JPH0826877B2 - Turbo molecular pump - Google Patents
Turbo molecular pumpInfo
- Publication number
- JPH0826877B2 JPH0826877B2 JP3043601A JP4360191A JPH0826877B2 JP H0826877 B2 JPH0826877 B2 JP H0826877B2 JP 3043601 A JP3043601 A JP 3043601A JP 4360191 A JP4360191 A JP 4360191A JP H0826877 B2 JPH0826877 B2 JP H0826877B2
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- pump
- tangential flow
- pump stage
- stator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明はターボ分子ポンプに関
し、特に、より高圧まで動作範囲を拡張できるよう圧縮
比を高めたターボ分子ポンプに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a turbo molecular pump, and more particularly to a turbo molecular pump having an increased compression ratio so that the operating range can be extended to a higher pressure.
【０００２】[0002]
【従来の技術】従来のターボ分子ポンプは一般に10-7〜
10-1（又は１）Ｐa の動作範囲を有し、すなわちこれら
のポンプは大気に直接排気をすることができない。した
がって従来のターボ分子ポンプは、必要となる補助真空
を生成しかつ圧送された気体を大気圧で排出する補助ポ
ンプを連結する必要がある。しかしながら、補助ポンプ
の潤滑油によってターボ分子ポンプの汚れが生じ、これ
が低動作範囲における圧送作用を妨げる。これは短期間
におけるメンテナンスにより回避することができるが、
このために真空装置の高価な初期費用に加えてさらに運
転コストが上昇する。しかも、ターボ分子ポンプと補助
ポンプとの連結は手間がかかり、ほとんどの適用におい
て不都合となる。2. Description of the Related Art Conventional turbo molecular pumps are generally 10 -7 〜
It has an operating range of 10 -1 (or 1) Pa, ie these pumps cannot pump directly to the atmosphere. Therefore, in the conventional turbo molecular pump, it is necessary to connect an auxiliary pump that generates a necessary auxiliary vacuum and discharges the pumped gas at atmospheric pressure. However, the lubricating oil of the auxiliary pump causes fouling of the turbomolecular pump, which impedes the pumping action in the low operating range. This can be avoided by short-term maintenance,
This further increases operating costs in addition to the expensive initial cost of the vacuum system. Moreover, the connection between the turbo molecular pump and the auxiliary pump is time-consuming and inconvenient in most applications.
【０００３】上記の補助ポンプの必要性を減じるため
に、いわゆる複合型ターボ分子ポンプが開発されてい
る。米国特許公報第 4732529号、第 4826393号及び第 4
797068号は、圧縮比上昇部を備えたターボ分子ポンプを
開示する。この圧縮比上昇部は、気体を高真空部から簡
単な排気装置（例えば薄板ポンプ）へ案内する螺旋溝付
きロータ（又はねじロータ）からなる。この種の複合型
ターボ分子ポンプは複数の補助真空ポンプからなる複雑
な排気装置を必要としないものの、気体を大気圧で排出
することができないためにやはり補助ポンプを必要とす
る。In order to reduce the need for the above auxiliary pumps, so-called hybrid turbomolecular pumps have been developed. U.S. Patent Publication Nos. 4732529, 4826393 and 4
No. 797068 discloses a turbo molecular pump having a compression ratio increasing section. The compression ratio increasing section is composed of a rotor with a spiral groove (or a screw rotor) for guiding the gas from the high vacuum section to a simple exhaust device (for example, a thin plate pump). Although this type of composite turbo-molecular pump does not require a complicated exhaust device including a plurality of auxiliary vacuum pumps, it also needs an auxiliary pump because it cannot discharge gas at atmospheric pressure.
