IT1287016B1 - VACUUM PUMP. - Google Patents
VACUUM PUMP.Info
- Publication number
- IT1287016B1 IT1287016B1 IT96TO000624A ITTO960624A IT1287016B1 IT 1287016 B1 IT1287016 B1 IT 1287016B1 IT 96TO000624 A IT96TO000624 A IT 96TO000624A IT TO960624 A ITTO960624 A IT TO960624A IT 1287016 B1 IT1287016 B1 IT 1287016B1
- Authority
- IT
- Italy
- Prior art keywords
- vacuum pump
- vacuum
- pump
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/06—Combinations of two or more pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT96TO000624A IT1287016B1 (en) | 1996-07-18 | 1996-07-18 | VACUUM PUMP. |
DE69700064T DE69700064T2 (en) | 1996-07-18 | 1997-04-02 | Vacuum pump |
DE0819856T DE819856T1 (en) | 1996-07-18 | 1997-04-02 | Vacuum pump |
EP97105458A EP0819856B1 (en) | 1996-07-18 | 1997-04-02 | Vacuum pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
IT96TO000624A IT1287016B1 (en) | 1996-07-18 | 1996-07-18 | VACUUM PUMP. |
Publications (3)
Publication Number | Publication Date |
---|---|
ITTO960624A0 ITTO960624A0 (en) | 1996-07-18 |
ITTO960624A1 ITTO960624A1 (en) | 1998-01-18 |
IT1287016B1 true IT1287016B1 (en) | 1998-07-24 |
Family
ID=11414799
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
IT96TO000624A IT1287016B1 (en) | 1996-07-18 | 1996-07-18 | VACUUM PUMP. |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0819856B1 (en) |
DE (2) | DE69700064T2 (en) |
IT (1) | IT1287016B1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10151176B4 (en) * | 2001-10-12 | 2008-02-28 | Renner, Bernt | Compressor system with at least one water-injected screw compressor for compressing gas |
DE10305038A1 (en) | 2003-02-07 | 2004-08-19 | Pfeiffer Vacuum Gmbh | Vacuum pumping arrangement |
CN107524579A (en) * | 2017-09-26 | 2017-12-29 | 安徽万瑞冷电科技有限公司 | A kind of cryogenic pump |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4926648A (en) * | 1988-03-07 | 1990-05-22 | Toshiba Corp. | Turbomolecular pump and method of operating the same |
JP2538796B2 (en) * | 1989-05-09 | 1996-10-02 | 株式会社東芝 | Vacuum exhaust device and vacuum exhaust method |
IT1241431B (en) * | 1990-03-09 | 1994-01-17 | Varian Spa | PERFECTED TURBOMOLECULAR PUMP. |
DE69409555T2 (en) * | 1993-01-11 | 1998-12-03 | Applied Materials, Inc., Santa Clara, Calif. | Turbomolecular pump |
US5337572A (en) * | 1993-05-04 | 1994-08-16 | Apd Cryogenics, Inc. | Cryogenic refrigerator with single stage compressor |
US5483803A (en) * | 1993-06-16 | 1996-01-16 | Helix Technology Corporation | High conductance water pump |
-
1996
- 1996-07-18 IT IT96TO000624A patent/IT1287016B1/en active IP Right Grant
-
1997
- 1997-04-02 DE DE69700064T patent/DE69700064T2/en not_active Expired - Fee Related
- 1997-04-02 DE DE0819856T patent/DE819856T1/en active Pending
- 1997-04-02 EP EP97105458A patent/EP0819856B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
ITTO960624A1 (en) | 1998-01-18 |
ITTO960624A0 (en) | 1996-07-18 |
EP0819856B1 (en) | 1998-12-02 |
DE69700064D1 (en) | 1999-01-14 |
DE819856T1 (en) | 1998-05-14 |
DE69700064T2 (en) | 1999-07-15 |
EP0819856A1 (en) | 1998-01-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
IT1288737B1 (en) | VACUUM PUMPING DEVICE. | |
DE69727514D1 (en) | Displacement vacuum pump | |
DE69734028D1 (en) | vacuum pump | |
DE69821453D1 (en) | vacuum pumps | |
DE69625401D1 (en) | vacuum pump | |
IT1281025B1 (en) | TURBOMOLECULAR PUMP. | |
ID17368A (en) | DISPENSER PUMP | |
ID21719A (en) | PUMP | |
DE69820547D1 (en) | Vacuum pumping system | |
DE69924558D1 (en) | vacuum pump | |
DE59805694D1 (en) | VACUUM PUMP | |
DE59707441D1 (en) | PUMP | |
IT1293407B1 (en) | PUMP | |
DE19981942D2 (en) | Vacuum pump | |
IT9067163A0 (en) | IMPROVED TURBOMOLECULAR PUMP. | |
ID23820A (en) | PUMP | |
DE19882987T1 (en) | Vacuum pump | |
DE69801080D1 (en) | TWO-STAGE VACUUM PUMP SYSTEM | |
DE69820824D1 (en) | vacuum pumps | |
IT1313281B1 (en) | VACUUM PUMP. | |
IT1296155B1 (en) | TURBOMOLECULAR PUMP ROTOR | |
DE59706325D1 (en) | FRICTION VACUUM PUMP | |
DE69928172D1 (en) | Vacuum pump | |
DE69508163D1 (en) | Turbomolecular vacuum pump | |
DE59708643D1 (en) | suction Pump |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
0001 | Granted |