EP3045728B1 - Pompe à vide à vis - Google Patents

Pompe à vide à vis Download PDF

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Publication number
EP3045728B1
EP3045728B1 EP15186607.6A EP15186607A EP3045728B1 EP 3045728 B1 EP3045728 B1 EP 3045728B1 EP 15186607 A EP15186607 A EP 15186607A EP 3045728 B1 EP3045728 B1 EP 3045728B1
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EP
European Patent Office
Prior art keywords
spiral
orbiting
vacuum pump
stator
seal
Prior art date
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Active
Application number
EP15186607.6A
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German (de)
English (en)
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EP3045728A1 (fr
Inventor
Armin Conrad
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication of EP3045728A1 publication Critical patent/EP3045728A1/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
    • F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
    • F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
    • F04C18/0223—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving with symmetrical double wraps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085—Prime movers

Definitions

  • the invention relates to a scroll vacuum pump.
  • Spiral vacuum pumps also called scroll pumps or spiral fluid conveying devices, are vacuum pumps that work on the positive displacement principle.
  • a spiral vacuum pump consists of two nested spiral cylinders (Archimedean spirals). One of these spirals is fixed, the other moves on a circular path via an eccentric drive (eccentric gear, eccentric shaft).
  • the fluid to be pumped for example gas
  • the height of the spiral walls, their distance and the speed define the suction power of a spiral vacuum pump.
  • the oscillating movement of the moving spiral is often generated in practice by an eccentric shaft.
  • the movable spiral orbits the axis of the drive shaft when the drive shaft rotates.
  • the movable scroll must be prevented from turning around its own axis.
  • One to three anti-rotation mechanisms are often provided for this purpose.
  • Such a scroll pump is, for example, from the prior art ( DE 199 14 770 A1 ) known.
  • This prior art scroll pump has the disadvantage that the pump requires a relatively large amount of installation space, since the drive for the shaft is designed as a separate motor.
  • JPH01 219378 A also includes a compressor which has a scroll disk that is also driven by a rotor of an electric motor. Since the motor is arranged outside the scroll disk, the overall length of this device is also very large.
  • the technical problem on which the invention is based consists in specifying a spiral vacuum pump, the pumping capacity of which is increased compared to the prior art with a small footprint of the pump.
  • a spiral vacuum pump is to be specified which is inexpensive to manufacture with reliable and long-term operation.
  • the scroll vacuum pump according to the invention with a fixed first spiral and an orbiting second spiral engaging therein, wherein the first spiral is arranged on a stator and wherein the second spiral is arranged on an orbiting disk, wherein at least one stator and at least two orbiting disks are provided, wherein an electric motor is provided for driving, which is integrated in and / or on at least one orbiting disc and corresponding to the at least one disc in the spiral vacuum pump, which as an orbiting movement of the disc relative to the stator and thus the orbiting movement of the
  • the electric motor effecting the second spiral is formed with respect to the first spiral and in which the spiral vacuum pump is formed in at least two stages, is characterized in that the at least two orbiting disks are arranged at an angle to one another.
  • the two-stage design ensures, on the one hand, that the pumping capacity of the pump is significantly increased.
  • a stator is provided and on both sides of the stator there are two orbiting disks arranged, a mass balance takes place when the disks are arranged, for example, diametrically opposite one another.
  • the performance of the spiral vacuum pump according to the invention can be significantly increased by the arrangement of a stator with several disks or several stators with at least two disks. This has an advantageous effect that the electric motor is integrated in the at least one stator and the at least one orbiting disk, since this enables a simple construction of the spiral vacuum pump.
  • the at least two orbiting disks are arranged at an angle to one another. This arrangement makes it possible to avoid imbalances or gas-dynamic forces when driving the disks.
  • the mounting of the at least one orbiting disk by means of the at least two shafts mounted on ball bearings in the stator has the advantage that the two shafts represent a rotation preventing mechanism without additional rotation preventing mechanisms having to be provided.
  • the ball bearings of the shafts additional anti-rotation mechanisms must be provided.
  • the ball bearings of the shafts a relatively low-wear and very reliable type of storage.
  • a further advantageous embodiment of the invention provides that at least two orbiting disks are provided, each with a spiral, and that the stator has at least two spirals and that the spirals of the stator and the spirals of the two orbiting disks are arranged so as to engage one another.
