EP0697069B1 - Friction vacuum pump with pump sections of different designs - Google Patents

Friction vacuum pump with pump sections of different designs Download PDF

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Publication number
EP0697069B1
EP0697069B1 EP94913098A EP94913098A EP0697069B1 EP 0697069 B1 EP0697069 B1 EP 0697069B1 EP 94913098 A EP94913098 A EP 94913098A EP 94913098 A EP94913098 A EP 94913098A EP 0697069 B1 EP0697069 B1 EP 0697069B1
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EP
European Patent Office
Prior art keywords
pump
annular
rotor
stages
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP94913098A
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German (de)
French (fr)
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EP0697069A1 (en
Inventor
Günter Schütz
Heinrich Engländer
Friedrich Karl Von Schulz-Hausmann
Hinrich Henning
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Leybold GmbH
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Leybold Vakuum GmbH
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Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Priority to EP98110191A priority Critical patent/EP0874159A3/en
Publication of EP0697069A1 publication Critical patent/EP0697069A1/en
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Publication of EP0697069B1 publication Critical patent/EP0697069B1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Definitions

  • the invention relates to a friction vacuum pump with the features of the preamble of the independent claims 1 and 2.
  • Frictional vacuum pumps include Gaede pumps (in one Housing rotating cylinder with pump gap and between Inlet and outlet located barrier gap), Holweck pumps (rotating cylinder in a housing with arranged helically, stator or rotor side Grooves), Siegbahn pumps (rotating and standing Washers with spiral grooves) and Turbomolecular pumps with rotor and guide vanes are equipped. It is known to use different friction pumps designed pump sections.
  • the present invention is based on the object as smooth a flow as possible between the different pump sections.
  • the pump section with the Siegbahn stages at least one further pump stage any Type - preferably a friction pump - that in the intermediate range between molecular flow and viscous flow has good pumping properties.
  • a vacuum pump designed in this way a relatively high backing pressure (greater than 10 mbar) is generated so that pumps of this type with small and inexpensive backing pumps can be operated.
  • the embodiment according to FIG. 1 is a Friction vacuum pump 1, the housing of which is designated 2.
  • The includes upper, cylindrical housing section 3 and centers the stator 4, which has a plurality of stator rings 5, 6 and 7.
  • the rotor 8 is supported on the bearings 9 and Pump shaft 10 in the pump housing 2.
  • the drive motor is with Designated 11.
  • the Inlet flange 12 a recipient to be evacuated connected.
  • the gases become the outlet 13 promoted to which a backing pump is connected.
  • the embodiment according to FIG. 1 is 3 in total Pump sections equipped.
  • the high vacuum pump section consists of turbomolecular pump stages.
  • the stator rings 5 each carry the inward stator blades 14, which are associated with rotor blades 15 attached to the rotor 8.
  • the second pump section has Siegbahn pump stages. This comprise rotating ring disks 16 fastened to the rotor 8, whose surfaces are flat. Between the rotor ring disks 16 are the stator ring washers 17.
  • the stator rings 6 wear the stator washers 17; they are preferably in one piece educated.
  • the stator washers 17 are on the end face with spiral projections 18 and corresponding grooves 19 equipped (see FIG. 2).
  • the spiral shape is each chosen so that a continuous gas flow from Inlet 12 to outlet 13 is secured, i.e. that at embodiment shown the above a stator washer 6 pump active areas of the Siegbahnhaven the gases from the outside in and those below one Stator ring 6 located pump active areas of the Siegbahnhaven convey the gases from the inside out.
  • There are three spiral grooves or projections are provided, which each extend over approximately 360 °.
  • the number, depth, The width and slope of the spirals determine the pump properties of the pump section consisting of Siegbahn stages.
  • the first Siegbahn stage following the turbomolecular pump stages the gases from the outside in.
  • the stator washer 17 rotor ring disk 16 upstream of the first Siegbahn stage has one smaller diameter than the other rotor ring disks 16 and bears on its circumference in relation to the other rotor blades 15 Shortened blades 27. This is as trouble-free as possible Transition between the different pump sections guaranteed.
  • the first Siegbahnlope If gases are to be conveyed from the inside out, one can do this accordingly designed first stator washer 17 with compared to the rest Disks with an enlarged inner diameter may be provided the inside carries shortened stator blades.
  • high vacuum or initially a turbomolecular pump section on the inlet side followed by a Siegbahn pump section.
  • the pre-vacuum side that follows the Siegbahn pump section Pump stage is like a side channel pump educated. To do this, they face each other radially extending surfaces of the last rotor ring disk 28 (Fig. 5) and the last stator washer 29 (Fig. 6) in cross section essentially semicircular, facing each other circular grooves 31, 32 are provided.
  • the arranged on the suction side rotating groove 31 is with a plurality of crosspieces 33 equipped.
  • the fixed groove 32 arranged on the pressure side has an inlet 34 and an inlet with respect to the extracted gases Outlet 35.
  • Its inlet 34 is a radially outwardly extending one Groove section that through the peripheral pumping gap gases flowing between the annular disc 27 and the stator 4 records.
  • the outlet 35 is substantially axial extending bore, which the groove 32 with the fore-vacuum space connects. Inlet 34 and outlet 35 are immediately adjacent and are separated from each other by a web (36), to avoid backflow. A division of the groove 32 in two or more groove sections, each with an inlet 34 and an outlet 35 is possible.
  • the exemplary embodiment according to FIGS. 7 and 8 is based the shaft 10 via its bearings 9 initially on the inside a sleeve-shaped carrier 41.
  • the top end of the carrier 41 is equipped with a collar 42.
  • the lower end of the The carrier projects into a recess 43 in a housing component 44 into it, which has only a slightly larger diameter than the outer diameter of the carrier 41.
  • An O-ring 45 between the carrier 41 and the inside of the recess 43 secures the central position of the carrier 41.
  • To support the carrier 41 in the housing 2 are three substantially axially extending Bars 46 are provided on the collar 42 and on the housing component 44 are attached.
  • the O-ring 45 acts Vibrations of this type as a damping element. This allows the pumping gaps between the active pumping surfaces, in particular between the stator and rotor ring disks of the Siegbahn stages, very small design and therefore a very good pump effect be achieved.
  • Fig. 9 shows an embodiment for a pump according to the Invention in which the rotor is on a fixed Pins 51 of the housing 2 supports and the drive motor 11 as External rotor motor is formed.
  • the bars 46 is the pin 51 at its upper end with a collar 52 equipped.
  • the sleeve-shaped carrier 41 has on its lower end an inward edge 53. Between Collar 52 and edge 53 extend the rods 46.
  • the Siegbahn pump section follows on the pressure side to a Holweck pump section that comes from the stator ring 55 with the helically shaped projections 56 and Outside of the cylindrical rotor section 57. This carries the motor rotor on the inside.
  • Gaeda pump section there is also a Gaeda pump section on.
  • This includes the stator ring 60 on the stator side with two circumferential webs 61, 62 which form the groove 63, and the correspondingly elongated rotor section on the rotor side 57.
  • the inlet to the Gaedepumpgen form an or several openings 64 (see also FIG. 10) in the upper web 61. These are located directly next to one or more fixed, in the groove 63 protruding projections 65 which with the Rotor 57 form the blocking gap 66.
  • the outlet opening (s) 67 are located in the lower web 62 and open into the fore-vacuum space the pump 1.
  • the groove 63 divided into two sections. There are two in parallel mutually arranged gate pump stages are provided. You point in each case the inlet opening 64 and the outlet openings 67 and each extend over approximately 180 °.
  • the arrow 68 indicates the direction of rotation of the rotor 57.
  • the groove is 63 no longer designed in a ring shape.
  • Groove depth or groove width
  • Fig. 11 decreasing
  • Fig. 12 constantly changing
  • the desired pressure build-up is thereby achieved.
  • several chambers 69 are present, in which a relatively slow pressure build-up in succession and relatively rapid expansion is taking place. The pressure increases from chamber to chamber.
  • Figures 13 to 18 show embodiments for Siegbahnhaven, which are combined with gaed stages.
  • the outside diameter of the rotating ring disks 17 are selected in such a way that between its periphery and that surrounding it Stator 4 each have an outer annular space 71, 72.
  • the inner diameter of the stator washers 15 chosen such that an inner annular space 73, 74 is present is.
  • Figure 13 which is a plan view of a Stator ring disk with two spiral grooves 19 shows is can be seen that stationary in the annular spaces 71, 72 Projections 75, 76 and 77, 78 are located together with the Outer circumference of the rotor ring disks 16 or the rotating one Central part (e.g. rotor 8 or shaft 10) locking gaps 79, 80 form.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

