EP0874159A2 - Reibungsvakuumpumpe mit einer Gaedepumpenstufe - Google Patents
Reibungsvakuumpumpe mit einer Gaedepumpenstufe Download PDFInfo
- Publication number
- EP0874159A2 EP0874159A2 EP98110191A EP98110191A EP0874159A2 EP 0874159 A2 EP0874159 A2 EP 0874159A2 EP 98110191 A EP98110191 A EP 98110191A EP 98110191 A EP98110191 A EP 98110191A EP 0874159 A2 EP0874159 A2 EP 0874159A2
- Authority
- EP
- European Patent Office
- Prior art keywords
- section
- pump
- rotor
- groove
- stator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
Definitions
- the invention relates to a friction pump the features of the preamble of claim 1.
- friction vacuum pumps include Gaede pumps (Rotating cylinder with pump gap in a housing and blocking gap between inlet and outlet), Holweck pumps (rotating in a housing Cylinder with helical, stator or rotor side arranged grooves), Siegbahn pumps (rotating and standing ring disks with spiral grooves) and turbomolecular pumps with rotor and guide vanes are equipped.
- Friction pumps are known with differently designed pump sections equip.
- the present invention is based on the object a friction vacuum pump with a simple Gaeda pump stage equip that in the area of transition between Molecular flow and viscous flow have good pumping properties Has.
- Gaede pump stage can be combined with a Siegbahn stage is so that a compact pump stage with optimal pumping properties can be realized.
- an in This type of vacuum pump can be a relative high backing pressure (greater than 10 mbar) are generated, making pumps of this type with small and inexpensive Backing pumps can be operated.
- the embodiment according to FIG. 1 is a Friction vacuum pump 1, the housing of which is designated 2. Of the includes upper, cylindrical housing section 3 and centers the stator 4, which has a plurality of stator rings 5, 6 and 7.
- the rotor 8 is supported on the bearings 9 and Pump shaft 10 in the pump housing 2.
- the drive motor is with Designated 11.
- the Inlet flange 12 a recipient to be evacuated connected.
- the gases become the outlet 13 promoted to which a backing pump is connected.
- the embodiment according to FIG. 1 is 3 in total Pump sections equipped.
- the high vacuum pump section consists of turbomolecular pump stages.
- the stator rings 5 each carry the inward stator blades 14, which are associated with rotor blades 15 attached to the rotor 8.
- the second pump section has Siegbahn pump stages. This comprise rotating ring disks 16 fastened to the rotor 8, whose surfaces are flat. Between the rotor ring disks 16 are the stator ring washers 17.
- the stator rings 6 wear the stator washers 17; they are preferably in one piece educated.
- the stator washers 17 are on the end face with spiral projections 18 and corresponding grooves 19 equipped (see FIG. 2).
- the spiral shape is each chosen so that a continuous gas flow from Inlet 12 to outlet 13 is secured, i.e. that at embodiment shown the above a stator washer 6 pump active areas of the Siegbahnhaven the gases from the outside in and those below one Stator ring 6 located pump active areas of the Siegbahnhaven convey the gases from the inside out.
- There are three spiral grooves or projections are provided, which each extend over approximately 360 °.
- the number, depth, The width and slope of the spirals determine the pump properties of the pump section consisting of Siegbahn stages.
- the first Siegbahn stage following the turbomolecular pump stages the gases from the outside in.
- the stator washer 17 rotor ring disk 16 upstream of the first Siegbahn stage has one smaller diameter than the other rotor ring disks 16 and bears on its circumference in relation to the other rotor blades 15 Shortened blades 27. This is as trouble-free as possible Transition between the different pump sections guaranteed.
- the first Siegbahnlope If gases are to be conveyed from the inside out, one can do this accordingly designed first stator washer 17 with compared to the rest Disks with an enlarged inner diameter may be provided the inside carries shortened stator blades.
- high vacuum or initially a turbomolecular pump section on the inlet side followed by a Siegbahn pump section.
- the pre-vacuum side that follows the Siegbahn pump section Pump stage is like a side channel pump educated. To do this, they face each other radially extending surfaces of the last rotor ring disk 28 (Fig. 5) and the last stator washer 29 (Fig. 6) in cross section essentially semicircular, facing each other circular grooves 31, 32 are provided.
