EP2251547A2 - Pompe à vide - Google Patents

Pompe à vide Download PDF

Info

Publication number
EP2251547A2
EP2251547A2 EP10004024A EP10004024A EP2251547A2 EP 2251547 A2 EP2251547 A2 EP 2251547A2 EP 10004024 A EP10004024 A EP 10004024A EP 10004024 A EP10004024 A EP 10004024A EP 2251547 A2 EP2251547 A2 EP 2251547A2
Authority
EP
European Patent Office
Prior art keywords
blade
impeller
vacuum pump
blades
partial
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP10004024A
Other languages
German (de)
English (en)
Other versions
EP2251547B1 (fr
EP2251547A3 (fr
Inventor
Ronald Dr. Sachs
Aleksandr Dr. Shirinov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2251547A2 publication Critical patent/EP2251547A2/fr
Publication of EP2251547A3 publication Critical patent/EP2251547A3/fr
Application granted granted Critical
Publication of EP2251547B1 publication Critical patent/EP2251547B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/28—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum pump according to the preamble of the first claim.
  • Vacuum pumps with side channel pumping stages are known in the art and are gaining increasing economic importance. When used in a turbomolecular pump, a side channel pumping stage allows the turbomolecular pump to be ejected against higher pressures. Vacuum pumps with Holweck and side channel pumping stage achieve ultimate pressures in the molecular flow range in very compact sizes.
  • An example of such a vacuum pump is the DE 19930952 A1 which is equipped in the intake with a parallel working Holweckpump note and in the gas stream subsequently with a plurality of side channel pumping stages.
  • the impellers used in these bykanalpumpgen are simple: the blades of the disc-shaped impeller are arranged at the edge and are in the radial direction of the disc from. Between the blades a center bar runs around, which has the full blade height along the entire impeller circumference.
  • the vacuum characteristics of the side channel pumping stage in particular the suction capacity and the pressure ratio between inlet and outlet, depend on the design of the blades, the channel and the gap between rotating and stationary parts. As a rule, good vacuum characteristics lead to rising production costs.
  • the geometry of the blade according to claim 1 is inexpensive to produce. Compared to the prior art mentioned above, an angle between at least one partial blade and the direction of movement of the blade of less than 90 ° results in an improvement in the pressure ratio between inlet and outlet of the side channel pumping stage in the region of the rough vacuum.
  • the vacuum pump 1 of the embodiment is shown in FIG Fig. 1 , shown in longitudinal section.
  • the housing of the vacuum pump provided with a gas inlet 2 and a gas outlet 3 has a plurality of housing parts 20, 21, 22 and 23, in which the components described below are accommodated.
  • the gas first passes into the molecular pump stage 4, which is designed here according to Holweck design.
  • This comprises an inner stator 405 with an inner thread groove 407 and an outer stator 406 with an outer thread groove 408.
  • the thread grooves run helically and cooperate with a rotating cylinder 402 located between inner stator and outer stator in such a way that a pumping action occurs in the molecular flow region.
  • the cylinder is mounted on a carrier 400, which in turn is connected to the shaft 8.
  • the molecular pumping stage is symmetrical and has a second cylinder 402 'which cooperates with associated stator components. This design results in a parallel conveying mechanism.
  • the shaft is rotated by a drive 7 in rotation.
  • This drive comprises an electric coil 12 on the stator side and a permanent magnet 13 on the shaft side.
  • the shaft is mounted in roller bearings 10 and 11.
  • the gas From the molecular pump stage, the gas enters downstream through the first transfer channel 24 into a high-vacuum-side side channel stage 5.
  • This has a rotor 500, which is provided with at least one rotor blade. This runs in the side channel 501.
  • the gas further compressed in this pumping stage is transferred via the second transfer channel 25 to the side channel pumping stage 6, where it is further compressed and finally discharged via the gas outlet from the vacuum pump.
  • Fig. 2 the side channel pumping stage 6 is shown in a section along the line II '.
  • the housing part 22, which houses the side channel pumping stage, has an annular side channel 601.
  • the ring of this side channel is interrupted by a breaker 604. This separates the intake and discharge side of each other and triggers the guided on the impeller gas flow from this.
  • in the Side channel runs around the at least one blade 602, which is arranged at the edge 603 of the impeller 600. It extends at this edge in the radial direction.
  • the impeller is rotated by the shaft 8 and gas enters the side channel through the transfer channel 25, it is moved with the blade along the channel.
  • This entrainment of the gas in the circumferential direction ends at the Abtreifer 604. At this the gas is transferred to the subsequent channel. This then leads to a further pumping stage or to the gas outlet 3.
  • the design of the blade of the impeller is in Fig. 3 shown in a view of the edge.
  • the blade 602 has a first partial blade 621 and a second partial blade 622.
  • Each of these vanes has a partial bucket back 625 and 626.
  • At least one of these two vanes forms an angle 615 of less than 90 ° with the direction of travel 607 of the bucket. It is advantageous if both partial blades are inclined at such an angle and together form an open V in the direction of movement. This measure increases the pressure ratio, which can be achieved with the blade.
  • a further increase is achieved by the chamfer 616, which are provided on the partial blade rear sides 625 and 626 and on which lie in the plane of the impeller outer edge of the sub-blades.
  • a saw blade saws the edge of the impeller and is inclined against the axis of rotation of the impeller, ie the axis of rotation is not in the plane of the saw blade.
  • the impeller has in addition to the blade 602 still another blade 612, which is advantageously designed similar. Between the blades 602 and 612, a central web 630 is arranged.
  • the design of the Mittelsteges is based Fig. 4 clarified. This shows a section along the line II-II '.
  • the central web 630 is disposed between the blades 602 and 612. Its height 631 is at least partially smaller than the blade height 632, so that a continuous space between the blades is formed. This leads to an improved pressure ratio.
  • the geometry is in turn easily produced by sawing. During sawing, the saw blade plunges over the center of the edge of the impeller and removes the material of the center bar. If the saw blade is inclined as described above, a sawing process results in a geometry in which the higher part of the central web is arranged in front of the blade 602 in relation to the direction of movement 607.
  • a further development of the shovel shows the top view of the edge of the impeller in Fig. 5 ,
  • the blade 602 has two partial blades 651 and 652.
  • Each of the sub-blades has a partial bucket rear 653 and 654.
  • a chamfer 656 is arranged, which lies on the lying in the plane of the impeller outer edge of the sub-blade.
  • the sub-blades form an angle 615 'of less than 90 ° with the direction of movement 607.
  • the sub-blades are offset by an offset 661 in the direction of movement against each other.
  • the partial vane backs extend beyond the center 660 of the impeller.
  • FIG. 6 is a view of the edge of the rotor of the high-vacuum side side channel pumping stage 5 shown.
  • the blade 502 arranged at the edge of the rotor has partial blades 551 and 552 with a partial rear side 513.
  • a chamfer is provided at the back part of the bucket.
  • FIGS. 3 to 6 shown structures are repeated several times and occur along the circumference of the impeller in an integer multiple.
  • the combination of a molecular pumping stage 4 with a high-vacuum side-channel pumping stage, which after a Fig. 6 designed rotor having, and with a side channel pumping stage, the impeller having the features of the FIGS. 3 to 5 has, results in a cost-effectively manufacturable, compact vacuum pump with improved vacuum characteristics.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP10004024.5A 2009-05-16 2010-04-16 Pompe à vide Not-in-force EP2251547B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009021620.0A DE102009021620B4 (de) 2009-05-16 2009-05-16 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2251547A2 true EP2251547A2 (fr) 2010-11-17
EP2251547A3 EP2251547A3 (fr) 2014-07-09
EP2251547B1 EP2251547B1 (fr) 2016-04-06

