IT1241431B - PERFECTED TURBOMOLECULAR PUMP. - Google Patents

PERFECTED TURBOMOLECULAR PUMP.

Info

Publication number
IT1241431B
IT1241431B IT67163A IT6716390A IT1241431B IT 1241431 B IT1241431 B IT 1241431B IT 67163 A IT67163 A IT 67163A IT 6716390 A IT6716390 A IT 6716390A IT 1241431 B IT1241431 B IT 1241431B
Authority
IT
Italy
Prior art keywords
rotor
tangential flow
vanes
stages
channel
Prior art date
Application number
IT67163A
Other languages
Italian (it)
Other versions
IT9067163A0 (en
IT9067163A1 (en
Inventor
Fausto Casaro
Luigi Dolcino
Mars Hablanian
Giampaolo Levi
Original Assignee
Varian Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Spa filed Critical Varian Spa
Publication of IT9067163A0 publication Critical patent/IT9067163A0/en
Priority to IT67163A priority Critical patent/IT1241431B/en
Priority to AT91200302T priority patent/ATE113343T1/en
Priority to ES91200302T priority patent/ES2064873T3/en
Priority to DE69104749T priority patent/DE69104749T2/en
Priority to EP91200302A priority patent/EP0445855B1/en
Priority to JP3043601A priority patent/JPH0826877B2/en
Publication of IT9067163A1 publication Critical patent/IT9067163A1/en
Priority to US07/917,564 priority patent/US5238362A/en
Application granted granted Critical
Publication of IT1241431B publication Critical patent/IT1241431B/en
Priority to HK97101526A priority patent/HK1000016A1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

A turbomolecular pump comprising, in addition to usual axial flow pumping stages consisting of alternated rotors (1,1a) and stators (2,2a), one or more tangential flow pumping stages (10;30) arranged at the exhaust side of the pump, to raise up the compression ratio. Each axial flow stage consists of a plane disk rotor (12;35) encompassed to a coplanar annular stator (13;36), spaced apart from the rotor disk, so that a free annular channel is formed in-between (14;38), in which channel the pumped gases move along a tangential flow. Such channel is closed by a baffle (15;39), and communicates with a suction port (17;40) and a discharge port (18;41). The plane disk rotor may be provided of vanes (37,37a,37b). It is possible to combine tangential flow stages (10) having rotor without vanes (12) and tangential flow stages (30) having rotor with vanes (35); in such a way it is possible to raise the exhaust pressure up to the atmospheric pressure, and to discharge directly in the atmosphere. <IMAGE>
IT67163A 1990-03-09 1990-03-09 PERFECTED TURBOMOLECULAR PUMP. IT1241431B (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
IT67163A IT1241431B (en) 1990-03-09 1990-03-09 PERFECTED TURBOMOLECULAR PUMP.
EP91200302A EP0445855B1 (en) 1990-03-09 1991-02-13 Improved turbomolecular pump
ES91200302T ES2064873T3 (en) 1990-03-09 1991-02-13 PERFECTED TURBOMOLECULAR PUMP.
DE69104749T DE69104749T2 (en) 1990-03-09 1991-02-13 Improved turbomolecular pump.
AT91200302T ATE113343T1 (en) 1990-03-09 1991-02-13 IMPROVED TURBOMOLECULAR PUMP.
JP3043601A JPH0826877B2 (en) 1990-03-09 1991-03-08 Turbo molecular pump
US07/917,564 US5238362A (en) 1990-03-09 1992-07-21 Turbomolecular pump
HK97101526A HK1000016A1 (en) 1990-03-09 1997-07-09 Improved turbomolecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT67163A IT1241431B (en) 1990-03-09 1990-03-09 PERFECTED TURBOMOLECULAR PUMP.

Publications (3)

Publication Number Publication Date
IT9067163A0 IT9067163A0 (en) 1990-03-09
IT9067163A1 IT9067163A1 (en) 1991-09-09
IT1241431B true IT1241431B (en) 1994-01-17

Family

ID=11300124

Family Applications (1)

Application Number Title Priority Date Filing Date
IT67163A IT1241431B (en) 1990-03-09 1990-03-09 PERFECTED TURBOMOLECULAR PUMP.