- the arranged on the suction side rotating groove 31 is with a plurality of crosspieces 33 equipped.
- the fixed groove 32 arranged on the pressure side has an inlet 34 and an inlet with respect to the extracted gases Outlet 35.
- Its inlet 34 is a radially outwardly extending one Groove section that through the peripheral pumping gap gases flowing between the annular disc 27 and the stator 4 records.
- the outlet 35 is substantially axial extending bore, which the groove 32 with the fore-vacuum space connects. Inlet 34 and outlet 35 are immediately adjacent and are separated from one another by a web 36 Avoid backflow. A division of the groove 32 into two or more groove sections, each with an inlet 34 and one Outlet 35 is possible.
- the exemplary embodiment according to FIGS. 7 and 8 is based the shaft 10 via its bearings 9 initially on the inside a sleeve-shaped carrier 41.
- the top end of the carrier 41 is equipped with a collar 42.
- the lower end of the The carrier projects into a recess 43 in a housing component 44 into it, which has only a slightly larger diameter than the outer diameter of the carrier 41.
- An O-ring 45 between the carrier 41 and the inside of the recess 43 secures the central position of the carrier 41.
- To support the carrier 41 in the housing 2 are three substantially axially extending Bars 46 are provided on the collar 42 and on the housing component 44 are attached.
- the O-ring 45 acts Vibrations of this type as a damping element. This allows the pumping gaps between the active pumping surfaces, in particular between the stator and rotor ring disks of the Siegbahn stages, very small design and therefore a very good pump effect be achieved.
- Fig. 9 shows an embodiment for a pump according to the Invention in which the rotor is on a fixed Pins 51 of the housing 2 supports and the drive motor 11 as External rotor motor is formed.
- the bars 46 is the pin 51 at its upper end with a collar 52 equipped.
- the sleeve-shaped carrier 41 has on its lower end an inward edge 53. Between Collar 52 and edge 53 extend the rods 46.
- the Siegbahn pump section follows on the pressure side to a Holweck pump section that comes from the stator ring 55 with the helically shaped projections 56 and Outside of the cylindrical rotor section 57. This carries the motor rotor on the inside.
- Gaeda pump section there is also a Gaeda pump section on.
- This includes the stator ring 60 on the stator side with two circumferential webs 61, 62 which form the groove 63, and the correspondingly elongated rotor section on the rotor side 57.
- the inlet to the Gaedepumpgen form an or several openings 64 (see also FIG. 10) in the upper web 61. These are located directly next to one or more fixed, in the groove 63 protruding projections 65 which with the Rotor 57 form the blocking gap 66.
- the outlet opening (s) 67 are located in the lower web 62 and open into the fore-vacuum space the pump 1.
- the groove 63 divided into two sections. There are two in parallel mutually arranged gate pump stages are provided. You point in each case the inlet opening 64 and the outlet openings 67 and each extend over approximately 180 °.
- the arrow 68 indicates the direction of rotation of the rotor 57.
- the groove is 63 no longer designed in a ring shape.
- Groove depth or groove width
- Fig. 11 decreasing
- Fig. 12 constantly changing
- the desired pressure build-up is thereby achieved.
- several chambers 69 are present, in which a relatively slow pressure build-up in succession and relatively rapid expansion is taking place. The pressure increases from chamber to chamber.
- Figures 13 to 18 show embodiments for Siegbahnhaven, which are combined with gaed stages.
- the outside diameter of the rotating ring disks 17 are selected in such a way that between its periphery and that surrounding it Stator 4 each have an outer annular space 71, 72.
- the inner diameter of the stator washers 16 chosen such that an inner annular space 73, 74 is present is.