  • This embodiment has the advantage that it is a two-stage pump system, whereby the performance of the spiral vacuum pump according to the invention is increased.
  • the pump stages can be arranged in parallel or in series.
  • stator is designed in the form of a disk and that a spiral is arranged on each of the two base surfaces of the disk of the stator.
  • This embodiment has the advantage that a two-stage pumping system can be formed with a stator and two orbiting disks.
  • At least two stators are provided. This allows further pump stages to be set up.
  • the at least two disks radially symmetrically to one another. This means that the at least two disks are arranged such that the center of gravity of all disks taken together is arranged in the center of the at least one stator, or axially offset from the center of the at least one stator.
  • two orbiting disks are provided, which are arranged diametrically opposite one another with respect to the axis of rotation.
  • This embodiment has the advantage that no imbalances occur, but mass balancing takes place. Imbalances would place particular stress on the bearings.
  • the overall system is advantageously balanced outwards.
  • An advantageous embodiment provides that permanent magnets are arranged in and / or on the at least one spiral vacuum pump on the stator side and electromagnets are arranged in and / or on the at least one orbiting disk, or vice versa.
  • the space-saving electric motor is formed by this embodiment.
  • Another advantageous embodiment of the invention provides that electromagnets are arranged in and / or on the spiral vacuum pump and the orbiting disk as Reluctance rotor is designed.
  • This embodiment has the advantage that it is constructed in a particularly simple and inexpensive manner.
  • Another advantageous embodiment of the invention provides that the pump stages of the spiral vacuum pump are connected in parallel and / or in series.
  • Another particularly preferred embodiment of the invention provides that two orbiting disks are arranged on or on each shaft.
  • This embodiment has the advantage that a shaft is provided which extends through the stator and carries an orbiting disk on both sides of the disk-shaped stator.
  • the shafts are mounted in ball bearings or slide bearings in the stator.
  • the at least one shaft has at least one offset.
  • the orbiting movement of the disks is achieved through this offset.
  • a further advantageous embodiment provides that the at least one shaft has a shaft section arranged in the stator and that a shaft section arranged in the orbiting disk is formed axially offset from the shaft section arranged in the stator.
  • This embodiment has the advantage that no separate eccentric is required for the orbiting movement of the disk, but that the shafts which serve to support the orbiting disks simultaneously determine the eccentricity.
  • the orbiting disk is secured against rotation at the same time.
  • a further advantageous embodiment provides that the shafts have a first shaft section arranged in the stator and that a second shaft section arranged in a first orbiting disk is axially offset from the shaft section arranged in the stator and that a second shaft section arranged in a second orbiting disk Disc arranged third shaft section is formed offset to the first two shaft sections.
  • two orbiting disks are assigned to one stator.
  • the axially offset shaft sections ensure that the disks move, advantageously diametrically opposite, orbiting relative to the stator.
  • the arrangement of at least two, preferably three, shafts ensures protection against twisting of the stator disks.
  • Another advantageous embodiment of the invention provides that at least one anti-rotation device is provided. If the at least one orbiting disk is only supported by a shaft, there is basically the possibility that the orbiting disk will rotate around its own axis, which is not desirable since the correct engagement of the spirals of the stationary part and the orbiting disk must be guaranteed. For this reason, it makes sense to use an anti-rotation device.
  • the anti-rotation device is designed as at least one corrugated bellows.
  • the orbiting disk and thus the movable spiral must be prevented from rotating around its own axis. This can be done using a corrugated bellows.
  • a seal is provided on the end faces of the at least one spiral. At the end faces, that is to say on the upper side of the spiral walls, there is usually a seal with the mating face.
  • This seal is beneficial Plastic formed. Other materials can also be provided. Mixtures of different plastics are preferably used.
  • the seals advantageously have a rectangular cross section (so-called “tip seal”). The seal wears out with increasing operating time. There are various options so that the sealing effect is guaranteed even with increasing wear.
  • An advantageous embodiment of the invention provides that the seal is designed as a trackable seal.
  • the seal is particularly advantageously arranged on an elastic carrier material.
  • the seal is adjusted due to the elasticity of the carrier material and the preload is maintained even with advanced wear.
  • the seal is designed as a seal that can be tracked due to a gas pressure. If the seal has a rectangular cross section, the seal can be pressed against the opposing surface with the required contact force due to a gas pressure of a gas to be conveyed arranged in a gap.