The invention relates to a friction vacuum pump (1) with pump sections of different designs, of which the pump section on the inlet side consists of turbomolecular pump stages (14, 15) and a further pump section of siegbahn stages (16, 17) with spiral grooves (19), whereby the active pumping surfaces of the siegbahn stages are formed by facing surfaces of a rotor disc and a stator disc (16, 17). To simplify the production of such a pump, it is proposed that the stator discs (16) have spiral grooves (19).

Description

Die Erfindung bezieht sich auf eine Reibungsvakuumpumpe mit den Merkmalen des Oberbegriffs der unabhängigen Patentansprüche 1 und 2.The invention relates to a friction vacuum pump with the features of the preamble of the independent claims 1 and 2.

Zu den Reibungsvakuumpumpen gehören Gaede-Pumpen (in einem Gehäuse rotierender Zylinder mit Pumpspalt und zwischen Einlass und Auslass gelegenem Sperrspalt), Holweck-Pumpen (in einem Gehäuse rotierender Zylinder mit wendelförmigen, Stator- oder rotorseitig angeordneten Nuten), Siegbahn-Pumpen (rotierende und stehende Ringscheiben mit spiralförmig gestalteten Nuten) und Turbomolekular-Pumpen, die mit Lauf- und Leitschaufeln ausgerüstet sind. Es ist bekannt, Reibungspumpen mit unterschiedlich gestalteten Pumpenabschnitten auszurüsten.Frictional vacuum pumps include Gaede pumps (in one Housing rotating cylinder with pump gap and between Inlet and outlet located barrier gap), Holweck pumps (rotating cylinder in a housing with arranged helically, stator or rotor side Grooves), Siegbahn pumps (rotating and standing Washers with spiral grooves) and Turbomolecular pumps with rotor and guide vanes are equipped. It is known to use different friction pumps designed pump sections.

Aus der DE-A 39 22 782 und der FR-A-22 80 809 sind Reibungspumpen der eingangs erwähnten Art bekannt. Pumpen dieser Art sollen nicht nur im Molekularströmungsbereich sondern auch bei viskoser Strömung gute Fördereigenschaften haben. Als besonderes Problem haben sich die Übergangsbereiche zwischen den unterschiedlich gestalteten Pumpenabschnitten erwiesen. Störungen der Strömung oder gar Strömungsabrisse finden in diesen Bereichen statt.From DE-A 39 22 782 and FR-A-22 80 809 are friction pumps of the type mentioned above. pump This type is not only intended in the molecular flow range but also good conveying properties with viscous flow to have. They have a special problem Transitional areas between the differently designed Pump sections proved. Flow disorders or even stall in these areas instead of.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, einen möglichst störungsfreien Übergang der Strömung zwischen den verschiedenen Pumpenabschnitten sicherzustellen. The present invention is based on the object as smooth a flow as possible between the different pump sections.

Erfindungsgemäß wird diese Aufgabe durch die kennzeichnenden Merkmale der Patentansprüche 1 und 2 gelost. Die Besonderheit der erfindungsgemäß vorgeschlagenen Rotor- bzw. Statorringscheibe liegt darin, dass sie einerseits bereits Bestandteil einer Siegbahnstufe ist, andererseits aber noch verkürzte Rotorschaufeln trägt. Störungen der Strömung sind minimiert, Strömungsabrisse finden nicht mehr statt.According to the invention, this object is achieved by the characterizing Features of claims 1 and 2 solved. The peculiarity the rotor or Stator washer is that on the one hand it already On the other hand, it is part of a Siegbahn level but still carries shortened rotor blades. Disorders of the Flow is minimized, stalls cannot be found more instead.

Eine weitere vorteilhafte Maßnahme besteht darin, die Statorringscheiben der Siegbahnstufen mit den spiralförmigen Nuten auszurüsten. Durch diese Maßnahme wir zum einen erreicht, dass es nicht mehr erforderlich ist, den Rotor aus einer Vielzahl von Einzelteilen herzustellen. Der Rotor kann einteilig ausgebildet und z.B. aus dem Vollen gedreht sein. Weiterhin ist die Anpassung einer Reibungspumpe der hier betroffenen Art an unterschiedliche Einsatzfälle einfacher. Bei Vakuumpumpen dieser Art bestimmen nämlich die Eigenschaften der spiralförmigen Nuten (Tiefe, Breite, Steigung) die Pumpeigenschaften. Bei einer Änderung der Pumpeigenschaften müssen deshalb bei einer Reibungsvakuumpumpe nach dem Stand der Technik nacheinander Stator und Rotor demontiert, die Rotorscheiben mit den spiralförmigen Nuten ausgetauscht und dann wieder Rotor und Stator montiert werden. Bei einer Reibungsvakuumpumpe nach der Erfindung muss nur der Stator demontiert und mit Austausch-Scheiben wieder montiert werden.Another advantageous measure is that Stator ring washers of the Siegbahn levels with the spiral Equip grooves. Through this measure we become achieved one that it is no longer necessary to Manufacture rotor from a variety of individual parts. The rotor can be made in one piece and e.g. from the Be fully turned. Furthermore, the adaptation of a Friction pump of the type concerned here to different Use cases easier. With vacuum pumps of this type determine the properties of the spiral Grooves (depth, width, slope) the pump properties. Therefore, when changing the pump properties in a friction vacuum pump according to the prior art the stator and rotor are dismantled one after the other, the rotor disks exchanged with the spiral grooves and then the rotor and stator are mounted again. At a Friction vacuum pump according to the invention only the stator disassembled and reassembled with replacement discs become.

