EP3623634B1 - Pompe à vide comprenant un étage de pompe de holweck et undeux étages de pompe à canal latéral - Google Patents

Pompe à vide comprenant un étage de pompe de holweck et undeux étages de pompe à canal latéral Download PDF

Info

Publication number
EP3623634B1
EP3623634B1 EP19191378.9A EP19191378A EP3623634B1 EP 3623634 B1 EP3623634 B1 EP 3623634B1 EP 19191378 A EP19191378 A EP 19191378A EP 3623634 B1 EP3623634 B1 EP 3623634B1
Authority
EP
European Patent Office
Prior art keywords
pump
rotor
vacuum
holweck
stages
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP19191378.9A
Other languages
German (de)
English (en)
Other versions
EP3623634A1 (fr
Inventor
Tobias Stoll
Michael Schweighöfer
Sebastian Südwasser
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP19191378.9A priority Critical patent/EP3623634B1/fr
Publication of EP3623634A1 publication Critical patent/EP3623634A1/fr
Application granted granted Critical
Publication of EP3623634B1 publication Critical patent/EP3623634B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/62—Mounting; Assembling; Disassembling of radial or helico-centrifugal pumps
    • F04D29/624—Mounting; Assembling; Disassembling of radial or helico-centrifugal pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum pump according to the preamble of claim 1.
  • a vacuum pump according to the preamble of claim 1.
  • Such is in the EP 2 253 851 A2 disclosed.
  • Further vacuum pumps comprising a Holweck pump stage and a side channel pump stage arranged downstream of the Holweck pump stage are in FIG U.S. 5,772,395 A , the U.S. 2013/224001 A1 , the U.S. 2014/369807 A1 and the U.S. 2006/093473 A1 disclosed.
  • a booster pump is a pump that is used, for example, in a multi-chamber vacuum application such as a mass spectrometry system, typically between a turbomolecular pump, e.g., a split flow pump, and a foreline pump. It is mostly used to increase the inlet pressure at the backing pump, so that the backing pump can be dimensioned significantly smaller.
  • the pump according to the invention has a pump rotor which forms a common pump rotor of the Holweck pump stage and the side channel pump stages. This eliminates the need for separate drive and bearing measures for Holweck and side channel pump stages. In addition, the operation of the pump by the common rotor is advantageous and easy.
  • the Holweck and side channel pump stages are also referred to as Holweck and side channel stages in the following for simplified purposes.
  • the rotor element or elements of the Holweck pump stage on the one hand and the rotor element or elements of the side channel pump stages on the other hand are connected independently of one another to a rotor shaft of the pump rotor.
  • the rotor elements can in particular be connected either indirectly via a carrier or directly to the rotor.
  • configurations are excluded in which the rotor elements of the side channel pump stages are carried by a Holweck sleeve forming a rotor element of the Holweck pump stage.
  • the Holweck pump stage on the one hand and the side channel pump stages on the other hand each have a carrier connected to the pump rotor or its rotor shaft for the respective rotor element or for the respective rotor elements.
  • the vacuum pump has at least two Holweck stages that are effective in parallel. This promises a high pumping speed and thus good pumping performance.
  • the vacuum pump remains compact.
  • at least two, in particular three, Holweck stages connected in parallel can also be provided. Holweck stages connected in parallel can convey or eject towards the side channel stages in particular.
  • the gas flow in the Holweck stages e.g. at least essentially no change in direction to be provided. More generally, it can be provided that the gas flow in a Holweck stage, in particular all Holweck stages, runs at least essentially only axially.
  • At least two Holweck stages in particular those connected in parallel, can in particular be arranged in an axially overlapping manner, particularly preferably essentially covering the same axial area, which advantageously allows a particularly compact design to be implemented with good pump performance.
  • the Holweck stages can be nested.
  • the Holweck stages which are preferably arranged in an overlapping manner, have the same compression. In this way it can be ensured in a simple and advantageous manner that gas does not flow back through one stage while the other is pumping.
  • a Holweck stage located radially on the inside has a lower pumping speed than a Holweck stage located radially further on the outside. This leads to a further improvement in pump performance.
  • a corresponding gradation is advantageous, i.e. all stages then have the same compression, with the pumping speed of the stages decreasing in the radial direction from the outside to the inside.
  • the Holweck stages can be formed, for example, on the rotor side by one or more, in particular two, rotating Holweck sleeves.
  • two Holweck stages can have a common rotor element, for example.
  • a respective Holweck sleeve can be made, for example, from a composite material, such as GRP or CRP, or a metal, such as titanium, and/or be carried by a metal rotor element carrier.
  • a stator element can preferably form a common stator element for two Holweck stages.
  • the stator element can advantageously be ring-shaped or sleeve-shaped.
  • at least one stator element of a Holweck stage can preferably have a Holweck thread.
  • the stator element can have, for example, two Holweck threads, one for each Holweck stage.
  • the threads can be arranged, for example, on the inside and outside of the stator element, which is particularly ring-shaped or sleeve-shaped.
  • the vacuum pump has at least two side channel pump stages effective in series. This brings about a particularly reliable removal of the gas from the Holweck stage(s) and thus good pump performance.
  • the pump remains compact.
  • two series-connected side channel stages can be connected downstream of several, in particular three, Holweck stages connected in parallel.
  • it can preferably be provided that all of the gas conveyed by the Holweck stages is conveyed through the one or more side channel stages, in particular those connected in series.
  • a side channel stage can be designed, for example, as an axial or as a radial side channel stage.
  • a rotor element extends in the axial direction into an annular channel.
  • a rotor element extends in the radial direction into an annular channel.
  • the at least two side channel stages or their ring channels are offset radially for the purpose of a compact structure and are arranged in an axially overlapping manner with the electric motor.
  • the vacuum pump has at least two, in particular exactly two, side channel pump stages, which are arranged offset axially and radially with respect to one another. This allows one particularly compact structure, especially when the side channel stages are designed as radial side channel stages. Due to the offset in the axial and radial direction, the necessary installation space can be used to advantage.
  • a rotor element of a respective side channel stage can be carried, for example, by a rotor element carrier, in particular with the rotor element being formed separately from the rotor element carrier.
  • a pump-active element is generally to be understood as a rotor element. In the case of the side channel stage, this has a plurality of rotor blades which rotate in the annular channel.
  • the rotor element can preferably be carried by the rotor element carrier via an intermediate element, in particular a ring-shaped or sleeve-shaped intermediate element.
  • the intermediate element can, for example, comprise or be made of a composite material, such as GRP or CFRP, or a metal, in particular titanium.
  • the intermediate component enables an advantageous and space-saving arrangement of the side channel stage, in particular with the actual rotor element carrier being easy to manufacture.
  • the intermediate component can be designed to be pump-active, for example in cooperation with an opposite, static, pump-active structure, such as a Holweck thread.
  • a pump-active intermediate component can, for example, reduce leakage from an annular channel of the side channel stage and thus improve pump performance.
  • a magnetic bearing is provided for the pump rotor at an intake-side end of the rotor and optionally a roller bearing is provided at another end or at the end opposite the intake-side end.
  • the combination of magnetic and roller bearings is also referred to as a hybrid bearing and is common in the prior art for turbomolecular pumps.
  • the hybrid bearing allows a particularly compact design.
  • this is Magnetic bearing with the or the Holweck stages arranged overlapping axially and can be surrounded by the one or more Holweck stages.
  • the suction-side, axial start of the magnetic bearing in particular characterized by a first magnet in the axial direction, can be arranged essentially at the same axial height as the suction-side, axial start of the Holweck stage or Holweck stages.
  • the roller bearing can be designed as a ball bearing, for example.
  • a felt lubrication and/or a cone-shaped lubricant conveying device for conveying a lubricant to the roller bearing can also be provided against the force of gravity.
  • the vacuum pump may have an inlet and a static element spanning the inlet.
  • a stator element of the at least one Holweck stage can be carried by this element.
  • the static element can be, for example, a carrier for a bearing element.
  • the bearing element can be a magnetic bearing, for example.
  • the carrier can preferably be designed as a star and/or have several, in particular three, arms which support a central area on the pump housing that carries the bearing element.
  • At least one rotor element of at least one pump stage is carried by a rotor element carrier.
  • the rotor element carrier can, for example, be formed separately from or in one piece with the rotor and/or the rotor element.
  • the rotor element carrier can in particular be arranged upstream or downstream of the rotor element.
  • a rotor element carrier of the Holweck pump stage can, for example, have a passage for a gas that is or is to be conveyed by the rotor element. This allows a particularly compact structure. It was recognized that a gas flow does not necessarily have to be routed past a rotor element carrier. Rather, a radially inner area of the rotor element can now also be designed to be effective for pumping. This radially inner area is thus used to further improve the pumping effect without having to change the external dimensions of the pump.
  • the passage can in particular open into an area arranged downstream of the pump stage, in particular an intermediate stage area between Holweck and side channel stages.
  • the passage can be arranged in particular on a rotor element carrier of the at least one Holweck stage. Separate rotor element carriers can generally be provided for the Holweck stage and side channel stages.
  • the passage can generally advantageously be an axial passage.
  • the rotor element carrier can be designed, for example, as an essentially disk-shaped component.
  • the at least one rotor element can, for example, be glued to the rotor element carrier, for example on a peripheral surface, in particular an inner or outer peripheral surface, of the rotor element carrier, which is defined, for example, by an axial projection.