  • a so-called hard coat coating is advantageously arranged on the mating surface or the corresponding surface.
  • This is a coating which is made particularly hard and which advantageously has a smooth surface so that the wear on the soft surface of the spiral or a seal arranged in the spiral remains as low as possible.
  • another hard coating can also be provided.
  • the seal has at least one structure on an end face.
  • Such structures are advantageously arranged in the end face of the seals.
  • the structures can, for example, have a sawtooth-like cross-section or also dovetail-shaped cross-sections.
  • a further advantageous embodiment of the invention provides that the seal is designed as a seal that forms a gap with the opposing surface. This type of seal is sufficient in many cases if the gap is chosen to be small enough. This embodiment has the advantage that the fact that a gap remains between the seal and the mating surface means that the seal does not wear out.
  • a cooling device is provided.
  • the cooling device serves to cool the at least one pump stage.
  • stator is assigned a spiral on both base surfaces and cooling by convection is difficult because of the difficult accessibility, for example to provide channels in the stator through which a coolant is passed.
  • This type of cooling can be combined, for example, with cooling by means of forced convection of the orbiting spirals.
  • At least one check valve is arranged on the outlet side. This prevents the pump from venting back after the drive has been switched off. This also prevents the spiral from rotating counter to the specified direction of rotation.
  • Another advantageous embodiment provides that at least one gas ballast valve is provided.
  • gas is pumped into the pump chamber from the atmosphere side in order to avoid condensation of the gas.
  • the gas ballast is advantageously supplied through the stator.
  • the stator has a first ring and that the orbiting disk has a second ring and that an electric motor is integrated in the first ring and in the second ring, which as an orbiting movement in the activated state of the first ring relative to the second ring and thus the orbiting movement the second spiral with respect to the first spiral effecting electric motor is formed.
  • This embodiment has the advantage that the electric motor can be accommodated in the two rings without structurally obstructing the spiral.
  • stator has a ring and that the electric motor is integrated in the ring and in the orbiting disk, which as an orbiting movement of the disk relative to the ring and thus an orbiting movement of the second spiral with respect to the first spiral effecting electric motor is formed.
  • This embodiment has the advantage that no additional ring has to be arranged on the orbiting disk, but the magnets are integrated in the disk, for example on the outer edge.
  • the ring of the stator is advantageously arranged on the outer diameter of the stator in such a way that the ring surrounds the orbiting disk.
  • Fig. 1 shows a spiral vacuum pump 1 with a first stage 2 and a second stage 3.
  • the first stage 2 consists of an orbiting disk 4 and a stator 5.
  • the orbiting disk 4 carries a spiral 6.
  • the stator 5 carries a spiral 7 and 7 are arranged in an interdigitated manner.
  • the spiral 6 seals off from the stator 5.
  • the stator 5 can have a so-called hardcoat coating or another hard coating on a mating surface 8.
  • the orbiting disk 4 is in three shafts 9, of which in Fig. 1 only two shafts are shown, orbiting.
  • the waves 9 are rotatably mounted in a stator 10 by means of ball bearings 11.
  • the second stage 3 also has an orbiting disk 12 and a stator 13.
  • the disk 12 carries a spiral 14, the stator 13 carries a spiral 15.
  • the spirals 14, 15 are also arranged in an interlocking manner.
  • the orbiting disk 12 is mounted on ball bearings by means of the shafts 9 in the stator disk 10.
  • the shafts 9 have a shaft section 16 which is mounted in the stator 10.
  • the shafts 9 also each have two shaft sections 17, 18 which are offset from the shaft section 16. The orbiting movement of the disks 4, 12 is caused by the offset 17, 18.
  • the orbiting movement is driven by means of an electric motor, which consists of a motor stator 19 and a motor orbiter 20.
  • the motor orbiter 20 consists according to Fig. 1 made of permanent magnets.
  • the motor stator 10 has excitable electromagnets which, when supplied with current, cause the orbiting movement of the disks 4, 12 and thus the spirals 6, 14. If the electric motor, that is to say the electromagnet 19 thereof, is energized, the electric motor acts as a drive, so that the in the spaces between the two spirals 6, 7; 14, 15 arranged gas is compressed. The gas is transported from an inlet 21 of each stage 2, 3 to an outlet 22 and is compressed in the process.
  • a corrugated bellows 24 is provided in each pumping stage to seal off pumping spaces 23.