【０００４】低い到達圧力（３×10-2Ｐa)に達しうる新
型のラフポンプが開発されている。「真空科学技術(J.V
ac.Sci.Technol.)」第６巻第４号2518〜2521（1988年７
／８月号）に記載されているように、このポンプは、半
径流ポンプ段及び排気側の周流ポンプ段を備えたターボ
真空ラフポンプであり、半径流ポンプ段は圧送気流を半
径方向に案内する溝付き通路内で回転する羽根車からな
り、周流ポンプ段はポンプが大気圧で排気可能であるよ
うに圧力を上昇させる。しかしながら、このポンプはタ
ーボ分子ポンプを代替し得ない単なるラフポンプであ
る。ターボ分子ポンプの到達圧力（10-7Ｐa)は、このラ
フポンプの到達圧力（10-2Ｐa)よりも数段低い値であ
る。A new type of rough pump capable of reaching a low ultimate pressure (3 × 10 -2 Pa) has been developed. `` Vacuum science and technology (JV
ac.Sci.Technol.) ", Vol. 6, No. 4, 2518-2521 (July 1988)
/ August issue), this pump is a turbo vacuum rough pump having a radial flow pump stage and a peripheral flow pump stage on the exhaust side, and the radial flow pump stage guides the compressed air flow in the radial direction. Consisting of an impeller rotating in a grooved passage, the peripheral pump stage raises the pressure so that the pump can exhaust at atmospheric pressure. However, this pump is just a rough pump that cannot replace the turbomolecular pump. The ultimate pressure (10 -7 Pa) of the turbo molecular pump is several times lower than the ultimate pressure (10 -2 Pa) of this rough pump.
【０００５】[0005]
【発明が解決しようとする課題】本発明の第１の目的
は、高圧縮比を備えたターボ分子ポンプを提供すること
にある。本発明の第２の目的は、補助ポンプを連結する
ことなく大気圧での排気が可能なターボ分子ポンプを提
供することにある。本発明の第３の目的は、同様の動作
範囲を有する従来の真空システムに比べて比較的扱いが
容易なターボ分子ポンプを提供することにある。SUMMARY OF THE INVENTION The first object of the present invention is to provide a turbo-molecular pump having a high compression ratio. A second object of the present invention is to provide a turbo molecular pump capable of exhausting at atmospheric pressure without connecting an auxiliary pump. A third object of the present invention is to provide a turbomolecular pump that is relatively easy to handle compared to conventional vacuum systems that have similar operating ranges.
【０００６】[0006]
【課題を解決するための手段】上記の目的を達成するた
めに、本発明に係るターボ分子ポンプは、互いに逆方向
に傾斜した羽根群をそれぞれに備えたロータ及びステー
タを交互に配設してなる、気体を軸流方向に圧送する複
数の軸流ポンプ段を吸気側に具備したターボ分子ポンプ
において、実質的に円滑な外周面を有した平板ロータ及
び該ロータと同一面上に配置されたステータからなるポ
ンプ段であって、それら平板ロータ及びステータの周辺
の一部に沿って相互間に、吸気口及び排気口に連通する
環状の自由通路を形成して、該吸気口から該排気口まで
気体を前記平板ロータに対し接線流方向に圧送する少な
くとも１つの接線流ポンプ段を、排気側で前記軸流ポン
プ段に結合したことを特徴とする。本発明の他の特徴に
よれば、粘性流れ範囲におけるポンプ効果を高めるため
に、ロータが複数の羽根を備えた羽根付ロータからなる
付加ポンプ段を、排気口の下流にさらに備えることがで
きる。In order to achieve the above object, a turbo-molecular pump according to the present invention has rotors and stators, each having blades inclined in opposite directions, arranged alternately. In a turbo-molecular pump having a plurality of axial pump stages for pumping gas in the axial direction on the intake side, a flat plate rotor having a substantially smooth outer peripheral surface and a rotor arranged on the same plane as the rotor A pump stage composed of a stator, around the flat plate rotor and the stator
To communicate with the intake port and the exhaust port along a part of
At least one tangential flow pump stage, which forms an annular free passage and pumps gas from the intake port to the exhaust port in the tangential flow direction to the flat plate rotor, is connected to the axial flow pump stage on the exhaust side. It is characterized by According to another feature of the invention, the rotor comprises a vaned rotor with a plurality of vanes in order to enhance the pumping effect in the viscous flow range.
An additional pump stage may further be provided downstream of the exhaust .
