. 2 to 5 show different versions of inventively designed blades (unwound). Their respective upper edge 8 in the figures faces the suction side of the pump 1, its respective lower edge 9 of the pressure side. Shown are each sections through the blades 5,6 and approximately perpendicular to the substantially radially directed longitudinal axes of the blades. Parallel to these longitudinal axes of the blades extend - as shown in each case - the convex and / or concave-shaped areas of the front and back sides. The direction of rotation of the blades 5, 6 is in each case marked by an arrow 10.
- FIGS. 2 and 3 show exemplary embodiments of rotor blades 6, the front sides are denoted by 11 and the back sides with 12.
- the rear sides 12 of the blades 6 on the suction side a convex portion 13 and the pressure side, a concave portion 14.
- the front side 11 is flat in the region 15 of its suction side (incoming flow, inflow), convex in the region 16 of its pressure side (outflow).
- the front sides 11 of the blades 6 have concave (suction side) and convex (pressure side) regions 15 and 16, respectively, while the back sides 12 are convex on the intake side (region 13) and flat on the pressure side (region 14).
- the front and rear boundary surfaces converge toward one another on the suction side and the pressure side with acute angles, whereby the edges 8, 9 of the blades are formed.
- FIG. 4 shows - also unwound - a version with three rows of rotor blades, which are components of the rotor system 7, and two Statorschaufelschsch, which are components of the stator 2.
- the rotor blades 6 are all formed in such a way that they each have concave and convex portions on their front and back sides (see also FIG FIG. 5 ).
- the stator blades 5 of the upper row of stator blades have in a known manner planar front and rear sides, while the stator blades 5 of the lower row of blades are designed according to the invention.
- the cross section of the stator blades 5 is to be designed such that they are substantially mirror-inverted to the adjacent rotor blades, ie, have oppositely directed angle of attack.
- FIG. 5 a blade 6 is shown enlarged. Some tangents t 1 to t 5 are drawn. It follows that already each wing 6 practically has a variety of angles of attack. In contrast, the angle of attack in the prior art varies from stage to stage. The radii of the concave and convex areas are chosen so that the tangents always have positive angles of attack.
- the tangent t 2 is a tangent through the inflection point 18 of the rear boundary surface of the blade 6. Also marked is the (axial) height h of the blade 6. The inflection point 18 - and also the inflection point 19 of the leading boundary surface 11 - are at half the height h of the blade 6. The tangent t 2 has the angle of attack ⁇ , which - as in the prior art - can decrease from the suction side to the pressure side. Corresponding mirror image expedient and the stator blades 5 are formed.
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Description
Die Erfindung bezieht sich auf eine Turbomolekularvakuumpumpe mit den Merkmalen des Oberbegriffs des Patentanspruchs 1.The invention relates to a turbomolecular vacuum pump with the features of the preamble of
Turbomolekularvakuumpumpen sind nach Art einer Turbine mit Stator- und Rotorschaufeln aufgebaut. Eine maßgebliche Pumpwirkung wird nur im Bereich der Molekularströmung erreicht (p < 10-3 mbar). Im sich anschließenden Bereich der Knudsen-Strömung lassen die Förderleistungen mit zunehmendem Druck mehr und mehr nach.Turbomolecular vacuum pumps are constructed in the manner of a turbine with stator and rotor blades. A significant pumping effect is achieved only in the range of molecular flow (p <10 -3 mbar). In the adjoining area of the Knudsen current, the delivery rates decrease more and more with increasing pressure.
Das Pumpprinzip einer Turbomolekularvakuumpumpe beruht darauf, dass die abzupumpenden Gasmoleküle durch Zusammenstöße mit den Rotor- und Statorschaufeln einen Impuls in Förderrichtung erhalten. Diese Wirkung wird nur dann erreicht, wenn die Umfangsgeschwindigkeiten der Rotorschaufeln in der Größenordnung der mittleren thermischen Geschwindigkeit der zu pumpenden Gasmoleküle liegen.The pumping principle of a turbomolecular vacuum pump is based on the fact that the gas molecules to be pumped receive an impulse in the conveying direction as a result of collisions with the rotor and stator blades. This effect is achieved only if the peripheral speeds of the rotor blades are of the order of the average thermal velocity of the gas molecules to be pumped.
