EP0697068B1 - Pompe a vide a friction munie d'un support de palier - Google Patents

Pompe a vide a friction munie d'un support de palier Download PDF

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Publication number
EP0697068B1
EP0697068B1 EP94910416A EP94910416A EP0697068B1 EP 0697068 B1 EP0697068 B1 EP 0697068B1 EP 94910416 A EP94910416 A EP 94910416A EP 94910416 A EP94910416 A EP 94910416A EP 0697068 B1 EP0697068 B1 EP 0697068B1
Authority
EP
European Patent Office
Prior art keywords
sleeve
rotor
shaped carrier
housing
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP94910416A
Other languages
German (de)
English (en)
Other versions
EP0697068A1 (fr
Inventor
Heinrich Engländer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Balzers und Leybold Deutschland Holding AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG, Balzers und Leybold Deutschland Holding AG filed Critical Leybold AG
Publication of EP0697068A1 publication Critical patent/EP0697068A1/fr
Application granted granted Critical
Publication of EP0697068B1 publication Critical patent/EP0697068B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0606—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump
    • F04D25/0613—Units comprising pumps and their driving means the pump being electrically driven the electric motor being specially adapted for integration in the pump the electric motor being of the inside-out type, i.e. the rotor is arranged radially outside a central stator
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Definitions

  • the invention relates to a friction vacuum pump a housing, a rotor and a rotor bearing, which itself supported in the housing via a sleeve-shaped carrier.
  • a pump of this type is known from document FR-A-2 534 980.
  • Frictional vacuum pumps include Gaede pumps (in one Housing rotating cylinder with pump gap and between Inlet and outlet located barrier gap), Holweck pumps (in a housing rotating cylinder with helical, grooves arranged on the stator or rotor side), Siegbahn pumps (rotating and standing washers with spiral designed grooves) and turbomolecular pumps with Rotor and guide vanes are equipped. It is known, Friction pumps with differently designed pump sections equip.
  • the pump properties of a friction vacuum pump depend decisive for the distance between the moving, pump-active areas.
  • the gap cannot be arbitrarily small be made because of slight vibrations of the rotor must be permitted. This applies in particular to the phase driving through resonance frequencies when starting the Rotor to its operating speed.
  • the present invention is based on the object a friction vacuum pump of the type mentioned To support the rotor bearing in the housing in such a way that allow despite vibrations of the rotating system Support optimally small distances between the pump-active areas can be selected.
  • this object is achieved in that the sleeve-shaped carrier on which the rotor bearing is located supports, in turn over several, preferably three, itself supports axially extending rods in the housing.
  • Rotor are the vibrations that the rotor is still executing can, positively guided, in the radial direction.
  • Axial directional components of movement of the rotor are themselves at relatively short rods practically zero. Radially yourself extending gaps between active pumping surfaces can therefore optimally small. Axial only directed columns still have the radial vibrations of the Rotor are taken into account.
  • damping For damping and reducing the radial vibration amplitudes of the rotor it is advisable to use damping to provide.
  • This advantageously consists of one O-ring, which is between the sleeve-shaped carrier and a housing part. The maximum vibration amplitude the rotor is thereby determined.
  • the axially directed Columns must be chosen so that they are allow slight, maximum possible vibrations.
  • the various friction vacuum pumps are generally with 1, their housing with 2 and the upper, cylindrical housing section with 3 designated.
  • the cylindrical housing section 3 is centered the stator 4, which has a plurality of stator rings 5, 6 and 7 includes.
  • the rotor 8 is mounted in the bearings 9. Both illustrated embodiments are the bearings 9 as Rolling bearings trained. Also magnetic bearings or plain bearings can be used in these places.
  • the drive motor is designated 11. During the operation of the pump is a recipient to be evacuated at the inlet flange 12 connected. Due to the rotation of the rotor 8, the Gases conveyed to the outlet 13 to which a backing pump connected.
  • the exemplary embodiment according to FIG. 1 is a turbomolecular vacuum pump.
  • the stator rings 5 each carry inwards Directed stator blades 14, which are attached to the rotor 8 Rotor blades 15 are assigned.
  • the rotor 8 is supported via a shaft 16 in the rotor bearings 9.
  • the rotor support according to the invention comprises the sleeve-shaped Carrier 21, the upper end of which has a collar 22 is equipped.
  • the lower end of the carrier 21 protrudes into one Recess 23 of a housing component 24, which only has a slightly larger diameter than the outside diameter of the carrier 21.
  • An O-ring 25 between the Carrier 21 and the inside of the recess 23 secures the one the central position of the carrier 21 and is used for other than a damping element.
  • Rods 26 are provided on the collar 22 and on the housing component 24 are attached. Performs one suspended in this way Rotor 8 due to shocks or when driving through resonances Vibrations, then these are vibrations positively driven and practically exclusively directed radially. When rotor vibrations occur, only one occurs radially directional parallel displacement of the rotor instead. Radial directed gap between the stator and rotor blades 14, 15 can be kept optimally small. When dimensioning the radially directed gap between the stator blades 14 and the rotor 8 on the one hand and the rotor blades 15 and the stator 4 on the other hand are only the minor Radial vibrations of the rotor must be taken into account. The amplitude of these vibrations depends on the design of the damping element 25.
  • the rods 26 - preferably three - suitably consist of Metal and have a rigidity adapted to the machine dynamics over the length and the rod diameter. For lengths> 30 mm occur axially directed vibration components of the Rotor 8 in view of the small radial deflections ( ⁇ 0.2 mm) practically not.
  • turbomolecular pump stages 14, 15 available on the high vacuum side. That includes itself Siegbahn pump section.
  • the individual Siegbahn pump stages consist of rotor ring disks 16 and stator ring disks 17.
  • the stator washers 17 are from the Stator rings 6 worn. At the front, they are spiral-shaped Grooves 19 equipped. The spiral shape is chosen so that a continuous gas flow from inlet 12 to outlet 13 is ensured, that is, that in the illustrated embodiment, the above a stator ring disk 17 pump-active surfaces the Siegbahn steps the gases from the outside in and the located below a stator washer 17 Pump-active surfaces convey the gases from the inside to the outside.
  • the axial gaps between the stator and rotor ring disks 16, 17 can - since the rotor 8 axially directed vibrations can practically not do - optimally small being held.
  • the pump characteristics of the Siegbahn pump section, especially their compression also optimal.
  • the embodiment of Figure 4 differs from the embodiments of Figures 1 to 3 also still in that instead of a shaft 16 a housing fixed Pin 33 is provided on which the rotor 8 on the Layer 9 and the sleeve-shaped carrier 21 supports.
  • the bars 26 extend between a collar 34 at the top of the pin 33 and an inward edge 35 on lower end of the sleeve-shaped carrier 21.
  • the damping element 25 is located between the sleeve-shaped carrier 21 and the collar 34 of the pin 33. With a rotor support this type it is also necessary that the Drive motor 11 is designed as an external rotor.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (12)