  • a check valve 25 is arranged in each case outlets 22. The check valve 25 prevents the spiral vacuum pump 1 from being ventilated back after the drive 18, 19 has been switched off. Thus, the spirals 6, 7; 14, 15 against the specified direction of rotation can be avoided.
  • a gas ballast valve 26 is provided in each pumping stage. Gas is pumped from the atmosphere into the pump chamber 23 through the gas ballast valve 26 in order to avoid condensation of the gas to be pumped.
  • the shafts 9 are rotatably mounted in the disks 4, 12 via ball bearings 11.
  • the electric motor 19, 20 can also be constructed in such a way that the motor orbiter 20 consists of a soft magnetic material, for example iron.
  • the electromagnets arranged in the motor stator 19 can be designed as coils, for example. In principle, there is also the possibility of forming the motor orbiter 20 from electromagnets and the motor stator 19 from permanent magnets or from a soft magnetic material, for example.
  • Fig. 2 shows a vacuum pump 1, which is designed as a double-flow pump.
  • the pump 1 is only shown schematically.
  • the pump 1 has a stator 10 in which the shaft 9 is rotatably arranged by means of the ball bearings 11.
  • a shaft 9 is provided to support the orbiting disks 4, 12, which carry the spirals 6, 14, in a rotatable manner. Since only one shaft 9 is provided, the corrugated bellows 24 serve as a rotation preventing mechanism so that the orbiting disks 4, 12 do not rotate about their own axis.
  • the pump 1 according to Fig. 2 has an inlet 21.
  • the gas is conveyed through the pump stages 2, 3 in the direction of the respective outlet 22 and ejected there.
  • fans in Fig. 2 not shown
  • channels 29 are formed in the stator disk 10, through which a cooling medium can be passed to remove the waste heat.
  • the pump according to Fig. 2 is designed as a double-flow pump with a parallel connection.
  • Fig. 3 shows the pump 1, which is designed as a two-stage pump with a series connection.
  • the pump 1 with its components is only shown schematically. Since only the principle of series connection is to be shown, neither the shaft nor the drive are shown.
  • the pump 1 according to Fig. 3 has an inlet 21.
  • the gas is pumped by the pumping stage 2, that is to say the spirals 6, 7, to an intermediate outlet 30.
  • the gas is guided through a guide 31 into an outer region of the second pump stage 3 and is conveyed in the pump stage 3 by the spirals 14, 15 in the direction of the outlet 22.
  • the corrugated bellows 24 again has a sealing function and can additionally have a rotation-preventing function.
  • the disks 32, 33 are designed as stationary disks.
  • the disk 34 is designed as an orbiting disk. This means that the spirals 6, 14 execute an orbiting movement in the stationary spirals 7, 15 through the orbiting disk 34.
  • Fig. 4 shows a double-flow vacuum pump 1, which is also shown only schematically.
  • the representation of seals, drive and shaft has been omitted in the schematic representation.
  • the disks 32, 33 are also designed as fixed disks.
  • the disk 34 is designed as an orbiting disk.
  • the disk 32 carries the spiral 7, the disk 33 carries the spiral 15.
  • the orbiting disk 34 carries the spirals 6 and 14.
  • the spirals are only shown schematically, but are in engagement so that a gas can be conveyed.
  • the disk 34 is supported via the shaft 9 in the disk 33 by means of the ball bearing 11.
  • a corrugated bellows 24 is provided to seal the ball bearing 11.
  • the gas enters the pump 1 through the inlet opening 21 and is distributed there according to the arrows A.
  • a passage 35 is provided in the disk 34 through which the gas passes from the pump stage 3 into the pump stage 2. The gas emerges from the pump stage 2 through the outlet opening 22.
  • Fig. 5 shows another pump 1, which is designed with two flows and two stages.
  • the disks 32, 33 are designed as stationary disks.
  • the disk 32 simultaneously forms the stator in which the shaft 9 is arranged in ball bearings (ball bearings not shown).
  • the disk 32 also forms the stator of the pump stage 36.
  • a disk 38 forms a stator for the pump stage 37.
  • the disk 39 is designed as an orbiting disk.
  • the scroll vacuum pump 1 has an inlet 21.
  • the gas is fed into the pump stages 3, 37 according to the arrows A.
  • the gas passes through intermediate outlets 30 and guides 31 into the pump stages 2, 36, each sealed by a corrugated bellows 24. From there, the gas is fed through a guide 41 to the outlet 22.