Die mittlere thermische Geschwindigkeit von Gasmolekülen ist abhängig von ihrer molaren Masse. Sie beträgt für H2 (Masse 2) ca. 1760 m/s und für N2 (Masse 28) ca. 470 m/s. Diese Zahlen lassen erkennen, dass die Fördereigenschaften einer Turbomolekularvakuumpumpe gasartabhängig sind. Dieses gilt weniger für das Saugvermögen, aber um so mehr für das Kompressionsverhältnis (Verhältnis zwischen dem Partialdruck einer Gaskomponente auf der Druckseite der Turbomolekularvakuumpumpe zum Partialdruck dieser Gaskomponente auf der Hochvakuumseite dieser Pumpe). Das Kompressionsverhältnis einer bekannten Turbomolekularvakuumpumpe steigt zwischen den Massen der vorgenannten Gase H2 und N2 von etwa 103 bis 108 an.The average thermal velocity of gas molecules depends on their molar mass. It is about 1760 m / s for H 2 (mass 2) and about 470 m / s for N 2 (mass 28). These numbers indicate that the pumping properties of a turbomolecular vacuum pump are gas-dependent. This is true less for the pumping speed, but more so for the compression ratio (ratio between the partial pressure of a gas component on the pressure side of the turbomolecular vacuum pump to the partial pressure of this gas component on the high vacuum side of this pump). The compression ratio of a known turbomolecular vacuum pump increases between the masses of the aforementioned gases H 2 and N 2 of about 10 3 to 10 8 at.
Die übliche Ausbildung der Schaufeln einer Turbomolekularpumpe ist aus der
Aus der
Der vorliegenden Erfindung liegt die Aufgabe zugrunde, die Fördereigenschaften einer Turbomolekularvakuumpumpe für Gase mit geringer spezifischer Masse zu verbessern.The object of the present invention is to improve the conveying properties of a turbomolecular vacuum pump for gases with a low specific mass.
Erfindungsgemäß wird diese Aufgabe durch die kennzeichnenden Merkmale der Patentansprüche gelöst.According to the invention this object is achieved by the characterizing features of the claims.
Durch die Erfindung wird die gestellte Aufgabe gelöst, d.h., die Förderung leichter Gase wird verbessert. Darüberhinaus wird der Vorteil erreicht, dass die Massnahmen nach der Erfindung die Verdichtungs- und Förderleistungen der Pumpe (Kompression, Saugvermögen, Durchsatz) für Gase mit höherer molarer Masse nicht beeinträchtigen. Schließlich behalten die erfindungsgemäß gestalteten Schaufeln ihre verbesserten Fördereigenschaften bis weit in den Kundsen-Bereich hinein, so dass die Vorvakuumbeständigkeit einer damit ausgerüsteten Turbomolekularpumpe im Vergleich zum Stand der Technik wesentlich günstiger ist bzw. der Aufwand für die Vorvakuumpumpen maßgeblich reduziert werden kann.By the invention, the object is achieved, that is, the promotion of light gases is improved. Moreover, the advantage is achieved that the measures according to the invention do not affect the compression and delivery rates of the pump (compression, pumping speed, throughput) for gases with higher molar mass. Finally, the blades designed according to the invention retain their improved conveying properties well into the Kundsen range, so that the fore-vacuum resistance of a turbomolecular pump equipped therewith is considerably more favorable compared with the prior art or the outlay for the backing pumps can be significantly reduced.
Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von in den Figuren dargestellten Ausführungsbeispielen erläutert werden. Es zeigen
-
schematisch eine Turbomolekularvakuumpumpe,Figur 1 -
Ausführungen von erfindungsgemäß gestalteten Rotorschaufeln, bei denen entweder die Rückseite oder die Vorderseite konvexe und konkave Bereiche aufweist, sowieFiguren 2 und 3 -
Figuren 4 und 5 Ausführungen von erfindungsgemäß gestalteten Schaufeln, bei denen beide Seiten konvexe und konkave Bereiche aufweisen.
