DE69214845D1 - Kryopumpe mit differenzleistung - Google Patents

Kryopumpe mit differenzleistung

Info

Publication number
DE69214845D1
DE69214845D1 DE69214845T DE69214845T DE69214845D1 DE 69214845 D1 DE69214845 D1 DE 69214845D1 DE 69214845 T DE69214845 T DE 69214845T DE 69214845 T DE69214845 T DE 69214845T DE 69214845 D1 DE69214845 D1 DE 69214845D1
Authority
DE
Germany
Prior art keywords
cryopump
differential performance
differential
performance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69214845T
Other languages
English (en)
Other versions
DE69214845T2 (de
Inventor
Allen Bartlett
Douglas Aitken
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Helix Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helix Technology Corp filed Critical Helix Technology Corp
Application granted granted Critical
Publication of DE69214845D1 publication Critical patent/DE69214845D1/de
Publication of DE69214845T2 publication Critical patent/DE69214845T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps
DE69214845T 1991-05-17 1992-05-13 Kryopumpe mit differenzleistung Expired - Fee Related DE69214845T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/702,597 US5211022A (en) 1991-05-17 1991-05-17 Cryopump with differential pumping capability
PCT/US1992/003972 WO1992020918A2 (en) 1991-05-17 1992-05-13 Cryopump with differential pumping capability

Publications (2)

Publication Number Publication Date
DE69214845D1 true DE69214845D1 (de) 1996-11-28
DE69214845T2 DE69214845T2 (de) 1997-04-03

Family

ID=24821872

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69214845T Expired - Fee Related DE69214845T2 (de) 1991-05-17 1992-05-13 Kryopumpe mit differenzleistung

Country Status (5)

Country Link
US (1) US5211022A (de)
EP (1) EP0678165B1 (de)
JP (1) JP3192143B2 (de)
DE (1) DE69214845T2 (de)
WO (1) WO1992020918A2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5537833A (en) * 1995-05-02 1996-07-23 Helix Technology Corporation Shielded cryogenic trap
US5974809A (en) * 1998-01-21 1999-11-02 Helix Technology Corporation Cryopump with an exhaust filter
US7320224B2 (en) * 2004-01-21 2008-01-22 Brooks Automation, Inc. Method and apparatus for detecting and measuring state of fullness in cryopumps
US7313922B2 (en) * 2004-09-24 2008-01-01 Brooks Automation, Inc. High conductance cryopump for type III gas pumping
US9266039B2 (en) 2010-11-24 2016-02-23 Brooks Automation, Inc. Cryopump with controlled hydrogen gas release
JP6031451B2 (ja) * 2011-02-09 2016-11-24 ブルックス オートメーション インコーポレイテッド クライオポンプ
TWI705187B (zh) 2011-03-04 2020-09-21 美商艾德華真空有限責任公司 低溫冷凍系統以及用於控制氦氣冷凍劑之供給的方法
JP5808691B2 (ja) * 2012-02-23 2015-11-10 住友重機械工業株式会社 クライオポンプ、及びクライオポンプの再生方法
KR101588166B1 (ko) 2015-05-12 2016-01-25 박상욱 기능성 상의
JP6806583B2 (ja) * 2017-02-07 2021-01-06 住友重機械工業株式会社 クライオポンプ
EP3710699B1 (de) 2017-11-17 2022-06-22 Edwards Vacuum LLC Kryopumpe mit verstärktem frontarray
WO2019099862A1 (en) * 2017-11-17 2019-05-23 Brooks Automation, Inc. Cryopump with peripheral first and second stage arrays

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3122896A (en) * 1962-10-31 1964-03-03 Cryovac Inc Pump heat radiation shield
FR2114039A5 (de) * 1970-11-13 1972-06-30 Air Liquide
FR2161483A6 (en) * 1971-11-26 1973-07-06 Air Liquide Ultra high vacuum plant - uses cryopump with improved cryosorption trap
DE3330146A1 (de) * 1982-09-17 1984-03-22 Balzers Hochvakuum Gmbh, 6200 Wiesbaden Vorrichtung und verfahren zur schnellen regeneration von autonomen kryopumpen
US4446702A (en) * 1983-02-14 1984-05-08 Helix Technology Corporation Multiport cryopump
US4555907A (en) * 1984-05-18 1985-12-03 Helix Technology Corporation Cryopump with improved second stage array
US4724677A (en) * 1986-10-09 1988-02-16 Foster Christopher A Continuous cryopump with a device for regenerating the cryosurface
US4838035A (en) * 1988-05-05 1989-06-13 The United States Of America As Represented By The United States Department Of Energy Continuous cryopump with a method for removal of solidified gases

Also Published As

Publication number Publication date
DE69214845T2 (de) 1997-04-03
JPH06507958A (ja) 1994-09-08
WO1992020918A3 (en) 1993-01-21
JP3192143B2 (ja) 2001-07-23
US5211022A (en) 1993-05-18
EP0678165A1 (de) 1995-10-25
WO1992020918A2 (en) 1992-11-26
EP0678165B1 (de) 1996-10-23

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee