EP1119710A1 - Pompe a vide a friction - Google Patents

Pompe a vide a friction

Info

Publication number
EP1119710A1
EP1119710A1 EP99938360A EP99938360A EP1119710A1 EP 1119710 A1 EP1119710 A1 EP 1119710A1 EP 99938360 A EP99938360 A EP 99938360A EP 99938360 A EP99938360 A EP 99938360A EP 1119710 A1 EP1119710 A1 EP 1119710A1
Authority
EP
European Patent Office
Prior art keywords
rotor
stator
pump according
unit
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP99938360A
Other languages
German (de)
English (en)
Other versions
EP1119710B1 (fr
Inventor
Heinrich Engländer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1119710A1 publication Critical patent/EP1119710A1/fr
Application granted granted Critical
Publication of EP1119710B1 publication Critical patent/EP1119710B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations

Definitions

  • the invention relates to a friction vacuum pump which has a stator, a rotor and a housing and in which a narrow gap between the stator and rotor must be maintained during its operation.
  • the properties of this type of machine largely depend on the size of the gap between the stator and rotor.
  • Machines of the type concerned here are usually constructed in such a way that the rotor is elastically decoupled from the stator in order to avoid vibration transmissions. It is common to support the bearings in the housing using elastomer rings. From document DE-U-80 27 697 it is known to equip the rotor with a spindle bearing and to support it overall via O-rings in the housing. In constructions of this type, the minimum gap between the stator and rotor must not be less than a few tenths of a millimeter, since the elastomers used set the technical limit for narrowing the gaps.
  • the object of the present invention is to design a machine of the type concerned here in such a way that it can be operated with narrower gaps between the stator and the rotor than before.
  • this object is achieved in that the stator and rotor are coupled to one another in terms of vibration technology and in that the system consisting of the stator and rotor is held together via oscillating elements in the housing.
  • "Vibrationally coupled to one another" is intended to mean that the rotor unit and the stator unit carry out essentially identical vibrations, so that the size of the gaps between the stator and rotor components can be made substantially smaller than previously.
  • the common vibrations of the system consisting of the rotor and stator are determined by the vibrating elements, via which this system is supported in the housing.
  • a rigid coupling of the rotor and stator is particularly advantageous.
  • the size of the gap between the stator and the rotor only depends on the tolerances of the injection molded or machined parts that are feasible in terms of production engineering, which are much narrower than the previous gaps to be maintained between the stator and the rotor by the elastomers used.
  • FIG. 1 shows a section through a turbomolecular vacuum pump according to the invention
  • Figure 2 shows a section through a molecular vacuum pump.
  • the pumps 1 according to FIGS. 1 and 2 each consist of an outer housing 2 and a rotor / stator system 3 located therein, which is supported in the housing 2 via oscillating elements 4, 5.
  • the housing 2 carries the connection flange 6 on the suction side and a connection cover 7 on the pressure side.
  • the rotor-stator system 3 comprises the rotor unit 8 and the stator unit 9.
  • the central shaft 11 which carries the essentially bell-shaped rotor 12 on the suction side.
  • the shaft 11 On the pressure side, the shaft 11 is equipped with the motor rotors 13 of the drive motor.
  • the stator of the drive motor is designated 14. It is supported in the housing 2.
  • Components of the stator unit 9 are three sleeve components 15, 16, 17, one (15) of which is arranged on the pressure side, the other two (16, 17) on the suction side (inside and outside the wall 18 of the bell-shaped rotor 12).
  • the pressure-side end of the sleeve 15 is equipped with an inwardly directed edge 21, the inside of which is designed as a sliding fit 22 for the pressure-side shaft bearing 23.
  • the edge 21 is equipped with a receptacle for an O-ring 24 made of elastomeric material.
  • a corresponding receptacle is on the connection cover 7 of the housing
  • the receptacles are designed such that, in addition to the function of sealing, the O-ring 24 has the function of a first oscillating element 5 located on the pressure side, via which the rotor-stator system 3 is located in the housing 2 supports.
  • other vibrating elements e.g. Simmerrings, flat rings, piston seals
  • Simmerrings, flat rings, piston seals can also be provided.
  • the sleeve 15 is provided on the suction side with an outwardly directed edge 26 to which the two further sleeves 16, 17 are fastened. This is done with a union nut 27 which can be screwed onto the outer sleeve 17 from the pressure side and which clamps the outer edge 26 on the sleeve 15 and an outer edge 28 which is part of the inner sleeve 16.
  • the connecting flange 6 is provided on the suction side with an inwardly directed step 31 for receiving a further 0-ring 32 or another oscillating element.