【０００７】[0007]
【実施例】以下、添付図面を参照して本発明の実施例を
説明する。図１に示したように、本発明に係るターボ分
子ポンプは、従来公知のように、円筒形のポンプ胴３に
収容されたそれぞれロータ１ないし１ａ及びステータ２
ないし２ａからなる所定数の軸流ポンプ段を具備する。
ロータ１ａ及びステータ２ａからなるポンプ段をさらに
図２に示す。各ロータは回転軸６（以下、軸６という）
に取着されたディスク５からなり、ディスク５はその周
縁に半径方向へ突出する傾斜羽根７，７ａ，７ｂを担持
する。各ステータはロータの軸６を受ける中心穴を備え
た同様のディスクからなる。各ステータはポンプ胴３に
固定され、羽根９，９ａ，９ｂを備えたディスク８から
なる。この羽根９，９ａ，９ｂは、ロータの羽根７，７
ａ，７ｂの傾斜方向と反対方向に傾斜する。Embodiments of the present invention will be described below with reference to the accompanying drawings. As shown in FIG. 1, the turbo-molecular pump according to the present invention is, as is conventionally known, a rotor 1 to 1a and a stator 2 which are housed in a cylindrical pump body 3, respectively.
2a to a predetermined number of axial pump stages.
The pump stage consisting of the rotor 1a and the stator 2a is further shown in FIG. Each rotor has a rotating shaft 6 (hereinafter referred to as shaft 6)
The disk 5 is attached to the disk 5, and the disk 5 carries inclined blades 7, 7a, 7b protruding in the radial direction on the periphery thereof. Each stator consists of a similar disk with a central hole that receives the shaft 6 of the rotor. Each stator is fixed to the pump body 3 and consists of a disk 8 with vanes 9, 9a, 9b. The blades 9, 9a, 9b are the blades 7, 7 of the rotor.
It is inclined in the opposite direction to the inclination direction of a and 7b.
【０００８】吸気側から入る気体は（矢印Ａで示す）、
上記の軸流ポンプ段によって円筒形のポンプ胴３の軸線
に平行な方向へ圧送される。すなわち交互に配置したロ
ータ及びステータを通って、図１の矢印Ｂで示したよう
に気体の軸流が生じる。本発明によれば、異なる概念に
よる１つ又は複数のポンプ段が、軸流ポンプ段の下流に
付設される。図１にこのような２つのポンプ段を包括的
に参照符号10及び30を付して示す。各ポンプ段10及び30
はやはり、軸６に取着したロータとポンプ胴３に固定し
たステータとを備える。これらのポンプ段の構造細部を
図２〜図４に示す。The gas entering from the intake side (indicated by arrow A) is
The axial pump stage described above pumps in a direction parallel to the axis of the cylindrical pump body 3. That is, an axial flow of gas is generated as shown by an arrow B in FIG. 1 through the rotors and the stators arranged alternately. According to the invention, one or more pump stages according to different concepts are added downstream of the axial pump stage. Two such pump stages are shown generically in FIG. 1 with reference numerals 10 and 30. Each pump stage 10 and 30
Again comprises a rotor mounted on the shaft 6 and a stator fixed on the pump shell 3. The structural details of these pump stages are shown in FIGS.
