DE59300970D1 - Gasreibungsvakuumpumpe. - Google Patents

Gasreibungsvakuumpumpe.

Info

Publication number
DE59300970D1
DE59300970D1 DE59300970T DE59300970T DE59300970D1 DE 59300970 D1 DE59300970 D1 DE 59300970D1 DE 59300970 T DE59300970 T DE 59300970T DE 59300970 T DE59300970 T DE 59300970T DE 59300970 D1 DE59300970 D1 DE 59300970D1
Authority
DE
Germany
Prior art keywords
vacuum pump
gas friction
friction vacuum
gas
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE59300970T
Other languages
English (en)
Inventor
Hans-Peter Kabelitz
Martin Muehlhoff
Hans Kriechel
Frank Fleischmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oerlikon Deutschland Holding GmbH
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Application granted granted Critical
Publication of DE59300970D1 publication Critical patent/DE59300970D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE59300970T 1992-05-16 1993-04-23 Gasreibungsvakuumpumpe. Expired - Fee Related DE59300970D1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE4216237A DE4216237A1 (de) 1992-05-16 1992-05-16 Gasreibungsvakuumpumpe
PCT/EP1993/000984 WO1993023672A1 (de) 1992-05-16 1993-04-23 Gasreibungsvakuumpumpe

Publications (1)

Publication Number Publication Date
DE59300970D1 true DE59300970D1 (de) 1995-12-21

Family

ID=6459056

Family Applications (2)

Application Number Title Priority Date Filing Date
DE4216237A Withdrawn DE4216237A1 (de) 1992-05-16 1992-05-16 Gasreibungsvakuumpumpe
DE59300970T Expired - Fee Related DE59300970D1 (de) 1992-05-16 1993-04-23 Gasreibungsvakuumpumpe.

Family Applications Before (1)

Application Number Title Priority Date Filing Date
DE4216237A Withdrawn DE4216237A1 (de) 1992-05-16 1992-05-16 Gasreibungsvakuumpumpe

Country Status (5)

Country Link
US (1) US5553998A (de)
EP (1) EP0640185B1 (de)
JP (1) JPH07506648A (de)
DE (2) DE4216237A1 (de)
WO (1) WO1993023672A1 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4216237A1 (de) * 1992-05-16 1993-11-18 Leybold Ag Gasreibungsvakuumpumpe
JPH0886298A (ja) * 1994-09-19 1996-04-02 Hitachi Ltd ドライターボ真空ポンプ
GB9525337D0 (en) * 1995-12-12 1996-02-14 Boc Group Plc Improvements in vacuum pumps
DE19632874A1 (de) * 1996-08-16 1998-02-19 Leybold Vakuum Gmbh Reibungsvakuumpumpe
DE29717079U1 (de) 1997-09-24 1997-11-06 Leybold Vakuum Gmbh Compoundpumpe
DE59912626D1 (de) * 1998-05-26 2006-02-16 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit chassis, rotor und gehäuse sowie einrichtung, ausgerüstet mit einer reibungsvakuumpumpe dieser art
JP3092063B2 (ja) 1998-06-17 2000-09-25 セイコー精機株式会社 ターボ分子ポンプ
US6328527B1 (en) * 1999-01-08 2001-12-11 Fantom Technologies Inc. Prandtl layer turbine
JP3788558B2 (ja) * 1999-03-23 2006-06-21 株式会社荏原製作所 ターボ分子ポンプ
JP3961155B2 (ja) * 1999-05-28 2007-08-22 Ｂｏｃエドワーズ株式会社 真空ポンプ
US6514035B2 (en) * 2000-01-07 2003-02-04 Kashiyama Kougyou Industry Co., Ltd. Multiple-type pump
DE10008691B4 (de) * 2000-02-24 2017-10-26 Pfeiffer Vacuum Gmbh Gasreibungspumpe
JP5149472B2 (ja) * 2000-05-15 2013-02-20 プファイファー・ヴァキューム・ゲーエムベーハー ガス摩擦ポンプ
DE10111546A1 (de) 2000-05-15 2002-01-03 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE10046766A1 (de) * 2000-09-21 2002-04-11 Leybold Vakuum Gmbh Compound-Reibungsvakuumpumpe
DE10056144A1 (de) * 2000-11-13 2002-05-23 Pfeiffer Vacuum Gmbh Gasreibungspumpe
US7717684B2 (en) * 2003-08-21 2010-05-18 Ebara Corporation Turbo vacuum pump and semiconductor manufacturing apparatus having the same
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
GB0503946D0 (en) * 2005-02-25 2005-04-06 Boc Group Plc Vacuum pump
US7457661B2 (en) * 2005-03-24 2008-11-25 Medtronic Vascular, Inc. Catheter-based, dual coil photopolymerization system
US7326034B2 (en) * 2005-09-14 2008-02-05 Schlumberger Technology Corporation Pump apparatus and methods of making and using same
US7845413B2 (en) * 2006-06-02 2010-12-07 Schlumberger Technology Corporation Method of pumping an oilfield fluid and split stream oilfield pumping systems
JP5369591B2 (ja) 2008-10-03 2013-12-18 株式会社島津製作所 ターボ分子ポンプ
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage
US9061095B2 (en) 2010-04-27 2015-06-23 Smith & Nephew Plc Wound dressing and method of use
US11274671B2 (en) * 2011-09-14 2022-03-15 Roger L. Bottomfield Turbine cap for turbo-molecular pump
JP6706553B2 (ja) * 2015-12-15 2020-06-10 エドワーズ株式会社 真空ポンプ及び該真空ポンプに搭載される回転翼、反射機構
JP6885851B2 (ja) * 2017-10-27 2021-06-16 エドワーズ株式会社 真空ポンプ、ロータ、ロータフィン、およびケーシング
GB2592618A (en) * 2020-03-03 2021-09-08 Edwards Ltd Turbine blades and methods of manufacture of turbine blades

