EP1078166B1 - Pompe a vide a friction dotee d'un stator et d'un rotor - Google Patents

Pompe a vide a friction dotee d'un stator et d'un rotor Download PDF

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Publication number
EP1078166B1
EP1078166B1 EP98946450A EP98946450A EP1078166B1 EP 1078166 B1 EP1078166 B1 EP 1078166B1 EP 98946450 A EP98946450 A EP 98946450A EP 98946450 A EP98946450 A EP 98946450A EP 1078166 B1 EP1078166 B1 EP 1078166B1
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EP
European Patent Office
Prior art keywords
rotor
vacuum pump
pump
friction vacuum
stages
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP98946450A
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German (de)
English (en)
Other versions
EP1078166B2 (fr
EP1078166A1 (fr
Inventor
Christian Beyer
Ralf Adamietz
Markus Henry
Günter Schütz
Heinrich Engländer
Gerhard Wilhelm Walter
Hans-Rudolf Fischer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
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Filing date
Publication date
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Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1078166A1 publication Critical patent/EP1078166A1/fr
Application granted granted Critical
Publication of EP1078166B1 publication Critical patent/EP1078166B1/fr
Publication of EP1078166B2 publication Critical patent/EP1078166B2/fr
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps

Definitions

  • the invention relates to a friction vacuum pump with the features of the preamble of the claim 1.
  • DE-A-43 31 589 discloses using only one vacuum pump system the various from the corpuscular blasting machine generate required pressures.
  • the pump system includes two turbomolecular and one molecular (Holweck) pump stage. These pumping stages are axially one behind the other arranged. Each pump stage has a gas inlet (front gas passage surface) on the connection means with the associated chamber of the evacuated Device is connected.
  • connection means serve in the solution according to DE-A-34 31 589 Housing itself and an additional housing arranged on the side. The housing itself is located on the front Connection opening for connecting the gas inlet the first pump stage with the one to be evacuated Facility equipped. There are connecting cables in the additional housing provided the associated inlets the further pump stages with further connection openings connect.
  • connection openings in the additional housing with the connection opening of the first pump stage in one common plane perpendicular to the rotor axis
  • the connecting cables in the additional housing be relatively long. This results in relative large conductance losses in the connecting lines, which is particularly disadvantageous when Area of an intermediate connection has a high pumping speed is desired.
  • the state of the art also includes the content of Documents DE 18 09 102 A1, US 31 89 264 A and US 36 28 894 A. Turbomolecular and molecular pumps are disclosed with only one connection opening on the suction side.
  • the present invention is based on the object a friction vacuum pump of the type mentioned above to shape that the pumping speed of the intermediate stages not due to high conductance losses in connecting lines is impaired.
  • the implementation of the measures according to the invention has this means that the gases to be pumped in the inlet area the first pump stage, i.e. exactly where the Pressure is lowest, must be redirected.
  • the resulting loss of conductance can be kept small because the distance between the gas inlet and the level of the port opening is still relative is small and also in this area of choice larger diameter nothing stands in the way.
  • particularly high pumping speeds in the area of the inlet of the first (high vacuum side) pump stage not required become. Often there is even a need for this Throttling pumping speed at this point.
  • the main purpose of the first pump stage is to ensure a high compression ratio.
  • the for the first pump stage selected blade properties must take this function into account.
  • Essential is a separation of the two working pressure ranges of the two pump stages.
  • a high pumping speed is usually only at the intermediate entrance (s) desired. This goal can also be chosen special blade geometries can be achieved.
