EP1252445A1 - Pompe a vide a friction - Google Patents

Pompe a vide a friction

Info

Publication number
EP1252445A1
EP1252445A1 EP01909681A EP01909681A EP1252445A1 EP 1252445 A1 EP1252445 A1 EP 1252445A1 EP 01909681 A EP01909681 A EP 01909681A EP 01909681 A EP01909681 A EP 01909681A EP 1252445 A1 EP1252445 A1 EP 1252445A1
Authority
EP
European Patent Office
Prior art keywords
pump
pump according
friction
blades
radially
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01909681A
Other languages
German (de)
English (en)
Other versions
EP1252445B1 (fr
Inventor
Heinrich Engländer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH, Leybold Vacuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1252445A1 publication Critical patent/EP1252445A1/fr
Application granted granted Critical
Publication of EP1252445B1 publication Critical patent/EP1252445B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/10—Centrifugal pumps for compressing or evacuating
    • F04D17/12—Multi-stage pumps
    • F04D17/127—Multi-stage pumps with radially spaced stages, e.g. for contrarotating type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum

Definitions

  • the invention relates to a friction vacuum pump with a fixed component carrying stator blade rows and with a rotating component carrying rotor blade rows, the stator and rotor blade rows being arranged concentrically to the axis of rotation of the rotating component and intermeshing.
  • the friction vacuum pumps of this type include the turbomolecular vacuum pumps, as are known for example from WO 94/00694. They are designed like a turbine with rows of rotor and stator blades.
  • the stator and rotor extend essentially cylindrical and are arranged coaxially to the axis of rotation of the rotating component.
  • the longitudinal axes of the alternately intermeshing stator and rotor blades extend radially, so that there is an essentially axially directed conveying direction.
  • One or more pairs of a rotor blade row and a stator blade row form a pump stage.
  • the delivery properties of a pump stage (pumping speed, compression) are set by designing the blades, preferably by means of their angle of attack.
  • turbomolecular vacuum pumps In the case of turbomolecular vacuum pumps according to the prior art, a minimum number of pump stages cannot be undercut. As a result, turbomolecular vacuum pumps according to the prior art are relatively long, especially since the drive motor increases the axial length. In addition, in known turbomolecular pumps, only one component - usually the rotor - can be formed in one piece, while the other component - usually the stator - must consist of a plurality of parts in order to be able to mount the intermeshing rows of blades.
  • the present invention has for its object to provide a friction vacuum pump of the type mentioned, which is much shorter in the axial direction.
  • the invention makes it possible to build friction pumps whose axial length - apart from the drive motor - does not significantly exceed the length of the stator and rotor blades. Since the blades extend axially, the rotor and stator can be formed in one piece.
  • radially conveying pumps of the type according to the invention are operated in such a way that the conveyed gases flow from outside to inside.
  • the utilization of the different circumferential speeds of the blades proves to be an advantage, since the frictional losses correspond to the pressure area let reduce.
  • the backflow losses compared to the axial compressor in the conveying direction can be greatly reduced, since the stator can be made in one piece and there is no large tolerance chain due to the large number of joining parts.
  • the backflow losses due to the flow around the wing tips are also minimized, since the gaps can also be considerably reduced here by aligning the carriers.
  • wing disks described can be machined by turning and eroding machines. Both techniques are relatively inexpensive. With the achievable reduction in the number of parts, the invention is a real alternative to counter today's price pressure.
  • FIG. 1 shows a radial section through the wings of a friction vacuum pump according to the invention
  • FIGS. 2 to 4 axial sections through different designs
  • FIGS. 5 and 6 sections through a double flow design
  • FIG. 7 shows a section through a multi-stage solution
  • Figure 8 is a combination of a radially promoting