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2224009A5 (de) * 1973-03-30 1974-10-25 Cit Alcatel
US4579508A (en) * 1982-04-21 1986-04-01 Hitachi, Ltd. Turbomolecular pump
JPS6034594U (ja) * 1983-08-16 1985-03-09 セイコー精機株式会社 縦型タ−ボ分子ポンプ
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump
JPS60182394A (ja) * 1984-02-29 1985-09-17 Shimadzu Corp タ−ボ分子ポンプ
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
DE3613344A1 (de) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik Turbomolekular-vakuumpumpe fuer hoeheren druck
JPS6341695A (ja) * 1986-08-07 1988-02-22 Seiko Seiki Co Ltd タ−ボ分子ポンプ
JPS6385288A (ja) * 1986-09-29 1988-04-15 Hitachi Ltd 真空ポンプ
JPS6463698A (en) * 1987-09-02 1989-03-09 Hitachi Ltd Turbo vacuum pump
JPH02502840A (ja) * 1988-01-05 1990-09-06 ショロホフ　ヴァレリイ　ボリソヴィチ 分子真空ポンプ
DE3885899D1 (de) * 1988-10-10 1994-01-05 Leybold Ag Pumpenstufe für eine Hochvakuumpumpe.
EP0408791B1 (de) * 1989-07-20 1994-03-16 Leybold Aktiengesellschaft Reibungspumpe mit glockenförmigem Rotor
DE58905785D1 (de) * 1989-07-20 1993-11-04 Leybold Ag Gasreibungspumpe mit mindestens einer auslassseitigen gewindestufe.
DE4216237A1 (de) * 1992-05-16 1993-11-18 Leybold Ag Gasreibungsvakuumpumpe

Also Published As

Publication number Publication date
JPH07506648A (ja) 1995-07-20
US5553998A (en) 1996-09-10
DE4216237A1 (de) 1993-11-18
EP0640185B1 (de) 1995-11-15
WO1993023672A1 (de) 1993-11-25
EP0640185A1 (de) 1995-03-01

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Legal Events

Date Code Title Description
8327 Change in the person/name/address of the patent owner

Owner name: BALZERS UND LEYBOLD DEUTSCHLAND HOLDING AG, 63450

8364 No opposition during term of opposition
8327 Change in the person/name/address of the patent owner

Owner name: UNAXIS DEUTSCHLAND HOLDING GMBH, 63450 HANAU, DE

8339 Ceased/non-payment of the annual fee