Family

ID=42154827

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10004024.5A Not-in-force EP2251547B1 (fr) 2009-05-16 2010-04-16 Pompe à vide

Country Status (3)

Country Link
EP (1) EP2251547B1 (fr)
JP (1) JP5680334B2 (fr)
DE (1) DE102009021620B4 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2933497A3 (fr) * 2014-04-17 2015-12-02 Pfeiffer Vacuum GmbH Pompe à vide
EP2565464B1 (fr) * 2011-09-05 2019-04-24 Pfeiffer Vacuum GmbH Pompe à vide
US10337517B2 (en) 2012-01-27 2019-07-02 Edwards Limited Gas transfer vacuum pump

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011118661A1 (de) * 2011-11-16 2013-05-16 Pfeiffer Vacuum Gmbh Reibungsvakuumpumpe
DE102012003680A1 (de) * 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102015113821B4 (de) 2014-08-27 2020-06-04 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3594498B1 (fr) * 2019-11-06 2022-01-05 Pfeiffer Vacuum Gmbh Système avec un dispositif de recyclage des gaz

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19930952A1 (de) 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2405890A1 (de) * 1974-02-07 1975-08-14 Siemens Ag Seitenkanal-ringverdichter
JPS61210294A (ja) * 1985-03-13 1986-09-18 Nishimura Denki Kk 送風機
JP2536571B2 (ja) * 1987-12-25 1996-09-18 ダイキン工業株式会社 渦流形タ―ボ機械
JPH0689758B2 (ja) * 1988-06-28 1994-11-14 ダイキン工業株式会社 渦流形ターボ機械
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
US5527149A (en) * 1994-06-03 1996-06-18 Coltec Industries Inc. Extended range regenerative pump with modified impeller and/or housing
JPH10196586A (ja) * 1997-01-06 1998-07-31 Hitachi Ltd ターボ真空ポンプ
DE19955955A1 (de) * 1999-11-19 2001-06-13 Siemens Ag Seitenkanalmaschine
JP3800128B2 (ja) 2001-07-31 2006-07-26 株式会社デンソー インペラ及びタービン式燃料ポンプ
GB0229356D0 (en) 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
JP4524349B2 (ja) 2003-02-25 2010-08-18 日立オートモティブシステムズ株式会社 タービン型燃料ポンプ
DE102005025132A1 (de) 2005-06-01 2006-12-07 Robert Bosch Gmbh Förderaggregat

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19930952A1 (de) 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2565464B1 (fr) * 2011-09-05 2019-04-24 Pfeiffer Vacuum GmbH Pompe à vide
DE102011112689B4 (de) 2011-09-05 2024-03-21 Pfeiffer Vacuum Gmbh Vakuumpumpe
US10337517B2 (en) 2012-01-27 2019-07-02 Edwards Limited Gas transfer vacuum pump
EP2933497A3 (fr) * 2014-04-17 2015-12-02 Pfeiffer Vacuum GmbH Pompe à vide

Also Published As

Publication number Publication date
JP2010265894A (ja) 2010-11-25
JP5680334B2 (ja) 2015-03-04
DE102009021620A1 (de) 2010-11-18
EP2251547B1 (fr) 2016-04-06
DE102009021620B4 (de) 2021-07-29
EP2251547A3 (fr) 2014-07-09

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