  • the rotor element is ring-shaped or sleeve-shaped.
  • the rotor element can interact with a stator element of the pumping stage, in particular an outside thereof, in particular at least via an inside of the rotor element to generate a pumping effect.
  • the passage can be arranged in particular at a downstream end of the pump stage.
  • the passage can be provided in particular for two, in particular parallel, Holweck stages.
  • the passage can preferably be arranged radially inside a radially outermost rotor element.
  • the passage is designed to be effective for pumping. This improves the overall pumping effect. However, practically no additional installation space is required, so that this does not have a negative impact on the compactness of the pump.
  • the passage can generally be in the form of a bore.
  • a pumping effect can be imparted to the passage in a simple manner, for example, in that the passage is designed obliquely, in particular as an oblique bore, in particular obliquely in the circumferential and/or rotational direction.
  • a side channel pump stage typically has an annular channel and a rotor element rotating therein, with a gap being formed between the rotor element and a component which defines the annular channel.
  • Such a gap is necessary due to positional tolerances of the rotor during operation for its free rotation, even if the gap is always designed to be as small as possible in order to achieve the lowest possible leakage.
  • an active pumping structure can be provided in at least one side channel pump stage, which has a pumping effect against leakage from the ring channel through the gap. This reduces the leakage that cannot be completely avoided by design.
  • the pump-active structure can advantageously be a Holweck structure. This acts advantageously as a blocking stage.
  • the active pumping structure can be arranged either in the conveying path of the gas or on a mere leakage path.
  • the pump-active structure can be arranged, for example, between two pump stages and/or on a leakage path to a motor area of the pump.
  • the pump-active structure can be arranged on a leakage path between two side channel pump stages.
  • the vacuum pump can advantageously have an inlet flange which has a smaller diameter and/or a smaller cross-sectional area than at least one radially largest Holweck stage.
  • the inlet flange can preferably be formed on a housing end that tapers in a conical shape.
  • the inlet flange can be designed as a DN63 flange, with at least one Holweck sleeve, in particular the radially largest Holweck sleeve, having a diameter of at least 80 mm, in particular at least 85 mm. This achieves a particularly good pump performance with compact dimensions and in particular with a compact flange connection.
  • the pump has a vacuum connection between two pump stages, in particular between Holweck pump stage and side channel pump stage and/or between two side channel pump stages.
  • This vacuum port can also be used as an interstage or called interstage port.
  • operating parameters such as pressure and/or pumping speed can be measured or determined at the vacuum connection.
  • the vacuum connection can also be used, for example, as an intermediate inlet, for example in a multi-chamber vacuum system. The vacuum connection therefore offers particular flexibility in the use of the pump, although hardly any additional installation space is required, and the pump can therefore be designed to be compact.
  • a vacuum system in particular a mass spectrometry system, which comprises: a first vacuum chamber; a turbomolecular pump having an inlet connected to the first vacuum chamber; a second vacuum chamber which is connected in particular to the first chamber, in particular via an orifice; a vacuum pump according to the type described above with a vacuum connection between the Holweck pump stage and the side channel pump stage, the vacuum pump having a main inlet which is connected to an outlet of the turbomolecular pump; wherein the vacuum port forms an intermediate inlet connected to the second vacuum chamber.
  • the vacuum pump in particular a booster pump, can advantageously have an outlet which is connected to an inlet of a fore-vacuum pump.
  • the backing pump ejects in particular against the atmosphere.
  • the vacuum system can have a third vacuum chamber, for example, which can be connected in particular to the second chamber.
  • the inlet of the fore-vacuum pump can be connected to the third chamber, for example.
  • the vacuum system or mass spectrometry system can in particular be a liquid chromatography-mass spectrometry system (LC-MS), in particular one with a large gas load.
  • LC-MS liquid chromatography-mass spectrometry system
  • turbomolecular pump and the vacuum pump are in particular separate pumps with separate rotors.
  • a vacuum pump 10 is indicated schematically. This includes a housing 12 which defines an inlet 14 and an outlet, not shown.
  • the inlet 14 is spanned by a carrier element 16 which carries a bearing element 18 for a rotor 20 (not shown in detail). At an end facing away from the inlet, a further bearing for the rotor 20 is provided, which is not shown separately.
  • the rotor 20 includes a rotor shaft 21 on which a rotor element carrier 22 is arranged in a rotationally fixed manner, which carries two rotor elements 24 .
  • the rotor element carrier 22 forms a hub component arranged on the rotor shaft 21 and is designed here separately from the rotor elements 24 and separately from the rotor shaft 21 .
  • the rotor elements 24 form rotor elements of three Holweck pump stages 25 connected in parallel.