  • Fig. 5 shows a vacuum pump 1 with a stator disk 10 and two orbiting disks 4, 12. Die Disks 4, 12 are mounted orbiting by means of a shaft 9.
  • the shaft 9 is supported by ball bearings (in Fig. 6 not shown) rotatably mounted in the disk 10.
  • the gas enters the spiral vacuum pump 1 through an inlet 21.
  • the gas is fed to the outlet 22 via a guide 41.
  • a corrugated bellows 24 is provided in each pump stage 2, 3 for sealing and as a rotation preventing mechanism.
  • the gas is conveyed in the direction of the arrows from the inlet 21 in the direction of the outlet 22.
  • the orbiting disk 4 has a spiral 6
  • the orbiting disk 12 has a spiral 14.
  • the stator 10 has two spirals 40, 53.
  • the pumps according to the Figures 2 to 6 are only shown schematically. These pumps, like the pump according to Fig. 1 for the storage of the shaft or the shafts 9 each have ball bearings.
  • the spirals interlock in such a way that gas delivery is possible.
  • Fig. 7 shows the disk 5 with the spiral 7 and the disk 4 with the spiral 6.
  • Fig. 7 several ways of sealing the spirals 6, 7 to the disks 4, 5 are shown.
  • the spiral section 42 has a structured surface.
  • the surface is sawtooth-like in cross section.
  • the spiral section 42 seals against the mating surface 44 of the disk 4 by means of a correspondingly selected narrow gap 43.
  • the spiral section 45 of the spiral 6 has an elastic carrier material 46 and a seal 47.
  • the seal 47 rests on the opposing surface 8 and thus seals against the opposing surface 8. When the seal 47 is worn, the seal 47 is adjusted by the elastic carrier material 46.
  • the mating surface 8 advantageously has a so-called hard coat coating in order to minimize wear.
  • the spiral section 48 also has a seal 49.
  • the seal 49 is arranged in a channel 50 of the spiral section 48, that is to say in the stationary spiral 7.
  • the seal 49 seals against the opposing surface 44.
  • the seal 49 is rectangular in cross section, as in FIG Fig. 7 shown.
  • the length L is greater than the width B of the seal 49.
  • the seal 49 is arranged in the channel 50 such that a gap 51 remains in the area of the narrow side with the width B and a gap 51 remains in the area of the longitudinal side of the seal 49.
  • the seal 49 is designed to be more flexible in the radial direction.
  • the gas to be pumped and compressed arrives in the column 51, 52.
  • the seal 49 is automatically adjusted when the seal is worn, so that a sealing effect between the seal 49 and the mating surface 44 is ensured over a long period of time.
  • the pumping direction of the gas is always provided from radially outside to radially inside.
  • Fig. 8 shows the stator 10.
  • the orbiting disk 4, which sits on the shaft section 17, is arranged in front of the plane of the drawing of the stator 10.
  • the orbiting disk 12, which is arranged on the shaft section 18, is arranged behind the stator disk 10.
  • the disks 4, 12 are arranged diametrically opposite one another so that no imbalance occurs when the disks 4, 12 are driven, that is to say that there is a mass balance.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (11)

  1. Pompe à vide à spirale (1) munie d'une première spirale fixe (7, 15) et d'une deuxième spirale orbitale (6, 14), pénétrant dans celle-ci, la première spirale (7, 15) étant agencée sur un stator (5, 13) et la deuxième spirale (6, 14) étant agencée sur un disque orbital (4, 12), au moins un stator (5, 13, 32, 33, 38) et au moins deux disques orbitaux (4, 12, 34, 39) étant prévus, et un moteur électrique (19, 20) étant prévu pour l'entraînement, qui est intégré dans et/ou sur au moins un disque orbital (4, 12, 34, 39) et en correspondance avec l'au moins un disque (4, 12, 34, 39) dans la pompe à vide à spirale (1), qui est configuré sous la forme d'un moteur électrique (19, 20) produisant à l'état activé un mouvement orbital du disque (4, 12, 34, 39) par rapport au stator (5, 13, 32, 33, 38) et par conséquent le mouvement orbital de la deuxième spirale (6) par rapport à la première spirale (7), et la pompe à vide à spirale (1) étant configurée au moins à deux étages,
    caractérisée en ce que les au moins deux disques orbitaux (4, 12) sont agencés en décalage angulaire les uns par rapport aux autres.