-
FIG. 1 schematically a turbomolecular vacuum pump, -
FIGS. 2 and 3 Embodiments of inventively designed rotor blades, in which either the back or the front has convex and concave areas, and -
FIGS. 4 and 5 Embodiments of inventively designed blades, in which both sides have convex and concave portions.
Die in
Die
Die
Bei der Ausführung nach
In
Die Tangente t2 ist eine Tangente durch den Wendepunkt 18 der rückseitigen Begrenzungsfläche der Schaufel 6. Eingezeichnet ist weiterhin die (axiale) Höhe h der Schaufel 6. Der Wendepunkt 18 - und auch der Wendepunkt 19 der vorlaufenden Begrenzungsfläche 11 - liegen auf der halben Höhe h der Schaufel 6. Die Tangente t2 hat den Anstellwinkel α, der - wie beim Stand der Technik - von der Saugseite zur Druckseite abnehmen kann. Entsprechend spiegelbildlich sind zweckmäßig auch die Statorschaufeln 5 ausgebildet.The tangent t 2 is a tangent through the
Claims (9)
- Turbomolecular vacuum pump (1) with an inlet (3) and an outlet (4) and with rotor and stator vanes (5 and 6) situated between the inlet and outlet, wherein the rotor vanes (6) have front sides (11) and rear sides (12) in relation to the direction of rotation thereof, characterised in that at least some of the rotor vanes (6) have a rear side (12) which is designed to be convex on the suction side and concave on the delivery side.
- Turbomolecular pump according to Claim 1, characterised in that the front side (11) of the rotor vanes (6) is designed to be flat on the suction side and convex on the delivery side.
- Turbomolecular vacuum pump (1) with an inlet (3) and an outlet (4) and with rotor and stator vanes (5 and 6) situated between the inlet and outlet, wherein the rotor vanes (6) have front sides (11) and rear sides (12) in relation to the direction of rotation thereof, characterised in that at least some of the rotor vanes (6) have a front side (11) which is designed to be concave on the suction side and convex on the delivery side.
- Turbomolecular pump according to Claim 3, characterised in that the rear side (12) of the rotor vanes (6) is designed to be convex on the suction side and flat on the delivery side.
- Turbomolecular vacuum pump (1) with an inlet (3) and an outlet (4) and with rotor and stator vanes (5 and 6) situated between the inlet and outlet, wherein the rotor vanes (6) have front sides (11) and rear sides (12) in relation to the direction of rotation thereof, characterised in that at least some of the rotor vanes (6) have a rear side (12) according to Claim 1 and a front side (11) according to Claim 3.
- Turbomolecular pump according to any one of Claims 1 to 5, characterised in that the front side and the rear side boundary surfaces of the vanes taper to a point in the area of the side edges of the vanes.
- Turbomolecular pump according to any one of Claims 1 to 6, characterised in that the radii of the concave and convex areas are selected so that the tangents (t1 to t5) have positive angles of incidence in the area of the concave and convex areas.
- Turbomolecular pump according to any one of Claims 1 to 7, characterised in that the inflection points (18, 19) of the boundary surfaces are located at half the height (h) of the vanes (5, 6).