  • the rotor elements 24 interact with two stator elements 26 of the Holweck pump stages 25 to produce a pumping effect.
  • the rotor elements 24 are designed as sleeves, which can be made of a composite material, for example, and connected to the rotor element carrier 22 or the rotor 20 rotate during operation of the pump 10.
  • the stator elements 26 each have a pumping structure on a side facing an adjacent rotor element 24, namely a so-called Holweck thread 28.
  • In 1 are indicated by arrows 30 caused by the Holweck pump stages 25 gas delivery paths. These gas conveying paths 30 run parallel, in this embodiment not only in a functional sense, but also in a spatial sense.
  • the three Holweck pump stages 25 are nested in one another and arranged in the same axial area.
  • gas that has passed axially through the carrier element 16 can also be conveyed radially inside the inner stator element 26 from the radially inner Holweck stage 25 in the direction of the outlet.
  • the gas conveyed by the radially outer Holweck stage 25 is conveyed past the rotor element carrier 22 to a first side channel pump stage 33 .
  • the gas is conveyed from the first side channel stage 33 via a transition (not shown) to a second side channel pump stage 33 which is connected in series with the first side channel pump stage 33 .
  • the side channel stages 33 are here as radial side channel stages formed. They are also offset axially and radially.
  • the radially inner two gas delivery paths 30 of the respective Holweck stages 25 pass through a plurality of passages 38 arranged in the rotor element carrier 22 on exiting the respective Holweck stage 25 .
  • the gas reaches an intermediate stage area from which it can enter the first annular channel 36 or the first side channel stage 33 and can be conveyed through the side channel stages 33 to the outlet.
  • a respective passage 38 forms a common passage for the two radially inner Holweck stages 25.
  • the passages 38 are designed as a plurality of bores arranged distributed over the rotor element carrier 22 in the circumferential direction.
  • a passage 38 is illustrated in more detail in a sectional view.
  • the passage 38 is designed as an inclined bore.
  • the circumferential direction or direction of rotation of the rotor element carrier 22 runs from left to right.
  • the conveying direction is in 2 from top to bottom.
  • the inner wall of the inclined bore or passageway 38 causes pumping activity in the flow direction. In doing so, it acts in a similar way to a rotor blade of a turbomolecular pump stage.
  • a vacuum pump 10 is shown in section at a higher level of detail. This includes an inlet flange 40 which defines an inlet 14 and is designed here as part of a housing 12 .
  • the vacuum pump 10 comprises a common pump rotor 20 which is supported on the inlet or suction side by a magnetic bearing 42 and on an opposite end by a roller bearing 44 .
  • the pump 10 thus includes a hybrid bearing for the rotor 20.
  • a felt lubrication is provided for the roller bearing 44, which has a lubricating oil reservoir in the form of a felt body 45 and a having conical conveying element 46 for the lubricating oil.
  • the rotor 20 is driven by an electric motor 47 .
  • the magnetic bearing 42 is carried by a carrier element 16, which is designed here as a star.
  • the support member 16 also carries a radially inner stator member 26 of a set of Holweck stages 25 connected in parallel.
  • Two rotor elements 24 are provided, which are carried by a rotor element carrier 22 . Between the rotor elements 24 and the respectively opposite stator element 26, three parallel-connected Holweck pump stages 25 are formed. Similar to the embodiment described above, the gas delivered by the radially outer Holweck stage 25 is delivered past the rotor element carrier 22 into an interstage region 48 and the gas delivered by the radially inner Holweck stages 25 passes through a passage 38 of the rotor element carrier 22 to enter the interstage region 48 reach.
  • Two side channel pump stages 33 connected in series are provided downstream of the Holweck stages 25 or the intermediate stage region 48 .
  • the side channel steps 33 are designed as axial side channel steps and are offset axially and radially.
  • the side channel pump stages 33 therefore have their own carrier 50 for their rotor elements 34.
  • the vacuum pump 10 includes a vacuum port 54 connected to the interstage region 48 .
  • the radially outer stator element 26 in the sectional view of 3 channel section from the vacuum connection 54 to the intermediate stage region 48 which is not visible.
  • the vacuum connection 54 could, for example, also be arranged at the axial level of the intermediate stage region 48 and, for example, open directly into it.
  • the vacuum port 54 is located between the Holweck stages 25 and the side channel stages 33 and forms an interstage port. It can be used, for example, to measure or determine operating parameters or as an interstage inlet, particularly in a multi-chamber vacuum system, as illustrated in FIG 8 will be explained in more detail.
  • the carrier element 16 has an axial projection 56, in particular a circumferential one.
  • the stator element 26 is held on a circumferential surface, here on an inner circumference, of the projection 56, for example by means of a press fit.
  • the projection 56 also ensures that the stator element 26 is positioned precisely.
  • the gas which, coming from the inlet 14, passes through the carrier 16 radially outside the projection 56, is divided between the two radially outer Holweck stages 25.