  • a receptacle corresponding to this receptacle is located in the region of the end face of the sleeve 16.
  • the O-ring 32 forms the second oscillating element 4, via which the rotor-stator system is located
  • housing 2 forms a clamping sleeve which, together with the cover 7 and the connecting flange 6, clamps the rotor-stator system 3. With appropriate dimensions, housing 2 and connecting flange 6 can also be in one piece.
  • the sleeve 16 is supported on a step-like extension 29 in the sleeve 15.
  • the suction-side end of the inner sleeve 16 is equipped with an inwardly directed edge 34, the inside of which forms a sliding fit 35 for the suction-side shaft bearing 36.
  • an annular spring 37 is located in this area, which generates the necessary bearing contact forces.
  • the rotor unit 8 and the stator unit 9 are rigidly coupled to one another via the bearings 23, 36 and the sliding fits 22, 35.
  • the desired reduction in play between the stator and the rotor is thereby achieved.
  • the rotor-stator system 3 is supported in the housing 2 via the oscillating elements 4 and 5.
  • the design of the vibrating elements as O-rings has the advantage that they can also perform a sealing function. They ensure a vacuum-tight separation of the delivery rooms located in the inner housing and the atmosphere.
  • a further 0-ring 38 expediently surrounds the outer circumference of the edge 28, which carries the inner sleeve 16, so that vacuum tightness is also ensured in the region of the union nut 27.
  • the stator unit 9 practically forms a second inner housing. It is vacuum-tight so that the outer housing 2 can be equipped with air slots 39.
  • the exemplary embodiment according to FIG. 1 is designed as a single-flow turbomolecular vacuum pump with a delivery space 40 tapering from the suction side to the pressure side.
  • the outer sleeve 17 carries stator blade rows 42 on its inside, and rotor blade rows 41 on the outside of the rotor wall 18.
  • the path of the conveyed gases is indicated by arrows 43. They enter through the connecting flange 6 into the delivery space equipped with the blades 41, 42 and pass through openings 44 in the inner sleeve 16 along the shaft 11 and through openings 45 in the edge 21 to the outlet opening 46.
  • the embodiment according to Figure 2 is a three-stage ⁇ cages molecular pump.
  • the inside of the sleeve 17 and the outside of the sleeve 16 are each equipped with a thread 47, 48 at the wall 18 of the rotor 12, which together with the cylindrical rotor wall 18 bring about the desired gas delivery in two stages.
  • the outside of the shaft 11, which has an enlarged diameter in the area of the sleeve 16, is also equipped with a thread 49 and, together with the inside of the sleeve 16, forms the third pump stage.
  • the path of the extracted gases is marked by arrows 51. They enter the outer pump stage through the connecting flange 6.
  • this pump stage is preceded by a filling stage 52 consisting of a blade ring.
  • the embodiment of Figure 2 can be easily converted into a single-stage friction vacuum pump. Without sleeve 17, rotor bell 18 and union nut 27, only the third pump stage would be present and effective. The edges 26 and 28 and the thread 48 could also be omitted. A further requirement would be that the diameters of the oscillating and sealing element 4.32 and the end face of the sleeve 16 correspond to one another so that the rotor-stator system 3 can be supported elastically in the housing 2.7.
  • stator unit 9 and rotor unit 8 are rigidly coupled to one another in terms of vibration technology (sliding fits 35, 22).
  • the implementation of the invention is particularly advantageous in the case of small turbomolecular pumps.
  • the harmful proportion of the backflow related to the gas flow is increased and thereby disproportionately worsens the vacuum properties of a pump.
  • the vacuum technology data can be significantly improved by reducing the gap between the rotor and stator according to the invention with the present new concept. Conversely, this means that a pump of this size can still be produced with economically sensible effort. This is due to the fact that the pump can be made from relatively few parts.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

L'invention concerne une pompe à vide à friction comprenant une unité stator (9), une unité rotor (12) et un boîtier (2, 7). Pendant le fonctionnement de cette pompe, un espace étroit doit être respecté entre le stator et le rotor. L'invention vise à permettre le respect d'espaces inférieurs à ceux de la technique antérieure. A cet effet, le stator (9) et le rotor (8) sont couplés l'un à l'autre de manière à présenter des oscillations pratiquement identiques, et le système (3) comprenant l'unité stator (9) et l'unité rotor (8) est maintenu dans le boîtier (2, 7) par l'intermédiaire d'éléments oscillants (4, 5).
EP99938360A 1998-10-07 1999-07-28 Pompe a vide a friction Expired - Lifetime EP1119710B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19846189 1998-10-07
DE19846189A DE19846189A1 (de) 1998-10-07 1998-10-07 Reibungsvakuumpumpe
PCT/EP1999/005395 WO2000020763A1 (fr) 1998-10-07 1999-07-28 Pompe a vide a friction

