DE69406752D1 - Sorptionspumpe - Google Patents

Sorptionspumpe

Info

Publication number
DE69406752D1
DE69406752D1 DE69406752T DE69406752T DE69406752D1 DE 69406752 D1 DE69406752 D1 DE 69406752D1 DE 69406752 T DE69406752 T DE 69406752T DE 69406752 T DE69406752 T DE 69406752T DE 69406752 D1 DE69406752 D1 DE 69406752D1
Authority
DE
Germany
Prior art keywords
sorption pump
sorption
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69406752T
Other languages
English (en)
Other versions
DE69406752T2 (de
Inventor
Gunter Voss
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold Inficon Inc
Original Assignee
Leybold Inficon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Inficon Inc filed Critical Leybold Inficon Inc
Application granted granted Critical
Publication of DE69406752D1 publication Critical patent/DE69406752D1/de
Publication of DE69406752T2 publication Critical patent/DE69406752T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Sampling And Sample Adjustment (AREA)
DE69406752T 1993-09-17 1994-09-06 Sorptionspumpe Expired - Fee Related DE69406752T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/123,140 US5401298A (en) 1993-09-17 1993-09-17 Sorption pump

Publications (2)

Publication Number Publication Date
DE69406752D1 true DE69406752D1 (de) 1997-12-18
DE69406752T2 DE69406752T2 (de) 1998-07-02

Family

ID=22406935

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69406752T Expired - Fee Related DE69406752T2 (de) 1993-09-17 1994-09-06 Sorptionspumpe

Country Status (6)

Country Link
US (1) US5401298A (de)
EP (1) EP0645536B1 (de)
JP (1) JPH07151057A (de)
KR (1) KR950008976A (de)
CN (1) CN1109142A (de)
DE (1) DE69406752T2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5426300A (en) * 1993-09-17 1995-06-20 Leybold Inficon, Inc. Portable GCMS system using getter pump
US5902551A (en) * 1995-01-13 1999-05-11 Semi-Gas Systems, Inc. Process gas docking station with point-of-use filter for receiving removable purifier cartridges
US5882384A (en) * 1996-05-20 1999-03-16 Advanced Technology Materials, Inc. Gas source and dispensing system with in situ monitoring of pressure and temperature
US20070274841A1 (en) * 2006-05-24 2007-11-29 Ghantasala Muralidhar K Passive adsorption microvacuum pump and microsystem containing the same
US8193487B2 (en) * 2007-03-16 2012-06-05 Inficon, Inc. Portable light emitting sampling probe
CN101319668B (zh) * 2007-06-06 2010-05-26 中国科学院理化技术研究所 用于驱动微米或纳米流体的润湿泵
GB2592375A (en) * 2020-02-25 2021-09-01 Edwards Vacuum Llc Flange for a vacuum apparatus

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2060861A (en) * 1934-09-29 1936-11-17 Rca Corp Getter assembly
US2511726A (en) * 1947-04-22 1950-06-13 Clark Metal Products Inc Dehydrator plug
DE879430C (de) * 1951-07-19 1953-06-11 Licentia Gmbh Getter fuer Hochspannungsroehren
US3197945A (en) * 1961-02-27 1965-08-03 Varian Associates Sorption pump apparatus
US3208203A (en) * 1962-05-14 1965-09-28 Arnav Ind Inc Dehydrator
US3310227A (en) * 1965-04-12 1967-03-21 Milleron Norman Surge and backstreaming porous diaphragm filter for vacuum system
US3638401A (en) * 1969-03-24 1972-02-01 Varian Associates Vacuum connector for connecting replaceable evacuated devices to an evacuated system
US3791106A (en) * 1970-09-24 1974-02-12 California Inst Of Techn Gas analysis systems and palladium tube separator therefor
NL7016726A (de) * 1970-11-14 1972-05-16
IT963874B (it) * 1972-08-10 1974-01-21 Getters Spa Dispositivo getter perfezionato contenente materiale non evapora bile
US3942546A (en) * 1972-10-27 1976-03-09 Continental Oil Company Corrosion monitoring and composition-analytical apparatus
NL7301204A (de) * 1973-01-29 1974-07-31
US3992626A (en) * 1973-02-23 1976-11-16 Honeywell Inc. Test instrument
IT998681B (it) * 1973-10-01 1976-02-20 Getters Spa Pompa getter
NL7315641A (nl) * 1973-11-15 1975-05-20 Philips Nv Hogedrukgasontladingslamp.
IT1006761B (it) * 1974-01-07 1976-10-20 Getters Spa Impianto e procedimento per l otte nimento di alti vuoti
US4272259A (en) * 1976-07-21 1981-06-09 Union Carbide Corporation Gas gettering system
NL7611137A (nl) * 1976-10-08 1978-04-11 Philips Nv Hogedrukontladingslamp.
US4193398A (en) * 1978-05-25 1980-03-18 Watson-Marlow Limited Fluid displacement
US4146277A (en) * 1978-06-29 1979-03-27 Santoro Dario S Desiccant cap
IT1110295B (it) * 1979-02-05 1985-12-23 Getters Spa Lega ternaria getterante non evaporabile particolarmente per l'assorbimento di acqua e vapore d'acqua in barre combustibili di reattori nucleari
NL8101459A (nl) * 1981-03-24 1982-10-18 Philips Nv Werkwijze voor het vervaardigen van een beeldweergeefbuis voorzien van een gasabsorberende laag; beeldweergeefbuis aldus vervaardigd en getterinrichting geschikt voor een dergelijke werkwijze.
DE3332647A1 (de) * 1983-09-09 1985-03-28 Siemens AG, 1000 Berlin und 8000 München Getter-sorptionspumpe mit waermespeicher fuer hochvakuum- und gasentladungsanlagen
US4874339A (en) * 1985-08-09 1989-10-17 Saes Getters S.P.A. Pumping tubulation getter
IT1224604B (it) * 1988-07-27 1990-10-04 Varian Spa Rivelatore perfezionato di perdite di elio
GB2231716A (en) * 1989-05-10 1990-11-21 Philips Electronic Associated Producing and maintaining a vacuum space in an infrared detector or other device with a getter
CA2024022A1 (en) * 1990-08-27 1992-02-28 Norman L. Baker Filter for removing contaminants from refrigerant
IT1246785B (it) * 1991-04-16 1994-11-26 Getters Spa Contenitore di protezione temporanea per un materiale getter
US5154582A (en) * 1991-08-20 1992-10-13 Danielson Associates, Inc. Rough vacuum pump using bulk getter material
US5328336A (en) * 1992-12-09 1994-07-12 Praxair Technology, Inc. Getter capsule

Also Published As

Publication number Publication date
CN1109142A (zh) 1995-09-27
EP0645536A1 (de) 1995-03-29
KR950008976A (ko) 1995-04-21
EP0645536B1 (de) 1997-11-12
DE69406752T2 (de) 1998-07-02
US5401298A (en) 1995-03-28
JPH07151057A (ja) 1995-06-13

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee