EP2565464B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP2565464B1
EP2565464B1 EP12180605.3A EP12180605A EP2565464B1 EP 2565464 B1 EP2565464 B1 EP 2565464B1 EP 12180605 A EP12180605 A EP 12180605A EP 2565464 B1 EP2565464 B1 EP 2565464B1
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EP
European Patent Office
Prior art keywords
sleeve
vacuum pump
hub
pump according
stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP12180605.3A
Other languages
German (de)
English (en)
Other versions
EP2565464A2 (fr
EP2565464A3 (fr
Inventor
Jan Hofmann
Tobias Stoll
Michael Schweighöfer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to JP2012193203A priority Critical patent/JP5683544B2/ja
Publication of EP2565464A2 publication Critical patent/EP2565464A2/fr
Publication of EP2565464A3 publication Critical patent/EP2565464A3/fr
Application granted granted Critical
Publication of EP2565464B1 publication Critical patent/EP2565464B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Definitions

  • the invention relates to a vacuum pump according to the preamble of the first claim.
  • Rotating sleeves have proven themselves in vacuum pumps, for example in the form of a Holweckpumpcut.
  • One or a plurality of sleeves is attached on one side to a hub, which in turn is arranged on a shaft.
  • a hub which in turn is arranged on a shaft.
  • Such a structure shows, for example, the EP 0 695 872 A1 ,
  • the prior art ( DE 1 010 235 B ) includes a molecular pump in which a Holweckpumptreatment is provided which carries an arranged on a hub elongated one-piece sleeve.
  • This sleeve has the disadvantage that on the one hand the production must be carried out very accurately, since the pump-active column are very small and the sleeve must be made very precisely for this reason as a fast-rotating component.
  • an expansion of the sleeve by centrifugal forces plays a role in the rapid rotations, which also has a disadvantageous effect on the long design.
  • the prior art also includes a vacuum pump having a Holweckpumpe and downstream side channel pumping stages. This pump can be further improved in their design.
  • the vacuum pump according to the invention in particular a molecular pump, having a rotor which has a shaft, a hub connected to the shaft and a first sleeve connected to a first side and concentric with the shaft, and wherein the first sleeve is arranged below in the gas flow of a second sleeve is characterized in that the at least one second sleeve is concentric with the shaft on a second axial side of the first side opposite the second side of the hub connected thereto and that the hub comprises a lateral surface which is formed with a gas-promoting cooperating stator.
  • a radius of the first sleeve and a radius of the second sleeve are different. As a result, the space of the pump can be reduced while maintaining the same pressure ratio.
  • a further advantageous embodiment provides that a third sleeve with a smaller radius is arranged concentrically to the first sleeve.
  • This third sleeve is arranged axially from the shaft at the same height as the first sleeve.
  • a fourth sleeve is arranged with a radius concentric with the second sleeve. Viewed axially, the fourth sleeve is arranged at the same height with the second sleeve. As a result, the pumping capacity is further increased with the same installation space.
  • a stator is provided radially within the second sleeve, which cooperates pumping with an inner surface of the second sleeve. This also once again significantly increases the pumping capacity without the need to increase the installation space of the pump.
  • At least one rotor disk turbomolekularer type is arranged in the gas stream in front of the second sleeve. This also increases the pumping action of the pump.
  • a particularly preferred embodiment of the invention provides that the at least one sleeve comprises a carbon fiber reinforced plastic.
  • a carbon fiber reinforced plastic as a sleeve material allows even lower column, since the centrifugal expansion of the sleeve is reduced.
  • the hub has a lateral surface which interacts with a gas to promote a stator.
  • the lateral surface of the hub is used to achieve a pumping action.
  • the lateral surface and the radially outer outer surfaces of the first and the second sleeve are formed together as only a cylindrical surface. This has the advantage that the first and second sleeve together with the lateral surface of the hub acts as a continuous sleeve of a Holweck stage and thus the pumping action of the pump is optimized.
  • a further advantageous embodiment of the invention provides that the hub in the gas flow in front of the first sleeve has a constriction, which cooperates with a gas inlet.
  • This embodiment has the advantage that the interaction of the gas inlet with the constriction of the hub lead to an improvement of the vacuum technical parameters such as pumping speed and pressure ratio.
  • a longitudinal section through a vacuum pump shows Fig. 1 ,
  • a suction port 4 is provided through which gas is sucked into the vacuum pump. After compression, it is expelled through an outlet 6 from the vacuum pump.
  • a rotor 10 which generates the pumping action together with a stator 30.
  • the rotor 10 has a shaft 12, whose end facing the suction opening 4 is supported by a permanent magnet bearing 14. The opposite end is supported by a roller bearing 16.
  • This bearing arrangement has over other conceivable types of bearings such as flying bearings with two bearings on the opposite side of the intake 4, the advantage that a lubricant-free bearing is used on the suction side and due to the rotor dynamic simpler storage narrow column and a short overall length can be achieved.
  • a permanent magnet 20 is provided, which cooperates with a powered drive coil 22.
  • the rotor 10 is set in a sufficiently fast speed. This is based on the pumping principle used and is usually at some ten thousand revolutions per minute with molecular pumping principles.
  • the stator 30 has one or a plurality of helical channels 32 on its surface facing the rotor 10.
  • a hub 40 is attached on the shaft 12. It has a first side 42 and a second side 44 opposite thereto. The second side 44 faces the suction opening 4.
  • a first sleeve 50 is secured to the first side 42 and a second sleeve 52 to the second side. Both sleeves 50, 52 cooperate with the stator 30 and its helical channel 32 to create a holweck pumping action.
  • the gas flow leads through the suction opening 4 in a gap S between the second sleeve 52 and the stator 30.
  • the first sleeve 50 is arranged downstream in the gas flow of the second sleeve 52 and thus compresses toward the higher pressure.
  • Fig. 2 a part of the stator 30 and a part of the rotor 10 is shown.
  • the hub 40 is disposed on the shaft 12.
  • the hub 40 has a substantially disc-shaped and in a plane perpendicular to the shaft axis W expanding body, creating a low-cost redordynamically advantageous support structure for the sleeves 50, 52, 54 is created.
  • the hub 40 and at least one of the sleeves 50, 52, 54, 56 are integral educated. It is possible the hub 40 symmetrical or, as in Fig. 2 shown asymmetrically, in particular seen perpendicular to the axial direction, form.
  • first sleeve 50 and a third sleeve 54 are attached on its first side 42, which corresponds to a first end face of the hub 40.
  • the material of the sleeves 50, 52, 54 essentially comprises carbon fiber reinforced plastic.
  • the attachment of the sleeves 50, 52, 54 can be done for example by gluing.
  • a further shoulder 82 is provided, on which the extending in the direction of the suction opening and upstream in the gas flow of the first sleeve 50 second sleeve 52 is attached.
  • the hub 40 has a radially outer circumferential surface 46, which together with at least one helical channel 32 in the stator 30 achieves a pumping action.
  • the lateral surface 46 together with the radially outer surfaces 60 and 62 of the first and second sleeves 50 and 52 forms a cylindrical surface, apart from material transitions.
  • a rotor disk 70 turbomolekularer design is arranged in the gas flow in front of the second sleeve, with which the pumping speed is increased at a short length and the pressure range is extended to lower pressures.
  • Fig. 3 the additional design latitude is presented to make lengths L1 and L2 of first and second sleeves 50 and 52 of different lengths.
  • the vacuum technical data and the rotor dynamics can overlap due to the mass distribution on the rotor be matched.
  • radii R1 and R2 of first and second sleeves 50, 52 may be different from each other.
  • a fourth sleeve 56 may be provided. Between the second and fourth sleeve 52, 56, an additional stator 34 is provided, which has helical channels 36 and 38 as pump-active structures. The channel 36 cooperates with an inner surface 64 of the second sleeve 52.
  • the arrows illustrate the gas flow that initially occurs on the outer surface of the fourth sleeve 56 toward the hub 40, then is directed away from the hub 40 on the surface 64 of the second sleeve 52, and subsequently on the radially outer surface of the second sleeve 52 again is aligned in the direction of the hub 40.
  • constriction 48 represents a portion of the hub 40 between first and second sleeves 50, 52 in which the radius of the hub 40 is reduced from the radius 48 of both sleeves 50 and 52.
  • This constriction cooperates with an additional gas inlet 8 in the form that gas entering through the gas inlet 8 first enters the constriction 48.
  • gas can be distributed around the rotor 10, whereby the gas flow in the direction of the first sleeve 50 is improved.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Claims (9)

