JPS60125795A - Composite vacuum pump - Google Patents

Composite vacuum pump

Info

Publication number
JPS60125795A
JPS60125795A JP58232543A JP23254383A JPS60125795A JP S60125795 A JPS60125795 A JP S60125795A JP 58232543 A JP58232543 A JP 58232543A JP 23254383 A JP23254383 A JP 23254383A JP S60125795 A JPS60125795 A JP S60125795A
Authority
JP
Japan
Prior art keywords
pump
rotor
pump unit
rotating shaft
centrifugal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58232543A
Other languages
Japanese (ja)
Inventor
Shigeru Kaneto
金戸　成
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OSAKA SHINKU KIKI SEISAKUSHO KK
Original Assignee
OSAKA SHINKU KIKI SEISAKUSHO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by OSAKA SHINKU KIKI SEISAKUSHO KK filed Critical OSAKA SHINKU KIKI SEISAKUSHO KK
Priority to JP58232543A priority Critical patent/JPS60125795A/en
Publication of JPS60125795A publication Critical patent/JPS60125795A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum

Abstract

PURPOSE:To permit to evacuate from an atmospheric pressure to a super high vacuum area by one set of pump by a method wherein either one set of a turbo molecular pump unit or a screw groove pump unit and a centrifugal pump unit are formed in the casing of the pump and these rotors are mounted onto a common rotating shaft. CONSTITUTION:Both of rotors 5, 4a are rotated through the common rotating shaft 6 in accordance with the driving of a motor 8 and gas from a suction port 9 is compressed by the kinetic blade 2a and the static blade 2b of the turbo molecular pump unit 2. Then, it is compressed in the screw groove pump unit 3 by the screw groove 3a of the outer periphery of the rotor 5 and a cylinder 3b. Further, it is compressed to a high pressure by the blades 4e...4e of the rotor 4 and stators 4b...4b in the centrifugal pump unit 4 and, thereafter, is discharged out of a discharging port 10. According to this method, evacuation from the atmospheric pressure to the super high vacuum area may be effected by one set of the pump and the auxiliary pump for a rough evacuating pump as before becomes unnecessary, further, the operation of the pump may be simplified.

Description

【発明の詳細な説明】 本発明は大気圧から超高真空の領域まで１台のポンプに
より排気可能にした複合真空ポ〉・プに関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a composite vacuum pump capable of evacuation from atmospheric pressure to ultra-high vacuum with a single pump.

従来の超高真空ポンプとして、スパッタイオンポンプ、
チタンサブリメーションポンプ、ターボ分子ポンプ、ク
ライオポンプ等があるが、これらのポンプのいずれも大
気圧から超高真空の領域まで排気するのに粗引ポンプや
補助ポンプを必要とし、かくて両ポンプ間の配管やバル
ブ、更には両ポンプの運転を制御するための複雑な制御
盤等も必要となり、真空排気系として複雑になると共に
スペースをとる欠点があった。As conventional ultra-high vacuum pumps, sputter ion pumps,
There are titanium sublimation pumps, turbomolecular pumps, cryopumps, etc., but all of these pumps require a roughing pump or an auxiliary pump to pump air from atmospheric pressure to ultra-high vacuum. This required piping and valves, as well as a complicated control panel to control the operation of both pumps, making the vacuum evacuation system complex and requiring space.

本発明はこれらの欠点を排除し配管やバルブ等を不必要
にして簡単な真空排気系でスペースをとらず１台のポツ
プで大気圧から超高真空の領域まで排気を可能にした複
合真空ポンプを提供することを目的とし、−その特徴と
するところはポンプ筐体内にターボ分子ポンプ部或いは
ねじ溝ポンプ部の少なくともいずれか１つと遠心式ポン
プ部を形成し、これらポンプ部のロータを共通の回転軸
に装着したことにある。The present invention eliminates these drawbacks and provides a complex vacuum pump that eliminates the need for piping, valves, etc., uses a simple vacuum evacuation system, and does not take up much space, making it possible to evacuate from atmospheric pressure to ultra-high vacuum with a single unit. The objective is to provide a centrifugal pump section with at least one of a turbo molecular pump section and a thread groove pump section within the pump housing, and the rotors of these pump sections are connected to a common rotor. The reason is that it is attached to the rotating shaft.

以下本発明の１実施例を第１図乃至第５図に従って説明
する。An embodiment of the present invention will be described below with reference to FIGS. 1 to 5.

