EP1119710B1 - Pompe a vide a friction - Google Patents

Pompe a vide a friction Download PDF

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Publication number
EP1119710B1
EP1119710B1 EP99938360A EP99938360A EP1119710B1 EP 1119710 B1 EP1119710 B1 EP 1119710B1 EP 99938360 A EP99938360 A EP 99938360A EP 99938360 A EP99938360 A EP 99938360A EP 1119710 B1 EP1119710 B1 EP 1119710B1
Authority
EP
European Patent Office
Prior art keywords
rotor
stator
pump according
unit
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP99938360A
Other languages
German (de)
English (en)
Other versions
EP1119710A1 (fr
Inventor
Heinrich Engländer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1119710A1 publication Critical patent/EP1119710A1/fr
Application granted granted Critical
Publication of EP1119710B1 publication Critical patent/EP1119710B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Definitions

  • the invention relates to a friction vacuum pump, which has a stator, a rotor and a housing and with which during their operation a tight
  • the gap between the stator and rotor must be observed got to.
  • the characteristics of this type of machine depend largely depends on the size of the gap between the stator and rotor off.
  • Machines of the type concerned here are built usually such that the rotor to avoid of vibration transmissions from the stator elastic is decoupled. It is customary to use elastomer rings for the bearings supported in the housing. From DE-U-80 27 697 (see also FR-A-2 310 481) is known, the rotor with a spindle bearing equip and this overall via O-rings in Support the housing. In constructions of this type a minimal gap between stator and rotor of some Tenths of a millimeter should not be undershot because the elastomers used the technical limit to Set narrowing of the column.
  • the present invention is based on the object to design a machine of the type concerned here in such a way that they have narrower gaps between stator and rotor can be operated as before.
  • stator and rotor are coupled to one another in terms of vibration and that consists of the stator and rotor System together via vibrating elements in the housing is supported.
  • "Coupled with each other in terms of vibration technology” is supposed to mean that rotor unit and stator unit execute essentially identical vibrations, so the size of the column between the stator and Rotor components much smaller than previously executed can be.
  • the common vibrations of the systems consisting of rotor and stator are used by Vibrating elements added, over which this system supported in the housing.
  • a rigid coupling of the rotor is particularly advantageous and stator.
  • the pumps 1 according to FIGS. 1 and 2 each exist of an outer housing 2 and one located therein Rotor / stator system 3, which is based on vibrating elements 4, 5 is supported in the housing 2.
  • the housing 2 carries On the suction side the connection flange 6 and one on the pressure side Connection cover 7.
  • the rotor-stator system 3 comprises the rotor unit 8 and the stator unit 9.
  • the central shaft is part of the rotor unit 8 11, the suction side of the substantially bell-shaped designed rotor 12 carries.
  • the shaft is on the pressure side 11 equipped with the motor rotors 13 of the drive motor.
  • the stator of the drive motor is designated 14. It is supported in the housing 2.
  • Components of the stator unit 9 are three sleeve components 15, 16, 17, one of which (15) on the pressure side, the the other two (16, 17) on the suction side (inside and outside the wall 18 of the bell-shaped rotor 12) are arranged.
  • the pressure side end of the sleeve 15 is equipped with an inward edge 21, the inside as a sliding fit 22 for the pressure side Shaft bearing 23 is formed.
  • the edge 21 is equipped with a receptacle for an O-ring 24 equipped with an elastomeric material.
  • a corresponding one Recording is on the connection cover 7 of the housing 2 provided.
  • the recordings are designed such that the O-ring 24 next to the Function of sealing the function of a first, pressure side located vibrating element 5, about the supports the rotor-stator system 3 in the housing 2.
  • Other oscillating elements can also be used in place of the O-ring 23 (e.g. Simmerrings, flat rings, piston seals) be provided.
  • the connecting flange 6 is on the suction side with an inward directed stage 31 for the inclusion of another O-ring 32 or another vibrating element. There is a recording corresponding to this recording itself in the area of the end face of the sleeve 16.