  • Accessibility is essential for the pumping speed of a pump stage of the gas molecules to the gas inlet (effective gas passage area) prevail.
  • it is known at an intermediate stage between the previous stage and its gas inlet one provide a larger distance. It is particularly advantageous it if this distance is at least a quarter, preferably one third of the diameter of the rotor.
  • the pump itself is 1, its housing with 2, their stator system with 3 and their rotor system designated with 4.
  • the shaft 5 belongs to the rotor system, which in turn are on the bearings 6, 7 in the bearing housing 8, connected to the pump housing 2, supports.
  • In the bearing housing there is also the drive motor 9, 10.
  • the axis of rotation of the rotor system 4 is 15 designated.
  • a total of three pump stages 12, 13, 14 are provided, two of which (12, 13) as turbomolecular vacuum pump stages and a (14) as a molecular (Holweck) pumping stage are trained.
  • (12, 13) as turbomolecular vacuum pump stages
  • (14) as a molecular (Holweck) pumping stage
  • the first pump stage 12 is located on the high vacuum side from four pairs of rotor blade rows 21 and Stator blade rows 22. Your inlet, the effective gas passage area, is designated 23. To the first Pump stage 12 is followed by second pump stage 13, that of three pairs of one stator blade row 22 each and a rotor blade row 21. Your entry is designated 28.
  • the second pump stage 13 is from the first pump stage 12 spaced.
  • the selected distance (height) a secures the free accessibility of the gas molecules to be conveyed to the gas inlet 28.
  • the distance a is expediently greater than a quarter, preferably greater than a third the diameter of the rotor system 4.
  • the subsequent Holweck pump includes one rotating cylinder section 29, the outside and inside in a known manner, each with a thread groove 30, 31 equipped stator elements 32, 33 face each other.
  • the rotor-side parts of the pump stages 12, 13, 14 form a unit that is ready for use with the Wave 5 is connected.
  • a central bore 25 so that no immediate Connection between the storage room and the intermediate space exists and thus the risk of back diffusion of Lubricant vapors are eliminated.
  • This serves the purpose also the flying bearing of the rotor system 4.
  • the back diffusion of lubricant vapors can also be done by using magnetic bearings avoided, which are arranged in a more convenient place can be.
  • connection means serves the housing 2 itself. It is in the embodiment formed in such a way that the Levels of all connection openings 36, 37 parallel to the rotor axis 15. This is special the distance of the connection 37 to the associated gas inlet 28 very small, so the pumping speed of the pump stage 13 impairing conductance losses negligible are. This would also apply to any other intermediate connection apply to the downstream of the intermediate connection 37/28. Otherwise exceeds the diameter of the connection opening 37 around the height a about double. This measure also serves the reduction the conductance losses between inlet 28 and Connection opening 37.
  • the pump 1 shown and its pump-effective elements are expediently designed such that a pressure of 10 -4 to 10 -7 , preferably 10 -5 to 10 -6 , and in the area of the connection opening 36 A pressure of approximately 10 -2 to 10 -4 mbar is generated in the area of the connection opening 37.
  • the second pumping stage is intended to generate a high pumping speed (eg 200 l / s).
  • the subsequent two-stage Holweck pump stage (29, 30; 29, 31) ensures high fore-vacuum resistance, so that the pumping speed of the second pump stage is usually independent of the fore-vacuum pressure.
  • the embodiment of Figure 2 differs from the embodiment of Figure 1 in that the Diameter of those following the first pump stage 12 Pump stages 13 and 14 are larger than the diameter the pump stage 12. This fact is the level of Connection openings 36, 37 adapted. It is like that Axis 15 of the rotor 4 inclined that the distance between the connection openings 36, 37 to the associated gas inlets 23, 28 is as small as possible. The angle of inclination a the Level of the connection openings 36, 37 to the rotor axis 15 corresponds to the increase in the diameter of the pump stages. This allows optimally favorable spacing ratios can be achieved. In the illustrated embodiment the angle of inclination is about 5 °.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (13)