【０００９】図１〜図３に示したように、ポンプ段10は
軸６に固定した平板ディスクからなるロータ12を備え
る。ロータ12は、実質的同一面にありロータ12から離間
した環形状のステータ13によって包囲され、これにより
ロータとステータとの間に環状の自由通路14が形成され
る。バッフル15は上方の閉鎖板21及び下方の閉鎖板23に
それぞれ設けた吸気口17及び排気口18の間で通路14を遮
断する。閉鎖板21及び23は、例えば閉鎖板21の下向き縁
部22を接続する等適当な手段によって相互に連結され、
ポンプ段を収容する閉鎖ケーシングを形成する。軸６を
通すために、閉鎖板21及び23の双方に中心穴を設ける。
バッフル15は、図２及び図３に示したようにステータ13
の半径方向突起でもよいし、又はステータ13に堅固に固
定した別体の部材でもよい。As shown in FIGS. 1-3, the pump stage 10 comprises a rotor 12 consisting of a flat plate fixed to the shaft 6. The rotor 12 is surrounded by a ring-shaped stator 13 that is substantially coplanar and spaced from the rotor 12, thereby forming an annular free passage 14 between the rotor and the stator. The baffle 15 blocks the passage 14 between the intake port 17 and the exhaust port 18 provided in the upper closing plate 21 and the lower closing plate 23, respectively. The closure plates 21 and 23 are interconnected by any suitable means, such as connecting the downward edges 22 of the closure plate 21,
A closed casing is formed that houses the pump stage. A central hole is provided in both closure plates 21 and 23 for the passage of the shaft 6.
The baffle 15 is a stator 13 as shown in FIGS.
, Or a separate member that is rigidly fixed to the stator 13.
【００１０】上記のポンプ段の動作を以下に説明する。
軸流ポンプ段によって圧送された気体は、吸気口17に入
り（図１及び図２に矢印Ｄで示す）、そして通路14に進
入する。ここで気体分子はロータ12の回転ディスクに衝
突し、ロータ12の接線方向成分速度を保持する（矢印Ｅ
で示す）。この過程により、気体分子は自由通路14内で
接線流に従って吸気口17から排気口18まで移送され、排
気口18を通って通路14から流出する（矢印Ｆで示す）。
自由通路14内で生じる気体の流れは、ロータの接線速度
方向に平行であるため「接線流」として説明する。The operation of the above pump stage will be described below.
The gas pumped by the axial pump stage enters the inlet 17 (indicated by the arrow D in FIGS. 1 and 2) and enters the passage 14. Here, the gas molecules collide with the rotating disk of the rotor 12 and maintain the tangential component velocity of the rotor 12 (arrow E).
). By this process, the gas molecules are transferred from the intake port 17 to the exhaust port 18 along the tangential flow in the free passage 14 and flow out of the passage 14 through the exhaust port 18 (shown by an arrow F).
The gas flow generated in the free passage 14 is parallel to the tangential velocity direction of the rotor, and is therefore described as "tangential flow".
【００１１】上記の接線流ポンプ段10は分子流すなわち
過渡流の圧力範囲において効果的であり、出口圧力を従
来のターボ分子ポンプの一般的出口圧力である約１Ｐa
から103 Ｐa もしくはそれ以上まで高めることができ
る。より高い圧力範囲、すなわち粘性流れの範囲におい
ては、平板ディスクロータを備えたこの接線流ポンプ段
はもはや効果がない。そこで、図４に詳細に示したよう
な異なる形式のロータが、出口圧力をさらに大気圧まで
高めることができる。The tangential flow pump stage 10 described above is effective in the molecular or transient flow pressure range and has an outlet pressure of about 1 Pa, which is the typical outlet pressure of conventional turbomolecular pumps.
Can be increased up to 10 3 Pa or higher. In the higher pressure range, viscous flow range, this tangential flow pump stage with a flat disk rotor is no longer effective. Thus, different types of rotors, as detailed in FIG. 4, can increase the outlet pressure even further to atmospheric pressure.
