US3197945A - Sorption pump apparatus - Google Patents

Sorption pump apparatus Download PDF

Info

Publication number
US3197945A
US3197945A US91837A US9183761A US3197945A US 3197945 A US3197945 A US 3197945A US 91837 A US91837 A US 91837A US 9183761 A US9183761 A US 9183761A US 3197945 A US3197945 A US 3197945A
Authority
US
United States
Prior art keywords
casing
fin members
pump
sorption
envelope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US91837A
Inventor
Zaphiropoulos Renn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian Associates Inc filed Critical Varian Associates Inc
Priority to US91837A priority Critical patent/US3197945A/en
Priority to GB6977/62A priority patent/GB939395A/en
Priority to FR889324A priority patent/FR81223E/en
Application granted granted Critical
Publication of US3197945A publication Critical patent/US3197945A/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38Exhausting, degassing, filling, or cleaning vessels

Definitions

  • Prior art sorption vacuum pumps 'have proved generally unsatisfactory for some vacuum applications because of one or more of the following reasons: inadequate pumping capacity because of limited quantities of absorption material utilized, inadequate pumping capacity due to inefiicient cooling of absorption material, and pump configurations which are relatively expensive to fabricate and produce.
  • the present invention provides a unique sorption vacuum pump which manifests none of the above disadvantages.
  • the object of the present invention to provide a sorption vacuum pump which is very efi'icient in its operation, has a large pumping capacity, and whose components are relatively inexpensive to tool and fabricate.
  • One feature of the present invention is a novel sorption vacuum pump interior cooling means which is extremely efiicient and is easily tooled and assembled.
  • Another feature of the present invention is the use of an exhaust valve which allows a release of the interior pressure of a sorption vacuum pump upon completion of a pumping cycle.
  • Another feature of the present invention is a unique exterior design which provides a sorption vacuum pump of great mechanical strength and durability.
  • PIG. 1 is an exploded perspective view of the sorption pump apparatus of the present invention
  • FIG. 2 is an enlarged plan cross sectional plan view taken along the lines 2-2 in the direction of the arrows of the apparatus of FIG. 1, and
  • FIG. 3 is an enlarged fragmentary Vertical cross sectional view taken along the lines 3-3 in the direction of the arrows of the apparatus of FIG. 2.
  • FIGS. 1 through 3 there is shown a sorption vacuum pump casing having a hollow cylindrical side wall envelope 11 which is sealed by a bottom end wall 12 and a top end wall 13.
  • the end walls 12 and 13 are externally convex so as to form with the pump envelope 11 a structure of great mechanical strength which will experience Very little deformation upon subjection to pressure.
  • the top end wall 13 has a central inlet aperture which receives one appendage of a hollow tubing mechanism 14 having a cross configuration.
  • Two of the remaining open ends of the tubing mechanism 14 are associated with flanges 15 adapted to be connected to systems which it is desired to evacuate.
  • the one remaining open end of the tubing mechanism 14 is closed by a removable stopper 16 as of, for example, rubber which is permanently attached to the tubing 14 through the intermediary of an attaching chain 17.
  • the casing 10 and the bottom end Wall 12 are free of obstructions so as to allow them to be easily submerged in a cooling liquid.
  • the cooling fins 18 provide a short high conductance thermal path between the wall and central portion of the elongated envelope 11.