Eine weitere vorteilhafte Maßnahme nach der Erfindung besteht darin, dass sich an den Pumpenabschnitt mit den Siegbahn-Stufen mindestens eine weitere Pumpstufe beliebiger Art - vorzugsweise auf eine Reibungspumpe - anschließt, die im Zwischenbereich zwischen Molekularströmung und viskoser Strömung gute Fördereigenschaften hat. Mit einer in dieser Weise ausgebildeten Vakuumpumpe kann ein relativ hoher Vorvakuumdruck (größer 10 mbar) erzeugt werden, so dass Pumpen dieser Art mit kleinen und preiswerten Vorvakuumpumpen betrieben werden können.Another advantageous measure according to the invention is that the pump section with the Siegbahn stages at least one further pump stage any Type - preferably a friction pump - that in the intermediate range between molecular flow and viscous flow has good pumping properties. With a vacuum pump designed in this way a relatively high backing pressure (greater than 10 mbar) is generated so that pumps of this type with small and inexpensive backing pumps can be operated.

Weitere Vorteile und Einzelheiten der Erfindung sollen anhand von in den Figuren 1 bis 18 erläutert werden. Es zeigen

  • Figur 1 eine Reibungsvakuumpumpe nach der Erfindung,
  • Figur 2 einen Schnitt durch die Pumpe nach Figur 1 in Höhe der Statorscheibe einer Siegbahn-Stufe
  • Figur 3 einen Schnitt durch die Pumpe nach Figur 1 in Höhe einer sich in Förderrichtung an den Siegbahn-Pumpenabschnitt anschließenden weiteren Pumpstufe,
  • Figuren 4, 5 und 6 ein weiteres Ausführungsbeispiel für eine Pumpe nach der Erfindung,
  • Figuren 7, 8 ein Ausführungsbeispiel für eine Pumpe nach der Erfindung mit einer besonderen Rotoraufhängung,
  • Figuren 9 bis 12 Schnitte durch weitere Lösungen für druckseitig angeordnete Pumpstufen und
  • Figuren 13 bis 18 Schnitte durch Pumpstufen, die als kombinierte Siegbahn/Gaede-Stufen ausgebildet sind.
Further advantages and details of the invention will be explained with reference to FIGS. 1 to 18. Show it
  • FIG. 1 shows a friction vacuum pump according to the invention,
  • Figure 2 shows a section through the pump of Figure 1 at the level of the stator disk of a Siegbahn stage
  • 3 shows a section through the pump according to FIG. 1 at the level of a further pump stage adjoining the Siegbahn pump section in the conveying direction, FIG.
  • FIGS. 4, 5 and 6 show a further exemplary embodiment of a pump according to the invention,
  • FIGS. 7, 8 an exemplary embodiment of a pump according to the invention with a special rotor suspension,
  • Figures 9 to 12 sections through further solutions for pump stages and arranged on the pressure side
  • Figures 13 to 18 sections through pump stages, which are designed as a combined Siegbahn / Gaede stages.

Beim Ausführungsbeispiel nach Figur 1 handelt es sich um eine Reibungsvakuumpumpe 1, deren Gehäuse mit 2 bezeichnet ist. Der obere, zylindrisch gestaltete Gehäuseabschnitt 3 umfaßt und zentriert den Stator 4, der eine Mehrzahl von Statorringen 5,6 und 7 umfaßt. Der Rotor 8 stützt sich über die Lager 9 und die Pumpenwelle 10 im Pumpengehäuse 2 ab. Der Antriebsmotor ist mit 11 bezeichnet. Während des Betriebs der Pumpe ist an den Einlaßflansch 12 ein zu evakuierender Rezipient angeschlossen. Infolge der Drehung des Rotors 8 werden die Gase zum Auslaß 13 gefördert, an den eine Vorvakuumpumpe angeschlossen ist.The embodiment according to FIG. 1 is a Friction vacuum pump 1, the housing of which is designated 2. The includes upper, cylindrical housing section 3 and centers the stator 4, which has a plurality of stator rings 5, 6 and 7. The rotor 8 is supported on the bearings 9 and Pump shaft 10 in the pump housing 2. The drive motor is with Designated 11. During the operation of the pump, the Inlet flange 12 a recipient to be evacuated connected. As a result of the rotation of the rotor 8, the gases become the outlet 13 promoted to which a backing pump is connected.

Das Ausführungsbeispiel nach Figur 1 ist mit insgesamt 3 Pumpenabschnitten ausgerüstet. Der hochvakuumseitige Pumpenabschnitt besteht aus Turbomolekularpumpenstufen. Die Statorringe 5 tragen jeweils die nach innen gerichteten Statorschaufeln 14, denen am Rotor 8 befestigte Rotorschaufeln 15 zugeordnet sind. Der zweite Pumpabschnitt weist Siegbahnpumpenstufen auf. Diese umfassen rotierende, am Rotor 8 befestigte Ringscheiben 16, deren Oberflächen eben sind. Zwischen den Rotorringscheiben 16 befinden sich die Statorringscheiben 17. Die Statorringe 6 tragen die Statorringscheiben 17; vorzugsweise sind sie einstückig ausgebildet. Die Statorringscheiben 17 sind stirnseitig mit spiralförmigen Vorsprüngen 18 und entsprechenden Nuten 19 ausgerüstet (vgl. Figur 2). Die spiralförmige Gestaltung ist jeweils so gewählt, daß eine kontinuierliche Gasströmung vom Einlaß 12 zum Auslaß 13 sichergestellt ist, d.h. daß beim dargestellten Ausführungsbeispiel die oberhalb einer Statorringscheibe 6 befindlichen pumpaktiven Flächen der Siegbahnstufen die Gase von außen nach innen und die unterhalb einer Statorringscheibe 6 befindlichen pumpaktiven Flächen der Siegbahnstufen die Gase von innen nach außen fördern. Es sind jeweils drei spiralförmige Nuten bzw. Vorsprünge vorgesehen, die sich jeweils über etwa 360° erstrecken. Die Anzahl, Tiefe, Breite und Steigung der Spiralen bestimmt die Pumpeigenschaften des aus Siegbahnstufen bestehenden Pumpenabschnittes. Durch Austauschen von Statorringscheiben 17 mit geeignet gestalteten Spiralen können die Pumpeigenschaften unterschiedlichen Einsatzbedingungen angepaßt werden.The embodiment according to FIG. 1 is 3 in total Pump sections equipped. The high vacuum pump section consists of turbomolecular pump stages. The stator rings 5 each carry the inward stator blades 14, which are associated with rotor blades 15 attached to the rotor 8. The second pump section has Siegbahn pump stages. This comprise rotating ring disks 16 fastened to the rotor 8, whose surfaces are flat. Between the rotor ring disks 16 are the stator ring washers 17. The stator rings 6 wear the stator washers 17; they are preferably in one piece educated. The stator washers 17 are on the end face with spiral projections 18 and corresponding grooves 19 equipped (see FIG. 2). The spiral shape is each chosen so that a continuous gas flow from Inlet 12 to outlet 13 is secured, i.e. that at embodiment shown the above a stator washer 6 pump active areas of the Siegbahnstufen the gases from the outside in and those below one Stator ring 6 located pump active areas of the Siegbahnstufen convey the gases from the inside out. There are three spiral grooves or projections are provided, which each extend over approximately 360 °. The number, depth, The width and slope of the spirals determine the pump properties of the pump section consisting of Siegbahn stages. By Replacing stator washers 17 with suitably designed ones Spirals can have different pumping characteristics be adjusted.