【００１２】再び図１を参照すれば、粘性流れ範囲にお
いて効果的な第２の接線流ポンプ段が参照符号30で示さ
れる。ポンプ段30はポンプ段10の下流に連続して配置さ
れる。ポンプ段30はポンプ段10と同様に、下板33に連結
した下向き縁部32を備えた上板31からなる閉鎖ケーシン
グを備える。軸６はこのケーシング内を軸方向に延び、
周縁に羽根37，37ａ，37ｂを備えたディスクロータ35を
担持する。羽根37，37ａ，37ｂはロータ35の面に直交す
る面上に位置する。ロータと同一面にある環状ステータ
36がロータ35から離間してロータ35を包囲し、これによ
りロータの羽根の周縁とステータとの間に環状の自由通
路38が形成される。バッフル39は、上板31に設けた吸気
口40と下板33に設けた排気口41との間で、自由通路38を
遮断する。Referring again to FIG. 1, a second tangential flow pump stage that is effective in the viscous flow range is shown at 30. The pump stage 30 is continuously arranged downstream of the pump stage 10. The pump stage 30, like the pump stage 10, comprises a closed casing consisting of an upper plate 31 with a downward edge 32 connected to a lower plate 33. The shaft 6 extends axially in this casing,
A disk rotor 35 having blades 37, 37a, 37b on its periphery is carried. The blades 37, 37a, 37b are located on a plane orthogonal to the plane of the rotor 35. Annular stator flush with rotor
A space 36 separates from the rotor 35 and surrounds the rotor 35, thereby forming an annular free passage 38 between the periphery of the rotor blades and the stator. The baffle 39 blocks the free passage 38 between the intake port 40 provided in the upper plate 31 and the exhaust port 41 provided in the lower plate 33.
【００１３】図１に示したように、ポンプ段10の排気口
18から排出された気体は、ポンプ段30の吸気口40に入り
（矢印Ｇで示す）、ロータとステータとの間の自由通路
38に進入する。ここで、気体分子はロータに衝突するこ
とにより運動エネルギーを獲得し、接線速度成分を有し
た回流が自由通路38内に生じ、気体は吸気口40から排気
口41へと圧送される。この最終段において、圧力は約10
5 Ｐa まで上昇するため、ポンプはポンプ胴３の排気口
43から直接大気に排気することができる。As shown in FIG. 1, the exhaust port of the pump stage 10
The gas discharged from 18 enters the intake port 40 of the pump stage 30 (indicated by arrow G), and the free passage between the rotor and the stator.
Enter 38. Here, the gas molecules acquire kinetic energy by colliding with the rotor, a circulating flow having a tangential velocity component is generated in the free passage 38, and the gas is pumped from the intake port 40 to the exhaust port 41. At this final stage, the pressure is about 10
As the pump rises to 5 Pa, the pump is the exhaust port of the pump body 3.
It can be exhausted directly to the atmosphere from 43.
【００１４】軸流ポンプ段及び接線流ポンプ段の両方を
備えた上記のターボ分子ポンプにおけるロータの周速度
は、通常 250ｍ／ｓ以上であり、好ましくは 350〜 400
ｍ／ｓである。例えば直径 100mm（0.１ｍ）のロータを
備えた小型ポンプにおいて、ロータの角速度（Ｖa)は毎
分 50000回転であり、周速度（Ｖp) 260ｍ／ｓを得る
（Ｖp ＝２πr ・Ｖa)。より大径のロータに対しては、
周速度を 250ｍ／ｓ以下に下げない条件で角速度を小さ
くすることができる。The peripheral speed of the rotor in the above-mentioned turbomolecular pump having both an axial flow pump stage and a tangential flow pump stage is usually 250 m / s or more, preferably 350 to 400.
m / s. For example, in a small pump provided with a rotor having a diameter of 100 mm (0.1 m), the angular velocity (Va) of the rotor is 50,000 rpm, and the peripheral velocity (Vp) is 260 m / s (Vp = 2πr · Va). For larger diameter rotors,
The angular velocity can be reduced under the condition that the peripheral velocity is not reduced to 250 m / s or less.
【００１５】上記の説明から明らかなように、平板ロー
タ型式又は羽根付きロータ型式からなる軸流ポンプ段及
び接線流ポンプ段のいずれの個数も、本発明の範囲から
逸脱することなく特定の適用に従って変更することがで
きる。As will be apparent from the above description, any number of axial and tangential pump stages of the flat plate rotor type or vane rotor type may be adapted to a particular application without departing from the scope of the invention. Can be changed.
【図１】本発明によるターボ分子ポンプの部分軸方向断
面図である。FIG. 1 is a partial axial sectional view of a turbo molecular pump according to the present invention.
【図２】図１のポンプの一部を示す斜視図で、第１実施
例による接線流ポンプ段を部分的に切欠いて示す。2 is a perspective view of a portion of the pump of FIG. 1, showing the tangential flow pump stage according to the first embodiment in partial cutaway.