  • the O-ring 32 forms the second in addition to the sealing function Vibrating element 4, over which the rotor-stator system 3 supported in the housing 2.
  • the housing 2 forms a Adapter sleeve together with cover 7 and connection flange 6 clamps the rotor-stator system 3. With appropriate Housing 2 and connection flange can be dimensioned 6 can also be in one piece. additionally the sleeve 16 is supported on a step-like extension 29 in the sleeve 15.
  • the suction end of the inner sleeve 16 is with a equipped inward edge 34, the inside a sliding fit 35 for the suction side Shaft bearing 36 forms. Furthermore is in this Area an annular spring 37, the necessary bearing contact forces generated.
  • the rotor unit 8 and the stator unit 9 via the bearings 23, 36 and Sliding fits 22, 35 rigidly coupled together. This will reduce the game size you want between Stator and rotor reached.
  • the rotor-stator system 3 is supported in the housing 2 from.
  • the design of the vibrating elements as O-rings has the advantage of being a sealing function at the same time can take over. They ensure a vacuum tight Separation of the delivery rooms located in the inner housing and the atmosphere. Appropriately surrounds another O-ring 38 the outer periphery of the rim 28 which is the inner Sleeve 16 carries, so that in the area of the union nut 27 vacuum tightness is guaranteed.
  • the Stator unit 9 practically forms a second inner one Casing. It is vacuum tight, so the outer casing 2 can be equipped with louvers 39.
  • the embodiment of Figure 1 is a single flow Turbomolecular vacuum pump with one from the suction side to the pressure side tapering delivery chamber 40 is formed.
  • the outer sleeve 17 carries on its inside Stator blade rows 42, the outside of the rotor wall 18 rows of rotor blades 41.
  • the path of the extracted gases is indicated by arrows 43.
  • You step through the connecting flange 6 in the with the blades 41, 42nd equipped conveying space and get through openings 44 in the inner sleeve 16 along the shaft 11 and through openings 45 in the edge 21 to the outlet opening 46.
  • the embodiment of Figure 2 is a three-stage Molecular pump.
  • the inside of the sleeve 17 and the outside of the sleeve 16 are each in the amount of Wall 18 of the rotor 12 equipped with a thread 47, 48, which together with the cylindrical rotor wall 18 effect the desired gas production in two stages.
  • the outside of the shaft 11, which is in the range of Sleeve 16 has an enlarged diameter, is with equipped with a thread 49 and forms together with the inside of the sleeve 16, the third pump stage.
  • the path of the extracted gases is indicated by arrows 51. They come in through the connecting flange 6 the outer pump stage. This pump stage is useful a filling stage consisting of a blade ring 52 upstream.
  • FIG. 2 can in simpler Modified to a single-stage friction vacuum pump become. Without sleeve 17, rotor bell 18 and union nut 27 only the third pump stage would be present and effective. The edges 26 and 28 as well as the thread 48 could be omitted. Another requirement would be that the diameter of the vibrating and sealing element 4,32 and the end face of the sleeve 16 each other correspond so that the rotor-stator system 3 elastic can be supported in the housing 2.7.
  • stator 9 and rotor unit 8 rigid in terms of vibration coupled with each other (sliding fits 35, 22).
  • At the Embodiment according to Figure 2 is between the upper bearing 36 and the inside of the rim 34 in the O-ring 63 with a compared to the diameter of the O-rings 24.32 much smaller diameter.
  • This o-ring 63 only serves to bridge the fit game. A major influence on the choice of The O-ring has gaps between the rotor and stator units 63 not.
  • the implementation of the invention is for small turbomolecular pumps of particular advantage. As it gets smaller The damaging part of the backflow takes up the size based on the gas flow to and thereby disproportionately worsens the vacuum technology Characteristics of a pump. By the invention Reduction of the gap between the rotor and Stator with the present new concept can be significantly improve the vacuum data. The conversely means that this creates a pump in this size still with economically reasonable effort can produce. The fact also contributes to this at that the pump is made from relatively few parts can be.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (14)