  2. Pompe à vide à spirale selon la revendication 1, caractérisée en ce qu'au moins deux disques orbitaux (4, 12) munis chacun d'une spirale (6, 14) sont prévus, et en ce que le stator (10) comprend au moins deux spirales (40, 53), et en ce que les spirales (40, 53) du stator (10) et les spirales (6, 14) des deux disques orbitaux (4, 12) sont agencées de manière à pénétrer les unes dans les autres.
  3. Pompe à vide à spirale selon la revendication 1, caractérisée en ce que le stator (5, 13, 32, 33, 38) est configuré en forme de disque, et en ce qu'une spirale (6, 14) est agencée respectivement sur chacune des deux surfaces de base du disque du stator (10).
  4. Pompe à vide à spirale selon la revendication 1, caractérisée en ce qu'au moins deux stators (5, 13, 32, 33, 38) sont prévus, notamment en ce qu'un disque orbital (39, 34) est agencé à chaque fois entre les stators (32, 38 ; 32, 33), et en ce que le disque (39, 34) comprend respectivement une spirale (54) sur chacune des deux surfaces de base.
  5. Pompe à vide à spirale selon l'une quelconque des revendications précédentes, caractérisée en ce que les au moins deux disques (4, 12) sont agencés en symétrie radiale les uns par rapport aux autres.
  6. Pompe à vide à spirale selon l'une quelconque des revendications précédentes, caractérisée en ce que deux disques orbitaux (4, 12) sont prévus, qui sont agencés de manière diamétralement opposée l'un par rapport à l'autre au regard de l'axe de rotation.
  7. Pompe à vide à spirale selon l'une quelconque des revendications précédentes, caractérisée en ce que des aimants permanents sont agencés côté stator dans et/ou sur la pompe à vide à spirale (1) et des électro-aimants (20) sont agencés dans et/ou sur l'au moins un disque orbital (4, 12), ou inversement.
  8. Pompe à vide à spirale selon l'une quelconque des revendications précédentes, caractérisée en ce que des électro-aimants (20) sont agencés dans et/ou sur la pompe à vide à spirale (1), et le disque orbital (4, 12) est configuré sous la forme d'un rotor à réluctance.
  9. Pompe à vide à spirale selon l'une quelconque des revendications précédentes, caractérisée en ce qu'au moins un dispositif anti-rotation (24) est prévu, notamment en ce que le dispositif anti-rotation est configuré sous la forme d'au moins un soufflet ondulé (24) .
  10. Pompe à vide à spirale selon l'une quelconque des revendications précédentes, caractérisée en ce qu'un joint d'étanchéité (47, 49) est prévu sur des surfaces frontales de l'au moins une spirale (6, 7), notamment en ce que le joint d'étanchéité (47, 49) est formé en matière plastique, de préférence en ce que le joint d'étanchéité (47, 49) est configuré sous la forme d'un joint d'étanchéité apte à être asservi, de manière particulièrement préférée en ce que le joint d'étanchéité (49) est configuré sous la forme d'un joint d'étanchéité (49) apte à être asservi sur la base d'une pression de gaz.
  11. Pompe à vide à spirale selon la revendication 9, caractérisée en ce qu'un revêtement Hardcoat ou un autre revêtement dur est agencé sur une contre-surface (8, 44) du joint d'étanchéité (47, 49).
EP15186607.6A 2014-11-27 2015-09-24 Pompe à vide à vis Active EP3045728B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014117400.3A DE102014117400A1 (de) 2014-11-27 2014-11-27 Spiralvakuumpumpe

Publications (2)

Publication Number Publication Date
EP3045728A1 EP3045728A1 (fr) 2016-07-20
EP3045728B1 true EP3045728B1 (fr) 2021-12-01

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DE102015214291A1 (de) * 2015-07-28 2017-02-02 Siemens Aktiengesellschaft Vorrichtung mit direkt angetriebener rotierender Spirale
CN113482928A (zh) * 2021-08-16 2021-10-08 青岛腾远设计事务所有限公司 一种双蒸发工况、双涡旋盘压缩机和空调系统

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JP2710827B2 (ja) * 1989-05-26 1998-02-10 株式会社ゼクセル スクロール流体機械
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EP3045728A1 (fr) 2016-07-20

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