Country Status (7)

Country Link
EP (1) EP0445855B1 (en)
JP (1) JPH0826877B2 (en)
AT (1) ATE113343T1 (en)
DE (1) DE69104749T2 (en)
ES (1) ES2064873T3 (en)
HK (1) HK1000016A1 (en)
IT (1) IT1241431B (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4314418A1 (en) * 1993-05-03 1994-11-10 Leybold Ag Friction vacuum pump with differently designed pump sections
GB9318801D0 (en) * 1993-09-10 1993-10-27 Boc Group Plc Improved vacuum pumps
US5456575A (en) * 1994-05-16 1995-10-10 Varian Associates, Inc. Non-centric improved pumping stage for turbomolecular pumps
US5449270A (en) * 1994-06-24 1995-09-12 Varian Associates, Inc. Tangential flow pumping channel for turbomolecular pumps
IT1287016B1 (en) * 1996-07-18 1998-07-24 Varian Spa VACUUM PUMP.
IT1288737B1 (en) * 1996-10-08 1998-09-24 Varian Spa VACUUM PUMPING DEVICE.
IT1288738B1 (en) * 1996-10-08 1998-09-24 Varian Spa ELECTRONIC CONTROL UNIT FOR VACUUM PUMP.
US5709528A (en) * 1996-12-19 1998-01-20 Varian Associates, Inc. Turbomolecular vacuum pumps with low susceptiblity to particulate buildup
IT1289811B1 (en) 1996-12-27 1998-10-16 Varian Spa METHOD AND DIAGNOSTIC APPARATUS FOR VACUUM PUMP.
IT1297347B1 (en) 1997-12-24 1999-09-01 Varian Spa VACUUM PUMP.
US6071092A (en) * 1998-03-10 2000-06-06 Varian, Inc. Vacuum pump with improved back-up bearing assembly
US6074165A (en) * 1998-03-10 2000-06-13 Varian, Inc. Vacuum pump with magnetic bearing system and back-up bearings
TW504548B (en) 1998-06-30 2002-10-01 Ebara Corp Turbo molecular pump
US6179573B1 (en) * 1999-03-24 2001-01-30 Varian, Inc. Vacuum pump with inverted motor
EP1234982B1 (en) * 2001-02-22 2003-12-03 VARIAN S.p.A. Vacuum pump
US20070227357A1 (en) * 2006-03-31 2007-10-04 Mcdermott Wayne T Turbomolecular pump system for gas separation
US8247315B2 (en) * 2008-03-17 2012-08-21 Semiconductor Energy Laboratory Co., Ltd. Plasma processing apparatus and method for manufacturing semiconductor device
US8148839B2 (en) 2008-07-02 2012-04-03 Rosefsky Jonathan B Ribbon drive power generation and method of use
DE102013108482A1 (en) * 2013-08-06 2015-02-12 Pfeiffer Vacuum Gmbh Vacuum pump stage

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE239213C (en) *
FR1443239A (en) * 1965-05-05 1966-06-24 Mechanical rotary vacuum pump
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
KR890004933B1 (en) * 1985-07-31 1989-11-30 가부시기가이샤 히다찌세이사꾸쇼 Turbo molecular pump
JPS62113887A (en) * 1985-11-13 1987-05-25 Hitachi Ltd Vacuum pump
JPH0610477B2 (en) * 1987-05-13 1994-02-09 株式会社日立製作所 Turbo vacuum pump
JP2536571B2 (en) * 1987-12-25 1996-09-18 ダイキン工業株式会社 Eddy current type turbo machine
JPH01247794A (en) * 1988-03-29 1989-10-03 Daikin Ind Ltd Combined vacuum pump
DE3919529C2 (en) * 1988-07-13 1994-09-29 Osaka Vacuum Ltd Vacuum pump
JPH0249996A (en) * 1988-08-11 1990-02-20 Daikin Ind Ltd Vortex type vacuum pump

Also Published As

Publication number Publication date
JPH04224295A (en) 1992-08-13
DE69104749T2 (en) 1995-03-30
ATE113343T1 (en) 1994-11-15
ES2064873T3 (en) 1995-02-01
JPH0826877B2 (en) 1996-03-21
IT9067163A0 (en) 1990-03-09
HK1000016A1 (en) 1997-10-03
EP0445855A1 (en) 1991-09-11
EP0445855B1 (en) 1994-10-26
DE69104749D1 (en) 1994-12-01
IT9067163A1 (en) 1991-09-09

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Legal Events

Date Code Title Description
0001 Granted
TA Fee payment date (situation as of event date), data collected since 19931001

Effective date: 19950126