Publications (2)

Publication Number Publication Date
EP1119710A1 true EP1119710A1 (fr) 2001-08-01
EP1119710B1 EP1119710B1 (fr) 2002-09-04

Family

ID=7883695

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99938360A Expired - Lifetime EP1119710B1 (fr) 1998-10-07 1999-07-28 Pompe a vide a friction

Country Status (5)

Country Link
US (1) US6641376B1 (fr)
EP (1) EP1119710B1 (fr)
JP (1) JP2002526721A (fr)
DE (2) DE19846189A1 (fr)
WO (1) WO2000020763A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004050743A1 (de) * 2004-10-19 2006-04-20 Pfeiffer Vacuum Gmbh Vibrationsarme Vakuumpumpe
US7550881B1 (en) 2006-01-17 2009-06-23 Honeywell International Inc. Vibration damper for generator or motor stator
GB0618745D0 (en) * 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
EP2088327B1 (fr) * 2008-02-11 2011-08-31 Agilent Technologies Italia S.p.A. Support de roulement à rouleaux
DE102013214662A1 (de) * 2013-07-26 2015-01-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2588146A (en) * 2019-10-09 2021-04-21 Edwards Ltd Vacuum pump

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2215473C3 (de) * 1972-03-29 1980-12-18 Standard Elektrik Lorenz Ag, 7000 Stuttgart Eigenschwingungsgedämpfter, geräuscharmer Radiallüfter
IT1032818B (it) 1975-05-06 1979-06-20 Rava E Perfezionamento alle pompe turbomo lecolari
DE3039196A1 (de) * 1980-10-17 1982-05-13 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur montage einer einflutigen turbomolekular-vakuumpumpe und nach diesem verfahren montierte turbomolekular-vakuumpumpe
DE8027697U1 (de) * 1980-10-17 1982-04-01 Leybold-Heraeus GmbH, 5000 Köln Turbomolekular-vakuumpumpe
DE3204750C2 (de) * 1982-02-11 1984-04-26 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetisch gelagerte Turbomolekularpumpe
JPS59168295A (ja) * 1983-03-16 1984-09-21 Hitachi Ltd タ−ボ分子ポンプ
US4806075A (en) * 1983-10-07 1989-02-21 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
DE3410905A1 (de) * 1984-03-24 1985-10-03 Leybold-Heraeus GmbH, 5000 Köln Einrichtung zur foerderung von gasen bei subatmosphaerischen druecken
JPS61294191A (ja) * 1985-06-24 1986-12-24 Seiko Seiki Co Ltd タ−ボ分子ポンプの装着装置
JPS63128286U (fr) * 1987-02-16 1988-08-22
JPH0641566Y2 (ja) * 1987-09-04 1994-11-02 昭一 水村 ゴルフのクラブやゲートボールのスティック等における変形シャフトの取付構造
JPH0759955B2 (ja) * 1988-07-15 1995-06-28 ダイキン工業株式会社 真空ポンプ
JPH07117067B2 (ja) * 1988-12-30 1995-12-18 株式会社島津製作所 分子ポンプ
DE58907244D1 (de) * 1989-07-20 1994-04-21 Leybold Ag Reibungspumpe mit glockenförmigem Rotor.
DE3926577A1 (de) * 1989-08-11 1991-02-14 Leybold Ag Vakuumpumpe mit einem rotor und mit unter vakuum betriebenen rotorlagerungen
DE4314419A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit Lagerabstützung
JPH071395A (ja) * 1993-06-15 1995-01-06 Souzou Kagaku:Kk 超音波加工用工具クランプ方法
JP3427950B2 (ja) * 1994-11-17 2003-07-22 株式会社島津製作所 モレキュラドラッグポンプ
FR2735535B1 (fr) * 1995-06-16 1997-07-11 Cit Alcatel Pompe turbomoleculaire
JP2001241393A (ja) * 1999-12-21 2001-09-07 Seiko Seiki Co Ltd 真空ポンプ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO0020763A1 *

Also Published As

Publication number Publication date
WO2000020763A1 (fr) 2000-04-13
US6641376B1 (en) 2003-11-04
JP2002526721A (ja) 2002-08-20
DE59902592D1 (de) 2002-10-10
DE19846189A1 (de) 2000-04-13
EP1119710B1 (fr) 2002-09-04

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