- Figure 13 which is a plan view of a Stator ring disk with two spiral grooves 19 shows is can be seen that stationary in the annular spaces 71, 72 Projections 75, 76 and 77, 78 are located together with the Outer circumference of the rotor ring disks 16 or the rotating one Central part (e.g. rotor 8 or shaft 10) locking gaps 79, 80 form.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Description
- Figur 1 eine Reibungsvakuumpumpe mit mehreren Stufen,
- Figur 2 einen Schnitt durch die Pumpe nach Figur 1 in Höhe der Statorscheibe einer Siegbahn-Stufe
- Figur 3 einen Schnitt durch die Pumpe nach Figur 1 in Höhe einer sich in Förderrichtung an den Siegbahn-Pumpenabschnitt anschließenden weiteren Pumpstufe,
- Figuren 4, 5 und 6 ein weiteres Ausführungsbeispiel für eine Pumpe nach der Erfindung,
- Figuren 7, 8 ein Ausführungsbeispiel für eine Pumpe nach der Erfindung mit einer besonderen Rotoraufhängung,
- Figuren 9 bis 12 Schnitte durch weitere Lösungen für druckseitig angeordnete Pumpstufen und
- Figuren 13 bis 18 Schnitte durch Pumpstufen, die als kombinierte Siegbahn/Gaede-Stufen ausgebildet sind.
Claims (11)
- Reibungsvakuumpumpe mit einem Rotor (8, 10) und einem Stator (4) sowie mit einer Gaedepumpenstufe, die von einem Statorabschnitt (60) und einem Rotorabschnitt (15, 57) gebildet wird, dadurch gekennzeichnet, dass der Statorabschnitt in Höhe der Gaedepumpenstufe mit einer Nut (63, 71, 72) ausgerüstet ist, die von radial einwärts gerichteten Stegen (61, 62) oder von Statorringscheiben (16) seitlich begrenzt ist, dass in die Nut (63, 71, 72) mindestens ein feststehender Vorsprung (65, 75, 76) hineinragt, der mit dem Rotorabschnitt (17, 57) einen Sperrspalt (66, 79) bildet, und dass sich Einlass (19, 64) und Auslass (67) der Gaedepumpenstufe in der Nähe des Vorsprungs (65, 75, 76) befinden, und zwar derart, dass sich der Einlass - in Drehrichtung des Rotorabschnittes (17, 57) gesehen - hinter dem Vorsprung (65, 75, 76) und der Auslass (67) vor dem Vorsprung (65, 75, 76) befindet.
- Pumpe nach Anspruch 1, dadurch gekennzeichnet, dass zwei parallel zueinander angeordnete, sich radial erstreckende Stege (61, 62) des Statorabschnittes (60) gemeinsam mit einem zylindrischen Rotorabschnitt (57) eine oder mehrere Gaedepumpenstufen bilden, indem die von den Stegen (61, 62) gebildete Nut (63) mit ein oder mehreren Einlass- bzw. Auslassöffnungen (64, 67) und einem oder mehreren Vorsprüngen (65) zur Bildung eines oder mehrere Sperrspalte (66) ausgerüstet sind.
- Pumpe nach Anspruch 1, dadurch gekennzeichnet, dass mindestens eine Rotorringscheibe (17) zusammen mit Statorringscheiben (16) einen äußeren Ringraum (Nut 71, 72) bildet, der insgesamt oder abschnittsweise als Gaedepumpenstufe mit einem oder mehreren Vorsprüngen (75, 76) ausgebildet ist.
- Pumpe nach einem der Ansprüche 1 oder 3, dadurch gekennzeichnet, dass die Höhe des äußeren Ringraumes (71, 72) größer ist als die Dicke der Rotorringscheiben (17) und dass die Scheibe (17) mit ihrem äußeren Rand in den Ringraum (71, 72) hineinragt.
- Pumpe nach Anspruch 1, 3 oder 4, dadurch gekennzeichnet, dass mindestens eine Statorringscheibe (16) mit dem Rotor (8) einen inneren Ringraum (73, 74) bildet, der insgesamt oder abschnittsweise als Gaedepumpenstufe ausgebildet ist.
- Pumpe nach Anspruch 5, dadurch gekennzeichnet, dass der Rotor (8) im Bereich des inneren Ringraumes (73, 74) mit Mitteln (86) zur Vergrößerung der pumpaktiven Oberfläche ausgerüstet ist.
- Pumpe nach Anspruch 1 oder einem der Ansprüche 3 bis 6, dadurch gekennzeichnet, dass die Gaedepumpenstufe mit einer Siegbahnstufe kombiniert ist.