Beim Ausführungsbeispiel nach Figur 1 fördert die letzte druckseitige Siegbahn-Stufe die Gase von außen nach innen. Von dort aus gelangen sie in eine für den Zwischenbereich zwischen Molekularströmung und viskoser Strömung besonders geeignete Pumpenstufe, die nach Art einer Kreiselrad-Arbeitsmaschine ausgebildet ist. Diese umfaßt am Rotor 8 befestigte, in Bezug auf die Drehrichtung (Pfeil 21 in Figur 3) nach hinten gekrümmte, sich im wesentlichen axial erstreckende Laufschaufeln 22. Diesen sind Kreiselrad-Arbeitsmaschine Leitschaufeln 23 zugeordnet, die vom Statorring 7 getragen werden. Die Leitschaufeln 23 bilden Strömungskanäle 24, die etwa senkrecht zu den äußeren Bereichen der Laufschaufeln angeordnet sind und vom Gas in etwa radialer Richtung nach außen durchströmt werden. Im äußeren Bereich sind die Strömungskanäle 24 mit Öffnungen 25 versehen, durch die die Gase zur Vorvakuumseite der Pumpe gelangen. In Figur 1 ist der Strömungsweg der Gase durch den Pfeil 26 gekennzeichnet. In the embodiment of Figure 1, the last promotes Siegbahn stage on the pressure side, the gases from outside to inside. Of from there you get into a for the intermediate area between Molecular flow and viscous flow particularly suitable Pump stage, the type of a gyroscopic work machine is trained. This includes attached to the rotor 8 in relation curved backwards in the direction of rotation (arrow 21 in FIG. 3), substantially axially extending blades 22. These are rotor-wheel driven machine guide vanes 23 assigned, which are worn by the stator ring 7. The guide vanes 23 form flow channels 24 which are approximately perpendicular to the outer regions of the blades are arranged and from Gas flows outward in approximately radial direction. in the The outer region is the flow channels 24 with openings 25 through which the gases to the fore-vacuum side of the pump reach. In Figure 1, the flow path of the gases through the Arrow 26 marked.

Beim in Figur 1 dargestellten Ausführungsbeispiel fördert die erste auf die Turbomolekularpumpenstufen folgende Siegbahnstufe die Gase von außen nach innen. Die der Statorringscheibe 17 der ersten Siegbahnstufe vorgelagerte Rotorringscheibe 16 hat einen kleineren Durchmesser als die übrigen Rotorringscheiben 16 und trägt an ihrem Umfang gegenüber den übrigen Rotorschaufeln 15 verkürzte Schaufeln 27. Dadurch ist ein möglichst störungsfreier Übergang zwischen den verschiedenen Pumpenabschntten gewährleistet. Für den Fall, daß die erste Siegbahnstufe die Gase von innen nach außen fördern soll, kann eine entsprechend gestaltete erste Statorringscheibe 17 mit gegenüber den übrigen Scheiben vergrößertem Innendurchmesser vorgesehen sein, die an ihrer Innenseite verkürzte Statorschaufeln trägt.In the embodiment shown in Figure 1, the first Siegbahn stage following the turbomolecular pump stages the gases from the outside in. The stator washer 17 rotor ring disk 16 upstream of the first Siegbahn stage has one smaller diameter than the other rotor ring disks 16 and bears on its circumference in relation to the other rotor blades 15 Shortened blades 27. This is as trouble-free as possible Transition between the different pump sections guaranteed. In the event that the first Siegbahnstufe the If gases are to be conveyed from the inside out, one can do this accordingly designed first stator washer 17 with compared to the rest Disks with an enlarged inner diameter may be provided the inside carries shortened stator blades.

Auch beim Ausführungsbeispiel nach Figur 4 sind hochvakuum- bzw. einlaßseitig zunächst ein Turbomolekularpumpenabschnitt und daran anschließend ein Siegbahn-Pumpenabschnitt vorgesehen. Die sich an den Siegbahn-Pumpenabschnitt anschließende, vorvakuumseitige Pumpstufe ist nach Art einer Seitenkanalpumpe ausgebildet. Dazu sind in den einander zugewandten, sich radial erstreckenden Oberflächen der letzten Rotorringscheibe 28 (Fig. 5) und der letzten Statorringscheibe 29 (Fig. 6) im Querschnitt etwa halbrund gestaltete, einander zugewandte, im wesentliche kreisförmige Nuten 31, 32 vorgesehen. Die saugseitig angeordnete rotierende Nut 31 ist mit einer Vielzahl von Querstegen 33 ausgerüstet. Die druckseitig angeordnete, feststehende Nut 32 hat in Bezug auf die geförderten Gase einen Einlaß 34 und einen Auslaß 35. Ihr Einlaß 34 ist ein sich radial nach außen erstreckender Nutabschnitt, der die durch den peripheren Pumpspalt zwischen Ringscheibe 27 und Stator 4 strömenden Gase aufnimmt. Der Auslaß 35 ist eine sich im wesentlichen axial erstreckende Bohrung, welche die Nut 32 mit dem Vorvakuumraum verbindet. Einlaß 34 und Auslaß 35 liegen unmittelbar nebeneinander und sind durch einen Steg (36) voneinander getrennt, um Rückströmungen zu vermeiden. Eine Aufteilung der Nut 32 in zwei oder mehr Nutabschnitte, jeweils mit einem Einlaß 34 und einem Auslaß 35, ist möglich. In the exemplary embodiment according to FIG. 4, high vacuum or initially a turbomolecular pump section on the inlet side followed by a Siegbahn pump section. The pre-vacuum side that follows the Siegbahn pump section Pump stage is like a side channel pump educated. To do this, they face each other radially extending surfaces of the last rotor ring disk 28 (Fig. 5) and the last stator washer 29 (Fig. 6) in cross section essentially semicircular, facing each other circular grooves 31, 32 are provided. The arranged on the suction side rotating groove 31 is with a plurality of crosspieces 33 equipped. The fixed groove 32 arranged on the pressure side has an inlet 34 and an inlet with respect to the extracted gases Outlet 35. Its inlet 34 is a radially outwardly extending one Groove section that through the peripheral pumping gap gases flowing between the annular disc 27 and the stator 4 records. The outlet 35 is substantially axial extending bore, which the groove 32 with the fore-vacuum space connects. Inlet 34 and outlet 35 are immediately adjacent and are separated from each other by a web (36), to avoid backflow. A division of the groove 32 in two or more groove sections, each with an inlet 34 and an outlet 35 is possible.