  • the cooling fins 18 are fabricated from a sheet metal having a good thermal conductance such as copper with simple cutting and bending Operations making their tooling extremely simple and inexpensive.
  • a sufficient number of the cooling fins 18 are peripherally compressed within the pump envelope 11 by cone shaped jig assemblies (not shown) centrally inserted from both ends of the envelope 11.
  • the cooling fins 18 provide a short high conductance thermal path for distributing cooling between the wall and central portions of the elongated pump envelope 11. It is also possible to reverse the position of the cooling fins 18 by brazing the valley portions 19 to the envelope 11 with the ridge portions 20 extending inwardly therefrom.
  • a volume of absorbent material 21 such as activated charcoal or molecular sieve as of, for example, zeolite substantially fills the pump envelope 11 and buries the cooling fins 18 which provide cooling therefor.
  • the distribution of cooling provided by the fins 18 is extremely important because the pumping capacity of a sorption pump is largely dependent upon the temperature and surface area of its absorbent material and because both the absorbent material 21 and the vacuum spaces which exist between the particles of the absorbent material during pumping Operations offer very limited thermal conductance. It would, therefore, be impossible to achieve high pumping capacity without a relatively large volume of well cooled absorbent and impossible to efiiciently cool such large Volumes of absorption material without effective cooling distribution apparatus.
  • a sorption pump device of the present invention having an inner volume of between l and 2 liters will pump out a 70 liter air system from atmosphere to 29 microns in approximately one hour.
  • the sorption pump device of the present invention is placed in an open end container 22 as shown in FIG. 3 and either one or both of the flange members 15 are connected to systems it is desired to evacuate. However, if only one fiange 15 is connected to a vacuum system, the remainng -flange 15 is sealed off with a suitable closure ilange.
  • the container 22 is then filled with a liquid refrigerant 23 such as liquid nitrogen to a level suflicient to cover substantially all of the external envelope 11.
  • the cooling fins 18 brazed to the pump envelope 11 provide good thermal conductivity paths throughout the volume of absorbent material 21 to thereby quickly bring substantially the entire volume of absorbent material to an extremely low temperature equal to that of the liquid refrigerant 22.
  • the refrigerated absorbent material then absorbs gas molecules at a relatively high rate thereby evacuating a vacuum system through the intermediary of the tubing 14.
  • the sorption pump is valved of from the vacuum system with a suitable valve (not shown) and the stopper 16 is removed. This releases the pressure within the envelope 11 caused by the absorbed gas evaporation which takes mar/,945
  • the stopper 16 also serves as a safety valve by automatically disengaging from the pump to release a possibly dangerous pressure buildup within the pump envelope 11.
  • the present invention has therefore provided a sorption Vacuum pump which has a large pumping capacity, is extremely elficient, and is relatively inexpensive to tool and assemble;
  • Arvacuum sorption pump apparatus comprising: a hollow pump casing made of heat conductive, impervious material and having a cylindrical side Wall and top and bottom Walls, said casing adaptedrto be refrigerated by a liquid coolant, said top Wall having a gas inlet aperture, said casing being vacuum tight except for said gas inlet aperture; a plurality of elongated, heat conductive U- shaped fin members disposed in a radial array length- Wise within said casing, said fin members having Valley and ridge portions, said ridge portions being permanently secured to said side wall in good thermal relationship,