  1. Pompe à vide, notamment pompe à vide moléculaire, comprenant un rotor (10), lequel possède un arbre (12), un moyeu (40) relié à l'arbre et une première douille (50) reliée à un premier côté (42) du moyeu (40) et concentrique par rapport à l'arbre (12), la première douille (50) étant disposée à la suite d'une deuxième douille (52) dans le flux de gaz,
    l'au moins une deuxième douille (52) étant reliée au moyeu (40) sur un deuxième côté (44) de celui-ci opposé au premier côté (42) dans une direction axiale, de manière concentrique par rapport à l'arbre (12), caractérisée en ce que
    le moyeu (40) comporte une enveloppe (46) qui est configurée pour le refoulement de gaz en coopération avec un stator (30).
  2. Pompe à vide selon la revendication 1, caractérisée en ce qu'un rayon (R1) de la première douille (50) et un rayon (R2) de la deuxième douille (52) sont différents.
  3. Pompe à vide selon la revendication 1 ou 2, caractérisée en ce qu'une troisième douille (54) ayant un rayon plus petit est disposée de manière concentrique par rapport à la première douille (50).
  4. Pompe à vide selon l'une des revendications précédentes, caractérisée en ce qu'une quatrième douille (56) ayant un rayon plus petit est disposée de manière concentrique par rapport à la deuxième douille (52) .
  5. Pompe à vide selon l'une des revendications précédentes, caractérisée en ce qu'un stator (34) est prévu radialement à l'intérieur de la deuxième douille (52), lequel est configuré pour pomper en coopération avec une surface intérieure (64) de la douille (52).
  6. Pompe à vide selon l'une des revendications précédentes, caractérisée en ce qu'au moins un disque de rotor (70) de construction de type turbomoléculaire est disposé dans le flux de gaz avant la deuxième douille (52).
  7. Pompe à vide selon l'une des revendications précédentes, caractérisée en ce que l'au moins une douille (50, 52, 54, 56) comprend une matière plastique renforcée de fibres de carbone.
  8. Pompe à vide selon la revendication 1, caractérisée en ce que l'enveloppe (46) et les surfaces (60, 62) se trouvant à l'extérieur dans le sens radial des première et deuxième douilles (50, 52) sont réalisées sous la forme d'une unique surface cylindrique.
  9. Pompe à vide selon l'une des revendications 1 à 7, caractérisée en ce que le moyeu (40) présente un rétrécissement (48) devant la première douille (50) dans le flux de gaz, lequel est configuré pour coopérer avec une entrée de gaz (8).
EP12180605.3A 2011-09-05 2012-08-16 Pompe à vide Active EP2565464B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2012193203A JP5683544B2 (ja) 2011-09-05 2012-09-03 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102011112689.2A DE102011112689B4 (de) 2011-09-05 2011-09-05 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2565464A2 EP2565464A2 (fr) 2013-03-06
EP2565464A3 EP2565464A3 (fr) 2015-04-15
EP2565464B1 true EP2565464B1 (fr) 2019-04-24

Family

ID=46963391

Family Applications (1)

Application Number Title Priority Date Filing Date
EP12180605.3A Active EP2565464B1 (fr) 2011-09-05 2012-08-16 Pompe à vide

Country Status (3)

Country Link
EP (1) EP2565464B1 (fr)
JP (1) JP5683544B2 (fr)
DE (1) DE102011112689B4 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202013009462U1 (de) * 2013-10-28 2015-01-29 Oerlikon Leybold Vacuum Gmbh Trägerelement für Rohrelemente einer Holweckstufe
DE102013114290A1 (de) 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3907406B1 (fr) * 2021-04-16 2023-05-03 Pfeiffer Vacuum Technology AG Pompe à vide

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2251547A2 (fr) * 2009-05-16 2010-11-17 Pfeiffer Vacuum Gmbh Pompe à vide

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB180991A (fr) 1921-06-01 1923-08-07 Fernand Hippolyte Louis Holweck
DE1010235B (de) 1955-04-22 1957-06-13 Arthur Pfeiffer Fa Molekularpumpe
DE4427154A1 (de) 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Reibungspumpe mit Magnetlagerung
DE19930952A1 (de) 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102009035332A1 (de) 2009-07-30 2011-02-03 Pfeiffer Vacuum Gmbh Vakuumpumpe

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2251547A2 (fr) * 2009-05-16 2010-11-17 Pfeiffer Vacuum Gmbh Pompe à vide

Also Published As

Publication number Publication date
EP2565464A2 (fr) 2013-03-06
EP2565464A3 (fr) 2015-04-15
JP2013053626A (ja) 2013-03-21
DE102011112689B4 (de) 2024-03-21
DE102011112689A1 (de) 2013-03-07
JP5683544B2 (ja) 2015-03-11

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