EP2253851B1 - Pompe à vide - Google Patents

Pompe à vide Download PDF

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Publication number
EP2253851B1
EP2253851B1 EP10004025.2A EP10004025A EP2253851B1 EP 2253851 B1 EP2253851 B1 EP 2253851B1 EP 10004025 A EP10004025 A EP 10004025A EP 2253851 B1 EP2253851 B1 EP 2253851B1
Authority
EP
European Patent Office
Prior art keywords
blade
impeller
vacuum pump
side channel
blades
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP10004025.2A
Other languages
German (de)
English (en)
Other versions
EP2253851A3 (fr
EP2253851A2 (fr
Inventor
Ronald Dr. Sachs
Aleksandr Dr. Shirinov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP2253851A2 publication Critical patent/EP2253851A2/fr
Publication of EP2253851A3 publication Critical patent/EP2253851A3/fr
Application granted granted Critical
Publication of EP2253851B1 publication Critical patent/EP2253851B1/fr
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/28—Rotors specially for elastic fluids for centrifugal or helico-centrifugal pumps for radial-flow or helico-centrifugal pumps

Definitions

  • the invention relates to a vacuum pump according to the preamble of the first claim.
  • turbomolecular pumps which are additionally provided with a side channel pumping stage, so that they can expel against a higher prevacuum pressure.
  • a vacuum pump is for example in EP 1 576 292 shown.
  • the prior art JP H10 196586 A ) includes a vacuum pump with a side channel pumping stage.
  • the side channel pumping stage has an impeller with blades arranged on the impeller edge, which blades are arranged symmetrically on the edge of the impeller.
  • This side channel pumping stage can be further improved in terms of vacuum characteristics.
  • JP H06 89758 B2 discloses a vacuum pump according to the preamble of the first claim.
  • a chamfer at the outer edge of the trailing rearward of the movement direction improves the vacuum characteristics, in particular the pressure ratio, and is inexpensive to manufacture in many machining processes.
  • the improved pressure ratio makes it possible to work with few side channel pumping stages to cover a wide pressure range in a vacuum pump. This will reduce costs.
  • the chamfer is also in machining processes inexpensive to produce, which are used in small and medium series, such as milling and sawing. The production is made even easier if the back and bevel are flat surfaces.
  • the vacuum pump 1 has a gas inlet 2 and gas outlet 3 and a housing.
  • the housing is constructed with four housing parts 20, 21, 22 and 23 which house the components of the vacuum pump. These components are explained below.
  • Gas entering the vacuum pump through the gas inlet first enters the molecular stage 5.
  • This has an inner stator 505 provided with an internal thread groove 507 and an outer stator 506 provided with an outer thread groove 508.
  • a smooth surface cylinder 502 is provided, which is connected to the rotor 500.
  • the molecular level is thus designed as Holweckcut.
  • Holweck stage shown is symmetrical with a second cylinder 502 'surrounded by stator components and therefore works in duplicate.
  • the rotor is connected to the shaft 8, which is rotatably mounted in rolling bearings 10 and 11.
  • rolling bearings 10 and 11 instead of rolling bearings, passive and active magnetic bearings can also be used.
  • On the shaft at least one permanent magnet 13 is arranged, which cooperates with a stationary coil 12 and forms the drive 7 together with this.
  • Rolling bearing 10, drive 7 and molecular stage 5 are arranged in the housing parts 20 and 21.
  • the shaft passes through the housing part 22, which includes the side channel pumping stage 4.
  • the side channel pumping stage is formed by a side channel 401 and an impeller 400, wherein blades 402 are disposed on the impeller. which rotate in the side channel by the rotation of the shaft, thus generating the pumping action.
  • Gas passes through a transfer channel 24 from the molecular stage 5 into the side channel stage and is expelled through another transfer channel 25.
  • the gas passes through the transfer channel 25 in the fore-vacuum stage 6.
  • This is also designed as a side channel pump, in which case the geometry of the impeller 600 and arranged in the side channel 601 rotating blades 602 deviates from the geometry of the blades 402. From this pumping stage, the gas is expelled through the gas outlet from the vacuum pump.
  • the Fig. 2 shows a section through housing part 22 along the line I-I '.
  • the impeller 400 sits on the shaft 8, the impeller 400 sits. This has an edge 403, on which along the circumference evenly distributed blades 402 are arranged.
  • the side channel 401 surrounds the impeller, which surrounds the blade area of the impeller in a substantially annular manner. Only over part of the circumference of the housing is close to the impeller.
  • This section forms the breaker 404, which separates the suction and discharge side, and at which the gas flow, which forms in the side channel and follows the rotation of the impeller, detached therefrom and transferred to the transfer channel 25.
  • FIG. 3 shows therefore an alternatively designed housing portion 22 ', which receives the side channel pumping stage and is penetrated by the shaft 8'.
  • the side channel 401 ' is here not in the plane of the impeller 400' but axially offset in the shaft direction next to the impeller.
  • the blades 402 'do not protrude in the radial direction from the substantially disk-shaped impeller, but stand from the impeller in the direction of the surface normal.
  • FIG. 4 is a section along the line II-II 'by the arrangement with the housing part 22' and the shaft 8 'to FIG. 3 shown.
  • the blades 402 ' stand on the impeller and protrude through an annular space 409 in the side channel 401'.
  • the side channel forms in contrast to the annular space 409 no closed ring but is interrupted by the scraper 404 '. Gas, which through the transfer channel 24 'in the side channel entered and is moved by the blades along the side channel, is directed at the scraper in the direction of the transfer channel to the next pumping stage.
  • FIG. 1 and 3 For a clearer presentation in FIG. 1 and 3 the transfer channels leading into and out of the side channel pumping stage are shown opposite each other with respect to the circumference of the impeller. It is advantageous, however, to arrange them at a small angular distance from each other, so that they are separated only by the scraper 404 and 404 '.
  • a single vane 402 is in FIG. 5 shown. This can according to both in the arrangement FIG. 1 and 2 as well as in the arrangement FIGS. 3 and 4 and thus used as a blade 402 '.
  • the blade has a trailing back 405 with respect to the direction of movement 407 with an outer edge 408 on. At this outer edge a chamfer 406 is arranged. This chamfer decisively improves the vacuum characteristics, in particular the pressure ratio achievable with the impeller.
  • the rear side 405 and the chamfer 406 each comprise a flat surface.
  • Such flat surfaces are inexpensive to produce by sawing. This can be advantageously further developed by all the surfaces of the blade are designed as flat surfaces, so that the production is as simple as possible.
  • a reference example of the blades and the impeller is in FIG. 6 shown.
  • a first blade 420 and a second blade 412 are spaced apart in the direction of movement 407. Between them a central bar 430 is formed.
  • First and second blades are uniform. They have two blade sections 421 and 422, which in turn each one Section rear side 425 and 426 own. Each section is provided with a chamfer 406 at its section rear.
  • the blade sections form an angle of less than 90 ° with the direction of movement 407, measured in the direction of movement. By this angle results in a V-shaped position of the blade sections to each other, wherein the V is open in the direction of movement. This position of the blade sections cooperates with the chamfer and improves the achievable with the impeller pressure ratio.
  • a plurality of blades is provided distributed at a regular distance over the circumference of the impeller.
  • This geometry is particularly inexpensive to produce if at least the chamfer and the section rear side designed as flat surfaces and the blades are arranged on the edge of the impeller so that they rise in the impeller plane radially from this.
  • the center bar is then oriented circumferentially around the impeller.
  • the thus designed impeller can be produced inexpensively by sawing from a solid disk.
  • the Fig. 7 shows the arrangement Fig. 6 in section along the line III-III '.
  • the central web 430 provided between the blades 420 and 412 can be seen in cross-section.
  • the middle web has, at least in sections, a middle web height 431 which is smaller than the blade height 432.
  • the design of the blades according to the invention is based on Fig. 8 be clarified.
  • This picture shows the view of the rim of the wheel.
  • the blade 450 has two blade sections 451 and 452, each having a section rear side 453 and 454. At the section backs is on each Outside a chamfer 456 arranged.
  • the blade sections are offset in the direction of movement by an offset 461 to each other.
  • the section back sides of the blade sections extend beyond the center 460 of the impeller rim.
  • at least one blade section forms an angle 451 'of less than 90 ° with the direction of movement.
  • This blade design and combination of design elements also has improved vacuum characteristics.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (6)