（１）はポンプ筐体を示し、該ポンプ筐体（１）内には
その上方より順次ターボ分子ポンプ部（２）、ねじ溝ポ
ンプ部（３）及び遠心式ポンプ部（４）を形成した。そ
して該ターボ分子ポンプ部（２）はロー）ｉ（５）の上
方部の外周面に設けた動翼（２ａ）と前記ポンプ筐体（
１）の内周面に設けた静弦（２ｂ）とからなり、又前記
溝ポンプ部（３）は前記ロータ（５）の下方部の外周１
ｍに形成したねし溝（３ａ）とこれに対向する位置のＭ
ｆｊ記ポンプ筐体（１）の内周面に設けたシリンダー（
３ｂ）とからなり、該ロータ（５）は前記ターボ分子ポ
ンプ部（２）とボＪ記ねし溝ポンプｌ　（３）の共通の
ロータとなっている。又前記遠心式ポンプ部（４）は前
記ロータ（５）に嵌着した回転ｊＩｌｌ＋（６）の外周
面に設けたロータ（４ａ）と前記ポンプ筐体（１）の内
周面に設けたステータ （４ｂ）とからなる。(1) shows a pump housing, and inside the pump housing (1), a turbo molecular pump part (2), a thread groove pump part (3), and a centrifugal pump part (4) are formed in order from above. . The turbomolecular pump section (2) consists of a rotor blade (2a) provided on the outer peripheral surface of the upper part of the row (5) and the pump housing (2a).
1) and a static chord (2b) provided on the inner circumferential surface of the rotor (5).
The threaded groove (3a) formed at m and the position M at the opposite position
Cylinder (fj) provided on the inner peripheral surface of the pump housing (1)
3b), and the rotor (5) is a common rotor for the turbo molecular pump section (2) and the groove pump 1 (3). The centrifugal pump section (4) has a rotor (4a) provided on the outer circumferential surface of the rotor (6) fitted to the rotor (5), and a stator provided on the inner circumferential surface of the pump housing (1). It consists of (4b).

囲ちターボ分子ポンプ部（２）とねじ溝ポンプ部（３）
のロータ（５）と遠心式ポンプ部（４）のロータ（４ａ
）は共通の回転軸（６）に装着されている。そして該回
転軸（６）は２個所の軸受（７ａ）　（７ｂ）で前記ポ
ンプ筐体（１）に支持されている。Enclosed turbo molecular pump part (2) and threaded groove pump part (3)
The rotor (5) of the centrifugal pump section (4) (4a)
) are mounted on a common rotating shaft (6). The rotating shaft (6) is supported by the pump housing (1) by two bearings (7a) and (7b).

（８）は前記軸受（７ａ）　（７ｂ）間の前記ポンプ筐
体（１）内に設けたモータ、 （８ａ）はそのロータ、（８ｂ）はステータを示し、該
ロータに前記回転軸（６）を嵌着し、モータ（８）の駆
動により該回転軸（６）を介してターボ分子ポンプ部（
２）とねし溝ポンプ部（３）のロータ（５）及び遠心式
ポンプ部（４）のロータ（４ａ）が共に回転するように
した。(8) is a motor provided in the pump housing (1) between the bearings (7a) and (7b), (8a) is its rotor, (8b) is a stator, and the rotor is connected to the rotating shaft (6). ) is fitted, and the turbo molecular pump part (
2) The rotor (5) of the spiral groove pump section (3) and the rotor (4a) of the centrifugal pump section (4) were made to rotate together.