  • the gas, which passes through the carrier element 16 radially inside the projection 56 enters the radially innermost Holweck stage 25 , which is formed on the stator side by an inner Holweck thread 28 of the radially inner stator element 26 .
  • the figure 5 shows section C enlarged.
  • the side channel steps 33 are visible, which are arranged in an axially overlapping manner with the electric motor 47 .
  • a nested and particularly compact arrangement of the side channel stages 33 with the electric motor 47 is realized by the intermediate elements 52, which extend relatively long here, and the axially and radially offset arrangement of the side channel stages 33.
  • the pump 10 is particularly compact overall.
  • Two gaps 58 are provided between a respective rotor element 34 and a respective stator element 56 of the side channel stage 33 which defines the ring channel 36 so that the rotor element 34 can rotate freely in the ring channel 36 .
  • a certain quantity of gas to be conveyed can escape from the ring channel 36 through this gap 58 . This is basically a leak.
  • a pump-active structure can be provided, for example, in and/or adjacent to the gap 58 .
  • a Holweck thread can be provided on a static component, which can interact, for example, with a substantially smooth peripheral surface of the rotor element 34 and/or the intermediate element 52 in order to bring about a pumping effect counter to the leakage direction.
  • Such Holweck threads are not shown here.
  • a Holweck thread could be arranged, for example, on an inner circumference of the stator element 56 of the radially outer side channel step 33 and/or opposite the radially inner intermediate element 52 .
  • a Holweck thread can be provided, for example, on the inner circumference of the housing 12 and/or opposite the radially outer intermediate element 52 .
  • a Holweck thread could also be formed, for example, on an outer circumferential surface of a motor housing 60 and thus cooperate in a pumping manner, for example, with an inner circumference of the radially inner rotor element 34 or with a composite material inner circumferential surface. In this way, for example, a leakage through the corresponding gap 58 towards the electric motor 47 can be reduced.
  • a pumping effect generated by the outer circumference of the radially inner intermediate element 52 or of the radially inner rotor element 34 counteracts leakage from the inner side channel stage 33 connected downstream in series to the radially outer side channel stage 33 .
  • a pumping action generated by the outer periphery of the radially outer intermediate member 52 or the radially outer rotor member 34 counteracts back leakage into the interstage region 48 .
  • a pump-active structure, in particular a Holweck thread, to reduce leakage can generally be formed, for example, directly on the components described or on an additional component.
  • the intermediate elements 52 can preferably be designed as sleeves made of a composite material. They are preferably glued to the rotor element carrier 50, in particular to a respective axial projection thereof.
  • the vacuum pump 10 of 3 is in 6 shown in a different sectional view, where the sectional plane was rotated around the rotor axis.
  • a connection 62 is visible between the side channel stages. This connects the side channel stages 33 in series, namely an outlet of the first side channel stage 33 in the pumping direction with an inlet of the second side channel stage 33 in the pumping direction.
  • the first side channel stage 33 which is the radially outer one here, has an inlet that is connected to the intermediate stage area 48 is.
  • this admission is neither in 3 still in 6 visible since he is not in the selected cutting planes, but is located in a different perimeter. The same applies to an outlet of the second side channel stage 33 or the outlet of the pump 10.
  • a further vacuum connection 64 is also connected to the connection 62 .
  • this vacuum connection 64 can be used, for example, as a measurement connection or also as an interstage inlet.
  • connection 62 is essentially formed by two mutually perpendicular bores in the stator elements 56 .
  • vacuum connection 64 is formed by one of the two bores.
  • a vacuum system 70 is shown, for example comprising a mass spectrometry system.
  • the vacuum system 70 includes a first chamber 72 connected to an inlet of a turbomolecular pump 74 .
  • An outlet of the turbomolecular pump 74 is connected to an inlet of a booster pump 76, which forms a main inlet of the booster pump.
  • the booster pump also includes an intermediate inlet connected to a second vacuum chamber 78 .
  • the intermediate inlet of the booster pump 76 can be, for example, one of the vacuum ports 54 or 64 of the embodiment of a booster or vacuum pump described above.
  • An outlet of the booster pump 76 is connected to an inlet of a backing pump 80 which exhausts to atmosphere with an outlet.
  • the Backing pump 80 can be connected to a third vacuum chamber 82 as indicated by dashed lines, for example to an inlet to which booster pump 76 is also connected, or to an intermediate inlet. A combination of these is also conceivable.
  • the vacuum chambers 72, 78 and 82 can in particular be connected to one another via respective diaphragms and/or define an ion path of a mass spectrometer.
  • the pressure in the first vacuum chamber 72 is the lowest in comparison to the other vacuum chambers 78 and 82 .
  • the pressures in chambers 78 and 82 are progressively greater.
  • Additional chambers and/or additional pumps can also be provided, for example.
  • the second chamber 78 may be connected to a vacuum port between Holweck stages and side channel stages, particularly the vacuum port 64, to be connected.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (12)