【図３】図２のポンプ段の部分切欠平面図である。3 is a partial cutaway plan view of the pump stage of FIG. 2. FIG.
【図４】第２実施例による接線流ポンプ段の部分切欠斜
視図である。FIG. 4 is a partial cutaway perspective view of a tangential flow pump stage according to a second embodiment.
１，１ａ，12，35…ロータ ２，２ａ，13，36…ステータ ６…回転軸 ７，９，37…羽根 10，30…接線流ポンプ段 14，38…自由通路 15，39…バッフル 17，40…吸気口 18，41…排気口 1, 1a, 12, 35 ... Rotor 2, 2a, 13, 36 ... Stator 6 ... Rotating shaft 7, 9, 37 ... Vane 10, 30 ... Tangent flow pump stage 14, 38 ... Free passage 15, 39 ... Baffle 17, 40 ... Intake port 18, 41 ... Exhaust port
───────────────────────────────────────────────────── フロントページの続き (72)発明者 ジャンパオロ レビ イタリア国，10143 トゥリン，ピアッツ ァ リソルジメント 20 (56)参考文献 特開 平２−49996（ＪＰ，Ａ) ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Jampaolo Levi Italy, 10143 Turin, Piazza Resolvement 20 (56) Reference JP-A-2-49996 (JP, A)
Claims (8)
れに備えたロータ及びステータを交互に配設してなる、
気体を軸流方向に圧送する複数の軸流ポンプ段を吸気側
に具備したターボ分子ポンプにおいて、実質的に円滑な外周面を有した平板 ロータ及び該ロータ
と同一面上に配置されたステータからなるポンプ段であ
って、それら平板ロータ及びステータの周辺の一部に沿
って相互間に、吸気口及び排気口に連通する環状の自由
通路を形成して、該吸気口から該排気口まで気体を前記
平板ロータに対し接線流方向に圧送する少なくとも１つ
の接線流ポンプ段を、排気側で前記軸流ポンプ段に結合
したことを特徴とするターボ分子ポンプ。1. A rotor and a stator, each of which is provided with blade groups inclined in opposite directions, are alternately arranged.
In a turbo molecular pump having a plurality of axial pump stages for pumping gas in the axial direction on the intake side, a flat plate rotor having a substantially smooth outer peripheral surface and the rotor
A pump stage consisting of a stator arranged on the same plane as that of the flat plate rotor and a part of the periphery of the stator.
An annular free passage that communicates with the intake and exhaust ports
A passage is formed to allow gas to flow from the intake port to the exhaust port.
A turbo-molecular pump, characterized in that at least one tangential flow pump stage for feeding in a tangential flow direction to a flat plate rotor is connected to the axial flow pump stage on the exhaust side.
プ段を排気側にさらに具備し、該付加ポンプ段は、複数
の羽根を備えた羽根付ロータ及び該ロータと同一面上に
配置されたステータからなり、それら羽根付ロータ及び
ステータの周辺の一部に沿って該羽根の周縁と該ステー
タとの間に、吸気口及び排気口に連通する環状の自由通
路を形成して、該吸気口から該排気口まで気体を前記羽
根付ロータに対し接線流方向に圧送する、請求項１記載
のターボ分子ポンプ。2. An additional pump stage arranged downstream of the exhaust port is further provided on the exhaust side , and the additional pump stage is provided with a bladed rotor having a plurality of blades and on the same plane as the rotor.
Consists arranged stator, between the peripheral and the stay <br/> data of said blade along a portion of the periphery thereof vaned rotor and stator, the free passage of the annular communicating with the intake port and an exhaust port to form, the feather the gas from the intake port to the exhaust port
NETSUKE rotor to you pumped into tangential flow direction, a turbo molecular pump according to claim 1, wherein.
けられる請求項２記載のターボ分子ポンプ。3. The turbo-molecular pump according to claim 2, wherein the vanes are provided orthogonal to a surface of the rotor.