Beim Ausführungsbeispiel nach den Figuren 7 und 8 stützt sich die Welle 10 über ihre Lager 9 zunächst auf der Innenseite eines hülsenförmigen Trägers 41 ab. Das obere Ende des Trägers 41 ist mit einem Kragen 42 ausgerüstet. Das untere Ende des Trägers ragt in eine Ausnehmung 43 eines Gehäusebauteiles 44 hinein, welche nur einen geringfügig größeren Durchmesser hat als der Außendurchmesser des Trägers 41. Ein O-Ring 45 zwischen dem Träger 41 und der Innenseite der Ausnehmung 43 sichert die zentrische Position des Trägers 41. Zur Abstützung des Trägers 41 im Gehäuse 2 sind drei sich im wesentlichen axial erstreckende Stäbe 46 vorgesehen, die am Kragen 42 und am Gehäusebauteil 44 befestigt sind. Führt ein in dieser Weise aufgehängter Rotor 8 infolge von Stößen oder beim Durchfahren von Resonanzen Schwingungen aus, dann sind die Amplituden sehr klein und ausschließlich radial gerichtet. Der O-Ring 45 wirkt bei Schwingungen dieser Art als Dämpfungselement. Dadurch können die Pumpspalte zwischen den pumpaktiven Flächen, insbesondere zwischen den Stator- und Rotorringscheiben der Siegbahnstufen, sehr klein ausgebildet und damit eine sehr gute Pumpenwirkung erzielt werden.The exemplary embodiment according to FIGS. 7 and 8 is based the shaft 10 via its bearings 9 initially on the inside a sleeve-shaped carrier 41. The top end of the carrier 41 is equipped with a collar 42. The lower end of the The carrier projects into a recess 43 in a housing component 44 into it, which has only a slightly larger diameter than the outer diameter of the carrier 41. An O-ring 45 between the carrier 41 and the inside of the recess 43 secures the central position of the carrier 41. To support the carrier 41 in the housing 2 are three substantially axially extending Bars 46 are provided on the collar 42 and on the housing component 44 are attached. Introduces one hung in this way Rotor 8 due to shocks or when driving through resonances Vibrations, then the amplitudes are very small and only directed radially. The O-ring 45 acts Vibrations of this type as a damping element. This allows the pumping gaps between the active pumping surfaces, in particular between the stator and rotor ring disks of the Siegbahn stages, very small design and therefore a very good pump effect be achieved.

Fig. 9 zeigt ein Ausführungsbeispiel für eine Pumpe nach der Erfindung, bei der sich der Rotor auf einem feststehenden Zapfen 51 des Gehäuses 2 abstützt und der Antriebsmotor 11 als Außenläufermotor ausgebildet ist. Zur Befestigung der Stäbe 46 ist der Zapfen 51 an seinem oberen Ende mit einem Kragen 52 ausgerüstet. Der hülsenförmige Träger 41 weist an seinem unteren Ende einen nach innen gerichteten Rand 53 auf. Zwischen Kragen 52 und Rand 53 erstrecken sich die Stäbe 46.Fig. 9 shows an embodiment for a pump according to the Invention in which the rotor is on a fixed Pins 51 of the housing 2 supports and the drive motor 11 as External rotor motor is formed. For fastening the bars 46 is the pin 51 at its upper end with a collar 52 equipped. The sleeve-shaped carrier 41 has on its lower end an inward edge 53. Between Collar 52 and edge 53 extend the rods 46.

Im übrigen schließt sich an den Siegbahn-Pumpenabschnitt druckseitig ein Holweckpumpenabschnitt an, der aus dem Statorring 55 mit den wendelförmig gestalteten Vorsprüngen 56 und der Außenseite des zylindrischen Rotorabschnittes 57 besteht. Dieser trägt auf seiner Innenseite den Motorrotor.For the rest, the Siegbahn pump section follows on the pressure side to a Holweck pump section that comes from the stator ring 55 with the helically shaped projections 56 and Outside of the cylindrical rotor section 57. This carries the motor rotor on the inside.

An den Holweckpumpenabschnitt schließt sich noch ein Gaedepumpenabschnitt an. Dieser umfaßt statorseitig den Statorring 60 mit zwei umlaufenden Stegen 61, 62, welche die Nut 63 bilden, und rotorseitig den entsprechend verlängerten Rotorabschnitt 57. Den Einlaß in die Gaedepumpenstufen bilden eine oder mehrere Öffnungen 64 (vgl. auch Fig. 10) im oberen Steg 61. Diese liegen unmittelbar neben einem oder mehreren feststehenden, in die Nut 63 hineinragenden Vorsprüngen 65, die mit dem Rotor 57 den Sperrspalt 66 bilden. Die Auslaßöffnung(en) 67 befinden sich im unteren Steg 62 und münden in den Vorvakuumraum der Pumpe 1. Beim Ausführungsbeispiel nach Figur 10 ist die Nut 63 in zwei Abschnitte aufgeteilt. Es sind zwei parallel zueinander angeordnete Gaedepumpenstufen vorgesehen. Sie weisen jeweils die Einlaßöffnung 64 sowie die Auslaßöffnungen 67 auf und erstrecken sich jeweils über etwa 180°. Der Pfeil 68 kennzeichnet die Drehrichtung des Rotors 57.At the Holweck pump section there is also a Gaeda pump section on. This includes the stator ring 60 on the stator side with two circumferential webs 61, 62 which form the groove 63, and the correspondingly elongated rotor section on the rotor side 57. The inlet to the Gaedepumpstufen form an or several openings 64 (see also FIG. 10) in the upper web 61. These are located directly next to one or more fixed, in the groove 63 protruding projections 65 which with the Rotor 57 form the blocking gap 66. The outlet opening (s) 67 are located in the lower web 62 and open into the fore-vacuum space the pump 1. In the embodiment of Figure 10 is the groove 63 divided into two sections. There are two in parallel mutually arranged gate pump stages are provided. You point in each case the inlet opening 64 and the outlet openings 67 and each extend over approximately 180 °. The arrow 68 indicates the direction of rotation of the rotor 57.

Bei den Ausführungen nach den Figuren 11 und 12 ist die Nut 63 nicht mehr ringförmig gestaltet. Durch entsprechende Wahl der Nut-Tiefe (oder auch Nut-Breite) haben die sich zwischen Einlaß 64 und Auslaß 67 erstreckenden Abschnitte der Nut 63 einen abnehmenden (Fig. 11) bzw. ständig wechselnden (Fig. 12) Querschnitt. Dadurch wird der gewünschte Druckaufbau erzielt. Bei der Ausführung nach Fig. 12 sind mehrere Kammern 69 vorhanden, in denen nacheinander ein relativ langsamer Druckaufbau und eine relativ schnelle Expansion stattfinden. Der Druck nimmt von Kammer zu Kammer zu.In the embodiments according to FIGS. 11 and 12, the groove is 63 no longer designed in a ring shape. By appropriate choice of Groove depth (or groove width) are between the inlet 64 and outlet 67 extending portions of the groove 63 a decreasing (Fig. 11) or constantly changing (Fig. 12) Cross-section. The desired pressure build-up is thereby achieved. In the embodiment according to FIG. 12, several chambers 69 are present, in which a relatively slow pressure build-up in succession and relatively rapid expansion is taking place. The pressure increases from chamber to chamber.