  1. Pompe à vide (10), en particulier pompe de suralimentation (booster), comprenant
    un étage de pompage Holweck (25),
    au moins deux étages de pompage à canal latéral (33) disposés en aval de l'étage de pompage Holweck (25) et agissant en série, qui sont disposés en décalage axial l'un par rapport à l'autre, et
    un rotor de pompe (20) qui forme un rotor de pompe commun (20) de l'étage de pompage Holweck (25) et des étages de pompage à canal latéral (33), et
    un moteur électrique (47),
    des éléments de rotor (24) de l'étage de pompage Holweck (25) étant reliés à un arbre de rotor (21) du rotor de pompe (20) indépendamment des éléments de rotor (34) des étages de pompage à canal latéral (33), caractérisée en ce que
    les étages de pompage à canal latéral (33) sont disposés en décalage radial l'un par rapport à l'autre, et
    i) les étages de pompage à canal latéral (33) sont disposés en chevauchement axial avec le moteur électrique (47), et/ou
    ii) le rotor de pompe (20) comprend un palier magnétique (42) à une extrémité côté aspiration du rotor de pompage (20), et le palier magnétique (42) est disposé en chevauchement axial avec l'étage de pompage Holweck (25).
  2. Pompe à vide (10) selon la revendication 1,
    la pompe à vide (10) comprenant au moins deux étages de pompage Holweck (25) agissant en parallèle,
    de préférence, les étages de pompage Holweck (25) étant disposés en chevauchement axial.
  3. Pompe à vide (10) selon la revendication 2,
    dans laquelle les étages de pompage Holweck présentent la même compression,
    de préférence, la capacité d'aspiration de chacun des étages de pompage Holweck (25) diminue de l'extérieur vers l'intérieur dans la direction radiale.
  4. Pompe à vide (10) selon l'une des revendications précédentes, dans laquelle, pour le rotor de pompe (20), un palier magnétique (42) est prévu à une extrémité côté aspiration du rotor (20), et un palier à roulement (44) est prévu à une autre extrémité.
  5. Pompe à vide (10) selon l'une des revendications précédentes,
    la pompe à vide (10) présentant une entrée (14) et un composant statique (16) recouvrant l'entrée, un élément de stator (26) dudit au moins un étage de pompage Holweck (25) étant porté par ledit composant (16),
    en particulier, le composant (16) étant un support pour un élément de palier (42).
  6. Pompe à vide (10) selon l'une des revendications précédentes, dans laquelle un élément de rotor (24) de l'étage de pompage Holweck (25) est porté par un support d'élément de rotor (22), et le support d'élément de rotor (22) présente un passage (38) pour un gaz transporté ou à transporter par l'élément de rotor (24).
  7. Pompe à vide (10) selon la revendication 6,
    dans laquelle le passage (38) est réalisé de manière efficace en pompage.
  8. Pompe à vide (10) selon l'une des revendications précédentes,
    dans laquelle l'un au moins des étages de pompage à canal latéral (33) comprend un canal annulaire (36) et un élément de rotor (34) tournant dans celui-ci, un interstice (58) étant formé entre l'élément de rotor (34) et un composant (56) définissant le canal annulaire (36),
    une structure active en pompage est prévue dans et/ou au voisinage de l'interstice (58), laquelle présente un effet de pompage à l'encontre d'une fuite du canal annulaire (36) à travers l'interstice (58).
  9. Pompe à vide (10) selon la revendication 8,
    dans laquelle la structure active en pompage est disposée sur un chemin de fuite entre les deux étages de pompage à canal latéral (33).
  10. Pompe à vide (10) selon l'une des revendications précédentes,
    dans laquelle un raccord au vide est prévu entre deux étages de pompage.
  11. Système de vide (70), en particulier système de spectrométrie de masse, comprenant
    une première chambre à vide (72),
    une pompe turbomoléculaire (74) ayant une entrée raccordée à la première chambre à vide (72),
    une deuxième chambre à vide (78),
    une pompe à vide (10) selon la revendication 10, comprenant une entrée principale (14) reliée à une sortie de la pompe turbomoléculaire (74),
    le raccord au vide (54, 64) formant une entrée intermédiaire raccordée à la deuxième chambre à vide (78).
  12. Système de vide (70) selon la revendication 11,
    dans lequel la pompe à vide (10) comprend une sortie reliée à une entrée d'une pompe à vide préliminaire (80).
EP19191378.9A 2019-08-13 2019-08-13 Pompe à vide comprenant un étage de pompe de holweck et undeux étages de pompe à canal latéral Active EP3623634B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP19191378.9A EP3623634B1 (fr) 2019-08-13 2019-08-13 Pompe à vide comprenant un étage de pompe de holweck et undeux étages de pompe à canal latéral