  1. Pompe à vide à friction comportant une unité de stator (9), une unité de rotor (12) et un carter (2, 7), dans laquelle un intervalle étroit entre le stator et le rotor doit être maintenu pendant son fonctionnement, caractérisée en ce que le stator (9) et le rotor (8) sont couplés l'un à l'autre par des moyens techniques vis-à-vis des oscillations, et en ce que le système (3) constitué par l'unité de stator (9) et par l'unité de rotor (8) est monté conjointement via des éléments oscillatoires (4, 5) dans le carter (2,7).
  2. Pompe selon la revendication 1, caractérisée en ce qu'il est prévu des paliers mécaniques (23, 36), et en ce que le rotor et le stator sont couplés l'un à l'autre via les paliers mécaniques.
  3. Pompe selon l'une ou l'autre des revendications 1 et 2, caractérisée en ce que le stator (9) et le rotor (8) sont couplés un à l'antre de façon rigide par des moyens techniques vis-à-vis des oscillations.
  4. Pompe selon la revendication 3, caractérisée en ce qu'il est prévu un ajustage coulissant axial (22, 35) entre l'unité de rotor (8) et les paliers (23, 36) et/ou entre les paliers (23,36) et l'unité de stator (9).
  5. Pompe selon la revendication 2, caractérisée en ce qu'un joint torique (63) servant à combler un jeu d'ajustage se trouve entre l'un des paliers et l'unité de stator.
  6. Pompe selon l'une des revendications 1 à 5, caractérisée en ce que le carter (2) forme une douille de serrage qui, conjointement avec un couvercle frontal (7), serre le système à rotor et à stator (3).
  7. Pompe selon l'une des revendications 1 à 6, caractérisée en ce que des composants de l'unité de rotor (8) sont un arbre central (11) ainsi qu'un rotor (12), et en ce que l'unité de rotor (8) prend appui via les paliers (23, 36) dans l'unité de stator (9).
  8. Pompe selon l'une des revendications 1 à 7, caractérisée en ce que des composants de l'unité de stator (9) sont des douilles (15, 16, 17) ainsi que des logements pour les éléments oscillatoires (4, 5, 24, 32) via lesquels le système à rotor et à stator (3) s'appuie dans le carter (2, 7).
  9. Pompe selon la revendication 8, caractérisée en ce que l'unité de stator (9) forme un deuxième carter interne.
  10. Pompe selon la revendication 9, caractérisée en ce que le carter interne est étanche au vide, et en ce que le carter externe (2) est muni de fentes à air (39).
  11. Pompe selon l'une ou l'autre des revendications 7 et 8, caractérisée en ce que son rotor (12) est réalisé en forme de cloche, et en ce qu'il est prévu trois étages de pompe.
  12. Pompe selon la revendication 11, caractérisée en ce que le stator (9) comprend trois douilles (15, 16, 17) dont une est agencée du côté refoulement et dont deux sont agencées du côté aspiration, à savoir l'une à l'extérieur et l'autre à l'intérieur de la paroi de rotor (18).
  13. Pompe selon la revendication 12, caractérisée en ce que la douille côté refoulement (15) et la douille interne côté aspiration (16) sont munies de bordures externes (26, 28) qui sont serrées entre elles à l'aide d'un écrou-raccord (27) susceptible d'être vissé sur le côté refoulement de la douille externe.
  14. Pompe selon l'une des revendications précédentes, caractérisée en ce que le rotor (12) est muni d'un étage de remplissage (52) du côté frontal.
EP99938360A 1998-10-07 1999-07-28 Pompe a vide a friction Expired - Lifetime EP1119710B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19846189 1998-10-07
DE19846189A DE19846189A1 (de) 1998-10-07 1998-10-07 Reibungsvakuumpumpe
PCT/EP1999/005395 WO2000020763A1 (fr) 1998-10-07 1999-07-28 Pompe a vide a friction

Publications (2)