Die Figuren 13 bis 18 zeigen Ausführungsformen für Siegbahnstufen, die mit Gaedestufen kombiniert sind. Die Außendurchmesser der rotierenden Ringscheiben 17 sind dazu derart gewählt, daß zwischen ihrer Peripherie und dem sie umgebenden Stator 4 jeweils ein äußerer Ringraum 71, 72 vorhanden ist. Weiterhin ist der Innendurchmesser der Statorringscheiben 15 derart gewählt, daß jeweils ein innerer Ringraum 73, 74 vorhanden ist. Aus Figur 13, welche eine Draufsicht auf eine Statorringscheibe mit zwei spiralförmigen Nuten 19 zeigt, ist ersichtlich, daß sich in den Ringräumen 71, 72 feststehende Vorsprünge 75, 76 bzw. 77, 78 befinden, die gemeinsam mit dem Außenumfang der Rotorringscheiben 16 bzw. dem rotierenden Zentralteil (z.B. Rotor 8 oder Welle 10) Sperrspalte 79, 80 bilden.Figures 13 to 18 show embodiments for Siegbahnstufen, which are combined with gaed stages. The outside diameter of the rotating ring disks 17 are selected in such a way that between its periphery and that surrounding it Stator 4 each have an outer annular space 71, 72. Furthermore, the inner diameter of the stator washers 15 chosen such that an inner annular space 73, 74 is present is. From Figure 13, which is a plan view of a Stator ring disk with two spiral grooves 19 shows is can be seen that stationary in the annular spaces 71, 72 Projections 75, 76 and 77, 78 are located together with the Outer circumference of the rotor ring disks 16 or the rotating one Central part (e.g. rotor 8 or shaft 10) locking gaps 79, 80 form.

Während des Betriebs dreht sich der Rotor in Richtung des Pfeiles 81 (Fig. 13). Diese Drehung bewirkt ein Mitreißen der Gasmoleküle in den beiden Abschnitten des Ringraumes 71 in Richtung der Pfeile 82, 83 (Gaedepumpeffekt).During operation, the rotor turns in the direction of the Arrow 81 (Fig. 13). This rotation causes the Gas molecules in the two sections of the annular space 71 in Direction of arrows 82, 83 (Gaedepumpeffekt).

Infolge des Vorhandenseins der Vorsprünge 75, 76 werden die Gase in die spiralförmigen Nuten nach innen gefördert (Siegbahnpumpeffekt) und gelangen dort in die Abschnitte des Ringraumes 73. Dort werden sie in Richtung der Pfeile 84, 85 mitgerissen und gelangen auf der Unterseite der in Figur 13 in Draufsicht dargestellten Statorringscheibe 16 in die Nuten 19, welche derart ausgebildet sind, daß sie die Gase wieder nach außen fördern.Due to the presence of the projections 75, 76, the Gases conveyed inwards into the spiral grooves (Siegbahnpumpeffekt) and get there into the sections of the annulus 73. There they are in the direction of arrows 84, 85 entrained and reach the bottom of the in Figure 13 in Stator ring disk 16 shown in plan view into the grooves 19, which are designed in such a way that they re-gas promote outside.

Beim Ausführungsbeispiel nach den Figuren 16 bis 18 sind die pumpaktiven Oberflächen dadurch vergrößert worden, daß die Höhe der äußeren Ringräume 71, 72 größer gewählt worden ist als die Dicke der rotierenden Scheiben 17 und daß die Scheiben 17 mit ihren äußeren Rändern in die Ringräume 71, 72 hineinragen. Die Vorsprünge 75, 76 müssen bei dieser Lösung U-förmig gestaltet sein (fig. 18). Auch innerhalb der inneren Ringräume kann die pumpwirksame Oberfläche vergrößert werden, wenn der rotierende Zentralteil mit Vorsprüngen ausgerüstet ist. Ein Beispiel für einen ringförmig gestalteten Vorsprung 86 ist in Figur 17 gestrichelt eingezeichnet.In the embodiment according to Figures 16 to 18 are the pump-active surfaces have been increased in that the height the outer annular spaces 71, 72 has been chosen larger than that Thickness of the rotating disks 17 and that the disks 17 with protrude their outer edges into the annular spaces 71, 72. The In this solution, projections 75, 76 must be U-shaped be (fig. 18). This can also occur within the inner annular spaces Pump effective surface area can be enlarged when the rotating Central part is equipped with projections. An example for a ring-shaped projection 86 is shown in FIG. 17 shown in dashed lines.

Die beschriebenen und in den Figuren 13 bis 18 dargestellten Lösungen für kombinierte Gaede-/Siegbahnstufen können anstelle der in den Pumpen nach den Figuren 1, 4 und 7 wirksamen Siegbahnstufen vorhanden sein. Besonders geeignet sind die kombinierten Stufen jedoch für in der Nähe der Vorvakuumseite befindliche Pumpenabschnitte. Die Anzahl der in den jeweiligen Ringräumen 71 bis 74 vorhandener Sperrspalte ist beliebig. Sie ist der Anzahl und der Ausbildung der auf den Statorringscheiben befindlichen Nuten 19 anzupassen.The described and shown in Figures 13 to 18 Solutions for combined Gaede / Siegbahn levels can be used instead the Siegbahnstufen effective in the pumps according to Figures 1, 4 and 7 to be available. The combined ones are particularly suitable However, steps for near the fore-vacuum side located pump sections. The number of in each Annular spaces 71 to 74 of the existing locking gaps are arbitrary. she is the number and design of the stator washers adjust existing grooves 19.

Claims (20)