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP19191378.9A EP3623634B1 (fr) 2019-08-13 2019-08-13 Pompe à vide comprenant un étage de pompe de holweck et undeux étages de pompe à canal latéral

Publications (2)

Publication Number Publication Date
EP3623634A1 EP3623634A1 (fr) 2020-03-18
EP3623634B1 true EP3623634B1 (fr) 2022-04-06

Family

ID=67620281

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19191378.9A Active EP3623634B1 (fr) 2019-08-13 2019-08-13 Pompe à vide comprenant un étage de pompe de holweck et undeux étages de pompe à canal latéral

Country Status (1)

Country Link
EP (1) EP3623634B1 (fr)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015113821A1 (de) * 2014-08-27 2016-03-03 Pfeiffer Vacuum Gmbh Vakuumpumpe

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH046593U (fr) * 1990-04-25 1992-01-21
GB9525337D0 (en) * 1995-12-12 1996-02-14 Boc Group Plc Improvements in vacuum pumps
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
US7140833B2 (en) * 2004-11-04 2006-11-28 The Boc Group, Llc Integrated turbo/drag/regenerative pump with counter-rotating turbo blades
DE102009021642B4 (de) * 2009-05-16 2021-07-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102009035332A1 (de) * 2009-07-30 2011-02-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102012003680A1 (de) * 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015113821A1 (de) * 2014-08-27 2016-03-03 Pfeiffer Vacuum Gmbh Vakuumpumpe