- Pumpe nach Anspruch 7, dadurch gekennzeichnet, dass die Statorringscheibe (16) mit der oder den spiralförmigen Nuten (19, 19') ausgerüstet ist und dass die in den äußeren Ringraum (71, 72) bzw. in den inneren Ringraum (73, 74) mündende(n) Nut(en) (19, 19') den Einlass bzw. Auslass einer oder mehrerer Gaedepumpenstufen bildet (bilden).
- Pumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Nut (63) oder ein sich von einem Einlass (64) zu einem Auslass (67) erstreckender Abschnitt der Nut (63) einen kontinuierlich abnehmenden Querschnitt hat.
- Pumpe nach einem der Ansprüche 1 bis 8, dadurch gekennzeichnet, dass die Nut (63) oder ein sich vom Einlass (64) zum Auslass (67) erstreckender Abschnitt der Nut (63) einen ständig wechselnden Querschnitt hat.
- Pumpe nach Anspruch 10, dadurch gekennzeichnet, dass der Querschnitt der Nut (63) oder eines Abschnittes der Nut (63) derart gestaltet ist, dass nacheinander mehrfach ein relativ langsamer Druckaufbau und eine relativ schnelle Expansion stattfinden.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4314418A DE4314418A1 (de) | 1993-05-03 | 1993-05-03 | Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten |
DE4314418 | 1993-05-03 | ||
EP94913098A EP0697069B1 (de) | 1993-05-03 | 1994-03-31 | Reibungsvakuumpumpe mit unterschiedlich gestalteten pumpenabschnitten |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP94913098A Division EP0697069B1 (de) | 1993-05-03 | 1994-03-31 | Reibungsvakuumpumpe mit unterschiedlich gestalteten pumpenabschnitten |
Publications (2)
Publication Number | Publication Date |
---|---|
EP0874159A2 true EP0874159A2 (de) | 1998-10-28 |
EP0874159A3 EP0874159A3 (de) | 1998-11-18 |
Family
ID=6486923
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP98110191A Withdrawn EP0874159A3 (de) | 1993-05-03 | 1994-03-31 | Reibungsvakuumpumpe mit einer Gaedepumpenstufe |
EP94913098A Expired - Lifetime EP0697069B1 (de) | 1993-05-03 | 1994-03-31 | Reibungsvakuumpumpe mit unterschiedlich gestalteten pumpenabschnitten |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP94913098A Expired - Lifetime EP0697069B1 (de) | 1993-05-03 | 1994-03-31 | Reibungsvakuumpumpe mit unterschiedlich gestalteten pumpenabschnitten |
Country Status (5)
Country | Link |
---|---|
US (1) | US5695316A (de) |
EP (2) | EP0874159A3 (de) |
JP (1) | JPH08511071A (de) |
DE (2) | DE4314418A1 (de) |
WO (1) | WO1994025760A1 (de) |
Cited By (4)
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EP1201929A3 (de) * | 2000-10-31 | 2003-04-23 | Seiko Instruments Inc. | Vakuumpumpe |
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DE19632874A1 (de) * | 1996-08-16 | 1998-02-19 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe |
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US6179573B1 (en) * | 1999-03-24 | 2001-01-30 | Varian, Inc. | Vacuum pump with inverted motor |
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ES2219956T3 (es) * | 1999-07-19 | 2004-12-01 | Sterling Fluid Systems (Germany) Gmbh | Maquina volumetrica para medios comprimibles. |
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US6508631B1 (en) | 1999-11-18 | 2003-01-21 | Mks Instruments, Inc. | Radial flow turbomolecular vacuum pump |
US6394747B1 (en) | 2000-06-21 | 2002-05-28 | Varian, Inc. | Molecular drag vacuum pumps |
