SU1550222A1 - Turbomolecular vacuum pump - Google Patents

Abstract

The invention relates to vacuum technology and allows for improved pumping performance of a pump. Between the inlet and outlet sections 8 and 9 of the rotor (P) 6 are made holes 11. On the cylindrical stator (C) 5, located inside P 6, there are screw channels (K) 13. In addition to the outlet pipe (P) 3, the pump is equipped with an additional outlet pipe (DP) 10. P 3 and DP 10 are connected to an external vacuum system independently of each other. When working with gases of low molecular weight, external pumping is performed through DP 10, and when working with gases of large molecular weight, external pumping is performed through P 3. At the same time, the gas passes through the blade stage at the pump inlet, through the holes 11 enters the molecular step formed by K 13 C 5 and the surface P 6. 2 Il.

Description

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The invention relates to vacuum technology, in particular, to designs of turbomolecular vacuum pumps.

The purpose of the invention is to improve the pumping characteristics of the pump.

When pumping high molecular weight gases, external evacuation is carried out through pipe 3. Thus, on the suction side, the scapular step operates, and on the discharge side, the mole of FIG. 1 shows a pre-5 cular scheme formed by the rotor pump section 9 of the latated pump; in fig. 2 shows a section A-A 6 and the channels 13 of the cylindrical mill of FIG. 1. Tutorial 5. The pumped gas enters the mole. The pump includes a housing 1 with an inlet 2 coolant stage through the holes 11. and the outlet 3 nozzles placed Except the return flow from the side

On the inner surface of the housing 1 of the farvacuum stator 1 of each of the nozzles 3 and 10 disks 4, located along the axis of the corona, is achieved by installing a gas-dynamic seal 12 between them.

In the proposed pump (in comparison with the known ones), improve pumping characteristics when working with any kind of pumping15

gas.

Claims (1)

Invention Formula Turbomolecular Vacuum Pump, Pusa 1 is a cylindrical stator 5 and a rotor 6 enclosing it with rotor disks 7, divided into input 8 and output 9 sections. The housing 1 is provided with an additional outlet nozzle 10, the rotor 6 with through holes 11 formed between the inlet 8 and outlet 9, and a gas dynamic seal 12 located between the outlet nozzles 3 and 10, and on the outer surface of the cylinder includes a housing with an inlet and The output of the stator stator 5 is made of screw connections located on the inner channels 13. The surfaces of the housing The stator disks located along the axis of the housing are cylindrical. The pump works as follows. chesky stator and rotor covering it with The nozzles 3 and 10 are connected to the outer rotor disks, divided by the input The vacuum systems independently have 25 and OUTPUT portions, characterized in that from each other. with the aim of improving pumping performance, the body is equipped with an additional output When pumping gases with small p-nozzle molecules, the rotor is with through holes, with a mass of external evacuation, which is made between its inlet and exit through the nozzle 10. In this way, the gas-dynamic seal is pumped out such | gases are taken up by a valve located between the output-part only of the blade stages of the pump, nozzles, and on the external surface that provide the maximum fast-cylindrical stator, the rotor rotates the action channels. Aa P Rig When pumping gases with a large molecular weight, external evacuation is carried out through the pipe 3. Thus, on the suction side, the blade stage is operated, and on the discharge side, the molecular part is formed by section 9 of the rotor 6 and channels 13 of the cylindrical stator 5. The evacuated gas enters Mole U offers well-known pictures at p gas. containing to branch pipes, surfaces to Invention Formula Turbomolecular Vacuum Pump, The enclosing housing with inlet and outlet logging, stator disks placed on the inner surface of the housing,