ATE113343T1 - IMPROVED TURBOMOLECULAR PUMP. - Google Patents
IMPROVED TURBOMOLECULAR PUMP.Info
- Publication number
- ATE113343T1 ATE113343T1 AT91200302T AT91200302T ATE113343T1 AT E113343 T1 ATE113343 T1 AT E113343T1 AT 91200302 T AT91200302 T AT 91200302T AT 91200302 T AT91200302 T AT 91200302T AT E113343 T1 ATE113343 T1 AT E113343T1
- Authority
- AT
- Austria
- Prior art keywords
- rotor
- tangential flow
- vanes
- stages
- channel
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Abstract
A turbomolecular pump comprising, in addition to usual axial flow pumping stages consisting of alternated rotors (1,1a) and stators (2,2a), one or more tangential flow pumping stages (10;30) arranged at the exhaust side of the pump, to raise up the compression ratio. Each axial flow stage consists of a plane disk rotor (12;35) encompassed to a coplanar annular stator (13;36), spaced apart from the rotor disk, so that a free annular channel is formed in-between (14;38), in which channel the pumped gases move along a tangential flow. Such channel is closed by a baffle (15;39), and communicates with a suction port (17;40) and a discharge port (18;41). The plane disk rotor may be provided of vanes (37,37a,37b). It is possible to combine tangential flow stages (10) having rotor without vanes (12) and tangential flow stages (30) having rotor with vanes (35); in such a way it is possible to raise the exhaust pressure up to the atmospheric pressure, and to discharge directly in the atmosphere. <IMAGE>
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT67163A IT1241431B (en) | 1990-03-09 | 1990-03-09 | PERFECTED TURBOMOLECULAR PUMP. |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE113343T1 true ATE113343T1 (en) | 1994-11-15 |
Family
ID=11300124
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT91200302T ATE113343T1 (en) | 1990-03-09 | 1991-02-13 | IMPROVED TURBOMOLECULAR PUMP. |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP0445855B1 (en) |
JP (1) | JPH0826877B2 (en) |
AT (1) | ATE113343T1 (en) |
DE (1) | DE69104749T2 (en) |
ES (1) | ES2064873T3 (en) |
HK (1) | HK1000016A1 (en) |
IT (1) | IT1241431B (en) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4314418A1 (en) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Friction vacuum pump with differently designed pump sections |
GB9318801D0 (en) * | 1993-09-10 | 1993-10-27 | Boc Group Plc | Improved vacuum pumps |
US5456575A (en) * | 1994-05-16 | 1995-10-10 | Varian Associates, Inc. | Non-centric improved pumping stage for turbomolecular pumps |
US5449270A (en) * | 1994-06-24 | 1995-09-12 | Varian Associates, Inc. | Tangential flow pumping channel for turbomolecular pumps |
IT1287016B1 (en) * | 1996-07-18 | 1998-07-24 | Varian Spa | VACUUM PUMP. |
IT1288738B1 (en) * | 1996-10-08 | 1998-09-24 | Varian Spa | ELECTRONIC CONTROL UNIT FOR VACUUM PUMP. |
IT1288737B1 (en) * | 1996-10-08 | 1998-09-24 | Varian Spa | VACUUM PUMPING DEVICE. |
US5709528A (en) * | 1996-12-19 | 1998-01-20 | Varian Associates, Inc. | Turbomolecular vacuum pumps with low susceptiblity to particulate buildup |