  1. Friction vacuum pump (1) with differently shaped pump sections, of which the pump section on the inlet side consists of turbomolecular pump stages (14, 15) and another pump section consists of Siegbahn stages (16, 17) with spirally shaped grooves (19) in each case, the active pumping faces of the Siegbahn stages being formed, in each case, by those faces of an annular rotor disc and annular stator disc (16, 17) that face one another, characterised in that the first of the annular discs (16, 17) of the Siegbahn stages is an annular rotor disc (16), that the said first annular rotor disc has a smaller diameter than the other annular rotor discs (16), and that it carries, on its periphery, rotor blades (27) which are shortened compared with the rest of the rotor blades (15) of the turbomolecular pump stages (14, 15).
  2. Friction vacuum pump (1) with differently shaped pump sections, of which the pump section on the inlet side consists of turbomolecular pump stages (14, 15) and another pump section consists of Siegbahn stages (16, 17) with spirally shaped grooves (19) in each case, the active pumping faces of the Siegbahn stages being formed, in each case, by those faces of an annular rotor disc and annular stator disc (16, 17) that face one another, characterised in that the first of the annular discs (16, 17) of the Siegbahn stages is an annular stator disc (17), that the said first annular stator disc has a larger internal diameter than the other annular stator discs (17), and that it carries, on its inner side, stator blades which are shortened compared with the rest of the stator blades (14) of the turbomolecular pump stages (14, 15).
  3. Pump according to claim 1 or 2, characterised in that the annular stator discs (16) are furnished with the spiral grooves (19) in each case.
  4. Pump according to claim 1, 2 or 3, characterised in that the pump section consisting of the Siegbahn stages (16, 17) is adjoined by one or more other pump sections which are suitable for the intermediate range between molecular flow and viscous flow.
  5. Pump according to claim 4, characterised in that the other pump section or sections is/are constructed after the fashion of an impeller-type working machine, side-channel pump, Holweck pump, Gaede pump or the like.
  6. Pump according to claim 5, characterised in that the last pump stage on the fore-vacuum side comprises moving blades (22) on the rotor side and guide blades (23) on the stator side, the said guide blades (23) forming flow channels (24) which are furnished with apertures (25) directed towards the fore-vacuum side.
  7. Pump according to claim 5, characterised in that the last pump stage on the fore-vacuum side is constructed after the fashion of a side-channel pump, that an annular rotor disc (28) and an annular stator disc (29) are provided, that grooves (31, 32) which face one another are provided in those surfaces of the annular rotor disc (28) and annular stator disc that face one another, and the said grooves are constructed as components of the side-channel pump.
  8. Pump according to claim 7, characterised in that the grooves (31, 32) are essentially circularly shaped, and that one or more groove sections, in each case, form a side-channel pump stage.
  9. Pump according to claim 7 or 8, characterised in that two pairs of grooves, which are disposed so as to be concentric with one another, are provided and form side-channel pump stages.
  10. Pump according to claim 5, characterised in that the pump section on the fore-vacuum side consists of one or more Gaede pump stages.
  11. Pump according to claim 10, characterised in that two webs (61, 62), which are disposed parallel to one another and extend radially, form, jointly with a cylindrical rotor section (57), one or more Gaede pump stages, through the fact that the groove (63) formed by the webs (61, 62) is furnished with one or more inlet or outlet apertures (64, 67) and one or more projections (65) for forming one or more isolation gaps (66).
  12. Pump according to claim 11, characterised in that the groove (63), or a section of the said groove (63) that extends from an inlet (64) to an outlet (67), has a continuously decreasing cross-section.
  13. Pump according to claim 11, characterised in that the groove (63), or a section of the said groove (63) that extends from the inlet (64) to the outlet (67), has a constantly changing cross-section.
  14. Pump according to claim 13, characterised in that the cross-section of the groove (63), or of a section of the said groove (63), is shaped in such a way that a relatively slow pressure build-up and a relatively rapid expansion take place one after the other repeatedly.
  15. Pump according to one of the preceding claims, characterised in that at least one of the Siegbahn stages (16, 17) is combined with a Gaede stage.
  16. Pump according to claim 15, characterised in that at least one annular rotor disc (17) forms, with the stator (4), an outer annular space (71, 72) which, as a whole or in sections, is constructed as a Gaede pump stage with one or a number of projections (75, 76).
  17. Pump according to claim 15 or 16, characterised in that at least one annular stator disc (16) forms, with the rotor (8), an annular space (73, 74) which, as a whole or in sections, is constructed as a Gaede pump stage.
  18. Pump according to one of claims 15, 16, 17, characterised in that the height of the outer annular spaces (71, 72) is greater than the thickness of the annular rotor discs (17), and that the discs (17) project with their outer rims into the annular spaces (71, 72).
  19. Pump according to one of claims 15 to 18, characterised in that the rotor (8) is furnished, in the region of the inner annular spaces (73, 74), with means (86) for enlarging the active pumping surface.
  20. Pump according to one of the preceding claims, characterised in that the rotor (8) is supported on the inner side of a sleeve-shaped carrier (41) via bearings (9), and that the said carrier (41), for its part, is supported in the housing (2) via a number of bars (46), preferably three, which extend essentially axially.
EP94913098A 1993-05-03 1994-03-31 Friction vacuum pump with pump sections of different designs Expired - Lifetime EP0697069B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP98110191A EP0874159A3 (en) 1993-05-03 1994-03-31 Friction vacuum pump with Gaede pump stage

Applications Claiming Priority (3)

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DE4314418 1993-05-03
DE4314418A DE4314418A1 (en) 1993-05-03 1993-05-03 Friction vacuum pump with differently designed pump sections
PCT/EP1994/001011 WO1994025760A1 (en) 1993-05-03 1994-03-31 Friction vacuum pump with pump sections of different designs

Related Child Applications (1)

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EP98110191A Division EP0874159A3 (en) 1993-05-03 1994-03-31 Friction vacuum pump with Gaede pump stage

Publications (2)

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EP0697069A1 EP0697069A1 (en) 1996-02-21
EP0697069B1 true EP0697069B1 (en) 2000-05-24

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EP94913098A Expired - Lifetime EP0697069B1 (en) 1993-05-03 1994-03-31 Friction vacuum pump with pump sections of different designs