  1. Pompe à vide à friction à simple flux (1) comprenant un stator (3) et un rotor (4), lesquels forment au moins deux étages de pompe (12, 13, 14) avec chacun une admission de gaz (23, 28), et des moyens de raccordement pour les étages de pompe, lesquels sont dotés d'ouvertures de raccordement (36, 37) pour chacune des admissions de gaz (23, 28), les ouvertures de raccordement (36, 37) étant situées dans un plan commun et servant à relier les admissions de gaz (23, 28) des étages de pompe avec un dispositif devant être mis sous vide, caractérisée en ce que toutes les ouvertures de raccordement (36, 37) ainsi que le plan commun des ouvertures de raccordement se trouvent sur le côté à proximité des étages de pompe (12, 13, 14), de sorte que la distance entre les ouvertures de raccordement (36, 37) et l'axe du rotor (15) peut être choisie la plus petite possible.
  2. Pompe à vide à friction selon la revendication 1, caractérisée en ce que le plan des ouvertures de raccordement (36, 37) est disposé parallèlement à l'axe (15) du rotor (4).
  3. Pompe à vide à friction selon la revendication 1, caractérisée en ce que le diamètre des étages de pompe suivants (13, 14) est supérieur au diamètre des étages de pompe précédents (12, 13) et que l'inclinaison du plan des ouvertures de raccordement (36, 37) par rapport à la direction de l'axe (15) du rotor (4) est adaptée à l'augmentation du diamètre.
  4. Pompe à vide à friction selon une des revendications précédentes, caractérisée en ce que les ouvertures de raccordement (36, 37) font partie du boítier (2) de la pompe à vide à friction (1).
  5. Pompe à vide à friction selon une des revendications précédentes, caractérisée en ce que les deux premiers étages de pompe (12, 13) sont sous la forme d'étages de pompe turbomoléculaires et que leurs éléments actifs de pompage (aubes de stator et de rotor) sont configurés de telle manière que le premier étage de pompe (12) assure un rapport de compression élevé et que le deuxième étage de pompe (13) produit une capacité d'aspiration élevée.
  6. Pompe à vide à friction selon la revendication 5, caractérisée en ce que les deux étages de pompe (12 et 13) sont distants l'un de l'autre et que leur distance (a) est supérieure au quart du diamètre du rotor, de préférence environ égale au tiers du diamètre du rotor.
  7. Pompe à vide à friction selon la revendication 6, caractérisée en ce que le diamètre de l'ouverture de raccordement (37) qui est reliée par les moyens de raccordement à l'admission de gaz (28) du deuxième étage de pompe est supérieur à la distance (a), de préférence environ égal au double de la distance (a).
  8. Pompe à vide à friction selon la revendication 5, 6 ou 7, caractérisée en ce qu'un étage de pompe Holweck à deux étages se raccorde aux deux étages de pompe (12, 13).
  9. Pompe à vide à friction selon une des revendications précédentes, caractérisée en ce que le rotor (4) est entraíné du côté du vide primaire et monté en porte à faux.
  10. Pompe à vide à friction selon la revendication 9, caractérisée en ce qu'une extrémité d'arbre libre traverse un orifice central (25) dans le rotor (4) et que le rotor(4) est fixé sur cette extrémité d'arbre.
  11. Pompe à vide à friction selon la revendication 9 ou 10, caractérisée en ce que la partie du rotor (4) proche du moteur est en forme de cloche.
  12. Pompe à vide à friction selon une des revendications précédentes, caractérisée en ce qu'un obturateur (38) pour limiter la capacité d'aspiration est associé à l'admission (23) du premier étage de pompe (12).
  13. Pompe à vide à friction selon une des revendications précédentes, caractérisée en ce qu'elle est équipée de paliers magnétiques.
EP98946450A 1998-05-14 1998-09-11 Pompe a vide a friction dotee d'un stator et d'un rotor Expired - Lifetime EP1078166B2 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19821634 1998-05-14
DE19821634A DE19821634A1 (de) 1998-05-14 1998-05-14 Reibungsvakuumpumpe mit Stator und Rotor
PCT/EP1998/005802 WO1999060275A1 (fr) 1998-05-14 1998-09-11 Pompe a vide a friction dotee d'un stator et d'un rotor