ここで前記遠心式ポンプ部（４）のロータ（４ａ）は第
２図及び第３図示の如く中央に軸筒部（４Ｃ）を有する
円板（４ｄ）で該円板（４ｄ）の上面に放射状突条の！
（４ｅ）・・・（４ｅ）が形成されており、軸筒部（４
Ｃ）とステータ（４ｂ）との間隙 （４ｆ）に進入した気体は回転する翼 （４ｅ）・・・（４・ｅ）により遠心力が付与されて円
板（４ｄ）の外方に排出されるようにした。又前記遠心
式ポンプ部（４）のステータ（４ｂ）は第４図及び第５
図の如く周辺部の開口（４ｇ）と中心部の開口（４ｈ）
を有する上側円板（４１）と、中心部の開口 （４ｊ）を有する下側円板（４ｋ）と、両者を連結する
短円筒（４１）とからなり、これらの内部空間（４ｍ）
に放射状のフィン（４ｎ）・・・（４ｎ）を突設し、前
記開口（４ｇ）から内部空間（４ｍ）内に進入した気体
はフィン（４ｎ）・・・（４ｎ）と熱交換して冷却され
て前記開口（４ｊ）から排出し、気体の圧縮熱を放熱し
易くなるようにした。Here, the rotor (4a) of the centrifugal pump part (4) is a disc (4d) having a shaft cylinder part (4C) in the center as shown in FIGS. 2 and 3. Radial ridges!
(4e)...(4e) are formed, and the shaft cylinder part (4e) is formed.
The gas that has entered the gap (4f) between C) and the stator (4b) is given centrifugal force by the rotating blades (4e)...(4・e) and is discharged to the outside of the disk (4d). It was to so. The stator (4b) of the centrifugal pump section (4) is shown in FIGS. 4 and 5.
As shown in the diagram, the opening at the periphery (4g) and the opening at the center (4h)
It consists of an upper disk (41) having an opening (4j) in the center, a lower disk (4k) having an opening (4j) in the center, and a short cylinder (41) connecting the two, and the inner space (4m) of these
radial fins (4n)...(4n) are provided protruding from the fins (4n)...(4n), and the gas entering the internal space (4m) from the opening (4g) exchanges heat with the fins (4n)...(4n). The cooled gas was discharged from the opening (4j), so that the heat of compression of the gas could be easily dissipated.

尚、（９）は吸気口、（ｌＯ）は吐出口、（１１）及び
（１２）はスリーブ、（１３）は軸封部、（１４）は前
記回転軸（６）内の油通路を介して前記軸受（７ａ）（
７ｂ）に油を供給する油タンクを示す。In addition, (9) is an intake port, (lO) is an outlet, (11) and (12) are sleeves, (13) is a shaft seal, and (14) is an oil passage in the rotating shaft (6). and said bearing (7a) (
7b) shows an oil tank supplying oil.

次に上記実施例のポンプの作動を説明する。Next, the operation of the pump of the above embodiment will be explained.

モータ（８）の駆動によれば共通の回転軸（６）を介し
てロータ（５）及び（４ａ）が共に回転し、かくて吸気
口（９）からの気体はターボ分子ポンプ部（２）におい
て回転する動翼（２ａ）と静止オる静翼（２ｂ）とによ
り圧縮され、更にねし溝ポンプ部（３）において回転す
るロータ（５）の外周のねじ溝（３ａ）とシリンダー（
３ｂ）とにより圧縮され、更に遠心式ポンプ部（４）に
おいて回転するロータ（４ａ）の翼（４ｅ）・・・（４
ｅ）と静止するステータ（４ｂ）・・・（４ｂ）とによ
り高圧に圧縮されて吐出「１（１０）より排出される。According to the drive of the motor (8), the rotors (5) and (4a) rotate together through the common rotation shaft (6), and thus the gas from the intake port (9) is transferred to the turbo molecular pump section (2). The rotor blades (2a) rotating at
3b) and further rotates in the centrifugal pump section (4).
e) and the stationary stators (4b)...(4b), it is compressed to high pressure and discharged from the discharge port 1 (10).

従って大気圧から超高真空の領域まで排気が可能となる
。ここで前記吐出口（１０）における圧力は大気圧以上
でもよいし、或いは大気圧以下でもよい。Therefore, exhaust can be performed from atmospheric pressure to ultra-high vacuum. Here, the pressure at the discharge port (10) may be above atmospheric pressure or below atmospheric pressure.

第６図は他の実施例を示し、この実施例においてはねじ
溝ポンプ部（３）が存在せずにターボ分子ポンプ部（２
）と遠心式ポンプ部（４）との組合せからなり、該ター
ボ分子ポンプ部（２）のロータ（５ａ）と遠心式ポンプ
部（４）のロータ（４ａ）が共通の回転軸（６）に装着
されている。FIG. 6 shows another embodiment, in which the thread groove pump section (3) is not present and the turbomolecular pump section (2) is not present.
) and a centrifugal pump section (4), the rotor (5a) of the turbomolecular pump section (2) and the rotor (4a) of the centrifugal pump section (4) are mounted on a common rotation axis (6). It is installed.