Also Published As

Publication number Publication date
EP3623634A1 (fr) 2020-03-18

Similar Documents

Publication Publication Date Title
EP2295812B1 (fr) Récipient repliable
EP1090231B2 (fr) Pompe a vide rotative munie d'un chassis, d'un rotor et d'un carter, et dispositif pourvu d'une pompe a vide rotative de ce type
DE29516599U1 (de) Reibungsvakuumpumpe mit Zwischeneinlaß
DE102012003680A1 (de) Vakuumpumpe
EP2060794A2 (fr) Pompe à vide dotée d'une pompe à lubrifiant
DE602004008089T2 (de) Vakuumpumpe
DE60313493T2 (de) Vakuumpumpe
EP3112688B2 (fr) Pompe à vide à débit partagé et système à vide doté d'une pompe à débit partagé
EP2401505B1 (fr) Pompe à vide à plusieurs entrées
EP2933497B1 (fr) Pompe à vide
DE4327506C2 (de) Turbovakuumpumpe
EP2253851B1 (fr) Pompe à vide
EP2039941B1 (fr) Pompe à vide
DE60319585T2 (de) Vakuumpumpe
EP3623634B1 (fr) Pompe à vide comprenant un étage de pompe de holweck et undeux étages de pompe à canal latéral
EP3112689B1 (fr) Pompe à vide à debit partagé
EP3158198B1 (fr) Machine à anneau liquide
EP3088746B1 (fr) Pompe à vide
EP1838966A1 (fr) Compresseur a vide a canal lateral
DE1528717B2 (de) Vorrichtung zum ausgleich des axialschubes bei mehrstufigen kreiselpumpen
DE10149366A1 (de) Axial fördernde Reibungsvakuumpumpe
DE19901340A1 (de) Reibungsvakuumpumpe mit Chassis, Rotor und Gehäuse sowie Einrichtung, ausgerüstet mit einer Reibungsvakuumpumpe dieser Art
EP0459092B1 (fr) Pompe à vide à deux étages et son procédé de construction
EP3267040B1 (fr) Pompe turbomoléculaire
EP3767109B1 (fr) Système à vide

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN PUBLISHED

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20200717

RBV Designated contracting states (corrected)

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

17Q First examination report despatched

Effective date: 20201117

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

RIC1 Information provided on ipc code assigned before grant

Ipc: F04D 29/64 20060101ALI20211203BHEP

Ipc: F04D 29/62 20060101ALI20211203BHEP

Ipc: F04D 23/00 20060101ALI20211203BHEP

Ipc: F04D 19/04 20060101AFI20211203BHEP

INTG Intention to grant announced

Effective date: 20211222

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: AT

Ref legal event code: REF

Ref document number: 1481590

Country of ref document: AT

Kind code of ref document: T

Effective date: 20220415

REG Reference to a national code

Ref country code: DE

Ref legal event code: R096

Ref document number: 502019003943

Country of ref document: DE

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: GERMAN

REG Reference to a national code

Ref country code: LT

Ref legal event code: MG9D

REG Reference to a national code

Ref country code: NL

Ref legal event code: MP

Effective date: 20220406

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220406

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220406

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220808

Ref country code: NO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220706

Ref country code: LT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220406

Ref country code: HR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220406

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220707

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220406

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220406

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220706

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: RS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220406

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220406

Ref country code: LV

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220406

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220806

REG Reference to a national code

Ref country code: DE

Ref legal event code: R097

Ref document number: 502019003943

Country of ref document: DE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SM

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220406

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220406

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220406

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220406

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220406

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20230110

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220406

Ref country code: AL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220406

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220813

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220831

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220831

REG Reference to a national code

Ref country code: BE

Ref legal event code: MM

Effective date: 20220831

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220406

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220813

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220831

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20220831

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20230825

Year of fee payment: 5

Ref country code: CZ

Payment date: 20230807

Year of fee payment: 5

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20231027

Year of fee payment: 5

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT; INVALID AB INITIO

Effective date: 20190813

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220406

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220406

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20220406

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20240826

Year of fee payment: 6