  1. Pompe à vide à friction (1) comprenant un boítier (2, 3), un rotor (8) et un palier de rotor (9), qui s'appuie dans le boítier (2, 3) par l'intermédiaire d'un support en forme de douille (21), caractérisée en ce que la totalité du palier de rotor (9) s'appuie sur le support, et en ce que le support en forme de douille (21) s'appuie de son côté dans le boítier (2, 3) par l'intermédiaire de plusieurs tiges (26), de préférence au nombre de trois, qui s'étendent sensiblement axialement.
  2. Pompe selon la revendication 1, caractérisée en ce qu'un amortisseur (25) est associé au support en forme de douille (21).
  3. Pompe selon la revendication 2, caractérisée en ce que l'amortisseur est constitué par un joint torique (25) qui est agencé entre le support en forme de douille (21) et un composant solidaire du boítier (24, 34).
  4. Pompe selon l'une des revendications 1, 2 ou 3, caractérisée en ce que le rotor (8) est équipé d'un arbre (16), qui s'appuie dans le boítier (2, 3) par l'intermédiaire du palier (9), du support en forme de douille (21), et des tiges (26).
  5. Pompe selon la revendication 4, caractérisée en ce que le support en forme de douille (21) est équipé d'un côté d'une collerette (22) qui sert à la fixation des tiges (26).
  6. Pompe selon la revendication 5, caractérisée en ce que l'amortisseur (25) est associé au côté frontal du support en forme de douille (21) opposé à la collerette (22).
  7. Pompe selon la revendication 6, caractérisée en ce que l'extrémité du support en forme de douille opposée à la collerette (22) pénètre dans un évidement (23) d'un composant du boítier (24), et en ce qu'un joint torique (25) situé entre le support (21) et la face intérieure de l'évidement (23) forme l'amortisseur.
  8. Pompe selon l'une ou l'autre des revendications 1 et 2, caractérisée en ce que le rotor (8) s'appuie sur un tenon fixe (33) du boítier (2) par l'intermédiaire de son palier (9), du support en forme de douille (21), et des tiges (26).
  9. Pompe selon la revendication 8, caractérisée en ce que le tenon (33) est équipé d'une collerette (34) et le support en forme de douille (21) est équipé d'un bord intérieur (35) sur son côté opposé à la collerette (34), et en ce que les tiges (26) s'étendent entre la collerette (34) et le bord intérieur (35).
  10. Pompe selon la revendication 9, caractérisée en ce que le support en forme de douille (21) entoure la collerette (34), et en ce que l'amortisseur formé par un joint torique (25) est agencé entre la collerette (34) et le support en forme de douille (21).
  11. Pompe selon l'une des revendications précédentes, caractérisée en ce qu'elle est réalisée du côté vide poussé sous forme d'une pompe à vide turbo-moléculaire, et du côté vide préliminaire sous forme d'une pompe dite "siegbahn".
  12. Pompe selon l'une des revendications 1 à 10, caractérisée en ce qu'elle est réalisée du coté vide poussé sous forme d'une pompe à vide turbo-moléculaire, et du côté vide préliminaire sous forme d'une pompe de Holweck.
EP94910416A 1993-05-03 1994-03-14 Pompe a vide a friction munie d'un support de palier Expired - Lifetime EP0697068B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE4314419 1993-05-03
DE4314419A DE4314419A1 (de) 1993-05-03 1993-05-03 Reibungsvakuumpumpe mit Lagerabstützung
PCT/EP1994/000785 WO1994025759A1 (fr) 1993-05-03 1994-03-14 Pompe a vide a friction munie d'un support de palier