又、第７図は更に他の実施例を示し、この実施例におい
てはターボ分子ポンプ部（２）が存在せずにねじ溝ポン
プ部（３）と遠心式ポンプ部（４）との組合せからなり
、該ねじ溝ポンプ部（３）のロータ（５ｂ）と遠心式ポ
ンプ部（４）のロータ（４ａ）が共通の回転軸（６）に
装着されている。Further, FIG. 7 shows still another embodiment, in which the turbo molecular pump section (2) is not present and the combination of the thread groove pump section (3) and the centrifugal pump section (4) is used. The rotor (5b) of the thread groove pump section (3) and the rotor (4a) of the centrifugal pump section (4) are mounted on a common rotating shaft (6).

ここで前記いずれの実施例のものもモータ（８）等の駆
動部分が大気中にある ので、モータリード線や組合せ部分の１空ソールが不要
であり、又駆動部分を大気工具しに清潔なカスでパージ
しておけば、Ｗ；剤１″１：カスをポンプで吸引すると
きでも該腐触竹ガスがｒｉｉｉ記駆動部分に侵入するこ
とがない。In each of the above embodiments, the driving parts such as the motor (8) are in the atmosphere, so there is no need for motor lead wires or a hollow sole in the combination part, and the driving parts are not exposed to atmospheric tools. If the waste is purged, the rotting bamboo gas will not enter the driving part in riii even when the waste is sucked by a pump.

尚、前記実施例では軸受に軸受の潤滑油を使用した場合
を示したが、グリース潤滑油でもよく、又軸受として前
記実施例のころがり軸受の代りに磁気軸受或いは気体軸
受等でもよい。更に駆動部として前記実施例の電動式の
モータの代りにエアータービン式のモータ等であっても
よい。In the above embodiments, a lubricating oil for bearings is used in the bearings, but grease lubricating oil may be used, and instead of the rolling bearings in the above embodiments, magnetic bearings, gas bearings, etc. may be used as bearings. Further, the driving portion may be an air turbine type motor or the like instead of the electric motor of the above embodiment.

このように本発明によるとポンプ筐体内にターボ分子ポ
ンプ部或いはねじ溝ポンプ部の少なくともいずれか１つ
と遠心式ポンプ部を形成し、これらのポンプ部のロータ
を共通の回転軸に装着したので、１台のポンプで大気圧
から超高真空の領域まで排気可能で、従来の如く粗引ポ
ンプや補助ポンプ等が不必要となり、かくて簡単な真空
排気系となってスペースをとらず、更に操作も簡単にな
る等の効果を有する。As described above, according to the present invention, at least one of the turbomolecular pump section and the thread groove pump section and the centrifugal pump section are formed in the pump housing, and the rotors of these pump sections are mounted on a common rotating shaft. A single pump can evacuate from atmospheric pressure to ultra-high vacuum, eliminating the need for conventional roughing pumps and auxiliary pumps, resulting in a simple vacuum evacuation system that takes up less space and is easier to operate. It also has the effect of simplifying the process.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は本発明の複合真空ポンプの１実施例の縦断面図
、第２図はそのＩＩ　−ＩＩ線線断断面図第３図はその
■−■線截線面断面図４図は第１図のｒＶ−ＩＶ、！ｌ
ｉｔ截断面図、第５図はそのＶ−Ｖ線数断面図、第６図
は他の実施例の縦断面図、第７図は更に他の実施例の縦
断面図である。 （１）・・・ポンプ筐体 （２）・・・ターボ分子ポンプ部 （３）・・・ねじ溝ポンプ部 （４）・・・遠心式ポンプ部 （４ａ）、（５）、 （５ａ）、（５ｂ）・・・ロータ （４ｎ）・・・フィン　（６）・・・回転軸第２図 第３図 第４図 第５図 ４ｊ４ｎ４ｋ　４ｍ ９　第６図FIG. 1 is a longitudinal cross-sectional view of one embodiment of the compound vacuum pump of the present invention, FIG. 2 is a cross-sectional view taken along the line II--II, FIG. 3 is a cross-sectional view taken along the line ■-■, and FIG. rV-IV in Figure 1,! l
5 is a cross-sectional view taken along line V-V, FIG. 6 is a vertical cross-sectional view of another embodiment, and FIG. 7 is a vertical cross-sectional view of still another embodiment. (1) Pump housing (2) Turbo molecular pump section (3) Thread groove pump section (4) Centrifugal pump section (4a), (5), (5a) , (5b)...Rotor (4n)...Fin (6)...Rotating axis Fig. 2 Fig. 3 Fig. 4 Fig. 5 4j4n4k 4m 9 Fig. 6

Claims (2)