  1. Pompe à vide (1) dotée d'une entrée de gaz (2), d'une sortie de gaz (3) et d'un étage de pompe (4) à canal latéral qui comporte une roue à aubes (400, 400') mise en rotation et présentant un bord (403) et au moins une aube (402, 402'; 420; 450),
    les aubes présentant un côté (405) situé en arrière dans la direction de déplacement (407) et doté d'un chant extérieur (408),
    l'aube présentant sur le chant extérieur du côté arrière un chanfrein (406; 416; 456), l'aube (402, 402'; 420; 450) comportant deux sections (421, 422; 451, 452) décalées l'une par rapport à l'autre dans la direction de déplacement (407),
    les côtés arrière (425, 426; 453, 454) des sections d'aube (421, 422; 451, 452) s'étendant jusqu'au-dessus du milieu (460) de la roue à aubes (400, 400'),
    caractérisée en ce que
    la roue à aubes (400, 400') comporte une deuxième aube (412) et
    en ce qu'une nervure centrale (430) est prévue entre l'aube (402, 402'; 420, 450) et la deuxième aube.
  2. Pompe à vide selon la revendication 1,
    caractérisée en ce que le côté arrière (405) et le chanfrein (406; 416; 456) comprennent tous deux une surface plane.
  3. Pompe à vide selon les revendications 1 ou 2,
    caractérisée en ce que l'aube (402, 402'; 420; 450) comporte deux sections (421, 422; 451, 452) qui présentent chacune un côté arrière (425, 426; 453, 454), au moins une section d'aube formant avec la direction de déplacement (407) un angle (415; 415') inférieur à 90°.
  4. Pompe à vide selon la revendication 1,
    caractérisée en ce qu'au moins certaines parties de la nervure centrale (430) présentent entre deux aubes successives (420, 412) une hauteur moyenne de nervure (431) inférieure à la hauteur (432) de l'aube.
  5. Pompe à vide selon l'une des revendications précédentes, caractérisée en ce que l'aube (402; 402'; 420; 450; 412) est disposée dans la direction radiale sur le bord (403) de la roue à aubes (400, 400').
  6. Pompe à vide selon l'une des revendications précédentes, caractérisée en ce qu'elle présente un étage de pompage (5) adapté à la plage des pressions moléculaires et disposé entre l'étage de pompage (4) à canal latéral et l'entrée de gaz (2).
EP10004025.2A 2009-05-16 2010-04-16 Pompe à vide Not-in-force EP2253851B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102009021642.1A DE102009021642B4 (de) 2009-05-16 2009-05-16 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP2253851A2 EP2253851A2 (fr) 2010-11-24
EP2253851A3 EP2253851A3 (fr) 2014-07-09
EP2253851B1 true EP2253851B1 (fr) 2016-12-14