Publications (3)

Publication Number Publication Date
EP1078166A1 EP1078166A1 (fr) 2001-02-28
EP1078166B1 true EP1078166B1 (fr) 2003-06-11
EP1078166B2 EP1078166B2 (fr) 2007-09-05

Family

ID=7867761

Family Applications (1)

Application Number Title Priority Date Filing Date
EP98946450A Expired - Lifetime EP1078166B2 (fr) 1998-05-14 1998-09-11 Pompe a vide a friction dotee d'un stator et d'un rotor

Country Status (10)

Country Link
US (1) US6435811B1 (fr)
EP (1) EP1078166B2 (fr)
JP (1) JP4173637B2 (fr)
KR (1) KR20010025024A (fr)
CN (1) CN1115488C (fr)
AU (1) AU754944B2 (fr)
CA (1) CA2332777C (fr)
DE (2) DE19821634A1 (fr)
TW (1) TW370594B (fr)
WO (1) WO1999060275A1 (fr)

Families Citing this family (25)

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Publication number Priority date Publication date Assignee Title
US6090100A (en) * 1992-10-01 2000-07-18 Chiron Technolas Gmbh Ophthalmologische Systeme Excimer laser system for correction of vision with reduced thermal effects
GB9921983D0 (en) * 1999-09-16 1999-11-17 Boc Group Plc Improvements in vacuum pumps
JP3777498B2 (ja) * 2000-06-23 2006-05-24 株式会社荏原製作所 ターボ分子ポンプ
JP2002138987A (ja) * 2000-10-31 2002-05-17 Seiko Instruments Inc 真空ポンプ
US7033142B2 (en) * 2003-01-24 2006-04-25 Pfeifer Vacuum Gmbh Vacuum pump system for light gases
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
GB0409139D0 (en) 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
DE10353034A1 (de) * 2003-11-13 2005-06-09 Leybold Vakuum Gmbh Mehrstufige Reibungsvakuumpumpe
GB0329839D0 (en) * 2003-12-23 2004-01-28 Boc Group Plc Vacuum pump
GB0414316D0 (en) * 2004-06-25 2004-07-28 Boc Group Plc Vacuum pump
GB0503946D0 (en) * 2005-02-25 2005-04-06 Boc Group Plc Vacuum pump
DE202005019644U1 (de) * 2005-12-16 2007-04-26 Leybold Vacuum Gmbh Turbomolekularpumpe
JP2007231938A (ja) * 2006-02-06 2007-09-13 Boc Edwards Kk 真空装置、真空装置における水蒸気分圧の急速低減方法、ロードロックチャンバー内の水蒸気分圧の上昇防止方法、および、真空装置用真空ポンプ
DE102008024764A1 (de) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe
DE202009003880U1 (de) * 2009-03-19 2010-08-05 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe
FR2984972A1 (fr) * 2011-12-26 2013-06-28 Adixen Vacuum Products Adaptateur pour pompes a vide et dispositif de pompage associe
EP2757266B1 (fr) 2013-01-22 2016-03-16 Agilent Technologies, Inc. Pompe à vide rotative
DE102013109637A1 (de) * 2013-09-04 2015-03-05 Pfeiffer Vacuum Gmbh Vakuumpumpe sowie Anordnung mit einer Vakuumpumpe
DE102013114290A1 (de) 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP6488898B2 (ja) * 2015-06-09 2019-03-27 株式会社島津製作所 真空ポンプおよび質量分析装置
US10655638B2 (en) * 2018-03-15 2020-05-19 Lam Research Corporation Turbomolecular pump deposition control and particle management
US11519419B2 (en) 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface
GB2601515B (en) * 2020-12-02 2022-12-28 Agilent Technologies Inc Vacuum pump with elastic spacer
EP4293232A1 (fr) * 2023-10-17 2023-12-20 Pfeiffer Vacuum Technology AG Pompe
EP4379216A1 (fr) * 2024-04-22 2024-06-05 Pfeiffer Vacuum Technology AG Pompe à vide turbomoléculaire compacte

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US3189264A (en) 1963-06-04 1965-06-15 Arthur Pfeiffer Company Vacuum pump drive and seal arrangement
DE1809902C3 (de) * 1968-11-20 1973-11-15 Arthur Pfeiffer-Vakuumtechnik Gmbh, 6330 Wetzlar Mehrstufige Turbo Molekularhoch vakuumpumpe
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
DE2442614A1 (de) † 1974-09-04 1976-03-18 Siemens Ag Turbomolekularpumpe
DE3826710A1 (de) * 1987-08-07 1989-02-16 Japan Atomic Energy Res Inst Vakuumpumpe
DE4331589C2 (de) * 1992-12-24 2003-06-26 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
EP0603694A1 (fr) * 1992-12-24 1994-06-29 BALZERS-PFEIFFER GmbH Système à vide
DE29516599U1 (de) * 1995-10-20 1995-12-07 Leybold AG, 50968 Köln Reibungsvakuumpumpe mit Zwischeneinlaß
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
US6193461B1 (en) * 1999-02-02 2001-02-27 Varian Inc. Dual inlet vacuum pumps

Also Published As

Publication number Publication date
CA2332777C (fr) 2007-11-06
WO1999060275A1 (fr) 1999-11-25
CN1115488C (zh) 2003-07-23
CA2332777A1 (fr) 1999-11-25
AU9348198A (en) 1999-12-06
DE59808723D1 (de) 2003-07-17
EP1078166B2 (fr) 2007-09-05
JP4173637B2 (ja) 2008-10-29
JP2002515568A (ja) 2002-05-28
CN1292851A (zh) 2001-04-25
DE19821634A1 (de) 1999-11-18
AU754944B2 (en) 2002-11-28
KR20010025024A (ko) 2001-03-26
EP1078166A1 (fr) 2001-02-28
TW370594B (en) 1999-09-21
US6435811B1 (en) 2002-08-20

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