【特許請求の範囲】[Claims] （１）ポンプ筺体内にターボ分子ポンプ部或いはねじＪ
Ｒポンプ部の少なくもいずれか１つと遠心式ポンプ部を
形成し、これらポンプ部のロータを共通の回転軸に装着
して成る複合真空ポンプ。(1) Turbomolecular pump part or screw J inside the pump housing
A compound vacuum pump comprising at least one of the R pump parts and a centrifugal pump part, and the rotors of these pump parts are mounted on a common rotating shaft. （２）前記遠心式ポンプ部のステータの吸引気体の接触
面に複数のフィンを突設して成る特許請求の範囲第１項
記載の複合真空ポンプ。(2) The compound vacuum pump according to claim 1, wherein a plurality of fins are provided protruding from the suction gas contact surface of the stator of the centrifugal pump section.
JP58232543A 1983-12-09 1983-12-09 Composite vacuum pump Pending JPS60125795A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58232543A JPS60125795A (en) 1983-12-09 1983-12-09 Composite vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58232543A JPS60125795A (en) 1983-12-09 1983-12-09 Composite vacuum pump

Publications (1)

Publication Number Publication Date
JPS60125795A true JPS60125795A (en) 1985-07-05

Family

ID=16940967

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58232543A Pending JPS60125795A (en) 1983-12-09 1983-12-09 Composite vacuum pump

Country Status (1)

Country Link
JP (1) JPS60125795A (en)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4732530A (en) * 1984-07-25 1988-03-22 Hitachi, Ltd. Turbomolecular pump
JPS63266188A (en) * 1987-04-24 1988-11-02 Osaka Shinku Kiki Seisakusho:Kk Complex vacuum pump
US4826394A (en) * 1986-04-19 1989-05-02 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh Vacuum pump
US4826393A (en) * 1986-08-07 1989-05-02 Seiko Seiki Kabushiki Kaisha Turbo-molecular pump
JPH02136595A (en) * 1988-11-16 1990-05-25 Anelva Corp Vacuum pump
JPH0319491U (en) * 1989-07-06 1991-02-26
JPH03115797A (en) * 1990-02-15 1991-05-16 Hitachi Ltd Vacuum pump
JPH05141389A (en) * 1991-11-15 1993-06-08 Vacuum Prod Kk Vacuum pump
US5695316A (en) * 1993-05-03 1997-12-09 Leybold Aktiengesellschaft Friction vacuum pump with pump sections of different designs
US6422829B1 (en) * 1997-09-24 2002-07-23 Leybold Vakuum Gmbh Compound pump
JP2007192076A (en) * 2006-01-18 2007-08-02 Ebara Corp Turbo vacuum pump
JP2009047178A (en) * 2003-08-21 2009-03-05 Ebara Corp Turbo vacuum pump and semiconductor manufacturing device provided with turbo vacuum pump
US7645116B2 (en) 2005-04-28 2010-01-12 Ebara Corporation Turbo vacuum pump
CN101634307A (en) * 2008-07-22 2010-01-27 株式会社大阪真空机器制作所 Turbo-molecular pump

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5138113A (en) * 1974-08-01 1976-03-30 American Optical Corp
JPS5214504A (en) * 1975-07-23 1977-02-03 Borg Warner Moulding method for highhdensity powdered metal product
JPS5345984A (en) * 1976-10-07 1978-04-25 Nec Corp Resistance element

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5138113A (en) * 1974-08-01 1976-03-30 American Optical Corp
JPS5214504A (en) * 1975-07-23 1977-02-03 Borg Warner Moulding method for highhdensity powdered metal product
JPS5345984A (en) * 1976-10-07 1978-04-25 Nec Corp Resistance element

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4732530A (en) * 1984-07-25 1988-03-22 Hitachi, Ltd. Turbomolecular pump
US4826394A (en) * 1986-04-19 1989-05-02 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh Vacuum pump
US4826393A (en) * 1986-08-07 1989-05-02 Seiko Seiki Kabushiki Kaisha Turbo-molecular pump
JPS63266188A (en) * 1987-04-24 1988-11-02 Osaka Shinku Kiki Seisakusho:Kk Complex vacuum pump
JPH02136595A (en) * 1988-11-16 1990-05-25 Anelva Corp Vacuum pump
JPH0319491U (en) * 1989-07-06 1991-02-26
JPH03115797A (en) * 1990-02-15 1991-05-16 Hitachi Ltd Vacuum pump
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