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US6503050B2 (en) * | 2000-12-18 | 2003-01-07 | Applied Materials Inc. | Turbo-molecular pump having enhanced pumping capacity |
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JPS60125795A (ja) * | 1983-12-09 | 1985-07-05 | Osaka Shinku Kiki Seisakusho:Kk | 複合真空ポンプ |
JPS60139098U (ja) * | 1984-02-24 | 1985-09-13 | セイコ−精機株式会社 | 組合せ型軸流分子ポンプ |
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SU1285198A1 (ru) * | 1985-01-04 | 1987-01-23 | Предприятие П/Я А-1614 | Двухступенчатый турбомолекул рный вакуумный насос |
JPS61226596A (ja) * | 1985-03-29 | 1986-10-08 | Hitachi Ltd | タ−ボ分子ポンプ |
JPS6385291A (ja) * | 1986-09-29 | 1988-04-15 | Hitachi Ltd | 真空ポンプ |
DE3922782A1 (de) * | 1988-07-12 | 1990-02-08 | Beijing Lab Of Vacuum Physics | Molekularpumpe in kombinierter bauart |
US5219269A (en) * | 1988-07-13 | 1993-06-15 | Osaka Vacuum, Ltd. | Vacuum pump |
DE3919529C2 (de) * | 1988-07-13 | 1994-09-29 | Osaka Vacuum Ltd | Vakuumpumpe |
US5358373A (en) * | 1992-04-29 | 1994-10-25 | Varian Associates, Inc. | High performance turbomolecular vacuum pumps |
-
1993
- 1993-05-03 DE DE4314418A patent/DE4314418A1/de not_active Ceased
-
1994
- 1994-03-31 JP JP6523801A patent/JPH08511071A/ja active Pending
- 1994-03-31 EP EP98110191A patent/EP0874159A3/de not_active Withdrawn
- 1994-03-31 WO PCT/EP1994/001011 patent/WO1994025760A1/de active IP Right Grant
- 1994-03-31 EP EP94913098A patent/EP0697069B1/de not_active Expired - Lifetime
- 1994-03-31 DE DE59409375T patent/DE59409375D1/de not_active Expired - Fee Related
- 1994-03-31 US US08/545,646 patent/US5695316A/en not_active Expired - Fee Related
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DE239213C (de) * | ||||
GB336001A (en) * | 1929-07-09 | 1930-10-09 | Edwin Rodolph Grote | Improvements in pumps for obtaining high vacua |
US1942139A (en) * | 1930-12-26 | 1934-01-02 | Central Scientific Co | Molecular vacuum pump |
US1975568A (en) * | 1932-03-18 | 1934-10-02 | Central Scientific Co | Molecular vacuum pump |
FR1443239A (fr) * | 1965-05-05 | 1966-06-24 | Pompe à vide mécanique rotative | |
US4090815A (en) * | 1975-12-03 | 1978-05-23 | Aisin Seiki Kabushiki Kaisha | High vacuum pump |
EP0445855B1 (de) * | 1990-03-09 | 1994-10-26 | VARIAN S.p.A. | Verbesserte Turbomolekularpumpe |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1081387A2 (de) * | 1999-09-06 | 2001-03-07 | Pfeiffer Vacuum GmbH | Vakuumpumpe |
EP1081387A3 (de) * | 1999-09-06 | 2002-04-17 | Pfeiffer Vacuum GmbH | Vakuumpumpe |
EP1201929A3 (de) * | 2000-10-31 | 2003-04-23 | Seiko Instruments Inc. | Vakuumpumpe |
US6672827B2 (en) | 2000-10-31 | 2004-01-06 | Seiko Instruments Inc. | Vacuum pump |
WO2008035112A1 (en) * | 2006-09-22 | 2008-03-27 | Edwards Limited | Molecular drag pumping mechanism |
US8662841B2 (en) | 2006-09-22 | 2014-03-04 | Edwards Limited | Vacuum pump |
EP2064448B2 (de) † | 2006-09-22 | 2021-03-24 | Edwards Limited | Vakuumpumpe |
GB2589151A (en) * | 2019-11-25 | 2021-05-26 | Edwards Ltd | Molecular drag vacuum pump |
Also Published As
Publication number | Publication date |
---|---|
EP0874159A3 (de) | 1998-11-18 |
DE59409375D1 (de) | 2000-06-29 |
EP0697069A1 (de) | 1996-02-21 |
EP0697069B1 (de) | 2000-05-24 |
WO1994025760A1 (de) | 1994-11-10 |
DE4314418A1 (de) | 1994-11-10 |
US5695316A (en) | 1997-12-09 |
JPH08511071A (ja) | 1996-11-19 |
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