  • FIG. 1 shows that in the embodiments of a friction pump 1 according to the invention the longitudinal axes of the blades 2, 3 extend parallel to the rotary axis 4 of the rotating component. They are arranged in concentric rows around the axis of rotation 4. The rows of rotor blades 2 and the rows of stator blades 3 alternate with one another. They interlock and have, in a manner known per se, changing angles of attack in the direction of flow (arrow 16).
  • Figures 2 to 4 show that the blades 2, 3 are components of rotating or fixed carriers 6 and 7, respectively.
  • the rotating support 6 and the fixed support 7 have the shape of a disk.
  • the blade-side surface of the stator disk 7 is conical in such a way that the distance between the two disks 6, 7 decreases from the outside inwards.
  • the length of the blades 2, 3 also decreases from the outside inwards.
  • the fixed support 7 has the shape of a funnel, so that the distance between the supports 6 and 7 decreases from the inside to the outside.
  • the length of the blades 2, 3 is adapted to this change in distance.
  • FIG. 4 also shows that the fixed support 7 is part of a housing 8 of the pump 1. It consists of the carrier 7 with a connecting piece 9 and a flat, pot-shaped housing part 11 which is flanged to the carrier 7 with its edge.
  • the bottom 12 of the housing part 11 extends parallel to the rotor disk 6. It carries the drive motor 13, the shaft 14 of which extends through an opening in the bottom 12 and is coupled to the rotor disk 6.
  • a further connecting piece 15 is provided on the housing part 12.
  • Vacuum pumps are preferably operated so that the delivery space decreases in the direction of delivery of the gases. This property have friction pumps 1 according to the invention even when the gases are conveyed from the outside in (see arrows 16 shown in FIGS. 1 to 3).
  • the formation of the fixed support 7 according to FIG. 3 reinforces this property.
  • the width of the blades 2, 3 can also decrease from the outside inwards (cf. in particular FIG. 1).
  • FIG. 4 An example of a friction pump 1 operated in this way is shown in FIG. 4 (arrows 18).
  • the connecting flange 9 forms the inlet, the connecting flange 15 the outlet of the pump.
  • a change in the delivery space in the direction of the required gases is influenced by the fact that the distance between the carriers 6, 7 and thus the length of the blades 2, 3 decreases from the inside to the outside.
  • FIGS 5 and 6 show a double flow design of a friction pump 1 according to the invention.
  • An inner group of blade rows conveys the gases radially outwards (arrows 21), an outer group of blade rows from the outside inwards (arrows 22).
  • the connection pieces 9 and 15 are inlet pieces.
  • the stator disk 7 is equipped with a connecting piece 23, which has the function of an outlet. Reversing the direction of rotation results in a further configuration (1 intake port, 2 outlet port) that can be used for leak detectors with the countercurrent principle.
  • the friction pump 1 according to the invention to be multi-flow, that is to say with a plurality of blade groups which, in comparison with their neighboring blade groups, have opposite conveying directions.
  • a plurality of radially conveying pump stages are located axially one above the other in the housing 8.
  • the rotating system comprises two rotor disks 6, each of which carries rotor blades 2 on both sides.
  • the housing 8 and a housing-fixed carrier 25, which is located between the two rotor disks 6, carry corresponding stator blades 3.
  • Drawn arrows 27 show that the connecting piece 9 has the function of an inlet and that the subsequent, radially compressing steps (a total of four) convey alternately from the inside to the outside and from the outside to the inside.
  • the outlet is labeled 26. It lies inside and surrounds the drive shaft 14, so that sealants are not required in this area.
  • FIG. 8 shows one possibility of how a radially compressing friction pump 1 according to the invention can be combined with an axially compressing friction pump 31 according to the prior art.
  • the friction pump 31 consists of a turbomolecular pump stage 32 arranged on the suction side and a molecular pump stage 33 arranged on the pressure side, which as a Holweck pump (as shown provides) or can also be designed as a Gaede, Siegbahn, English or side channel pump.