排気口との間に配置したバッフルにより両端部を定めら
れる請求項１〜３のいずれか１つに記載のターボ分子ポ
ンプ。4. The turbo-molecular pump according to claim 1, wherein both ends of the annular free passage are defined by baffles arranged between the intake port and the exhaust port.
プ段の前記ロータと、気体を接線流方向に圧送する前記
接線流ポンプ段の前記ロータとを共通の回転軸に取着し
た請求項１記載のターボ分子ポンプ。5. The common rotating shaft is mounted with the rotor of the axial flow pump stage that pumps gas in the axial direction and the rotor of the tangential flow pump stage that pumps gas in the tangential flow direction. Item 1. A turbo molecular pump according to item 1.
タをさらに前記回転軸に取着した請求項１，２又は５記
載のターボ分子ポンプ。6. The turbo molecular pump according to claim 1, wherein the rotor of the tangential flow type additional pump stage is further attached to the rotary shaft.
及び前記付加ポンプ段の各々の前記ロータは、作動時に
各々少なくとも２５０ｍ／ｓの周速度で回転する請求項
５又は６記載のターボ分子ポンプ。7. The axial flow pump stage and the tangential flow pump stage
7. The turbomolecular pump according to claim 5 or 6, wherein the rotor of each of the additional pump stages rotates at a peripheral speed of at least 250 m / s during operation.
段の各々を、吸気口及び排気口を備えた上板及び下板か
らなるケーシングに収容した請求項１又は２記載のター
ボ分子ポンプ。8. The tangential flow pump stage and the additional pump
The turbomolecular pump according to claim 1 or 2, wherein each of the stages is housed in a casing including an upper plate and a lower plate having an intake port and an exhaust port.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT67163A IT1241431B (en) | 1990-03-09 | 1990-03-09 | PERFECTED TURBOMOLECULAR PUMP. |
| IT67163A/90 | 1990-03-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04224295A JPH04224295A (en) | 1992-08-13 |
| JPH0826877B2 true JPH0826877B2 (en) | 1996-03-21 |
Family
ID=11300124
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3043601A Expired - Lifetime JPH0826877B2 (en) | 1990-03-09 | 1991-03-08 | Turbo molecular pump |
Country Status (7)
| Country | Link |
|---|---|
| EP (1) | EP0445855B1 (en) |
| JP (1) | JPH0826877B2 (en) |
| AT (1) | ATE113343T1 (en) |
| DE (1) | DE69104749T2 (en) |
| ES (1) | ES2064873T3 (en) |
| HK (1) | HK1000016A1 (en) |
| IT (1) | IT1241431B (en) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4314418A1 (en) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Friction vacuum pump with differently designed pump sections |
| GB9318801D0 (en) * | 1993-09-10 | 1993-10-27 | Boc Group Plc | Improved vacuum pumps |
| US5456575A (en) * | 1994-05-16 | 1995-10-10 | Varian Associates, Inc. | Non-centric improved pumping stage for turbomolecular pumps |
| US5449270A (en) * | 1994-06-24 | 1995-09-12 | Varian Associates, Inc. | Tangential flow pumping channel for turbomolecular pumps |
| IT1287016B1 (en) * | 1996-07-18 | 1998-07-24 | Varian Spa | VACUUM PUMP. |
| IT1288737B1 (en) * | 1996-10-08 | 1998-09-24 | Varian Spa | VACUUM PUMPING DEVICE. |
| IT1288738B1 (en) * | 1996-10-08 | 1998-09-24 | Varian Spa | ELECTRONIC CONTROL UNIT FOR VACUUM PUMP. |
| US5709528A (en) * | 1996-12-19 | 1998-01-20 | Varian Associates, Inc. | Turbomolecular vacuum pumps with low susceptiblity to particulate buildup |