IT1289811B1 (en) | 1996-12-27 | 1998-10-16 | Varian Spa | METHOD AND DIAGNOSTIC APPARATUS FOR VACUUM PUMP. |
IT1297347B1 (en) | 1997-12-24 | 1999-09-01 | Varian Spa | VACUUM PUMP. |
US6071092A (en) * | 1998-03-10 | 2000-06-06 | Varian, Inc. | Vacuum pump with improved back-up bearing assembly |
US6074165A (en) * | 1998-03-10 | 2000-06-13 | Varian, Inc. | Vacuum pump with magnetic bearing system and back-up bearings |
TW504548B (en) | 1998-06-30 | 2002-10-01 | Ebara Corp | Turbo molecular pump |
US6179573B1 (en) * | 1999-03-24 | 2001-01-30 | Varian, Inc. | Vacuum pump with inverted motor |
EP1234982B1 (en) * | 2001-02-22 | 2003-12-03 | VARIAN S.p.A. | Vacuum pump |
US20070227357A1 (en) * | 2006-03-31 | 2007-10-04 | Mcdermott Wayne T | Turbomolecular pump system for gas separation |
US8247315B2 (en) * | 2008-03-17 | 2012-08-21 | Semiconductor Energy Laboratory Co., Ltd. | Plasma processing apparatus and method for manufacturing semiconductor device |
US8148839B2 (en) * | 2008-07-02 | 2012-04-03 | Rosefsky Jonathan B | Ribbon drive power generation and method of use |
DE102013108482A1 (en) * | 2013-08-06 | 2015-02-12 | Pfeiffer Vacuum Gmbh | Vacuum pump stage |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE239213C (en) * | ||||
FR1443239A (en) * | 1965-05-05 | 1966-06-24 | Mechanical rotary vacuum pump | |
US3628894A (en) * | 1970-09-15 | 1971-12-21 | Bendix Corp | High-vacuum mechanical pump |
KR890004933B1 (en) * | 1985-07-31 | 1989-11-30 | 가부시기가이샤 히다찌세이사꾸쇼 | Turbo molecular pump |
JPS62113887A (en) * | 1985-11-13 | 1987-05-25 | Hitachi Ltd | Vacuum pump |
JPH0610477B2 (en) * | 1987-05-13 | 1994-02-09 | 株式会社日立製作所 | Turbo vacuum pump |
JP2536571B2 (en) * | 1987-12-25 | 1996-09-18 | ダイキン工業株式会社 | Eddy current type turbo machine |
JPH01247794A (en) * | 1988-03-29 | 1989-10-03 | Daikin Ind Ltd | Combined vacuum pump |
DE3919529C2 (en) * | 1988-07-13 | 1994-09-29 | Osaka Vacuum Ltd | Vacuum pump |
JPH0249996A (en) * | 1988-08-11 | 1990-02-20 | Daikin Ind Ltd | Vortex type vacuum pump |
-
1990
- 1990-03-09 IT IT67163A patent/IT1241431B/en active IP Right Grant
-
1991
- 1991-02-13 DE DE69104749T patent/DE69104749T2/en not_active Expired - Lifetime
- 1991-02-13 EP EP91200302A patent/EP0445855B1/en not_active Expired - Lifetime
- 1991-02-13 AT AT91200302T patent/ATE113343T1/en not_active IP Right Cessation
- 1991-02-13 ES ES91200302T patent/ES2064873T3/en not_active Expired - Lifetime
- 1991-03-08 JP JP3043601A patent/JPH0826877B2/en not_active Expired - Lifetime
-
1997
- 1997-07-09 HK HK97101526A patent/HK1000016A1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
IT9067163A1 (en) | 1991-09-09 |
IT1241431B (en) | 1994-01-17 |
EP0445855A1 (en) | 1991-09-11 |
JPH04224295A (en) | 1992-08-13 |
DE69104749T2 (en) | 1995-03-30 |
IT9067163A0 (en) | 1990-03-09 |
HK1000016A1 (en) | 1997-10-03 |
ES2064873T3 (en) | 1995-02-01 |
DE69104749D1 (en) | 1994-12-01 |
JPH0826877B2 (en) | 1996-03-21 |
EP0445855B1 (en) | 1994-10-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
UEP | Publication of translation of european patent specification | ||
REN | Ceased due to non-payment of the annual fee |