  • the friction pumps 1 and 31 are located in a common, approximately cylindrical housing 35 with a lateral inlet 36.
  • a shaft 39 mounted on both end faces (bearings 37, 38) carries the rotating components of the pump stages (rotor disk 6 of the radially compressing pump 1, rotor) 41 of the turbomolecular pump stage 32, cylinder 42 of the Holweck pump stage 33).
  • the side inlet 36 of the combined pump opens between the radially compressing pump stage 1 and the axially compressing pump 31.
  • the outlet 44 of the combined pump is located on the pressure side of the molecular pump stage 33.
  • the arrows 45 and 46 shown show that the radially compressing pump stage 1 draws in the gases to be conveyed in the area of its periphery and the axially compressing pump 31 - as usual - in the area of its high vacuum side.
  • the gases conveyed by the pump stage 1 reach the suction side of the Holweck pump stage 33 via a bypass 47.
  • the peculiarity of the solution according to FIG. 8 is that the drive motor 48 is located on the high vacuum side of the axially conveying pump 31 (and not on the pressure side of the Holweck pump stage 33 as is customary). Due to the fact that the radially compressing pump stage 1 is located between the inlet 36 and the drive motor 48, a relatively high pressure can be maintained in the engine compartment 49 (eg I x 10 ⁇ 2 mbar). The use Fertilizing high vacuum compatible materials in the engine room 49 is not necessary. In addition, the radially pumping pump stage 1 supports the pumping capacity of the turbomolecular pumping stage 32 without significantly increasing the overall length of the pump 31.
  • FIGS. 9 to 11 show designs of combined friction pumps for use in multi-chamber systems, here two-chamber systems. This is e.g. multi-chamber analyzers that need to be evacuated to different pressures. As a result, the distance between the intake manifolds is predetermined, which in the prior art frequently leads to the need for relatively long, overhung rotor systems which require complex bearing systems.
  • All of the designs according to FIGS. 9 to 11 have two side inlets 36, 36 '. They are separated from one another by at least one radially compressing pump stage 1. As in the embodiment according to FIG. 8, the inlet 36 "sees" the entry areas of an axially conveying friction pump 31 as well as a friction pump 1 conveying radially from the outside inward.
  • the outlet of the radially delivering pump 1 opens into the inlet region of a second turbomolecular pump stage 32 ', to which the second inlet 36' is connected.
  • the pump 1 causes the pressure at the inlet 36 to be lower than at the inlet 36 '.
  • the drive motor 48 is located on the pressure side of the turbomolecular pump stage 32 '. This pressure side is connected via the bypass 47 to the suction side of the molecular pump stage 33.
  • a further axially compressing friction pump 1' can be provided to separate the inlets 36, 36 '(FIG. 10). It conveys a partial flow of the gases entering the inlet 36 '.
  • the outlets of the two friction pumps 1 and 1 ' are connected to the bypass 47.
  • the embodiment according to FIG. 11 has a further axially conveying friction pump 1 ′′ instead of the turbomolecular pump stage 32 ′.
  • This solution can be used when the amount of gas is not high.
  • the selected arrangement allows further high-vacuum pump systems to be arranged on the common shaft 39 and their inlets to be separated from one another by radially conveying pump stages according to the invention.
  • Both the respective high-vacuum pump stages, generally turbomolecular pump stages, and the outlets of the radially pumping pump stages can be connected to a common molecular pump stage via bypasses.
  • the examples given show that the combination and the order of the pump stages is arbitrary and can be adapted to the application-related circumstances.
  • the arrangement of the pump stages allows compact Constructions with bearings on both shaft ends. This allows the waves to be made as stiff as required. This leads to rotor-dynamically unproblematic constructions, which also have good balancing characteristics. Because almost any number of stages designed in the manner of components of a modular system can be attached to a shaft, it is easier to implement a high-vacuum pump that compresses against the atmosphere.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