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EP (2) EP0874159A3 (en)
JP (1) JPH08511071A (en)
DE (2) DE4314418A1 (en)
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Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB9318801D0 (en) * 1993-09-10 1993-10-27 Boc Group Plc Improved vacuum pumps
US5496149A (en) * 1995-03-10 1996-03-05 Basf Corporation Thin plate turbine
DE29516599U1 (en) * 1995-10-20 1995-12-07 Leybold AG, 50968 Köln Friction vacuum pump with intermediate inlet
IT1281025B1 (en) * 1995-11-10 1998-02-11 Varian Spa TURBOMOLECULAR PUMP.
DE19632874A1 (en) * 1996-08-16 1998-02-19 Leybold Vakuum Gmbh Friction vacuum pump
WO1999061799A1 (en) * 1998-05-26 1999-12-02 Leybold Vakuum Gmbh Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump
TW504548B (en) * 1998-06-30 2002-10-01 Ebara Corp Turbo molecular pump
JP3788558B2 (en) * 1999-03-23 2006-06-21 株式会社荏原製作所 Turbo molecular pump
US6179573B1 (en) * 1999-03-24 2001-01-30 Varian, Inc. Vacuum pump with inverted motor
JP4104098B2 (en) * 1999-03-31 2008-06-18 エドワーズ株式会社 Vacuum pump
US6220824B1 (en) * 1999-06-21 2001-04-24 Varian, Inc. Self-propelled vacuum pump
DE59909182D1 (en) * 1999-07-19 2004-05-19 Sterling Fluid Sys Gmbh Displacement machine for compressible media
DE19942410A1 (en) * 1999-09-06 2001-03-08 Pfeiffer Vacuum Gmbh Vacuum pump
US6382249B1 (en) * 1999-10-04 2002-05-07 Ebara Corporation Vacuum exhaust system
US6508631B1 (en) 1999-11-18 2003-01-21 Mks Instruments, Inc. Radial flow turbomolecular vacuum pump
US6394747B1 (en) 2000-06-21 2002-05-28 Varian, Inc. Molecular drag vacuum pumps
JP3777498B2 (en) * 2000-06-23 2006-05-24 株式会社荏原製作所 Turbo molecular pump
DE10046766A1 (en) * 2000-09-21 2002-04-11 Leybold Vakuum Gmbh Compound-friction vacuum pump
JP2002138987A (en) 2000-10-31 2002-05-17 Seiko Instruments Inc Vacuum pump
US6503050B2 (en) * 2000-12-18 2003-01-07 Applied Materials Inc. Turbo-molecular pump having enhanced pumping capacity
US6607351B1 (en) * 2002-03-12 2003-08-19 Varian, Inc. Vacuum pumps with improved impeller configurations
GB0409139D0 (en) 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
DE10353034A1 (en) * 2003-11-13 2005-06-09 Leybold Vakuum Gmbh Multi-stage friction vacuum pump
DE10357546A1 (en) * 2003-12-10 2005-07-07 Pfeiffer Vacuum Gmbh Side channel pump stage
GB0614928D0 (en) * 2006-07-27 2006-09-06 Boc Group Plc Molecular Drag Pumping Mechanism
US20080056886A1 (en) * 2006-08-31 2008-03-06 Varian, S.P.A. Vacuum pumps with improved pumping channel cross sections
US7628577B2 (en) † 2006-08-31 2009-12-08 Varian, S.P.A. Vacuum pumps with improved pumping channel configurations
DE102006043327A1 (en) * 2006-09-15 2008-03-27 Oerlikon Leybold Vacuum Gmbh vacuum pump
GB0618745D0 (en) † 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
JP4885000B2 (en) * 2007-02-13 2012-02-29 株式会社ニューフレアテクノロジー Vapor growth apparatus and vapor growth method
JP5056152B2 (en) * 2007-05-15 2012-10-24 株式会社島津製作所 Turbo molecular pump
DE102008004297A1 (en) * 2008-01-15 2009-07-16 Oerlikon Leybold Vacuum Gmbh Turbo molecular pump
US8087907B2 (en) * 2008-03-26 2012-01-03 Ebara Corporation Turbo vacuum pump
US8109744B2 (en) * 2008-03-26 2012-02-07 Ebara Corporation Turbo vacuum pump
US8070419B2 (en) * 2008-12-24 2011-12-06 Agilent Technologies, Inc. Spiral pumping stage and vacuum pump incorporating such pumping stage
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage
JP2010174779A (en) * 2009-01-30 2010-08-12 Hitachi High-Technologies Corp Vacuum process device
JP5397138B2 (en) * 2009-10-02 2014-01-22 株式会社島津製作所 Turbo molecular pump
GB2474507B (en) * 2009-10-19 2016-01-27 Edwards Ltd Vacuum pump
CN102667169B (en) * 2009-12-11 2016-03-02 埃地沃兹日本有限公司 The tubular fixed component of thread groove exhaust portion and use the vacuum pump of these parts
EP2775148B1 (en) * 2011-10-31 2019-03-27 Edwards Japan Limited Stationary member and vacuum pump
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
JP6353195B2 (en) * 2013-05-09 2018-07-04 エドワーズ株式会社 Fixed disk and vacuum pump
DE102013213815A1 (en) * 2013-07-15 2015-01-15 Pfeiffer Vacuum Gmbh vacuum pump
DE102013214662A1 (en) * 2013-07-26 2015-01-29 Pfeiffer Vacuum Gmbh vacuum pump
JP6616560B2 (en) * 2013-11-28 2019-12-04 エドワーズ株式会社 Vacuum pump parts and composite vacuum pump
JP6692635B2 (en) * 2015-12-09 2020-05-13 エドワーズ株式会社 Connectable thread groove spacer and vacuum pump
JP7108377B2 (en) * 2017-02-08 2022-07-28 エドワーズ株式会社 Vacuum pumps, rotating parts of vacuum pumps, and unbalance correction methods
IT201700075054A1 (en) * 2017-07-04 2017-10-04 Agilent Tech Inc A Delaware Corporation Molecular pumping stage for vacuum pump and vacuum pump comprising said molecular pumping stage
GB2569314A (en) * 2017-12-12 2019-06-19 Edwards Ltd A turbomolecular pump and method and apparatus for controlling the pressure in a process chamber
GB2575450B (en) * 2018-07-09 2022-01-26 Edwards Ltd A variable inlet conductance vacuum pump, vacuum pump arrangement and method
JP2020186687A (en) * 2019-05-15 2020-11-19 エドワーズ株式会社 Vacuum pump and stationary component for screw groove pump part
JP7348753B2 (en) * 2019-05-31 2023-09-21 エドワーズ株式会社 Vacuum pump and connected thread groove spacer
GB2589151A (en) * 2019-11-25 2021-05-26 Edwards Ltd Molecular drag vacuum pump
JP2022143507A (en) * 2021-03-17 2022-10-03 エドワーズ株式会社 Vacuum pump

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE239213C (en) *
US3104802A (en) * 1963-09-24 Unified system vacuum pump
GB336001A (en) * 1929-07-09 1930-10-09 Edwin Rodolph Grote Improvements in pumps for obtaining high vacua
US1942139A (en) * 1930-12-26 1934-01-02 Central Scientific Co Molecular vacuum pump
US1975568A (en) * 1932-03-18 1934-10-02 Central Scientific Co Molecular vacuum pump
FR1443239A (en) * 1965-05-05 1966-06-24 Mechanical rotary vacuum pump
SU528388A1 (en) * 1965-06-25 1976-09-15 Институт Металлургии Имени А.А.Байкова Ан Ссср Molecular Vacuum Pump
FR2161179A5 (en) * 1971-11-16 1973-07-06 Cit Alcatel
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
JPS5267810A (en) * 1975-12-03 1977-06-04 Aisin Seiki Co Ltd High vacuum pump
DE3239328C2 (en) * 1982-10-23 1993-12-23 Pfeiffer Vakuumtechnik Magnetically mounted turbomolecular pump with vibration damping
JPS60116896A (en) * 1983-11-30 1985-06-24 Hitachi Ltd Vacuum pump
JPS60116895A (en) * 1983-11-30 1985-06-24 Hitachi Ltd Vacuum pump
JPS60125795A (en) * 1983-12-09 1985-07-05 Osaka Shinku Kiki Seisakusho:Kk Composite vacuum pump
JPS60139098U (en) * 1984-02-24 1985-09-13 セイコ−精機株式会社 Combined axial flow molecular pump
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump
SU1285198A1 (en) * 1985-01-04 1987-01-23 Предприятие П/Я А-1614 Two-stage turbomolecular vacuum pump
JPS61226596A (en) * 1985-03-29 1986-10-08 Hitachi Ltd Turbo particle pump
JPS6385291A (en) * 1986-09-29 1988-04-15 Hitachi Ltd Vacuum pump
DE3922782A1 (en) * 1988-07-12 1990-02-08 Beijing Lab Of Vacuum Physics Molecular pump in a unit design
DE3919529C2 (en) * 1988-07-13 1994-09-29 Osaka Vacuum Ltd Vacuum pump
US5219269A (en) * 1988-07-13 1993-06-15 Osaka Vacuum, Ltd. Vacuum pump
IT1241431B (en) * 1990-03-09 1994-01-17 Varian Spa PERFECTED TURBOMOLECULAR PUMP.
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps

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EP0874159A3 (en) 1998-11-18
DE59409375D1 (en) 2000-06-29
WO1994025760A1 (en) 1994-11-10
EP0697069A1 (en) 1996-02-21
US5695316A (en) 1997-12-09
DE4314418A1 (en) 1994-11-10
JPH08511071A (en) 1996-11-19
EP0874159A2 (en) 1998-10-28

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