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Sorption Type Refrigeration Machines (AREA)

Description

Aug- 3, 1965 R. zAPHlRoPouLos 3,197,945
SORPTION PUMP APPARATUS Filed Feb. 27. 1961 INVENTOR. RENN ZAPHIROPOULOS w w ATTORNEY United States Patent 4 3,197,945 SGRPTIUN PUMP APPARATUS Renn Zaphiropoulos, lLos Altus, Calif., assignor to Varian Associates, Palio Aito, Calif., a corporation of Caifornia l Filed Feb. 27, 1961, Ser. No. 91,837 2 Claims. (Cl. 55-269) The present invention relates in general to sorption vacuum pumps and more particularly to novel means for cooling the absorbent material in a sorption vacuum pump.
Prior art sorption vacuum pumps 'have proved generally unsatisfactory for some vacuum applications because of one or more of the following reasons: inadequate pumping capacity because of limited quantities of absorption material utilized, inadequate pumping capacity due to inefiicient cooling of absorption material, and pump configurations which are relatively expensive to fabricate and produce.
The present invention provides a unique sorption vacuum pump which manifests none of the above disadvantages.
It is, therefore, the object of the present invention to provide a sorption vacuum pump which is very efi'icient in its operation, has a large pumping capacity, and whose components are relatively inexpensive to tool and fabricate.
One feature of the present invention is a novel sorption vacuum pump interior cooling means which is extremely efiicient and is easily tooled and assembled.
Another feature of the present invention is the use of an exhaust valve which allows a release of the interior pressure of a sorption vacuum pump upon completion of a pumping cycle.
Another feature of the present invention is a unique exterior design which provides a sorption vacuum pump of great mechanical strength and durability.
The above features and advantages of the present invention will become more apparent upon a perusal of the following speeification taken in connection with the accompanying drawings wherein:
PIG. 1 is an exploded perspective view of the sorption pump apparatus of the present invention,
FIG. 2 is an enlarged plan cross sectional plan view taken along the lines 2-2 in the direction of the arrows of the apparatus of FIG. 1, and
FIG. 3 is an enlarged fragmentary Vertical cross sectional view taken along the lines 3-3 in the direction of the arrows of the apparatus of FIG. 2.
Referring now to FIGS. 1 through 3 there is shown a sorption vacuum pump casing having a hollow cylindrical side wall envelope 11 which is sealed by a bottom end wall 12 and a top end wall 13. The end walls 12 and 13 are externally convex so as to form with the pump envelope 11 a structure of great mechanical strength which will experience Very little deformation upon subjection to pressure. V
The top end wall 13 has a central inlet aperture which receives one appendage of a hollow tubing mechanism 14 having a cross configuration. Two of the remaining open ends of the tubing mechanism 14 are associated with flanges 15 adapted to be connected to systems which it is desired to evacuate. The one remaining open end of the tubing mechanism 14 is closed by a removable stopper 16 as of, for example, rubber which is permanently attached to the tubing 14 through the intermediary of an attaching chain 17. The casing 10 and the bottom end Wall 12 are free of obstructions so as to allow them to be easily submerged in a cooling liquid.
There is provided within the pump envelope 11 a plu- ICC rality of axially elongated U-shaped metallic cooling fins 18 in a generally radial array whereby their free end ridge portions 20 contact the inner periphery of the vacuum pump envelope 11 and their Valley portions 19 extend inwardly toward the central portion of the pump envelope 11. Thus, the cooling fins 18 provide a short high conductance thermal path between the wall and central portion of the elongated envelope 11. The cooling fins 18 are fabricated from a sheet metal having a good thermal conductance such as copper with simple cutting and bending Operations making their tooling extremely simple and inexpensive. A sufficient number of the cooling fins 18 are peripherally compressed within the pump envelope 11 by cone shaped jig assemblies (not shown) centrally inserted from both ends of the envelope 11. This forces the ridge portions 20 of adjacent fins into compressive contact with each other at their free ends and with the inside wall of the envelope 11. The force produced by compressing the cooling fins 13 within the pump envelope 11 maintains them in position for brazing to the inner wall of the envelope 11 and eliminates the necessity of using a more complicated assembly jig. Thus, the cooling fins 18 provide a short high conductance thermal path for distributing cooling between the wall and central portions of the elongated pump envelope 11. It is also possible to reverse the position of the cooling fins 18 by brazing the valley portions 19 to the envelope 11 with the ridge portions 20 extending inwardly therefrom.