L'invention concerne une pompe à friction (1) comportant un élément fixe (7) portant des rangées de pales de stator ainsi qu'un élément rotatif (6) portant des rangées de pales de rotor, les rangées de pales de stator et de rotor étant disposées concentriquement par rapport à l'axe de rotation (4) de l'élément rotatif (6) et s'engrenant. L'invention vise à créer une pompe à friction courte dans le sens axial. A cet effet, les éléments (6, 7) portant les rangées de pales de rotor et de stator s'étendent pratiquement radialement et les axes longitudinaux des pales (2, 3) s'étendent pratiquement axialement.
EP01909681A 2000-02-01 2001-01-24 Pompe turbo-moléculaire Expired - Lifetime EP1252445B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10004271A DE10004271A1 (de) 2000-02-01 2000-02-01 Reibungsvakuumpumpe
DE10004271 2000-02-01
PCT/EP2001/000726 WO2001057402A1 (fr) 2000-02-01 2001-01-24 Pompe a vide a friction

Publications (2)

Publication Number Publication Date
EP1252445A1 true EP1252445A1 (fr) 2002-10-30
EP1252445B1 EP1252445B1 (fr) 2008-01-23

Family

ID=7629403

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01909681A Expired - Lifetime EP1252445B1 (fr) 2000-02-01 2001-01-24 Pompe turbo-moléculaire

Country Status (5)

Country Link
US (1) US7011491B2 (fr)
EP (1) EP1252445B1 (fr)
JP (1) JP4819277B2 (fr)
DE (2) DE10004271A1 (fr)
WO (1) WO2001057402A1 (fr)

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DE10150015A1 (de) * 2001-10-11 2003-04-17 Leybold Vakuum Gmbh Mehrkammeranlage zur Behandlung von Gegenständen unter Vakuum, Verfahren zur Evakuierung dieser Anlage und Evakuierungssystem dafür
GB0322889D0 (en) 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
DE10353034A1 (de) * 2003-11-13 2005-06-09 Leybold Vakuum Gmbh Mehrstufige Reibungsvakuumpumpe
DE102005003091A1 (de) * 2005-01-22 2006-07-27 Leybold Vacuum Gmbh Vakuum-Seitenkanalverdichter
US7632060B2 (en) * 2005-01-24 2009-12-15 Ford Global Technologies, Llc Fuel pump having dual flow channel
US7165932B2 (en) * 2005-01-24 2007-01-23 Visteon Global Technologies, Inc. Fuel pump having dual single sided impeller
GB0618745D0 (en) * 2006-09-22 2006-11-01 Boc Group Plc Molecular drag pumping mechanism
US20090081022A1 (en) * 2007-09-21 2009-03-26 Honeywell International Inc. Radially Staged Microscale Turbomolecular Pump
US20120014779A1 (en) * 2010-07-16 2012-01-19 Charles David Gilliam Disc pump
US20140020556A1 (en) * 2011-11-04 2014-01-23 Honeywell International Inc. Mass separation via a turbomolecular pump
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
EP2620649B1 (fr) 2012-01-27 2019-03-13 Edwards Limited Pompe à vide de transfert gazeux
US9677990B2 (en) 2014-04-30 2017-06-13 Particles Plus, Inc. Particle counter with advanced features
US10352844B2 (en) 2013-03-15 2019-07-16 Particles Plus, Inc. Multiple particle sensors in a particle counter
US10983040B2 (en) 2013-03-15 2021-04-20 Particles Plus, Inc. Particle counter with integrated bootloader
US11579072B2 (en) 2013-03-15 2023-02-14 Particles Plus, Inc. Personal air quality monitoring system
US20150063982A1 (en) * 2013-09-01 2015-03-05 Particles Plus, Inc. Multi-stage inflow turbine pump for particle counters
CN104600081A (zh) * 2014-12-31 2015-05-06 京东方科技集团股份有限公司 阵列基板及其制作方法、显示面板、显示装置
DE102016210701A1 (de) * 2016-06-15 2017-12-21 Inficon Gmbh Massenspektrometrischer Lecksucher mit Turbomolekularpumpe und Boosterpumpe auf gemeinsamer Welle
DE102018119747B3 (de) 2018-08-14 2020-02-13 Bruker Daltonik Gmbh Turbomolekularpumpe für massenspektrometer
EP3767110A1 (fr) * 2019-07-15 2021-01-20 Pfeiffer Vacuum Gmbh Système sous vide
US11519419B2 (en) * 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface
US11988591B2 (en) 2020-07-01 2024-05-21 Particles Plus, Inc. Modular optical particle counter sensor and apparatus
CN112160919A (zh) * 2020-09-28 2021-01-01 东北大学 涡轮分子泵和包括该分子泵的复合分子泵

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Also Published As

Publication number Publication date
US20040013514A1 (en) 2004-01-22
JP4819277B2 (ja) 2011-11-24
DE50113533D1 (de) 2008-03-13
JP2003525379A (ja) 2003-08-26
DE10004271A1 (de) 2001-08-02
WO2001057402A1 (fr) 2001-08-09
US7011491B2 (en) 2006-03-14
EP1252445B1 (fr) 2008-01-23

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