EP1838966A1 - Compresseur a vide a canal lateral - Google Patents

Compresseur a vide a canal lateral

Info

Publication number
EP1838966A1
EP1838966A1 EP06701216A EP06701216A EP1838966A1 EP 1838966 A1 EP1838966 A1 EP 1838966A1 EP 06701216 A EP06701216 A EP 06701216A EP 06701216 A EP06701216 A EP 06701216A EP 1838966 A1 EP1838966 A1 EP 1838966A1
Authority
EP
European Patent Office
Prior art keywords
side channel
pump rotor
pump
gap
vacuum side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06701216A
Other languages
German (de)
English (en)
Inventor
Christian Beyer
Heinrich Engländer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP1838966A1 publication Critical patent/EP1838966A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/051—Axial thrust balancing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/083—Sealings especially adapted for elastic fluid pumps

Definitions

  • the invention relates to a vacuum side channel compressor with a pump stator and a pump rotor, which enclose a side channel.
  • the object of the invention is to provide a vacuum side channel compressor in which the operational influences on the sealing gap are reduced.
  • the sealing gap at least partially forms a conical ring whose imaginary cone tip lies in the vicinity of the rotor thrust bearing.
  • the rotor of the side channel compressor is usually rotatably supported by two bearings, one of the two bearings axially fixing the rotor. In a flying storage of the pump rotor, this is the closest to the pump rotor bearing.
  • the sealing gap and the opposing sealing gap surfaces of the pump stator and the pump rotor each form a conical ring whose imaginary apex is located in the vicinity of the thrust bearing, the pump rotor expands in its thermally induced expansion in the region of the sealing gap approximately parallel to the conical ring, so that the distance between the sealing gap surfaces of the pump stator and the pump rotor, ie the gap of the sealing gap, remains approximately constant at each pump rotor temperature.
  • the heat-related influences can largely be ignored. In this way, no reserves must be provided for the design of the sealing gap for higher operating temperatures.
  • the gap can therefore be very small, ie the sealing gap can be designed very narrow, this gap remains substantially the same size at all pump rotor temperatures, whereby low Schoströmholde be effected.
  • This overall improves the pumping action of the vacuum side channel compressor.
  • the cone tip is not more than half the support length away from the thrust bearing.
  • the support length is the length between the two bearings holding the pump rotor.
  • the cone tip thus lies in a region about the length of a support length around the thrust bearing.
  • the cone tip is not more than a thrust bearing length away from the thrust bearing.
  • the Kegeispitze is thus in a range of a length of three thrust bearing lengths around the Axiallager- center around. Ideally, the cone tip lies within the thrust bearing itself.
  • At least two side channels are provided which, according to a preferred embodiment, lie in a radial plane.
  • the sealing gaps between the adjacent side channels each form their own conical ring, each with a different cone angle.
  • the conical tips to all cone rings are located in approximately a single point in the vicinity of the thrust bearing.
  • the non-tapered portions of the gap between two side channels are in a radial plane and / or on a cylindrical surface.
  • each outer side channel is greater than that of the adjacent inner side channel.
  • the side channel blower has on this Way an internal compression, which leads to an overall higher total compression of the side channel compressor.
  • the figure shows a vacuum side channel compressor according to the invention with four pump stages.
  • a vacuum side channel compressor 10 which has a pump rotor 12, a pump stator 14, a housing 16, an electric drive motor 18, a shaft 20 and two bearings 22,24 supporting the shaft 20.
  • the pump stator 14 and the pump rotor 12 surround four side channels 31,32,33,34, which lie approximately in a radial plane.
  • the pump rotor 12 is formed for this purpose disc-like.
  • the cross-section of the side channels 31-34 decreases from radially outward to radially inward so that the respective radially outer side channel 31, 32, 33 is larger in cross-section than the respective radially inner adjacent side channel 32, 33, 34.
  • the side channels 31 to 34 are connected in series so that the outside gas drawn through a gas inlet 36 gas passes through the four side channels 31 to 34 from outside to inside, and finally discharged through a gas outlet 38.
  • the pump rotor 12 is cantilevered.
  • the bearing 12 closer to the pump rotor 12 is a radial thrust bearing 22 designed as a roller bearing, while the bearing 24 which is further away from the pump rotor 12 is also a roller bearing, but a pure radial bearing
  • the sealing gap 40,42,44,46 each form a conical ring.
  • the conical rings are each part of an imaginary cone 61,62,63,64, whose common imaginary apex 50 lies within the Axiailagers 22 on the pump rotor axial 70.
  • the sealing ring 40 forming a conical ring of the outer side channel 31 is formed by a correspondingly inclined pump rotor sealing surface 52 and an opposite correspondingly inclined pump stator sealing surface 54.
  • the Spaitput of the sealing gap 40 over a high temperature range is approximately constant and can be designed very small, for example, less than 0.1 mm. This, in turn, the remindström losses between the four side channels 31 to 34 and between the outer side channel 31 and the gas inlet 36 are kept low.
  • the remaining non-conical annular gaps between the pump rotor 12 and the pump stator 14 lie in a radial plane or in a cylindrical surface. These non-conical annular gaps increase as the thermal expansion of the pump rotor 12 increases.
  • the gap between the pump stator 14 and the pump rotor 12 in a cylinder plane must be formed by a pump stator gap surface which is oriented radially inwards, otherwise the respective gap would shrink with increasing pump rotor heating.
  • the radially outwardly oriented gap surfaces of the pump rotor are all located on a conical ring whose imaginary apex lies inside the axial bearing, as described above.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