A volume of absorbent material 21 such as activated charcoal or molecular sieve as of, for example, zeolite substantially fills the pump envelope 11 and buries the cooling fins 18 which provide cooling therefor.
The distribution of cooling provided by the fins 18 is extremely important because the pumping capacity of a sorption pump is largely dependent upon the temperature and surface area of its absorbent material and because both the absorbent material 21 and the vacuum spaces which exist between the particles of the absorbent material during pumping Operations offer very limited thermal conductance. It would, therefore, be impossible to achieve high pumping capacity without a relatively large volume of well cooled absorbent and impossible to efiiciently cool such large Volumes of absorption material without effective cooling distribution apparatus.
A sorption pump device of the present invention having an inner volume of between l and 2 liters will pump out a 70 liter air system from atmosphere to 29 microns in approximately one hour.
In operation, the sorption pump device of the present invention is placed in an open end container 22 as shown in FIG. 3 and either one or both of the flange members 15 are connected to systems it is desired to evacuate. However, if only one fiange 15 is connected to a vacuum system, the remainng -flange 15 is sealed off with a suitable closure ilange. The container 22 is then filled with a liquid refrigerant 23 such as liquid nitrogen to a level suflicient to cover substantially all of the external envelope 11. The cooling fins 18 brazed to the pump envelope 11 provide good thermal conductivity paths throughout the volume of absorbent material 21 to thereby quickly bring substantially the entire volume of absorbent material to an extremely low temperature equal to that of the liquid refrigerant 22. The refrigerated absorbent material then absorbs gas molecules at a relatively high rate thereby evacuating a vacuum system through the intermediary of the tubing 14. Upon completion of a pumping cycle, the sorption pump is valved of from the vacuum system with a suitable valve (not shown) and the stopper 16 is removed. This releases the pressure within the envelope 11 caused by the absorbed gas evaporation which takes mar/,945
place when the absorbent material 23 reaches higher temperatures. It is the evaporation of gas absorbed by the absorbent material 20 that conditions the sorption pump for another cycle ofpumping which is carried out as described above.v The stopper 16 also serves as a safety valve by automatically disengaging from the pump to release a possibly dangerous pressure buildup within the pump envelope 11. i
The present invention has therefore provided a sorption Vacuum pump which has a large pumping capacity, is extremely elficient, and is relatively inexpensive to tool and assemble;
Since many changes could bemade in the above construction and many apparently widely differing embodiments of this invention could be made without departing from the scope thereof, it is intended that all matter contained in the above description or shown in the accompanying drawings shall be interpreted as illustrative and not in a limiting sense.
vVWhat is claimed is:
i 1. Arvacuum sorption pump apparatus comprising: a hollow pump casing made of heat conductive, impervious material and having a cylindrical side Wall and top and bottom Walls, said casing adaptedrto be refrigerated by a liquid coolant, said top Wall having a gas inlet aperture, said casing being vacuum tight except for said gas inlet aperture; a plurality of elongated, heat conductive U- shaped fin members disposed in a radial array length- Wise within said casing, said fin members having Valley and ridge portions, said ridge portions being permanently secured to said side wall in good thermal relationship,
said fin members dividing said container into a plm'ality of gas sorbent material receiving compartments disposed on both sides of said fin members; and, gas sorbent material disposed within and substantially tilling each of said compartments and contacting said fin members and casing.
2. Apparatus according to claim 1 wherein said fin members are compressed within said pump casing prior to being permanently secured to said side wall so as to produce a compressive force between their adjacent ridge portions. i
References Cited by the Examiner UNITED STATES PATENTS 1,729,083 9/29 Miller 62-269 XR 2,0l9,356 10/35 Normelli 62-480 2,067,678 1/37 Nesselmann 62-480 2253,90? 8/41 Levine 230-69 2,758,719 8/56 Line -387 XR 2,831,549 4/58 Alpert 55-467 XR 2,925,878 2/60 Spann 55-30 XR 3,116,764 1/64 Jepsen et al.
994,472 4/51 France.
3/39 Netherlands.
REUBTEN FREDMAN, Primary Examiner.
HARRY B. THGRNTON, IOSEPH L. BRANSON, JR.,
. Examrzers.