Publications (2)

Publication Number Publication Date
EP0697068A1 EP0697068A1 (fr) 1996-02-21
EP0697068B1 true EP0697068B1 (fr) 1998-02-25

Family

ID=6486924

Family Applications (1)

Application Number Title Priority Date Filing Date
EP94910416A Expired - Lifetime EP0697068B1 (fr) 1993-05-03 1994-03-14 Pompe a vide a friction munie d'un support de palier

Country Status (5)

Country Link
US (1) US5662456A (fr)
EP (1) EP0697068B1 (fr)
JP (1) JPH08512377A (fr)
DE (2) DE4314419A1 (fr)
WO (1) WO1994025759A1 (fr)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6019581A (en) * 1995-08-08 2000-02-01 Leybold Aktiengesellschaft Friction vacuum pump with cooling arrangement
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
GB9809418D0 (en) * 1998-05-02 1998-07-01 Normalair Garrett Ltd Electric motor
DE19901340B4 (de) * 1998-05-26 2016-03-24 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Chassis, Rotor und Gehäuse sowie Einrichtung, ausgerüstet mit einer Reibungsvakuumpumpe dieser Art
EP1090231B2 (fr) 1998-05-26 2015-07-08 Oerlikon Leybold Vacuum GmbH Pompe a vide rotative munie d'un chassis, d'un rotor et d'un carter, et dispositif pourvu d'une pompe a vide rotative de ce type
DE19846189A1 (de) * 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Reibungsvakuumpumpe
JP3788558B2 (ja) * 1999-03-23 2006-06-21 株式会社荏原製作所 ターボ分子ポンプ
DE19915983A1 (de) * 1999-04-09 2000-10-12 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gaslagerung
DE10001509A1 (de) * 2000-01-15 2001-07-19 Leybold Vakuum Gmbh Vakuumpumpe mit Schwingungsdämpfer
GB0618745D0 (en) * 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
DE102012110691A1 (de) 2012-11-08 2014-05-08 Pfeiffer Vacuum Gmbh Vorrichtung zur kinetischen Energiespeicherung
DE102013214662A1 (de) * 2013-07-26 2015-01-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102014115507A1 (de) * 2014-10-24 2016-04-28 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2569314A (en) * 2017-12-12 2019-06-19 Edwards Ltd A turbomolecular pump and method and apparatus for controlling the pressure in a process chamber
GB2575450B (en) * 2018-07-09 2022-01-26 Edwards Ltd A variable inlet conductance vacuum pump, vacuum pump arrangement and method
GB2584076B (en) * 2019-05-03 2022-04-20 Edwards Ltd Lubricant supply system and vacuum pump

Family Cites Families (11)

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Publication number Priority date Publication date Assignee Title
US1677464A (en) * 1923-07-03 1928-07-17 Stephen H Taylor Water wheel
FR1501477A (fr) * 1965-12-16 1967-11-10 Daimler Benz Ag Rotor de turbine à gaz
FR2086525A5 (fr) * 1970-04-01 1971-12-31 Commissariat Energie Atomique
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
DE3039196A1 (de) * 1980-10-17 1982-05-13 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur montage einer einflutigen turbomolekular-vakuumpumpe und nach diesem verfahren montierte turbomolekular-vakuumpumpe
DE3239328C2 (de) * 1982-10-23 1993-12-23 Pfeiffer Vakuumtechnik Magnetisch gelagerte Turbomolekularpumpe mit Schwingungsdämpfung
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
JPS6172896A (ja) * 1984-09-17 1986-04-14 Japan Atom Energy Res Inst 高速回転ポンプ
DE3537822A1 (de) * 1985-10-24 1987-04-30 Leybold Heraeus Gmbh & Co Kg Vakuumpumpe mit gehaeuse und rotor
DE8910040U1 (fr) * 1988-09-03 1989-12-14 Leybold Ag
DE58907244D1 (de) * 1989-07-20 1994-04-21 Leybold Ag Reibungspumpe mit glockenförmigem Rotor.

Also Published As

Publication number Publication date
EP0697068A1 (fr) 1996-02-21
DE59405313D1 (de) 1998-04-02
US5662456A (en) 1997-09-02
DE4314419A1 (de) 1994-11-10
WO1994025759A1 (fr) 1994-11-10
JPH08512377A (ja) 1996-12-24

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