L'invention concerne un compresseur à vide à canal latéral (10) présentant un stator de pompe (14) et un rotor de pompe (12) qui entourent un canal latéral (31, 32, 33, 34). Un palier axial (22) est prévu pour supporter le rotor de pompe (12). Un espace d'étanchéité (40) est formé, sur un côté du canal latéral, entre le stator de pompe (14) et le rotor de pompe (12), lequel espace forme partiellement un joint conique dont le sommet imaginaire (50) du cône se trouve dans le voisinage du palier axial (22).
EP06701216A 2005-01-22 2006-01-03 Compresseur a vide a canal lateral Withdrawn EP1838966A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200510003091 DE102005003091A1 (de) 2005-01-22 2005-01-22 Vakuum-Seitenkanalverdichter
PCT/EP2006/050018 WO2006077175A1 (fr) 2005-01-22 2006-01-03 Compresseur a vide a canal lateral

Publications (1)

Publication Number Publication Date
EP1838966A1 true EP1838966A1 (fr) 2007-10-03

Family

ID=36130100

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06701216A Withdrawn EP1838966A1 (fr) 2005-01-22 2006-01-03 Compresseur a vide a canal lateral

Country Status (5)

Country Link
US (1) US20080112790A1 (fr)
EP (1) EP1838966A1 (fr)
JP (1) JP2008528852A (fr)
DE (1) DE102005003091A1 (fr)
WO (1) WO2006077175A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage
US8070419B2 (en) * 2008-12-24 2011-12-06 Agilent Technologies, Inc. Spiral pumping stage and vacuum pump incorporating such pumping stage
DE102017200846A1 (de) * 2017-01-19 2018-07-19 Mahle International Gmbh Fördereinrichtung zum Antreiben eines Gases
DE102017119943A1 (de) * 2017-08-30 2019-02-28 Khs Gmbh Vorrichtung zur Etikettierung von Behältern

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2189295A (en) * 1986-04-19 1987-10-21 Arthur Pfeiffler Vakuumtechnik Vacuum pump
EP1363027A1 (fr) * 1996-05-03 2003-11-19 The BOC Group plc Pompe à vide

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3104802A (en) * 1963-09-24 Unified system vacuum pump
DE874503C (de) * 1939-12-19 1953-04-23 Siemens Ag Umlaufpumpe fuer Gasfoerderung
US2954157A (en) * 1958-01-27 1960-09-27 Edwin E Eckberg Molecular vacuum pump
US3298314A (en) * 1965-01-29 1967-01-17 John F Kopczynski Fluid moving device
US3697190A (en) * 1970-11-03 1972-10-10 Walter D Haentjens Truncated conical drag pump
JP2917563B2 (ja) * 1991-04-15 1999-07-12 株式会社デンソー 渦流式ポンプ
JP3486000B2 (ja) * 1995-03-31 2004-01-13 日本原子力研究所 ねじ溝真空ポンプ
DE19846188A1 (de) * 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
DE19902626C2 (de) * 1999-01-23 2003-02-06 Webasto Thermosysteme Gmbh Seitenkanalgebläse
GB9927493D0 (en) * 1999-11-19 2000-01-19 Boc Group Plc Improved vacuum pumps
DE10004271A1 (de) * 2000-02-01 2001-08-02 Leybold Vakuum Gmbh Reibungsvakuumpumpe
GB0013491D0 (en) * 2000-06-02 2000-07-26 Boc Group Plc Improved vacuum pump
DE10048695A1 (de) * 2000-09-30 2002-04-11 Leybold Vakuum Gmbh Pumpe als Seitenkanalpumpe
GB0114417D0 (en) * 2001-06-13 2001-08-08 Boc Group Plc Lubricating systems for regenerative vacuum pumps

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2189295A (en) * 1986-04-19 1987-10-21 Arthur Pfeiffler Vakuumtechnik Vacuum pump
EP1363027A1 (fr) * 1996-05-03 2003-11-19 The BOC Group plc Pompe à vide

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2006077175A1 *

Also Published As

Publication number Publication date
US20080112790A1 (en) 2008-05-15
JP2008528852A (ja) 2008-07-31
WO2006077175A1 (fr) 2006-07-27
DE102005003091A1 (de) 2006-07-27

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