Claims (1)

1. A VACUUM SORPTION PUMP APPARATUS COMPRISING: A HOLLOW PUMP CASING MADE OF HEAT CONDUCTIVE, IMPERVIOUS MATERIAL AND HAVING A CYLINDRICAL SIDE WALL AND TOP AND BOTTOM WALLS, SAID CASING ADAPTED TO THE REFRIGERATED BY A LIQUID COOLANT, SAID TOP WALL HAVING A GAS INLET APERATURE, SAID CASING BEING VACUUM TIGHT EXCEPT FOR SAID GAS INLET APERTURE; A PLURALITY OF ELONGATED, HEAT CONDUCTIVE USHAPED FIN MEMBERS DISPOSED IN A RADIAL ARRAY LENGTHWISE WITHIN SAID CASING, SAID FIN MEMBERS BEING VALLEY AND RIDGE PORTIONS, SAID RIDGE PORTIONS BEING PERMANENTLY SECURED TO SAID SIDE WALL IN GOOD THERMAL RELATIONSHIP, SAID FIN MEMBERS DIVIDING SAID CONTAINER INTO A PLURALITY OF GAS SORBENT MATERIAL RECEIVING COMPARTMENTS DISPOSED ON BOTH SIDE OF SAID FIN MEMBERS; AND, GAS SORBENT MATERIAL DISPOSED WITHIN AND SUBSTANTIALLY FILLING EACH OF SAID COMPARTMENTS AND CONTACTING SAID FIN MEMBERS AND CASING.
US91837A 1961-02-27 1961-02-27 Sorption pump apparatus Expired - Lifetime US3197945A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US91837A US3197945A (en) 1961-02-27 1961-02-27 Sorption pump apparatus
GB6977/62A GB939395A (en) 1961-02-27 1962-02-22 Sorption pump apparatus
FR889324A FR81223E (en) 1961-02-27 1962-02-27 Method and apparatus for making extremely high voids

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US91837A US3197945A (en) 1961-02-27 1961-02-27 Sorption pump apparatus

Publications (1)

Publication Number Publication Date
US3197945A true US3197945A (en) 1965-08-03

Family

ID=22229884

Family Applications (1)

Application Number Title Priority Date Filing Date
US91837A Expired - Lifetime US3197945A (en) 1961-02-27 1961-02-27 Sorption pump apparatus

Country Status (2)

Country Link
US (1) US3197945A (en)
GB (1) GB939395A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3264803A (en) * 1963-01-21 1966-08-09 Gen Electric Sorption vacuum pump
JPS5079481A (en) * 1973-11-16 1975-06-27
US3906798A (en) * 1974-09-30 1975-09-23 Bendix Corp Instrument protecting means
DE4326264A1 (en) * 1993-08-05 1995-02-09 Leybold Ag Test gas detector with vacuum pump and method for operating a test gas detector of this type
US5401298A (en) * 1993-09-17 1995-03-28 Leybold Inficon, Inc. Sorption pump
US5426300A (en) * 1993-09-17 1995-06-20 Leybold Inficon, Inc. Portable GCMS system using getter pump
US5917140A (en) * 1996-05-21 1999-06-29 Advanced Technology Materials, Inc. Sorbent-based fluid storage and dispensing vessel with enhanced heat transfer means
EP1041348A3 (en) * 1999-03-31 2001-07-04 Matsushita Electric Industrial Co., Ltd. Method for installing air conditioner
EP1041349A3 (en) * 1999-04-01 2001-10-17 Matsushita Electric Industrial Co., Ltd. Replacing gas apparatus for an air conditioner

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9557009B2 (en) 2013-11-06 2017-01-31 General Electric Company Gas reservoir and a method to supply gas to plasma tubes
US9330876B2 (en) 2013-11-06 2016-05-03 General Electric Company Systems and methods for regulating pressure of a filled-in gas

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL45782C (en) * 1936-07-09
US1729083A (en) * 1925-03-11 1929-09-24 Silica Gel Corp Refrigeration process and apparatus
US2019356A (en) * 1930-05-14 1935-10-29 Normelli Wulff Berzelius Refrigerating machine operating with a solid absorbent
US2067678A (en) * 1932-04-11 1937-01-12 Siemens Ag Refrigeration
US2253907A (en) * 1936-12-15 1941-08-26 Julius Y Levine Refrigerating apparatus
FR994472A (en) * 1949-07-04 1951-11-16 Improvements to dry absorption refrigeration units and periodic cycles
US2758719A (en) * 1953-01-22 1956-08-14 Ansul Chemical Co Dehydrator
US2831549A (en) * 1954-08-31 1958-04-22 Westinghouse Electric Corp Isolation trap
US2925878A (en) * 1957-04-08 1960-02-23 Delta Tank Mfg Co Inc Mist extractor with safety by-pass
US3116764A (en) * 1959-03-30 1964-01-07 Varian Associates High vacuum method and apparatus