Publication Number Publication Date
EP1119710A1 EP1119710A1 (fr) 2001-08-01
EP1119710B1 true EP1119710B1 (fr) 2002-09-04

Family

ID=7883695

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99938360A Expired - Lifetime EP1119710B1 (fr) 1998-10-07 1999-07-28 Pompe a vide a friction

Country Status (5)

Country Link
US (1) US6641376B1 (fr)
EP (1) EP1119710B1 (fr)
JP (1) JP2002526721A (fr)
DE (2) DE19846189A1 (fr)
WO (1) WO2000020763A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004050743A1 (de) * 2004-10-19 2006-04-20 Pfeiffer Vacuum Gmbh Vibrationsarme Vakuumpumpe
US7550881B1 (en) 2006-01-17 2009-06-23 Honeywell International Inc. Vibration damper for generator or motor stator
GB0618745D0 (en) * 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
EP2088327B1 (fr) * 2008-02-11 2011-08-31 Agilent Technologies Italia S.p.A. Support de roulement à rouleaux
DE102013214662A1 (de) * 2013-07-26 2015-01-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2588146A (en) * 2019-10-09 2021-04-21 Edwards Ltd Vacuum pump

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2215473C3 (de) 1972-03-29 1980-12-18 Standard Elektrik Lorenz Ag, 7000 Stuttgart Eigenschwingungsgedämpfter, geräuscharmer Radiallüfter
IT1032818B (it) 1975-05-06 1979-06-20 Rava E Perfezionamento alle pompe turbomo lecolari
DE3039196A1 (de) 1980-10-17 1982-05-13 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur montage einer einflutigen turbomolekular-vakuumpumpe und nach diesem verfahren montierte turbomolekular-vakuumpumpe
DE8027697U1 (de) * 1980-10-17 1982-04-01 Leybold-Heraeus GmbH, 5000 Köln Turbomolekular-vakuumpumpe
DE3204750C2 (de) * 1982-02-11 1984-04-26 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetisch gelagerte Turbomolekularpumpe
JPS59168295A (ja) * 1983-03-16 1984-09-21 Hitachi Ltd タ−ボ分子ポンプ
US4806075A (en) * 1983-10-07 1989-02-21 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
JPS61294191A (ja) 1985-06-24 1986-12-24 Seiko Seiki Co Ltd タ−ボ分子ポンプの装着装置
JPS63128286U (fr) * 1987-02-16 1988-08-22
JPH0641566Y2 (ja) * 1987-09-04 1994-11-02 昭一 水村 ゴルフのクラブやゲートボールのスティック等における変形シャフトの取付構造
JPH0759955B2 (ja) * 1988-07-15 1995-06-28 ダイキン工業株式会社 真空ポンプ
JPH07117067B2 (ja) * 1988-12-30 1995-12-18 株式会社島津製作所 分子ポンプ
DE58907244D1 (de) * 1989-07-20 1994-04-21 Leybold Ag Reibungspumpe mit glockenförmigem Rotor.
DE3926577A1 (de) 1989-08-11 1991-02-14 Leybold Ag Vakuumpumpe mit einem rotor und mit unter vakuum betriebenen rotorlagerungen
DE4314419A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit Lagerabstützung
JPH071395A (ja) * 1993-06-15 1995-01-06 Souzou Kagaku:Kk 超音波加工用工具クランプ方法
JP3427950B2 (ja) * 1994-11-17 2003-07-22 株式会社島津製作所 モレキュラドラッグポンプ
FR2735535B1 (fr) 1995-06-16 1997-07-11 Cit Alcatel Pompe turbomoleculaire
JP2001241393A (ja) * 1999-12-21 2001-09-07 Seiko Seiki Co Ltd 真空ポンプ

Also Published As

Publication number Publication date
JP2002526721A (ja) 2002-08-20
DE19846189A1 (de) 2000-04-13
US6641376B1 (en) 2003-11-04
DE59902592D1 (de) 2002-10-10
EP1119710A1 (fr) 2001-08-01
WO2000020763A1 (fr) 2000-04-13

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