Family

ID=42272003

Family Applications (1)

Application Number Title Priority Date Filing Date
EP10004025.2A Not-in-force EP2253851B1 (fr) 2009-05-16 2010-04-16 Pompe à vide

Country Status (3)

Country Link
EP (1) EP2253851B1 (fr)
JP (1) JP5670095B2 (fr)
DE (1) DE102009021642B4 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011118661A1 (de) * 2011-11-16 2013-05-16 Pfeiffer Vacuum Gmbh Reibungsvakuumpumpe
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
DE102013108482A1 (de) 2013-08-06 2015-02-12 Pfeiffer Vacuum Gmbh Vakuumpumpstufe
DE102015113821B4 (de) 2014-08-27 2020-06-04 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102017215731A1 (de) * 2017-09-07 2019-03-07 Robert Bosch Gmbh Seitenkanalverdichter für ein Brennstoffzellensystem zur Förderung und/oder Verdichtung von einem gasförmigen Medium
EP3623634B1 (fr) * 2019-08-13 2022-04-06 Pfeiffer Vacuum Gmbh Pompe à vide comprenant un étage de pompe de holweck et undeux étages de pompe à canal latéral

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0689758B2 (ja) * 1988-06-28 1994-11-14 ダイキン工業株式会社 渦流形ターボ機械
US20050047904A1 (en) * 2003-08-29 2005-03-03 Alcatel Vacuum pump

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61210294A (ja) * 1985-03-13 1986-09-18 Nishimura Denki Kk 送風機
US5358373A (en) * 1992-04-29 1994-10-25 Varian Associates, Inc. High performance turbomolecular vacuum pumps
JPH0886298A (ja) * 1994-09-19 1996-04-02 Hitachi Ltd ドライターボ真空ポンプ
DE19649529A1 (de) * 1996-11-29 1998-06-04 Duerr Dental Gmbh Co Kg Seitenkanalmaschine
JPH10196586A (ja) * 1997-01-06 1998-07-31 Hitachi Ltd ターボ真空ポンプ
DE19930952A1 (de) 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP3800128B2 (ja) 2001-07-31 2006-07-26 株式会社デンソー インペラ及びタービン式燃料ポンプ
GB0229356D0 (en) 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
JP4524349B2 (ja) 2003-02-25 2010-08-18 日立オートモティブシステムズ株式会社 タービン型燃料ポンプ
DE10334950A1 (de) * 2003-07-31 2004-12-09 Nash_Elmo Industries Gmbh Seitenkanalverdichter und Verfahren zum Betrieb eines Seitenkanalverdichters
US7033137B2 (en) * 2004-03-19 2006-04-25 Ametek, Inc. Vortex blower having helmholtz resonators and a baffle assembly
DE102005025132A1 (de) 2005-06-01 2006-12-07 Robert Bosch Gmbh Förderaggregat

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0689758B2 (ja) * 1988-06-28 1994-11-14 ダイキン工業株式会社 渦流形ターボ機械
US20050047904A1 (en) * 2003-08-29 2005-03-03 Alcatel Vacuum pump

Also Published As

Publication number Publication date
JP2010265895A (ja) 2010-11-25
JP5670095B2 (ja) 2015-02-18
EP2253851A3 (fr) 2014-07-09
EP2253851A2 (fr) 2010-11-24
DE102009021642A1 (de) 2010-11-18
DE102009021642B4 (de) 2021-07-22

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