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1729083A (en) * 1925-03-11 1929-09-24 Silica Gel Corp Refrigeration process and apparatus
US2019356A (en) * 1930-05-14 1935-10-29 Normelli Wulff Berzelius Refrigerating machine operating with a solid absorbent
US2067678A (en) * 1932-04-11 1937-01-12 Siemens Ag Refrigeration
NL45782C (en) * 1936-07-09
US2253907A (en) * 1936-12-15 1941-08-26 Julius Y Levine Refrigerating apparatus
FR994472A (en) * 1949-07-04 1951-11-16 Improvements to dry absorption refrigeration units and periodic cycles
US2758719A (en) * 1953-01-22 1956-08-14 Ansul Chemical Co Dehydrator
US2831549A (en) * 1954-08-31 1958-04-22 Westinghouse Electric Corp Isolation trap
US2925878A (en) * 1957-04-08 1960-02-23 Delta Tank Mfg Co Inc Mist extractor with safety by-pass
US3116764A (en) * 1959-03-30 1964-01-07 Varian Associates High vacuum method and apparatus

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3264803A (en) * 1963-01-21 1966-08-09 Gen Electric Sorption vacuum pump
JPS5079481A (en) * 1973-11-16 1975-06-27
JPS5743289B2 (en) * 1973-11-16 1982-09-14
US3906798A (en) * 1974-09-30 1975-09-23 Bendix Corp Instrument protecting means
DE4326264A1 (en) * 1993-08-05 1995-02-09 Leybold Ag Test gas detector with vacuum pump and method for operating a test gas detector of this type
US5401298A (en) * 1993-09-17 1995-03-28 Leybold Inficon, Inc. Sorption pump
US5426300A (en) * 1993-09-17 1995-06-20 Leybold Inficon, Inc. Portable GCMS system using getter pump
US5917140A (en) * 1996-05-21 1999-06-29 Advanced Technology Materials, Inc. Sorbent-based fluid storage and dispensing vessel with enhanced heat transfer means
EP1041348A3 (en) * 1999-03-31 2001-07-04 Matsushita Electric Industrial Co., Ltd. Method for installing air conditioner
EP1041349A3 (en) * 1999-04-01 2001-10-17 Matsushita Electric Industrial Co., Ltd. Replacing gas apparatus for an air conditioner

Also Published As

Publication number Publication date
GB939395A (en) 1963-10-16

Similar Documents

Publication Publication Date Title
US3197945A (en) Sorption pump apparatus
US2690653A (en) Stamped plate
EP0087827B1 (en) Infra-red radiation detectors
US5054544A (en) Sorption container for solid sorption medium
EP2549206B1 (en) Plate-based adsorption chiller subassembly
US7726139B2 (en) Cooling sorption element with gas-impermeable sheeting
US3202212A (en) Heat transfer element
JPH05264119A (en) Method and apparatus for cooling medium within container
US4555907A (en) Cryopump with improved second stage array
US2637530A (en) Heat exchange structure
US4494381A (en) Cryopump with improved adsorption capacity
US3116764A (en) High vacuum method and apparatus
FR2604100A1 (en) Enclosure device for adsorbers or vacuum evaporators
US3332479A (en) Heat exchanger with expansible tube seal
US3200569A (en) Sorption gas and vapor trap apparatus
US4466252A (en) Cryopump
US4938667A (en) Method for the manufacture of a vacuum insulating structure and an insulating structure so produced
US3172748A (en) Sorption pump
US3324941A (en) Heat exchanger with expansible tube seal
TWI791676B (en) Cryopump with enhanced frontal array
JP2013181748A (en) Heat exchanger
JPS6392897A (en) Isothermal structure
US3490247A (en) Sorption pump roughing system
CA1322273C (en) Method for the manufacture of a vacuum insulating structure and an insulating structure so produced
CN212179331U (en) Refrigerator with a door