- Turbomolecular pump according to Claim 8, characterised in that the tangent (t2) through the inflection point(s) (18, 19) has an angle of incidence (α) which decreases from the suction side to the delivery side.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10103230 | 2001-01-25 | ||
DE10103230A DE10103230A1 (en) | 2001-01-25 | 2001-01-25 | Turbomolecular vacuum pump with rotor and stator blades |
PCT/EP2001/013204 WO2002059483A1 (en) | 2001-01-25 | 2001-11-15 | Turbomolecular vacuum pump with rotor and stator vanes |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1354138A1 EP1354138A1 (en) | 2003-10-22 |
EP1354138B1 true EP1354138B1 (en) | 2008-09-10 |
Family
ID=7671659
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP01994664A Expired - Lifetime EP1354138B1 (en) | 2001-01-25 | 2001-11-15 | Turbomolecular vacuum pump with rotor and stator vanes |
Country Status (5)
Country | Link |
---|---|
US (1) | US6910861B2 (en) |
EP (1) | EP1354138B1 (en) |
JP (1) | JP3974529B2 (en) |
DE (2) | DE10103230A1 (en) |
WO (1) | WO2002059483A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009027834B4 (en) * | 2008-07-22 | 2013-04-11 | Osaka Vacuum, Ltd. | Turbo molecular pump |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102004012713A1 (en) * | 2004-03-16 | 2005-10-06 | Pfeiffer Vacuum Gmbh | Turbo molecular pump |
DE102006020081A1 (en) * | 2006-04-29 | 2007-10-31 | Pfeiffer Vacuum Gmbh | Rotor or stator disk for a molecular pump |
US8221098B2 (en) * | 2009-03-09 | 2012-07-17 | Honeywell International Inc. | Radial turbomolecular pump with electrostatically levitated rotor |
DE102013219050B3 (en) * | 2013-09-23 | 2015-01-22 | Oerlikon Leybold Vacuum Gmbh | High-performance rotors of a turbomolecular pump |
DE102013219043A1 (en) | 2013-09-23 | 2015-03-26 | Oerlikon Leybold Vacuum Gmbh | Alloys of rotors of a turbomolecular pump |
EP3093496B1 (en) * | 2015-05-15 | 2019-03-06 | Pfeiffer Vacuum Gmbh | Rotor of a vacuum pump |
GB2592043A (en) * | 2020-02-13 | 2021-08-18 | Edwards Ltd | Axial flow vacuum pump |
GB2612781B (en) * | 2021-11-10 | 2024-04-10 | Edwards Ltd | Turbomolecular pump bladed disc |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3128939A (en) * | 1964-04-14 | Szydlowski | ||
US2484554A (en) * | 1945-12-20 | 1949-10-11 | Gen Electric | Centrifugal impeller |
FR1306013A (en) * | 1961-08-04 | 1962-10-13 | Snecma | Turbomolecular Vacuum Pumps Improvements |
DE7237362U (en) * | 1972-10-12 | 1973-01-11 | Leybold Heraeus Gmbh & Co Kg | Turbo molecular vacuum pump |
US4227855A (en) * | 1978-08-25 | 1980-10-14 | Cummins Engine Company, Inc. | Turbomachine |
US4653976A (en) * | 1982-09-30 | 1987-03-31 | General Electric Company | Method of compressing a fluid flow in a multi stage centrifugal impeller |
JPH1089284A (en) * | 1996-09-12 | 1998-04-07 | Seiko Seiki Co Ltd | Turbo-molecular pump |
JP3047292B1 (en) * | 1998-11-24 | 2000-05-29 | セイコー精機株式会社 | Turbo molecular pump and vacuum device |
-
2001
- 2001-01-25 DE DE10103230A patent/DE10103230A1/en not_active Withdrawn
- 2001-11-15 EP EP01994664A patent/EP1354138B1/en not_active Expired - Lifetime
- 2001-11-15 JP JP2002559954A patent/JP3974529B2/en not_active Expired - Fee Related
- 2001-11-15 WO PCT/EP2001/013204 patent/WO2002059483A1/en active IP Right Grant
- 2001-11-15 DE DE50114317T patent/DE50114317D1/en not_active Expired - Lifetime
- 2001-11-15 US US10/466,343 patent/US6910861B2/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102009027834B4 (en) * | 2008-07-22 | 2013-04-11 | Osaka Vacuum, Ltd. | Turbo molecular pump |
Also Published As
Publication number | Publication date |
---|---|
DE50114317D1 (en) | 2008-10-23 |
EP1354138A1 (en) | 2003-10-22 |
JP2004536989A (en) | 2004-12-09 |
US20040037695A1 (en) | 2004-02-26 |
DE10103230A1 (en) | 2002-08-01 |
US6910861B2 (en) | 2005-06-28 |
JP3974529B2 (en) | 2007-09-12 |
WO2002059483A1 (en) | 2002-08-01 |
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