| IT1289811B1 (en) | 1996-12-27 | 1998-10-16 | Varian Spa | METHOD AND DIAGNOSTIC APPARATUS FOR VACUUM PUMP. |
| IT1297347B1 (en) | 1997-12-24 | 1999-09-01 | Varian Spa | VACUUM PUMP. |
| US6071092A (en) * | 1998-03-10 | 2000-06-06 | Varian, Inc. | Vacuum pump with improved back-up bearing assembly |
| US6074165A (en) * | 1998-03-10 | 2000-06-13 | Varian, Inc. | Vacuum pump with magnetic bearing system and back-up bearings |
| TW504548B (en) | 1998-06-30 | 2002-10-01 | Ebara Corp | Turbo molecular pump |
| US6179573B1 (en) * | 1999-03-24 | 2001-01-30 | Varian, Inc. | Vacuum pump with inverted motor |
| EP1234982B1 (en) * | 2001-02-22 | 2003-12-03 | VARIAN S.p.A. | Vacuum pump |
| US20070227357A1 (en) * | 2006-03-31 | 2007-10-04 | Mcdermott Wayne T | Turbomolecular pump system for gas separation |
| US8247315B2 (en) * | 2008-03-17 | 2012-08-21 | Semiconductor Energy Laboratory Co., Ltd. | Plasma processing apparatus and method for manufacturing semiconductor device |
| US8148839B2 (en) | 2008-07-02 | 2012-04-03 | Rosefsky Jonathan B | Ribbon drive power generation and method of use |
| DE102013108482A1 (en) * | 2013-08-06 | 2015-02-12 | Pfeiffer Vacuum Gmbh | Vacuum pump stage |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE239213C (en) * | ||||
| FR1443239A (en) * | 1965-05-05 | 1966-06-24 | Mechanical rotary vacuum pump | |
| US3628894A (en) * | 1970-09-15 | 1971-12-21 | Bendix Corp | High-vacuum mechanical pump |
| KR890004933B1 (en) * | 1985-07-31 | 1989-11-30 | 가부시기가이샤 히다찌세이사꾸쇼 | Turbo molecular pump |
| JPS62113887A (en) * | 1985-11-13 | 1987-05-25 | Hitachi Ltd | Vacuum pump |
| JPH0610477B2 (en) * | 1987-05-13 | 1994-02-09 | 株式会社日立製作所 | Turbo vacuum pump |
| JP2536571B2 (en) * | 1987-12-25 | 1996-09-18 | ダイキン工業株式会社 | Eddy current type turbo machine |
| JPH01247794A (en) * | 1988-03-29 | 1989-10-03 | Daikin Ind Ltd | Combined vacuum pump |
| DE3919529C2 (en) * | 1988-07-13 | 1994-09-29 | Osaka Vacuum Ltd | Vacuum pump |
| JPH0249996A (en) * | 1988-08-11 | 1990-02-20 | Daikin Ind Ltd | Vortex type vacuum pump |
-
1990
- 1990-03-09 IT IT67163A patent/IT1241431B/en active IP Right Grant
-
1991
- 1991-02-13 DE DE69104749T patent/DE69104749T2/en not_active Expired - Lifetime
- 1991-02-13 EP EP91200302A patent/EP0445855B1/en not_active Expired - Lifetime
- 1991-02-13 ES ES91200302T patent/ES2064873T3/en not_active Expired - Lifetime
- 1991-02-13 AT AT91200302T patent/ATE113343T1/en not_active IP Right Cessation
- 1991-03-08 JP JP3043601A patent/JPH0826877B2/en not_active Expired - Lifetime
-
1997
- 1997-07-09 HK HK97101526A patent/HK1000016A1/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| IT1241431B (en) | 1994-01-17 |
| JPH04224295A (en) | 1992-08-13 |
| DE69104749T2 (en) | 1995-03-30 |
| ATE113343T1 (en) | 1994-11-15 |
| ES2064873T3 (en) | 1995-02-01 |
| IT9067163A0 (en) | 1990-03-09 |
| HK1000016A1 (en) | 1997-10-03 |
| EP0445855A1 (en) | 1991-09-11 |
| EP0445855B1 (en) | 1994-10-26 |
| DE69104749D1 (en) | 1994-12-01 |
| IT9067163A1 (en) | 1991-09-09 |
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